Perovskite coating vacuum equipment

Abstract

The utility model discloses perovskite coating vacuum equipment, which relates to the technical field of solar cell production and comprises a vacuum bin, an evaporation crucible is fixedly mounted at the bottom end in the vacuum bin, a cell substrate positioning component is rotatably clamped in the vacuum bin, and one end of the cell substrate positioning component is in transmission connection with a driving component. A coating material in the evaporation crucible is vaporized, drifts away in the vacuum bin and is finally attached to one side of the battery substrate, when the thickness of a single-face coating film of the battery substrate meets the requirement, the driving motor drives the gearbox to rotate, the gearbox drives the battery substrate positioning groove to rotate, the other side of the battery substrate is made to directly face the evaporation crucible, and the battery substrate is completely evaporated. Therefore, the vaporized film coating material is in full contact with the other side of the battery substrate for film coating, and a uniform protective film is attached to the outer surface of the battery substrate.

Description

Technical Field

[0001] This utility model relates to the field of solar cell manufacturing technology, and in particular to a perovskite coating vacuum device. Background Technology

[0002] Perovskite is a type of material with a special crystal structure. This material has attracted much attention due to its high photoelectric conversion efficiency, low-cost manufacturing process and wide spectral absorption range. It shows great potential, especially in the field of solar cells. Perovskite coating is a key step in the manufacturing process of solar cells and requires the use of specialized vacuum tube coating equipment.

[0003] For example, Chinese Patent Publication No. CN219731042U discloses a vacuum evaporation equipment, including: a vacuum chamber for placing a perovskite substrate to be evaporated; an evaporation assembly, at least part of which is disposed in the vacuum chamber, including a linear crucible, which releases evaporation material to the perovskite substrate; wherein, the linear crucible includes a crucible body, several baffles disposed within the crucible body, and a sealing cover connected to the crucible body; the baffles divide the interior of the crucible body into several evaporation zones along the length of the crucible body, the evaporation zones being used to place the evaporation material; the sealing cover is provided with an evaporation port, from which the vaporized evaporation material in the evaporation zone is released.

[0004] When the aforementioned vacuum evaporation equipment performs vacuum coating on the battery substrate, the vaporized evaporation material first contacts one side of the battery substrate for coating, and then contacts the other side of the battery substrate for coating. This results in different thicknesses of the protective film covering the two sides of the battery substrate, affecting the protective effect of the protective film on the battery substrate. Utility Model Content

[0005] The purpose of this invention is to solve the problem that in existing vacuum evaporation equipment, when vacuum coating a battery substrate, the evaporated material first contacts one side of the battery substrate for coating, and then contacts the other side for coating, resulting in different thicknesses of the protective film covering the two sides of the battery substrate. Therefore, this invention proposes a perovskite coating vacuum equipment.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a perovskite coating vacuum device, comprising a vacuum chamber, wherein a vapor deposition crucible is fixedly installed at the bottom of the vacuum chamber, and a battery substrate positioning assembly is rotatably engaged inside the vacuum chamber. One end of the battery substrate positioning assembly is drivenly connected to a drive assembly. The battery substrate positioning assembly includes a rotating shaft and a battery substrate positioning groove. One end of each of the two rotating shafts is fixedly connected to the inside of the battery substrate positioning groove. Several mounting brackets are fixedly connected to both sides of the battery substrate positioning groove, and battery substrate clamps are fixedly connected to the upper ends of the mounting brackets. Several positioning slots are opened on both sides of the battery substrate positioning groove, and a feeding slot is provided on one side of each positioning slot.

[0007] Preferably, a number of heating resistance tubes are fixedly installed inside the vapor deposition crucible.

[0008] Preferably, a vapor deposition material guide pipe is provided above one end of the vapor deposition crucible, and the vapor deposition material guide pipe is fixedly inserted through one side of the vacuum chamber.

[0009] Preferably, a protective chamber is fixedly connected to the outside of the vacuum chamber, and a slide rail is symmetrically fixedly connected to the top of the protective chamber. A sealing chamber cover is slidably engaged with the outside of the slide rail, and a handle is fixedly installed on one side of the sealing chamber cover.

