Multifunctional placing trolley for disassembling and assembling thermal field parts of single crystal furnace

Abstract

The utility model discloses a multifunctional single crystal furnace disassembly and assembly thermal field piece placing trolley which comprises a trolley body, universal wheels and directional wheels are arranged at the bottom of the trolley body, a handrail is arranged on the side portion, close to the universal wheels, of the trolley body, and a placing assembly is arranged on the top of the trolley body. And the placing assembly comprises a cylindrical placing frame for bearing the main heater and a placing plate for bearing the auxiliary heater. The space of the vehicle body is effectively utilized, various thermal field parts are placed, and the placing rate is increased; the thermal field member is prevented from separating from the placing box and the transfer efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon manufacturing technology, specifically to a sliding multifunctional monocrystalline furnace hot zone component placement trolley. Background Technology

[0002] The single crystal furnace is a key piece of equipment used to produce semiconductor materials such as single crystal silicon. Its working principle involves heating the silicon material to melt it, and then slowly pulling the crystal at a constant temperature to form single crystal silicon. During the single crystal silicon pulling process, the hot zone components removed from the furnace need to be placed in a dismantling trolley for transfer and transportation. Currently, the existing dismantling trolleys are inconvenient for placing hot zone components, and the types and quantities of hot zone components that can be placed are limited, resulting in inefficient use of space and wasted space, necessitating repeated transportation of the hot zone components.

[0003] Therefore, this application is submitted. Utility Model Content

[0004] The purpose of this utility model is to provide a multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley. By providing placement components on the surface of the trolley, it is used to place various hot zone components, preventing damage to the hot zone components, and solving the problems of existing technologies that cannot make reasonable use of placement space and can only place one type of hot zone component.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following solution:

[0006] A multifunctional single crystal furnace hot zone component placement trolley includes a trolley body with universal wheels and directional wheels at the bottom, a handrail on the side of the trolley body near the universal wheels, and a placement assembly on the top of the trolley body. The placement assembly includes a cylindrical placement frame for supporting the main heater and a placement plate for supporting the auxiliary heater.

[0007] Furthermore, the number of cylindrical shelves is three, and the centers of the three cylindrical shelves form an equilateral triangle, with two cylindrical shelves located above the sides of the vehicle body and the remaining cylindrical shelf located in the middle of the vehicle body.

[0008] Furthermore, the column body of the column-shaped placement rack has a hollow structure, and the column-shaped placement rack adjacent to the handrail has a symmetrical semi-circular ring in the middle. The bottom of the semi-circular ring is provided with a support rod that is fixed to the vehicle body. The semi-circular ring holds a support rod, and the support rod passes through the semi-circular ring in the column-shaped placement rack adjacent to the handrail in sequence.

[0009] Furthermore, the height of the cylindrical mounting bracket is greater than the height of the electrode foot plate in the main heater.

[0010] Furthermore, the columnar placement rack has adjustable storage boxes on both sides away from the handrail. The placement boxes have mutually perpendicular movable plates one and two. The movable plate two slides laterally through the movable plate one on both sides of the placement box, and the movable plate one slides longitudinally on the other two sides of the placement box.

[0011] Furthermore, the side of the first movable plate is provided with a movable groove, through which the second movable plate passes.

[0012] Furthermore, the inner walls of the placement box are provided with elongated grooves located on the same horizontal line, and springs are provided in the elongated grooves to be connected to the ends of the first and second movable plates respectively.

[0013] Furthermore, the ends of the first and second movable plates are respectively provided with connecting rods that are fixedly connected to the springs.

[0014] Furthermore, the number of placement plates is four, arranged in pairs opposite each other, and a stop block for limiting the position is provided above the placement plate.

[0015] Furthermore, graphite pads are provided at the top of the columnar placement rack, on the surface of the placement plate, and on the side of the stop block.

