Boat beating robot

Abstract

The utility model relates to a boat beating robot which is used for conducting boat beating operation on a graphite boat and comprises a moving body. A robot arm mounted on the moving body; the racket boat unit comprises a mounting body, a racket boat assembly arranged on the mounting body and a driving part; the mounting body is connected with the movable end of the mechanical arm; the boat beating assembly comprises a boat beating rocker arm and a boat beating piece connected to the boat beating rocker arm. The end, away from the boat beating piece, of the boat beating rocker arm is rotationally connected with the mounting body. The output end of the driving part is in transmission connection with the boat beating rocker arm so as to drive the boat beating rocker arm to swing. The automatic boat beating device can achieve automatic operation in the boat beating process, improve the boat beating quality and reduce investment of labor cost, can execute multi-production-line boat beating tasks based on moving deployment of the boat beating robot, effectively improves boat beating efficiency, and further can effectively improve the boat beating quality and ensure boat beating precision and strength compared with a manual boat beating mode. And further, the product quality can be ensured.

Description

Technical Field

[0001] This utility model relates to the field of robotics technology, and in particular to a boat-launching robot. Background Technology

[0002] In modern industrial production, graphite boats are widely used as an important tool in fields such as semiconductors and photovoltaics. Due to their excellent thermal and electrical conductivity, graphite boats are widely used as a tool for supporting silicon wafers during thin film deposition in PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment. To improve process quality, the silicon wafer needs to be uniformly placed on the blades of the graphite boat and maintain stable contact with the clamping points (used to fix the position of the silicon wafer). Therefore, the traditional method is to manually tap the graphite boat with a handheld tapping device, using vibration during tapping to maintain stable contact between the silicon wafer and the blades and clamping points.

[0003] However, manual lapping has several problems. Firstly, manual operation is inefficient and cannot meet the demands of large-scale production. Workers need to spend a significant amount of time and energy on repetitive lapping work, which is not only physically demanding but also prone to fatigue, thus affecting the quality and consistency of lapping. Secondly, the precision of manual lapping is difficult to guarantee. Due to human factors, parameters such as the force and angle of lapping can vary considerably, potentially leading to insufficient contact between the silicon wafer and the clamping point or lapping blades, affecting product quality. Utility Model Content

[0004] Therefore, the technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a boat-plowing robot that can automate the boat-plowing process, reduce labor costs, improve the accuracy and quality of boat-plowing, and ensure product quality.

[0005] To solve the above-mentioned technical problems, this utility model provides a boat-paddle robot for performing boat-paddle operations on graphite boats, including,

[0006] Moving the main body;

[0007] A robotic arm is mounted on the mobile body;

[0008] The boat-slapping unit includes a mounting body, a boat-slapping assembly disposed on the mounting body, and a driving component; the mounting body is connected to the movable end of the robotic arm; the boat-slapping assembly includes a boat-slapping rocker arm and a boat-slapping component connected to the boat-slapping rocker arm; the end of the boat-slapping rocker arm away from the boat-slapping component is rotatably connected to the mounting body; the output end of the driving component is drively connected to the boat-slapping rocker arm to drive the boat-slapping rocker arm to swing.

[0009] In one embodiment of the present invention, the boat-tapping unit further includes a vision camera disposed on the mounting body, the vision camera being used to identify the position of the graphite boat.

[0010] In one embodiment of this utility model, the boat-pumping unit further includes a position sensor disposed on the mounting body and used to sense the position of the boat-pumping arm.

[0011] In one embodiment of the present invention, the boat-pulling unit further includes a transmission mechanism, which includes a drive rocker arm and a transmission link. One end of the drive rocker arm is fixedly connected to the output shaft of the drive member, and the other end of the drive rocker arm is hinged to the transmission link. The end of the transmission link away from the drive rocker arm is hinged to the boat-pulling rocker arm.

[0012] In one embodiment of this utility model, the transmission mechanism further includes a first universal ball joint bearing and a second universal ball joint bearing disposed at both ends of the transmission link; the transmission link is connected to the boat rocker arm through the first universal ball joint bearing; the transmission link is connected to the drive rocker arm through the second universal ball joint bearing.

