Gas data flowmeter for semiconductor production

Abstract

The utility model relates to the technical field of gas flow measurement, in particular to a gas data flowmeter for semiconductor production. A round bearing seat is fixedly installed in the cylinder body, a round installation groove is formed in the round bearing seat, a bearing is fixedly installed in the round installation groove, the shaft body is fixedly connected with an inner ring of the bearing, and a lubricating mechanism and a supply mechanism are arranged in the cylinder body. Through the rotation of the shaft body, the supply mechanism can be driven to work, the lubricating mechanism can discharge lubricating oil, the bearing is installed in the circular bearing seat and rotates along with the inner ring of the bearing, the whole body of the bearing can be lubricated at the oil injection port, and therefore the directional and fixed-point lubricating mode is achieved; and in addition, the stable oil outlet quantity of the oil injection head is realized through an extrusion mode of reciprocating the oil pushing plate, so that a quantitative lubrication mode is realized, and the lubrication effect is comprehensively improved.

Description

Technical Field

[0001] This utility model relates to the field of gas flow measurement technology, and in particular to a gas data flow meter for semiconductor manufacturing. Background Art

[0002] In the semiconductor manufacturing industry, precise control of gas flow rate is crucial, especially for key parameters affecting processes such as thin film deposition and etching. Gas turbine flow meters are commonly used in this industry due to their high measurement accuracy, good linearity, and fast response, making them suitable for high-velocity flow measurements.

[0003] The turbine in this type of flow meter needs to rotate continuously for a long time, so the lubrication of the turbine shaft is very important. Poor lubrication will lead to some measurement errors in the semiconductor manufacturing industry. However, because semiconductor manufacturing is a precision manufacturing process, even a small error can cause significant losses. Existing lubrication methods cannot achieve directional, quantitative, and point-to-point lubrication of the turbine shaft, which makes it impossible to control the lubrication range and ensure the lubrication effect. Therefore, the lubrication capability needs to be improved. Utility Model Content

[0004] The purpose of this invention is to address the problems existing in the background technology by proposing a gas data flow meter for semiconductor production.

[0005] The technical solution of this utility model is as follows: A gas data flow meter for semiconductor production includes a housing, a flow guide and a shaft disposed within the housing, an impeller and a signal transmitter mounted on the shaft, a cylindrical body fixedly mounted on the flow guide, a circular bearing seat fixedly mounted inside the cylindrical body, a circular mounting groove provided in the circular bearing seat, a bearing fixedly mounted in the circular mounting groove, the shaft and the inner ring of the bearing being fixedly connected, and a lubrication mechanism and a supply mechanism provided inside the cylindrical body;

[0006] The lubrication mechanism includes an oil storage tank fixed inside the cylinder, an oil outlet pipe fixed to the top of the oil storage tank and connected to it, an oil injection head connected to the oil outlet pipe, an oil injection port on the circular bearing seat, an oil injection port at the intersection of the inner and outer rings of the bearing, and an oil injection head located inside the oil injection port.

[0007] The supply mechanism includes a shaft with a reciprocating thread, a movable seat threaded on the reciprocating thread, a connecting rod fixed to the movable seat that passes through the oil reservoir, an oil pusher plate fixedly installed on the connecting rod inside the oil reservoir, and a plug fixedly installed at the end of the shaft.

[0008] Preferably, an arc-shaped oil collection tank is fixedly installed at the bottom of the oil storage tank. An inclined oil collection cavity communicating with the oil storage tank is opened in the arc-shaped oil collection tank. The oil inlet of the inclined oil collection cavity is located at the bottom of the circular bearing seat and is higher than the bottom of the circular bearing seat. The arc of the oil inlet of the inclined oil collection cavity is consistent with the arc of the bottom of the circular bearing seat, and the bottom of the arc-shaped oil collection tank coincides with the bottom of the circular bearing seat.

[0009] Preferably, the oil inlet of the inclined oil collecting chamber is at a high position, the oil outlet of the inclined oil collecting chamber is located inside the oil storage tank, the oil outlet of the inclined oil collecting chamber is at a low position, and a check valve assembly is provided at the oil outlet of the inclined oil collecting chamber.

[0010] Preferably, the check valve assembly includes several grooves formed on the arc-shaped oil collection tank, and also includes a check valve baffle rotatably installed in the groove, with the grooves and the check valve baffle being equidistantly distributed in an arc shape.

[0011] Preferably, the cylinder is equipped with a sealing cover, a sealing ring is provided between the sealing cover and the cylinder, the sealing cover and the shaft are rotatably connected, and the oil storage tank is provided with an oil delivery head that penetrates the cylinder.

[0012] Preferably, an integrator is fixedly mounted on the housing, and the integrator is electrically connected to the signal transmitter.