[0016] The beneficial effects of this utility model are:

[0017] This utility model utilizes a placement component on the surface of a vehicle body. The placement component includes a cylindrical placement rack, a placement plate, and a placement box. The cylindrical placement rack has a semi-circular ring at the bottom for placing a support rod, which effectively utilizes the space of the vehicle body to place various thermal components and improves the placement rate. At the same time, the placement box has two sliding plates for limiting movement, preventing thermal components from falling out of the placement box and improving transfer efficiency. Attached Figure Description

[0018] Figure 1 It is a structural diagram of the utility model;

[0019] Figure 2 This is a top view of the present invention;

[0020] Figure 3 This is the main view of the utility model;

[0021] Figure 4 This is a side view of the present invention;

[0022] Figure 5 This is a top view of the box placement in this utility model;

[0023] Figure 6 This is a cross-sectional view of the box placed in this utility model;

[0024] Figure 7This diagram illustrates the working state of this utility model.

[0025] Reference numerals: 1-Vehicle body, 10-Handrail, 11-Wheel caster, 12-Directional caster, 2-Placement assembly, 20-Columnar placement rack, 21-Semi-circular ring, 210-Support rod, 22-Placement box, 220-Moving plate one, 2200-Moving groove, 221-Moving plate two, 222-Elongated groove, 223-Spring, 224-Connecting rod, 23-Placement plate, 230-Stop block. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the embodiments and accompanying drawings, but the implementation of the present invention is not limited thereto.

[0027] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set up," "have," "install," "connect," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] Example 1

[0030] Embodiment 1 of this utility model is a multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley, including a trolley body 1 with universal wheels 11 and directional wheels 12 at the bottom, a handrail 10 on the side of the trolley body 1 adjacent to the universal wheels 11, and a placement assembly 2 on the top of the trolley body 1. The placement assembly 2 includes a columnar placement frame 20 for supporting the main heater and a placement plate 23 for supporting the auxiliary heater.

[0031] Reference Figures 1 to 4The main technical concept of this application is to install a placement assembly 2 on the surface of the vehicle body 1, which holds various thermal components. This assembly primarily includes a main heater and an auxiliary heater, respectively placed on a columnar placement rack 20 and a placement plate 23 above the vehicle body 1. Under their own weight, these components are prevented from shifting during movement, facilitating the transfer of thermal components. Simultaneously, this improves the space utilization of the vehicle body 1, increases the number and variety of thermal components that can be placed, enhances the utilization rate of the placement trolley, and avoids the need for repeated transport of multiple thermal components.

[0032] In some preferred embodiments, to increase the stability of the main heater placed on the columnar mounting bracket 20, three columnar mounting brackets 20 are used. The centers of the three columnar mounting brackets 20 form an isosceles triangle, with two columnar mounting brackets 20 located above the sides of the vehicle body 1 and the remaining columnar mounting bracket 20 located in the middle of the vehicle body 1. Specifically, the positions of the three columnar mounting brackets 20 are restricted, with two parallel to the armrest 10 and the remaining one located on the extended line of the center of the distance between the other two columnar mounting brackets 20. This ensures the stability of the main heater mounted on the columnar mounting brackets 20, thereby preventing displacement under its own weight during movement.

[0033] In some preferred embodiments, the column body of the column-shaped placement rack 20 is a hollow structure, and a semi-circular ring 21 is symmetrically provided in the middle of the column-shaped placement rack 20 adjacent to the handrail 10. A support rod 210 is provided at the bottom of the semi-circular ring 21 and fixed to the vehicle body 1. A support rod is placed in the semi-circular ring 21, and the support rod passes through the semi-circular ring 21 in the column-shaped placement rack 20 adjacent to the handrail 10 in sequence.

[0034] Specifically, refer to Figure 4 A semi-circular ring 21 and a support rod 210 are installed in the hollowed-out cylindrical placement frame 20 to utilize the hollow structure within the two cylindrical placement frames 20 of the parallel handrail 10. The width of the cylindrical placement frame 20 is greater than the outer diameter of the support rod, making it easy to retrieve the support rod from the semi-circular ring 21. The semi-circular ring 21 and the support rod 210 can be connected to the cylindrical placement frame 20 by welding, and the thickness between them can be set according to actual needs to ensure the stability of the support rod.

