Multifunctional tank cover device of semiconductor wet process tank type equipment

Abstract

The utility model relates to the technical field of semiconductor processing, in particular to a multifunctional tank cover device of semiconductor wet process tank type equipment, which comprises a cleaning tank, tank cover bodies are movably mounted on two sides of the top end of the cleaning tank, and an electric push rod is fixedly mounted below one side of the cleaning tank through a mounting seat. And an opening and closing mechanism is arranged between the electric push rod and the tank cover body. The electric push rod, the guide rail, the sliding seat and the connecting rods are used in cooperation, the two ends of the sliding seat are movably connected with one sides of the two groove cover bodies through the connecting rods, so that when the sliding seat ascends, the two connecting rods can be driven to turn over to open the groove cover bodies upwards, and when the two groove cover bodies are opened to a certain angle, the sliding seat moves to the positions of the positioning holes, and the groove cover bodies are fixed. And then the air cylinder is started and controls the output shaft of the air cylinder to be inserted into the positioning hole to be locked, so that when the two tank cover bodies are kept in an opening posture, falling caused by faults of the electric push rod is avoided, and the protection purpose can be achieved while opening and closing are convenient.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a multifunctional tank cover device for semiconductor wet process tank equipment. Background Technology

[0002] Semiconductor wet process tank equipment is a device used for wet process treatment in semiconductor manufacturing. During the cleaning process, the tank cover device can prevent the evaporation of chemical solutions and avoid the leakage of chemical substances into the surrounding environment, thereby protecting the safety of operators and reducing pollution to the environment around the equipment.

[0003] As disclosed in CN114308842B, an automatic cleaning tank for a semiconductor wafer cleaning machine includes a frame, and further includes a tank cover, a cleaning tank body, a support device, a filter device, and a rinsing device mounted on the frame; two tank covers are hinged to the top sides of the frame. The beneficial effects of this invention, achieved by adopting the above technical solution, are: solving the problem of cleaning dead angles, and addressing the technical issue of existing wafer cleaning equipment having certain cleaning dead angles.

[0004] While the aforementioned patent solves the problem of cleaning dead corners, the device requires two motors to be started simultaneously when the tank cover is opened, which increases the overall cost of the equipment. Moreover, the opening and closing method using two motors is rather cumbersome. Utility Model Content

[0005] The purpose of this invention is to provide a multifunctional tank cover device for semiconductor wet process tank equipment to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] A multifunctional tank cover device for semiconductor wet process tank equipment, comprising:

[0008] A cleaning tank, wherein a tank cover body is movably installed on both sides of the top of the cleaning tank, and an electric push rod is fixedly installed on one side of the cleaning tank via a mounting base, and an opening and closing mechanism is provided between the electric push rod and the tank cover body;

[0009] The expansion groove is located below the same side of the two groove cover bodies, and a sealing mechanism is provided inside the two expansion grooves.

[0010] Preferably, the opening and closing mechanism includes a guide rail, which is disposed at the upper middle part of the side of the cleaning tank near the electric push rod. A slide is movably mounted on the outside of the guide rail, and a support seat is disposed below the middle part of the outer side of the slide. The output shaft of the electric push rod is fixedly connected to the support seat.

[0011] Preferably, a connecting rod is movably installed between both of the slot cover bodies and both sides of the slide block;

[0012] Preferably, a cylinder is provided at the top of the support base, and a positioning hole is provided on the upper outer side of the guide rail, and the output shaft of the cylinder matches the positioning hole;

[0013] Preferably, the sealing mechanism includes a spring, which is disposed at one end of the groove cover body near the inner end of the telescopic groove, and a sealing plate is disposed at the other end of the spring;

[0014] Preferably, both of the two tank cover bodies are movably connected to the cleaning tank on opposite sides via hinges.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] 1. This multifunctional tank cover device for semiconductor wet process tank equipment uses an electric push rod, guide rail, slide block, and connecting rod in cooperation. Since the two ends of the slide block are movably connected to one side of the two tank cover bodies through the connecting rod, when the slide block is raised, it can drive the two connecting rods to flip and open the tank cover bodies upward. When the two tank cover bodies are opened to a certain angle, the slide block moves to the position of the positioning hole, and then the cylinder is activated. The cylinder controls its output shaft to insert into the positioning hole and lock it. In this way, when the two tank cover bodies are kept in the open position, they will not fall due to the failure of the electric push rod. Therefore, while facilitating opening and closing, it can also serve the purpose of protection.

