Combined target material type coating preparation equipment
By combining target-type coating preparation equipment, utilizing a vacuum preparation furnace and a rapid insertion target loading plate, the high cost problem caused by the fixed target material in existing equipment is solved, and rapid target replacement and stable preparation of rose gold coating are achieved.
Patent Information
- Application Number
- CN202422582487.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-25
- Publication Date
- 2025-10-28
- Estimated Expiration
- 2034-10-25
AI Technical Summary
In existing coating preparation equipment, the use of different target materials necessitates the purchase or manufacture of additional equipment for different target materials, increasing production costs and space requirements.
A combined target coating preparation equipment is adopted, which uses a vacuum preparation furnace and a rapid insertion target loading plate to support the rapid insertion, extraction and combination of Ti, CN and Al targets to form a TiCN and TiAL combined target structure.
This enabled rapid replacement and efficient supply of target materials, reduced production costs, and improved the stable preparation efficiency of rose gold coatings.
Smart Images
Figure CN223481256U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to surface coating technology and equipment, specifically, it demonstrates a combined target material coating preparation equipment. Background Technology
[0002] Coating preparation equipment generally uses a target material to prepare the corresponding coating. However, the target material in current coating preparation equipment is fixed. When different coatings need to be prepared, it is often necessary to purchase or manufacture additional equipment for preparing the corresponding target material, resulting in high production costs and serious occupation of production space.
[0003] Therefore, it is necessary to provide a combined target coating preparation equipment to solve the above problems. Utility Model Content
[0004] The purpose of this invention is to provide a combined target material coating preparation equipment.
[0005] This utility model achieves the above objectives through the following technical solution:
[0006] A combined target coating preparation equipment includes a vacuum preparation furnace, which is an octagonal furnace. Four or six inner walls of the octagonal furnace are provided with quick-insertion target loading plates, and the rest are arc current generating modules. The quick-insertion target loading plates are provided with several sets of target insertion seats. At least one target insertion seat is used to insert a Ti target, at least one target insertion seat is used to insert a CN target, and at least one target insertion seat is used to insert an Al target. During coating preparation, the Ti target and CN target are turned on simultaneously to form a TiCN combined target structure, and the Ti target and Al target are turned on simultaneously to form a TiAL combined target structure.
[0007] Furthermore, the target insertion socket is a quick-release socket connected via gold fingers.
[0008] Furthermore, the target insertion seats are in one or two sets;
[0009] Furthermore, when the target insertion seats are in a set, at least two insertion seats are used to insert Ti targets, one insertion seat is used to insert CN targets, and one insertion seat is used to insert AL targets.
[0010] Furthermore, when there are two sets of target insertion seats, one set of target insertion seats is used to insert Ti targets, and the other set of target insertion seats is used to insert CN targets and AL targets.
[0011] Furthermore, the ratio of CN targets to AL targets is 1:1.
[0012] Furthermore, the ratio of CN targets to AL targets is 1:3.
[0013] Furthermore, each set of target insertion seats has at least 3 target insertion seats.
[0014] Furthermore, each set of target insertion seats has 4 target insertion seats.
[0015] Compared with the prior art, this utility model has the ability to quickly replace the target material through the quick-insertion target material structure, and to provide effective target material through the combination of target materials, thereby effectively ensuring the stable preparation of the rose gold coating. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the structure of this utility model.
[0017] Figure 2 This is a schematic diagram of a structure of a quick-insertion target loading plate.
[0018] Figure 3 This is a schematic diagram of another structure of the quick-insertion target loading plate. Detailed Implementation
[0019] Example:
[0020] This embodiment demonstrates a combined target-type coating preparation equipment, including a vacuum preparation furnace, see reference. Figure 1 The vacuum preparation furnace is an octagonal furnace 100. Four or six inner walls of the octagonal furnace are equipped with quick-insertion target loading plates 1, and the rest are arc current generating modules 2. The insertion target loading plates 1 are equipped with several sets of target insertion seats 3. At least one target insertion seat 3 is used to insert a Ti target, at least one target insertion seat 3 is used to insert a CN target, and at least one target insertion seat 3 is used to insert an Al target. During coating preparation, the Ti target and CN target are turned on at the same time to form a TiCN combined target structure, and the Ti target and Al target are turned on at the same time to form a TiAL combined target structure.
[0021] The target insertion socket 3 is a quick-release socket connected via gold fingers.
[0022] See Figure 2-3 The target insertion seat 3 can be in one or two sets;
[0023] When the target insertion seats 3 are in a group, at least two insertion seats are used to insert Ti targets, one insertion seat is used to insert CN targets, and one insertion seat is used to insert AL targets.
[0024] When there are two sets of target insertion seats 3, one set of target insertion seats is used to insert Ti targets, and the other set of target insertion seats is used to insert CN targets and AL targets.
[0025] The ratio of CN targets to AL targets is 1:1.
[0026] The ratio of CN targets to AL targets is 1:3.
[0027] Each set of target insertion seats 3 has at least 3 target insertion seats.
[0028] Each set of target insertion seats 3 has 4 target insertion seats.
[0029] Compared with the prior art, this utility model enables quick target replacement through a quick-connect target structure, and provides effective target material through a combination of target materials.
[0030] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.
Claims
1. A composite target coating preparation equipment, characterized in that: The system includes a vacuum preparation furnace, which is an octagonal furnace. Four or six inner walls of the octagonal furnace are equipped with quick-insertion target loading plates, and the rest are arc current generating modules. The quick-insertion target loading plates are equipped with several sets of target insertion seats. At least one target insertion seat is used to insert a Ti target, at least one target insertion seat is used to insert a CN target, and at least one target insertion seat is used to insert an Al target. During coating preparation, the Ti target and CN target are turned on simultaneously to form a TiCN combined target structure, and the Ti target and Al target are turned on simultaneously to form a TiAL combined target structure.
2. The combined target material coating preparation equipment according to claim 1, characterized in that: The target insertion socket is a quick-release socket connected via gold fingers.
3. The combined target material coating preparation equipment according to claim 2, characterized in that: The target insertion seats are in one or two sets.
4. The combined target material coating preparation equipment according to claim 3, characterized in that: When the target insertion seats are in a set, at least two insertion seats are used to insert Ti targets, one insertion seat is used to insert CN targets, and one insertion seat is used to insert AL targets.
5. The combined target material coating preparation equipment according to claim 3, characterized in that: When there are two sets of target insertion seats, one set is used to insert Ti targets, and the other set is used to insert CN targets and AL targets.
6. A combined target coating preparation equipment according to claim 4 or 5, characterized in that: The ratio of CN targets to AL targets is 1:
1.
7. A combined target material coating preparation equipment according to claim 4 or 5, characterized in that: The ratio of CN targets to AL targets is 1:
3.
8. The combined target material coating preparation equipment according to claim 6, characterized in that: Each set of target insertion seats has at least 3 target insertion seats.
9. The combined target material coating preparation equipment according to claim 8, characterized in that: Each set of target insertion seats contains 4 target insertion seats.