[0035] In some preferred embodiments, to prevent metal contamination caused by contact between the electrode feet of the main heater and the surface of the vehicle body 1, the height of the cylindrical mounting bracket 20 is greater than the height of the electrode feet in the main heater. (Refer to...) Figure 7 This allows the bottom of the electrode foot plate to be suspended in the air, preventing the electrode foot plate from contacting the surface of the vehicle body 1 and causing metal contamination.

[0036] Example 2

[0037] This embodiment 2 provides an adjustable placement box 22. The cylindrical placement frame 20 has adjustable placement boxes 22 on both sides away from the armrest 10. The placement box 22 contains a first movable plate 220 and a second movable plate 221 that are perpendicular to each other. The second movable plate 221 slides laterally through the first movable plate 220 on both sides of the placement box 22, while the first movable plate 220 slides longitudinally on the other two sides of the placement box 22. The side of the first movable plate 220 has a movable groove 2200, through which the second movable plate 221 passes.

[0038] Reference Figure 5 , Figure 6 and Figure 7 The placement box 22 primarily holds small thermal field components such as graphite electrodes and bolts. Inside the placement box 22 are two interconnected movable plates 220 and 221, allowing the graphite electrodes and bolts to be arranged vertically in sequence, maximizing placement space. Movable plate 220 moves longitudinally within the placement box 22 to the maximum width limiting the thermal field components. Movable plate 221 slides laterally within the placement box 22 and movable plate 220 until it reaches the position of the last thermal field component, thus creating a fixed area. This securely limits the placement of multiple thermal field components of varying sizes, preventing individual components from detaching from the placement box 22 during vehicle movement and requiring retrieval, which would reduce work efficiency.

[0039] Meanwhile, the moving groove 2200 in the moving plate 220 is slightly smaller than the length of the moving plate 220, which allows the moving plate 221 to move fully within the placement box 22, thereby meeting various length limit requirements.

[0040] It should be noted that the lateral and longitudinal movements here specifically refer to... Figure 5 The movement direction shown, which also increases the limit width and limit length, is mainly the movement of moving plate 1 220 and moving plate 221 towards the end of the unconnected spring 223, respectively.

[0041] In some preferred embodiments, the inner wall of the placement box 22 is provided with an elongated groove 222 located on the same horizontal line. A spring 223 is provided in the elongated groove 222 and connected to the ends of the first movable plate 220 and the second movable plate 221, respectively. A connecting rod 224, fixedly connected to the spring 223, is provided at the ends of the first movable plate 220 and the second movable plate 221, respectively.

[0042] Specifically, the movement of movable plate 1 220 and movable plate 221 within the placement box 22 is mainly achieved by the connecting rods 224 at both ends of the movable plate 1 220 and movable plate 221 being fixedly connected to the ends of springs 223 within the elongated groove 222 of the placement box 22. When a pushing force is applied to movable plate 1 220 and movable plate 221, the connecting rods 224 compress the springs 223. Simultaneously, the springs 223 reset the movable plate 224, thus fixing the movable plate 1 220 and movable plate 221 to achieve the purpose of limiting the movable plate 220 and movable plate 221, thereby fulfilling multiple limiting requirements and improving the utilization rate.

[0043] In some preferred embodiments, the number of placement plates 23 is four, arranged in pairs opposite each other, and a stop block 230 for limiting the position is provided above the placement plate 23. Graphite pads are provided at the top of the columnar placement rack 20, on the surface of the placement plate 23, and on the side of the stop block 230.

[0044] Specifically, the auxiliary heater is mounted on top of four placement plates 23, and a stop block 230 is provided above the placement plates 23 to limit the state of the auxiliary heater, thereby preventing it from slipping and being damaged during movement. Furthermore, the placement trolleys of this invention are all made of steel to enhance the load-bearing capacity of multiple thermal components. The thickness of each component is set according to requirements. Graphite pads with a thickness of at least 30mm are placed where the columnar placement frame 20, placement plates 23, and stop blocks 230 contact the main heater or auxiliary heater. These graphite pads prevent the main heater and auxiliary heater from contacting metal materials, thus preventing metal contamination, improving the service life of the main heater and auxiliary heater, and reducing the production cost of single crystals.