[0013] In one embodiment of this utility model, the rocker arm of the boat is provided with a plurality of first threaded holes along its length for mounting a first universal ball joint bearing.

[0014] In one embodiment of this utility model, the drive rocker arm is provided with an adjustment hole for mounting a second universal ball joint bearing.

[0015] In one embodiment of this utility model, the boat-beating rocker arm is provided with a plurality of second threaded holes spaced apart along the length direction, and the boat-beating component is connected to at least two of the second threaded holes by fasteners to adjust the boat-beating range of the boat-beating assembly.

[0016] In one embodiment of the present invention, the boat-paddle unit further includes a support shaft, a first support, and a second support. One end of the support shaft is fixedly connected to the boat-paddle rocker arm, and the other end of the support shaft passes through the second support and the first support in sequence, and is rotatably connected to the first support and the second support. The first support and the second support are fixed to the mounting body.

[0017] In one embodiment of the present invention, the boat-beating component includes a connecting handle and a boat-beating part, one end of the connecting handle is fixedly connected to the boat-beating rocker arm, and the other end of the connecting handle is connected to the boat-beating part.

[0018] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0019] This invention enables automated operation of the boat-pumping process, improves boat-pumping quality, reduces labor costs, and, based on the mobile deployment of the boat-pumping robot, can perform boat-pumping tasks on multiple production lines, effectively improving boat-pumping efficiency. Compared with manual boat-pumping, this invention can also effectively improve boat-pumping quality, ensure the accuracy and force of boat-pumping, and thus guarantee product quality. Attached Figure Description

[0020] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0021] Figure 1 This is a schematic diagram of the preferred embodiment of the boat-plowing robot performing boat-plowing operations.

[0022] Figure 2 This is a schematic diagram of the boat-pulling unit according to a preferred embodiment of the present invention.

[0023] Figure 3 This is a partial structural schematic diagram of the boat-pulling component according to a preferred embodiment of the present invention.

[0024] Figure 4 This is a partial structural schematic diagram of the boat-pulling component according to a preferred embodiment of the present invention.

[0025] Explanation of reference numerals in the accompanying drawings: 1. Moving body; 10. Graphite boat; 2. Robotic arm; 30. Mounting body; 3001. First side plate; 3002. Second side plate; 301. Fixing plate; 302. Connecting bracket; 303. Support shaft; 304. First support; 305. Second support; 306. Clearance hole; 31. Boat-pulling assembly; 310. Boat-pulling rocker arm; 3101. First threaded hole; 3102. ... Two threaded holes; 311, boat-shaped component; 3110, connecting handle; 3111, boat-shaped component; 32, driving component; 33, transmission mechanism; 330, driving rocker arm; 3301, adjusting waist hole; 331, transmission connecting rod; 332, first universal ball joint bearing; 333, first locking nut; 334, first bolt; 335, second universal ball joint bearing; 336, second locking nut; 337, second bolt. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0027] Reference Figure 1As shown, this utility model discloses a boat-tapping robot for performing boat-tapping operations on a graphite boat 10. The boat-tapping robot includes a mobile body 1, which is used to drive the boat-tapping robot to move and can be controlled to run to a designated position, thereby facilitating the execution of boat-tapping tasks on multiple production lines and improving the efficiency of boat-tapping operations. Specifically, the mobile body 1 includes, but is not limited to, AGVs or other autonomous mobile devices.

[0028] The boat-pulling robot also includes a robotic arm 2 mounted on the mobile body 1; in a preferred embodiment, the robotic arm 2 is a multi-axis robotic arm.

[0029] Combination Figure 2 As shown, the boat-pumping robot also includes a boat-pumping unit, which includes a mounting body 30, a boat-pumping assembly 31 disposed on the mounting body 30, and a drive component 32. The mounting body 30 is also provided with a fixing plate 301 for mounting the drive component 32, which can be assembled onto the fixing plate 301. The mounting body 30 is connected to the movable end of the robotic arm 2, thus enabling it to move to a designated position under the drive of the robotic arm 2. In one possible embodiment, the mounting body 30 includes a first side plate 3001 and a second side plate 3002 with a right-angled structure. The first side plate 3001 is fixedly connected to the movable end of the robotic arm 2. The second side plate 3002 and the first side plate 3001 are of an integrated structure. The fixing plate 301 is mounted on the second side plate 3002.