[0013] Compared with existing technologies, the beneficial effects of this utility model are as follows: This solution sets up a lubrication mechanism and a supply mechanism inside the cylinder. The rotation of the shaft itself drives the supply mechanism to operate, allowing the lubrication mechanism to discharge lubricating oil. The bearing is installed in a circular bearing seat, allowing the lubricating oil to enter the oil outlet pipe. The lubricating oil through the oil outlet pipe enters the oil injection head, and finally, the lubricating oil is discharged to the intersection of the inner and outer rings of the bearing. As the inner ring of the bearing rotates, it can lubricate the entire bearing at the oil injection port, thus achieving directional and fixed-point lubrication. Furthermore, the reciprocating movement of the oil pusher plate ensures a stable oil output from the oil injection head, thus achieving quantitative lubrication. Therefore, this comprehensively improves the lubrication effect. Attached Figure Description

[0014] Figure 1 It is a structural diagram of the utility model;

[0015] Figure 2 This is a schematic diagram of the internal structure of the cylindrical body of this utility model;

[0016] Figure 3 This is a schematic diagram of the lubrication mechanism of this utility model;

[0017] Figure 4 for Figure 3 Another perspective structural diagram;

[0018] Figure 5This is a schematic diagram of the structure of the check valve assembly of this utility model.

[0019] Reference numerals: 1. Shell; 2. Flow guide; 3. Shaft; 4. Impeller; 5. Signal transmitter; 6. Integrator; 7. Cylinder; 8. Sealing cover; 10. Circular bearing seat; 11. Circular mounting groove; 12. Oil inlet; 13. Reciprocating thread; 14. Moving seat; 15. Pusher plate; 16. Bearing; 17. Plug; 18. Connecting rod; 91. Oil reservoir; 92. Arc-shaped oil collection tank; 93. Oil outlet pipe; 94. Oil inlet head; 95. Inclined oil collection chamber; 96. Oil delivery head; 100. Check valve assembly; 200. Check valve baffle; 300. Tank. Detailed Implementation

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0021] See attached document Figures 1-5 A gas flow meter for semiconductor manufacturing includes a housing 1, a flow guide 2 and a shaft 3 disposed within the housing 1, an impeller 4 and a signal transmitter 5 mounted on the shaft 3, a cylinder 7 fixedly mounted on the flow guide 2, a circular bearing seat 10 fixedly mounted inside the cylinder 7, a circular mounting groove 11 provided in the circular bearing seat 10, a bearing 16 fixedly mounted inside the circular mounting groove 11, the shaft 3 and the inner ring of the bearing 16 fixedly connected, and a lubrication mechanism and a supply mechanism provided inside the cylinder 7.

[0022] The lubrication mechanism includes an oil storage tank 91 fixed inside the cylinder 7, an oil outlet pipe 93 fixed to the top of the oil storage tank 91 and connected to it, an oil outlet pipe 93 connected to an oil injection head 94, an oil injection port 12 opened on the circular bearing seat 10, the intersection of the inner and outer rings of the bearing 16 is located at the oil injection port 12, and the oil injection head 94 is located inside the oil injection port 12.

[0023] The supply mechanism includes a reciprocating thread 13 on the shaft 3, a movable seat 14 threaded on the reciprocating thread 13, a connecting rod 18 that passes through the oil reservoir 91 fixed on the movable seat 14, an oil pusher plate 15 located inside the oil reservoir 91 fixedly installed on the connecting rod 18, and a plug 17 fixedly installed at the end of the shaft 3.

[0024] During operation, the oil reservoir 91 is filled with a full amount of lubricating oil. When the shaft 3 rotates, the moving seat 14 moves back and forth on the reciprocating thread 13. The reciprocating thread 13 pushes the oil pusher plate 15 to move, so that the oil pusher plate 15 can squeeze the lubricating oil in the oil reservoir 91, so that the lubricating oil enters the oil outlet pipe 93. The lubricating oil through the oil outlet pipe 93 enters the oil injection head 94, and finally the lubricating oil is discharged to the intersection of the inner and outer rings of the bearing 16. As the inner ring of the bearing 16 rotates, it can lubricate the entire bearing at the oil injection port 12, thus realizing directional and fixed-point lubrication. Furthermore, the squeezing action of the reciprocating oil pusher plate 15 ensures a stable oil output from the oil injection head 94, thus realizing quantitative lubrication. Therefore, the lubrication effect is comprehensively improved.

[0025] In this embodiment, an arc-shaped oil collection tank 92 is fixedly installed at the bottom of the oil storage tank 91. An inclined oil collection cavity 95 communicating with the oil storage tank 91 is opened in the arc-shaped oil collection tank 92. The oil inlet of the inclined oil collection cavity 95 is located at the bottom of the circular bearing seat 10 and is higher than the bottom of the circular bearing seat 10. The arc of the oil inlet of the inclined oil collection cavity 95 is consistent with the arc of the bottom of the circular bearing seat 10. The bottom of the arc-shaped oil collection tank 92 coincides with the bottom of the circular bearing seat 10. The oil inlet of the inclined oil collection cavity 95 is at a higher position. The oil outlet of the inclined oil collection cavity 95 is located inside the oil storage tank 91. The oil outlet of the inclined oil collection cavity 95 is at a lower position. A check valve component 100 is provided at the oil outlet of the inclined oil collection cavity 95.