[0045] The working principle of this utility model is as follows: When in use, the placement trolley is first moved to the furnace dismantling position under the action of the handrail 10. The main heater and auxiliary heater are placed on the columnar placement frame 20 and the placement plate 23 respectively. The support rod is placed in the semi-circular ring 21 set in the lower part of the columnar placement frame 20. The graphite electrode and bolt are placed in the placement box 22. Various thermal field components are placed to make effective use of the placement space. At the same time, the placement box 22 is provided with a sliding moving plate 1 220 and a moving plate 221. The moving plate 221 passes through the moving plate 1 220 to limit the graphite electrode and bolt in the placement box 22, preventing the thermal field components from falling out of the placement box 22 and improving work efficiency.

[0046] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Any simple modifications, equivalent substitutions, and improvements made to the above embodiments based on the technical essence of the present utility model and within the spirit and principles of the present utility model shall still fall within the protection scope of the present utility model.

Claims

1. A multifunctional single-crystal furnace disassembly and assembly hot zone component placement trolley, comprising a trolley body (1) with universal wheels (11) and directional wheels (12) at the bottom, wherein a handrail (10) is provided on the side of the trolley body (1) adjacent to the universal wheels (11), characterized in that, The top of the vehicle body (1) is provided with a placement assembly (2), which includes a columnar placement rack (20) that carries the main heater and a placement plate (23) that carries the auxiliary heater.

2. The multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley according to claim 1, characterized in that, The number of the columnar placement racks (20) is three, and the centers of the three columnar placement racks (20) form an isosceles triangle, with two columnar placement racks (20) located above the side of the vehicle body (1) and the remaining columnar placement rack (20) located in the middle of the vehicle body (1).

3. The multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley according to claim 1, characterized in that, The column of the column-shaped placement rack (20) has a hollow structure. The column-shaped placement rack (20) adjacent to the handrail (10) has a semi-circular ring (21) symmetrically arranged in the middle. The bottom of the semi-circular ring (21) is provided with a support rod (210) and fixed to the vehicle body (1). The semi-circular ring (21) holds a support rod, and the support rod passes through the semi-circular ring (21) in the column-shaped placement rack (20) adjacent to the handrail (10) in sequence.

4. The multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley according to claim 1, characterized in that, The height of the cylindrical placement rack (20) is greater than the height of the electrode foot plate in the main heater.

5. A multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley according to claim 1, characterized in that, The columnar placement rack (20) has adjustable storage boxes (22) on both sides away from the handrail (10). The storage box (22) has a movable plate one (220) and a movable plate two (221) that are perpendicular to each other. The movable plate two (221) slides laterally through the movable plate one (220) on both sides of the storage box (22), and the movable plate one (220) slides longitudinally on the other two sides of the storage box (22).

6. A multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley according to claim 5, characterized in that, The side of the first movable plate (220) is provided with a movable groove (2200), and the second movable plate (221) passes through the movable groove (2200).

7. A multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley according to claim 6, characterized in that, The inner wall of the placement box (22) is provided with an elongated groove (222) located on the same horizontal line. The elongated groove (222) is provided with a spring (223) which is connected to the end of the first moving plate (220) and the second moving plate (221) respectively.

8. A multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley according to claim 6, characterized in that, The ends of the first movable plate (220) and the second movable plate (221) are respectively provided with connecting rods (224) that are fixedly connected to the spring (223).

9. A multifunctional single crystal furnace disassembly and assembly hot zone component placement trolley according to claim 6, characterized in that, The number of the placement plates (23) is four and they are arranged in pairs opposite each other. A stop (230) for limiting the position is provided above the placement plate (23).

10. A multifunctional single-crystal furnace disassembly and assembly hot zone component placement trolley according to claim 9, characterized in that, The top of the columnar placement rack (20), the surface of the placement plate (23), and the side of the stop block (230) are all provided with graphite pads.

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