[0030] In a preferred embodiment, the boat-pulling unit also includes a connecting bracket 302 connected to the first side plate 3001 of the mounting body 30, and the connecting bracket 302 and the movable end of the robotic arm 2 are locked together by fasteners so that the mounting body 30 can be fixedly connected to the robotic arm 2.

[0031] Combination Figure 1 as well as Figure 2 The boat-beating assembly 31 includes a boat-beating rocker arm 310 and a boat-beating component 311 connected to the rocker arm 310. The end of the rocker arm 310 away from the boat-beating component 311 is rotatably connected to the mounting body 30. The output end of the drive component 32 is drively connected to the rocker arm 310 to drive the rocker arm 310 to swing up and down, thereby causing the boat-beating component 311 to beat the graphite boat 10, thus realizing the boat-beating operation.

[0032] As a preferred embodiment, according to Figure 2As shown, the boat-beating unit also includes a transmission mechanism 33. The transmission mechanism 33 connects the drive member 32 and the boat-beating rocker arm 310, transmitting the output power of the drive member 32 to the boat-beating rocker arm 310. In this embodiment, the drive member 32 is a drive motor. The transmission mechanism 33 includes a drive rocker arm 330 and a transmission link 331. One end of the drive rocker arm 330 is fixedly connected to the output shaft of the drive member 32 along the radial direction of the output shaft. The other end of the drive rocker arm 330 is hinged to the transmission link 331, and the end of the transmission link 331 away from the drive rocker arm 330 is hinged to the boat-beating rocker arm 310. With this configuration, the boat-beating rocker arm 330 can swing under the drive of the drive rocker arm 330 to achieve boat-beating operation. Generally, the transmission link 331 is hinged to the middle section of the boat-beating rocker arm 310. In practical applications, the drive member 32 includes, but is not limited to, a drive motor.

[0033] In a further embodiment, the transmission mechanism further includes a first universal joint bearing 332 and a second universal joint bearing 335 disposed at both ends of the transmission link 331. Specifically, one end of the transmission link 331 is connected to the rocker arm 310 via the first universal joint bearing 332; the other end of the transmission link 331 is connected to the drive rocker arm 330 via the second universal joint bearing 335.

[0034] Combination Figure 2 , Figure 3 as well as Figure 4 The boat-pumping rocker arm 310 has multiple threaded holes 3101 along its length for mounting a first universal ball joint bearing 332. These threaded holes 3101 cooperate with the transmission mechanism 33 to adjust the swing amplitude of the boat-pumping rocker arm 310. Specifically, the transmission mechanism 33 also includes a first locking nut 333 and a first bolt 334. The first universal ball joint bearing 332 is connected to one end of the transmission connecting rod 331 via the first locking nut 333, and the first universal ball joint bearing 332 is connected to any one of the threaded holes 3101 via the first bolt 334. This arrangement, based on the multiple threaded holes 3101, effectively adjusts the swing amplitude of the boat-pumping rocker arm 310, thereby also adjusting the boat-pumping force; simultaneously, it prevents damage to the graphite boat during operation. Specifically, the closer the connection point is to the swing center, the larger the swing amplitude will be. Therefore, the swing amplitude of the boat-slapping arm 310 can be controlled according to different needs, thereby adapting to the boat-slapping requirements of different graphite boats 10, so as to obtain a better boat-slapping effect and effectively improve the boat-slapping quality.