[0010] Preferably, the battery substrate clamp includes an electric telescopic rod, one end of which is fixedly connected to a transmission block, and two sides of one end of the transmission block are rotatably connected to transmission rods. One end of each of the two transmission rods is rotatably connected to a battery substrate gripper, and one end of each battery substrate gripper is fixedly connected to a rubber pad.

[0011] Preferably, the two sides of the other end of the transmission block are respectively rotatably connected to the first limiting rod, and one end of the two first limiting rods is respectively rotatably connected to the second limiting rod. One end of the second limiting rod is rotatably connected to both sides of the battery substrate clamp, and the other end of the second limiting rod is rotatably connected to the long rod.

[0012] Preferably, the drive assembly includes a drive motor, the output end of which is connected to a gearbox, and the output end of the gearbox is connected to one end of a rotating shaft.

[0013] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0014] 1. In this utility model, the coating material inside the vapor deposition crucible vaporizes and disperses inside the vacuum chamber, eventually adhering to one side of the battery substrate. When the thickness of the coating on one side of the battery substrate meets the requirements, the drive motor drives the gearbox to rotate, and the gearbox drives the positioning groove of the battery substrate to rotate, so that the other side of the battery substrate faces the vapor deposition crucible, thereby allowing the vaporized coating material to fully contact and coat the other side of the battery substrate, thus allowing a uniform protective film to be attached to the outer surface of the battery substrate.

[0015] 2. In this utility model, the transmission block is raised by the electric telescopic rod, and the transmission block drives the first limit rod and the transmission rod to move, so that the battery substrate clamping claw moves obliquely upward and ensures that the rubber pad at one end contacts and squeezes the edge of the battery substrate at one end, thereby fully positioning and clamping the battery substrate. Attached Figure Description

[0016] Figure 1 This utility model provides a three-dimensional structural schematic diagram of a perovskite coating vacuum device;

[0017] Figure 2 This utility model provides a three-dimensional structural diagram of a protective chamber in a perovskite coating vacuum device;

[0018] Figure 3 This utility model provides a schematic diagram of the internal structure of the vacuum chamber in a perovskite coating vacuum device;

[0019] Figure 4 This utility model presents a three-dimensional structural schematic diagram of a battery substrate positioning component in a perovskite coating vacuum equipment;

[0020] Figure 5 This invention presents a three-dimensional structural diagram of a battery substrate clamp in a perovskite coating vacuum equipment.

[0021] Legend: 1. Vacuum chamber; 11. Protective chamber; 12. Slide rail; 13. Sealed chamber cover; 14. Handle; 2. Evaporation crucible; 21. Heating resistance tube; 22. Evaporation material guide tube; 3. Battery substrate positioning assembly; 31. Rotating shaft; 32. Battery substrate positioning groove; 321. Positioning slot; 322. Discharge slot; 33. Mounting bracket; 34. Battery substrate clamp; 341. Electric telescopic rod; 342. Transmission block; 343. Transmission rod; 344. Battery substrate gripper; 345. First limit rod; 346. Second limit rod; 347. Long rod; 4. Drive assembly; 41. Drive motor; 42. Gearbox. Detailed Implementation

[0022] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features therein can be combined with each other without conflict.

[0023] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0024] Example 1: As Figure 1 - Figure 4 As shown, this utility model provides a perovskite coating vacuum device, including a vacuum chamber 1. A deposition crucible 2 is fixedly installed at the bottom of the vacuum chamber 1. A battery substrate positioning assembly 3 is rotatably engaged inside the vacuum chamber 1. A drive assembly 4 is connected to one end of the battery substrate positioning assembly 3. The battery substrate positioning assembly 3 includes rotating shafts 31 and battery substrate positioning grooves 32. One end of each rotating shaft 31 is fixedly connected to the inside of the battery substrate positioning groove 32. Several mounting brackets 33 are fixedly connected to both sides of the battery substrate positioning groove 32. Battery substrate clamps 34 are fixedly connected to the upper ends of the mounting brackets 33. Several positioning grooves are formed on both sides of the battery substrate positioning groove 32. A feeding slot 322 is provided on one side of the positioning slot 321. Several heating resistance tubes 21 are fixedly installed inside the vapor deposition crucible 2. A vapor deposition material guide pipe 22 is provided above one end of the vapor deposition crucible 2. The vapor deposition material guide pipe 22 is fixedly inserted through one side of the vacuum chamber 1. A protective chamber 11 is fixedly connected to the outside of the vacuum chamber 1. A slide rail 12 is symmetrically fixedly connected above the protective chamber 11. A sealing chamber cover 13 is slidably engaged on the outside of the slide rail 12. A handle 14 is fixedly installed on one side of the sealing chamber cover 13. The drive assembly 4 includes a drive motor 41. The output end of the drive motor 41 is drivenly connected to a gearbox 42. The output end of the gearbox 42 is drivenly connected to one end of the rotating shaft 31.