[0017] 2. This multifunctional tank cover device for semiconductor wet process tank equipment uses a combination of a tank cover body, a telescopic groove, a spring, and a sealing plate. When the two tank cover bodies are rotated and reset by the connecting rod, the ends of the sealing plates on the same side of the two tank cover bodies abut against each other. As the tank cover bodies continue to descend, the two abutting sealing plates compress the springs on their backs until the two tank cover bodies completely cover the upper end of the cleaning tank. Then, the contact surfaces of the two sealing plates fit tightly together, which can improve the sealing performance. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall main structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the sealing plate installation structure of this utility model;

[0020] Figure 3 This is a cross-sectional view of the groove cover body of this utility model;

[0021] Figure 4 For the present utility model Figure 1 Enlarged view of point A in the middle;

[0022] Figure 5 For the present utility model Figure 1 Enlarged diagram of point B in the middle.

[0023] In the diagram: 1. Cleaning tank; 2. Tank cover body; 3. Mounting base; 4. Electric actuator; 5. Telescopic groove; 6. Guide rail; 7. Slide; 8. Support base; 9. Connecting rod; 10. Cylinder; 11. Positioning hole; 12. Spring; 13. Sealing plate. Detailed Implementation

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] like Figure 1-5 As shown, this utility model provides a technical solution:

[0026] A multifunctional tank cover device for semiconductor wet process equipment includes a cleaning tank 1. Tank cover bodies 2 are movably installed on both sides of the top of the cleaning tank 1. An electric push rod 4 is fixedly installed on the lower side of one side of the cleaning tank 1 via a mounting base 3. An opening and closing mechanism is provided between the electric push rod 4 and the tank cover body 2. The opening and closing mechanism includes a guide rail 6, which is located at the upper middle part of the side of the cleaning tank 1 near the electric push rod 4. A slide 7 is movably installed on the outside of the guide rail 6. A support base 8 is provided at the lower middle part of the outer side of the slide 7. The output shaft of the electric push rod 4 is fixedly connected to the support base 8. A connecting rod 9 is movably installed between the two tank cover bodies 2 and both sides of the slide 7. The opposite sides of the two tank cover bodies 2 are movably connected to the cleaning tank 1 via hinges. A cylinder 10 is provided at the top of the support base 8. A positioning hole 11 is opened on the upper outer side of the guide rail 6. The output shaft of the cylinder 10 matches the positioning hole 11.

[0027] In this embodiment, when the slot cover body 2 is opened, the electric push rod 4 at the top of the mounting base 3 is activated. After the electric push rod 4 is activated, it drives the slide 7 to slide linearly on the guide rail 6 through the support base 8. Since the two ends of the slide 7 are movably connected to one side of the two slot cover bodies 2 through the connecting rod 9, when the slide 7 is raised, it can drive the two connecting rods 9 to flip and push the slot cover body 2 upward. When the two slot cover bodies 2 are opened to a certain angle, the slide 7 moves to the position of the positioning hole 11, and then the cylinder 10 is activated. The cylinder 10 controls its output shaft to insert into the positioning hole 11 and lock it. In this way, when the two slot cover bodies 2 are kept in the open position, they will not fall due to the failure of the electric push rod 4. Therefore, while facilitating opening and closing, it can also serve the purpose of protection.