[0035] In another possible embodiment, the drive rocker arm 330 is provided with an adjustment slot 3301 for mounting a second universal joint bearing 335. By providing the adjustment slot 3301 in the drive rocker arm 330, the swing amplitude and tackling force of the boat-tapping rocker arm 310 can be adjusted. Specifically, the transmission mechanism 33 also includes a second locking nut 336 and a second bolt 337. The second universal joint bearing 335 is connected to the end of the transmission link 331 away from the first universal joint bearing 332 via the second locking nut 336. The second bolt 337 passes through the adjustment slot 3301 and is locked by a nut. By adjusting the position of the second bolt 337 passing through the adjustment slot 3301, the swing amplitude and tackling force of the boat-tapping rocker arm 310 can be adjusted, reducing the risk of damage to the graphite boat during tackling operations to a certain extent. Providing the adjustment slot 3301 effectively addresses the issue of the relatively small size of the drive rocker arm 330. Furthermore, the closer the second bolt 337 is to the output end of the drive component 32 as the adjustment hole 3301, the smaller the swing amplitude and the slapping force of the boat rocker arm 310.

[0036] In a preferred embodiment, the boat-tapping rocker arm 310 is provided with a plurality of second threaded holes 3102 spaced apart along its length. The boat-tapping component 311 is connected to at least two of the second threaded holes 3102 by fasteners such as bolts, thereby allowing adjustment of the extension length of the boat-tapping component 311 and thus the boat-tapping range of the boat-tapping assembly 31. In addition, this arrangement can also adapt to the boat-tapping requirements of graphite boats 10 of different sizes.

[0037] Reference Figure 3 as well as Figure 4 As shown, to ensure smooth swinging of the boat-launching arm and improve stability and safety during operation, the boat-launching unit also includes a support shaft 303, a first support 304, and a second support 305. The boat-launching arm 310 is rotatably connected to the mounting body 30 via the support shaft 303. Specifically, one end of the support shaft 303 is fixedly connected to the boat-launching arm 310, and the other end passes through the second support 305 and the first support 304 in sequence, and is rotatably connected to both supports 304 and 305. The first support 304 and the second support 305 are mounted on the mounting body 30. In this embodiment, the first support 304 is fixedly mounted on the first side plate 3001 of the mounting body 30. The second support 305 is fixedly mounted on the second side plate 3002 of the mounting body 30. The first support 304 serves to balance torque. As a preferred embodiment, the first support 304 and the second support 305 can be mounted bearings.

[0038] As a preferred embodiment, refer to Figure 2To improve the accuracy, uniformity, and consistency of the boat-patting operation of the boat-patting component 31, enabling it to perform precise boat-patting operations, the boat-patting unit also includes a vision camera 34 mounted on the mounting body 30. Before performing the boat-patting operation, the vision camera 34 identifies and monitors the position of the graphite boat 10 to determine its location. This allows the boat-patting robot to adjust the position of the boat-patting component 31 by controlling the moving body 1 and the multi-axis robotic arm.

[0039] As a preferred embodiment, to avoid interference and impact between the boat-striking component 311 and the graphite boat 10, which could damage the graphite boat 10, the boat-striking unit further includes a position sensor disposed on the mounting body 30. This position sensor is used to sense the position of the boat-striking arm. In this embodiment, the position sensor is an infrared sensor 35, combined with... Figure 2 As can be seen, the mounting body 30 has a clearance hole 306 for the infrared light from the infrared sensor 35 to pass through. Specifically, the infrared sensor 35 is mounted on one side of the second side plate 3002 of the mounting body 30, and the boat-tapping rocker arm 310 is located on the other side of the second side plate 3002. The clearance hole 306 is formed through the second side plate 3002. Based on this arrangement, the infrared sensor 35 can monitor and sense the swing position of the boat-tapping rocker arm 310. This allows the position of the boat-tapping rocker arm 310 to be zeroed before the boat-tapping robot is started, preventing the boat-tapping rocker arm 310 from being in the lowest position of vertical swing, thereby avoiding damage to the graphite boat 10 during startup.

[0040] As a preferred embodiment, refer to Figure 3 As shown, the boat-beating component 311 includes a connecting handle 3110 and a boat-beating part 3111. One end of the connecting handle 3110 is fixedly connected to the boat-beating arm 310, and the other end of the connecting handle 3110 is connected to the boat-beating part 3111. To avoid damage to the graphite boat 10 during boat-beating operations, the boat-beating part 3111 is made of a flexible material. Specifically, the material of the boat-beating part 3111 includes, but is not limited to, silicone.