[0025] The specific settings and functions of this embodiment are described below. The battery substrate to be coated is placed into the battery substrate positioning groove 32. The battery substrate clamp 34 is activated to position and clamp the four corners of the battery substrate. Coating material is added to the inside of the vapor deposition crucible 2 through the vapor deposition material guide tube 22, and the heating resistance tube 21 is activated to heat the coating material. The handle 14 is gripped and the sealing chamber cover 13 is dragged to the top of the protective chamber 11 to seal the vacuum chamber 1. The vacuum pump is activated to extract the gas inside the vacuum chamber 1. At this time, the coating material inside the vapor deposition crucible 2 vaporizes and disperses inside the vacuum chamber 1, eventually adhering to one side of the battery substrate. When the thickness of the coating on one side of the battery substrate meets the requirements, the drive motor 41 drives the gearbox 42 to rotate. The gearbox 42 drives the battery substrate positioning groove 32 to rotate, so that the other side of the battery substrate faces the vapor deposition crucible 2, thereby allowing the vaporized coating material to fully contact and coat the other side of the battery substrate, so that a uniform protective film is attached to the outer surface of the battery substrate.

[0026] Example 2: Figure 1 , Figure 3 , Figure 4 and Figure 5 As shown, a perovskite coating vacuum device includes a vacuum chamber 1. A deposition crucible 2 is fixedly installed at the bottom of the vacuum chamber 1. A battery substrate positioning assembly 3 is rotatably engaged inside the vacuum chamber 1. One end of the battery substrate positioning assembly 3 is connected to a drive assembly 4. The battery substrate positioning assembly 3 includes rotating shafts 31 and battery substrate positioning grooves 32. One end of each of the two rotating shafts 31 is fixedly connected to the inside of the battery substrate positioning groove 32. Several mounting brackets 33 are fixedly connected to both sides of the battery substrate positioning groove 32. Battery substrate clamps 34 are fixedly connected to the upper ends of the mounting brackets 33. Several positioning slots 321 are opened on both sides of the battery substrate positioning groove 32. A feeding slot 322 is provided on one side. The battery substrate clamp 34 includes an electric telescopic rod 341. One end of the electric telescopic rod 341 is fixedly connected to a transmission block 342. Transmission rods 343 are rotatably connected to both sides of one end of the transmission block 342. One end of the two transmission rods 343 is rotatably connected to a battery substrate gripper 344. One end of the battery substrate gripper 344 is fixedly connected to a rubber pad. The two sides of the other end of the transmission block 342 are respectively rotatably connected to a first limiting rod 345. One end of the two first limiting rods 345 is respectively rotatably connected to a second limiting rod 346. One end of the second limiting rod 346 is rotatably connected to both sides of the battery substrate gripper 344. The other end of the second limiting rod 346 is rotatably connected to a long rod 347.

[0027] The overall effect of this embodiment is that when the battery substrate clamp 34 clamps one corner of the battery substrate, the electric telescopic rod 341 drives the transmission block 342 to rise, and the transmission block 342 drives the first limit rod 345 and the transmission rod 343 to move, so that the battery substrate gripper 344 moves obliquely upward and ensures that the rubber pad at one end contacts and presses against the edge of the battery substrate at one end, thereby fully positioning and clamping the battery substrate. The position where the battery substrate gripper 344 contacts the battery substrate is the reserved clamping area of ​​the battery substrate. After the battery substrate is coated, this clamping area will be cut off.