[0028] like Figure 2 and Figure 3 As shown, the telescopic groove 5 is located below the same side of the two groove cover bodies 2. Both telescopic grooves 5 are equipped with a sealing mechanism. The sealing mechanism includes a spring 12. The spring 12 is located at one end of the groove cover body 2 near the inside of the telescopic groove 5. The other end of the spring 12 is equipped with a sealing plate 13.

[0029] In this embodiment, when the two tank cover bodies 2 are rotated and reset by the connecting rod 9, the ends of the sealing plates 13 on the same side of the two tank cover bodies 2 abut against each other. As the tank cover bodies 2 continue to descend, the two abutting sealing plates 13 compress the springs 12 on their backs until the two tank cover bodies 2 completely cover the upper end of the cleaning tank 1. Then the contact surfaces of the two sealing plates 13 fit tightly together, which can improve the sealing performance.

[0030] Working principle: When the slot cover body 2 is opened, the electric actuator 4 at the top of the mounting base 3 is activated. After the electric actuator 4 is activated, it drives the slide 7 to slide linearly on the guide rail 6 through the support base 8. Since the two ends of the slide 7 are movably connected to one side of the two slot cover bodies 2 through the connecting rod 9, when the slide 7 is raised, it can drive the two connecting rods 9 to flip and push the slot cover body 2 upward. When the two slot cover bodies 2 are opened to a certain angle, the slide 7 moves to the position of the positioning hole 11, and then the cylinder 10 is activated. The cylinder 10 controls its output. The shaft is inserted into the positioning hole 11 and locked in place. This prevents the two cover bodies 2 from falling due to a malfunction of the electric push rod 4 when they are in the open position. After the two cover bodies 2 are rotated and reset by the connecting rod 9, the ends of the sealing plates 13 on the same side of the two cover bodies 2 abut against each other. As the cover bodies 2 continue to descend, the two abutting sealing plates 13 compress the springs 12 on their backs until the two cover bodies 2 completely cover the upper end of the cleaning tank 1, and the contact surfaces of the two sealing plates 13 are tightly fitted together.

[0031] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A multifunctional tank cover device for semiconductor wet process tank equipment, characterized in that: include A cleaning tank (1) is provided with a tank cover body (2) movably installed on both sides of the top of the cleaning tank (1). An electric push rod (4) is fixedly installed on one side of the cleaning tank (1) via a mounting base (3). An opening and closing mechanism is provided between the electric push rod (4) and the tank cover body (2). The telescopic groove (5) is located below the same side of the two groove cover bodies (2), and a sealing mechanism is provided inside the two telescopic grooves (5).

2. The multifunctional tank cover device for semiconductor wet process tank equipment according to claim 1, characterized in that: The opening and closing mechanism includes a guide rail (6), which is located on the upper middle part of the side of the cleaning tank (1) near the electric push rod (4). A slide (7) is movably installed on the outside of the guide rail (6), and a support seat (8) is provided on the lower middle part of the outer side of the slide (7). The output shaft of the electric push rod (4) is fixedly connected to the support seat (8).

3. The multifunctional tank cover device for semiconductor wet process tank equipment according to claim 2, characterized in that: A connecting rod (9) is movably installed between the two slot cover bodies (2) and the two sides of the slide (7).

4. A multifunctional tank cover device for semiconductor wet process tank equipment according to claim 2, characterized in that: A cylinder (10) is provided at the top of the support base (8), and a positioning hole (11) is provided on the upper outer side of the guide rail (6). The output shaft of the cylinder (10) matches the positioning hole (11).

5. A multifunctional tank cover device for semiconductor wet process tank equipment according to claim 1, characterized in that: The sealing mechanism includes a spring (12), which is located at one end of the groove cover body (2) near the telescopic groove (5), and a sealing plate (13) is provided at the other end of the spring (12).

6. A multifunctional tank cover device for semiconductor wet process tank equipment according to claim 1, characterized in that: Both of the two tank cover bodies (2) are movably connected to the cleaning tank (1) via hinges on opposite sides.

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