[0041] In summary, the boat-beating robot protected by this utility model includes a mobile body 1, a robotic arm 2 mounted on the mobile body 1, and a boat-beating unit assembled on the robotic arm 2. The boat-beating unit includes a mounting body 30, a boat-beating assembly 31 disposed on the mounting body 30, and a drive component 32. The mounting body 30 is connected to the movable end of the robotic arm 2. The boat-beating assembly 31 includes a boat-beating rocker arm 310 and a boat-beating component 311 connected to the rocker arm 310. The end of the rocker arm 310 away from the boat-beating component 311 is rotatably connected to the mounting body 30. The output end of the drive component 32 is drively connected to the rocker arm 310 to drive the rocker arm 310 to swing, thereby enabling the rocker arm 310 to drive the boat-beating component 311 to perform boat-beating operations. This invention enables automated operation of the boat-pumping process, improves boat-pumping quality, reduces labor costs, and, based on the mobile deployment of the boat-pumping robot, can perform boat-pumping tasks on multiple production lines, effectively improving boat-pumping efficiency. Compared with manual boat-pumping, this invention can also effectively improve boat-pumping quality, ensure the accuracy and force of boat-pumping, and thus guarantee product quality.

[0042] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0043] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0044] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A boat-paddle robot for performing boat-paddle operations on a graphite boat, characterized in that, include: Moving the main body; A robotic arm is mounted on the mobile body; The boat-slapping unit includes a mounting body, a boat-slapping assembly disposed on the mounting body, and a driving component; the mounting body is connected to the movable end of the robotic arm; the boat-slapping assembly includes a boat-slapping rocker arm and a boat-slapping component connected to the boat-slapping rocker arm; the end of the boat-slapping rocker arm away from the boat-slapping component is rotatably connected to the mounting body; the output end of the driving component is drively connected to the boat-slapping rocker arm to drive the boat-slapping rocker arm to swing.

2. The boat-launching robot according to claim 1, characterized in that, The boat-tapping unit also includes a vision camera disposed on the mounting body, the vision camera being used to identify the position of the graphite boat.

3. The boat-launching robot according to claim 1, characterized in that, The boat-pumping unit also includes a position sensor disposed on the mounting body and used to sense the position of the boat-pumping arm.

4. The boat-launching robot according to claim 1, characterized in that, The boat-pulling unit also includes a transmission mechanism, which includes a drive rocker arm and a transmission link. One end of the drive rocker arm is fixedly connected to the output shaft of the drive component, and the other end of the drive rocker arm is hinged to the transmission link. The end of the transmission link away from the drive rocker arm is hinged to the boat-pulling rocker arm.

5. The boat-launching robot according to claim 4, characterized in that, The transmission mechanism further includes a first universal ball joint bearing and a second universal ball joint bearing located at both ends of the transmission link; the transmission link is connected to the rocker arm of the boat through the first universal ball joint bearing; the transmission link is connected to the drive rocker arm through the second universal ball joint bearing.

6. The boat-launching robot according to claim 5, characterized in that, The rocker arm of the boat is provided with multiple threaded holes along its length for installing the first universal ball joint bearing.

7. The boat-launching robot according to claim 5, characterized in that, The drive rocker arm is provided with an adjustment hole for mounting a second universal ball joint bearing.

8. The boat-launching robot according to claim 1, characterized in that, The boat-pulling arm is provided with a plurality of second threaded holes spaced apart along its length, and the boat-pulling component is connected to at least two of the second threaded holes by fasteners.

9. The boat-launching robot according to claim 1, characterized in that, The boat-pumping unit also includes a support shaft, a first support, and a second support. One end of the support shaft is fixedly connected to the boat-pumping arm, and the other end of the support shaft passes through the second support and the first support in sequence, and is rotatably connected to the first support and the second support. The first support and the second support are fixed to the mounting body.

10. The boat-launching robot according to any one of claims 1-9, characterized in that, The boat-beating component includes a connecting handle and a boat-beating part. One end of the connecting handle is fixedly connected to the boat-beating rocker arm, and the other end of the connecting handle is connected to the boat-beating part.

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