[0028] The usage and working principle of this device are as follows: The battery substrate to be coated is placed into the battery substrate positioning groove 32. The electric telescopic rod 341 drives the transmission block 342 to rise. The transmission block 342 drives the first limit rod 345 and the transmission rod 343 to move, causing the battery substrate gripper 344 to move obliquely upwards, ensuring that the rubber pad at one end contacts and presses against the edge of the battery substrate. Coating material is added to the interior of the evaporation crucible 2 through the evaporation material guide tube 22, and the heating resistance tube 21 is activated to heat the coating material. The gripper 14 then... The sealing cover 13 is dragged to the top of the protective chamber 11 to seal the vacuum chamber 1. The vacuum pump is started to extract the gas inside the vacuum chamber 1. At this time, the coating material inside the vapor deposition crucible 2 vaporizes and disperses inside the vacuum chamber 1, eventually adhering to one side of the battery substrate. When the thickness of the coating on one side of the battery substrate meets the requirements, the drive motor 41 drives the gearbox 42 to rotate. The gearbox 42 drives the battery substrate positioning groove 32 to rotate, so that the other side of the battery substrate faces the vapor deposition crucible 2, thereby allowing the vaporized coating material to fully contact and coat the other side of the battery substrate.

[0029] The above are only preferred embodiments of the present invention and are not intended to limit the present invention in any other form. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification of the above embodiment made according to the technical essence of the present invention without departing from the content of the technical solution of the present invention shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A perovskite coating vacuum device, comprising a vacuum chamber (1), characterized in that: A vapor deposition crucible (2) is fixedly installed at the bottom of the vacuum chamber (1). A battery substrate positioning assembly (3) is rotatably clamped inside the vacuum chamber (1). A drive assembly (4) is connected to one end of the battery substrate positioning assembly (3). The battery substrate positioning assembly (3) includes a rotating shaft (31) and a battery substrate positioning groove (32). One end of each of the two rotating shafts (31) is fixedly connected to the inside of the battery substrate positioning groove (32). Several mounting brackets (33) are fixedly connected to both sides of the battery substrate positioning groove (32). A battery substrate clamp (34) is fixedly connected to the upper end of the several mounting brackets (33). Several positioning slots (321) are opened on both sides of the battery substrate positioning groove (32). A feeding slot (322) is provided on one side of the positioning slot (321).

2. The perovskite coating vacuum equipment according to claim 1, characterized in that: Several heating resistance tubes (21) are fixedly installed inside the vapor deposition crucible (2).

3. The perovskite coating vacuum equipment according to claim 1, characterized in that: A vapor deposition material guide pipe (22) is provided above one end of the vapor deposition crucible (2), and the vapor deposition material guide pipe (22) is fixedly inserted through one side of the vacuum chamber (1).

4. The perovskite coating vacuum equipment according to claim 1, characterized in that: A protective chamber (11) is fixedly connected to the outside of the vacuum chamber (1). A slide rail (12) is symmetrically fixedly connected above the protective chamber (11). A sealing chamber cover (13) is slidably engaged on the outside of the slide rail (12). A handle (14) is fixedly installed on one side of the sealing chamber cover (13).

5. The perovskite coating vacuum equipment according to claim 1, characterized in that: The battery substrate clamp (34) includes an electric telescopic rod (341), one end of which is fixedly connected to a transmission block (342), and two sides of one end of the transmission block (342) are rotatably connected to transmission rods (343). One end of the two transmission rods (343) is rotatably connected to a battery substrate clamping claw (344), and one end of the battery substrate clamping claw (344) is fixedly connected to a rubber pad.

6. The perovskite coating vacuum equipment according to claim 5, characterized in that: The transmission block (342) has two sides of the other end rotatably connected to the first limiting rod (345), and one end of the two first limiting rods (345) is rotatably connected to the second limiting rod (346). One end of the second limiting rod (346) is rotatably connected to both sides of the battery substrate clamp (344), and the other end of the second limiting rod (346) is rotatably connected to the long rod (347).

7. The perovskite coating vacuum equipment according to claim 1, characterized in that: The drive assembly (4) includes a drive motor (41), the output end of which is connected to a gearbox (42), and the output end of the gearbox (42) is connected to one end of the rotating shaft (31).

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