[0026] During use, when the lubricating oil rotates with the inner ring of the bearing 16 to the inclined oil collection chamber 95, it will automatically fall due to gravity. The bottom of the arc-shaped oil collection box 92 and the circular bearing seat 10 overlap, causing the lubricating oil to flow into the oil inlet of the inclined oil collection chamber 95 and then flow down into the oil reservoir 91, increasing the amount of lubricating oil in the oil reservoir 91. This forms a circulating oil circuit, ensuring that the oil reservoir 91 will not run out of oil.

[0027] It should be noted that the check valve assembly 100 includes several grooves 300 formed on the arc-shaped oil collection tank 92, and also includes a check valve baffle 200 rotatably installed in the grooves 300. The grooves 300 and the check valve baffle 200 are equidistantly distributed in an arc shape.

[0028] When the oil pusher plate 15 squeezes out oil, several check baffles 200 will block the oil outlet of the inclined oil collection chamber 95 to prevent lubricant from being discharged from there, ensuring that the oil outlet pipe 93 can output oil normally. When the inclined oil collection chamber 95 delivers oil into the oil storage tank 91, the check baffles 200 will be pushed open by the downward-flowing oil, thus entering the oil storage tank 91.

[0029] In addition, it should be noted that the cylinder 7 is equipped with a sealing cover 8, and a sealing ring is provided between the sealing cover 8 and the cylinder 7. The sealing cover 8 and the shaft 3 are rotatably connected. The oil storage tank 91 is provided with an oil delivery head 96 that penetrates the cylinder 7. An integrator 6 is fixedly installed on the shell 1, and the integrator 6 is electrically connected to the signal transmitter 5.

[0030] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A gas data flow meter for semiconductor manufacturing, comprising a housing (1), a flow guide (2) and a shaft (3) disposed within the housing (1), wherein an impeller (4) and a signal transmitter (5) are mounted on the shaft (3), characterized in that, The guide (2) is fixedly installed with a cylinder (7), and a circular bearing seat (10) is fixedly installed inside the cylinder (7). A circular mounting groove (11) is opened inside the circular bearing seat (10), and a bearing (16) is fixedly installed inside the circular mounting groove (11). The shaft (3) and the inner ring of the bearing (16) are fixedly connected. A lubrication mechanism and a supply mechanism are provided inside the cylinder (7). The lubrication mechanism includes an oil reservoir (91) fixed inside the cylinder (7), an oil outlet pipe (93) fixed and connected to the top of the oil reservoir (91), an oil injection head (94) connected to the oil outlet pipe (93), an oil injection port (12) opened on the circular bearing seat (10), the intersection of the inner and outer rings of the bearing (16) is located at the oil injection port (12), and the oil injection head (94) is located inside the oil injection port (12). The supply mechanism includes a shaft (3) with a reciprocating thread (13), a movable seat (14) threaded on the reciprocating thread (13), a connecting rod (18) that passes through the oil tank (91) fixed on the movable seat (14), an oil pusher plate (15) located in the oil tank (91) fixedly installed on the connecting rod (18), and a plug (17) fixedly installed at the end of the shaft (3).

2. The gas data flow meter for semiconductor manufacturing according to claim 1, characterized in that, An arc-shaped oil collection tank (92) is fixedly installed at the bottom of the oil storage tank (91). An inclined oil collection cavity (95) communicating with the oil storage tank (91) is opened in the arc-shaped oil collection tank (92). The oil inlet of the inclined oil collection cavity (95) is located at the bottom of the circular bearing seat (10) and is higher than the bottom of the circular bearing seat (10). The arc of the oil inlet of the inclined oil collection cavity (95) is consistent with the arc at the bottom of the circular bearing seat (10). The bottom of the arc-shaped oil collection tank (92) coincides with the bottom of the circular bearing seat (10).

3. A gas data flow meter for semiconductor manufacturing according to claim 2, characterized in that, The inlet of the inclined oil collecting chamber (95) is at a high position, the outlet of the inclined oil collecting chamber (95) is located inside the oil storage tank (91), the outlet of the inclined oil collecting chamber (95) is at a low position, and a check valve assembly (100) is provided at the outlet of the inclined oil collecting chamber (95).

4. A gas data flow meter for semiconductor manufacturing according to claim 3, characterized in that, The check valve assembly (100) includes several grooves (300) opened on the arc-shaped oil collection tank (92), and also includes a check valve baffle (200) rotatably installed in the groove (300). The grooves (300) and the check valve baffle (200) are equidistantly distributed in an arc shape.

5. A gas data flow meter for semiconductor manufacturing according to claim 1, characterized in that, The cylinder (7) is equipped with a sealing cover (8), and a sealing ring is provided between the sealing cover (8) and the cylinder (7). The sealing cover (8) and the shaft (3) are rotatably connected. The oil storage tank (91) is provided with an oil delivery head (96) that penetrates the cylinder (7).

6. A gas data flow meter for semiconductor manufacturing according to claim 1, characterized in that, An integrator (6) is fixedly installed on the housing (1), and the integrator (6) is electrically connected to the signal transmitter (5).

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