Liquid level detection assembly and chemical liquid storage system

Abstract

The utility model discloses a liquid level detection assembly and a chemical liquid storage system, and belongs to the technical field of chemical liquid storage devices. The two detection ends of the differential pressure transmitter body each comprise a flange joint, and a detection element is arranged in each flange joint. A first flange plate and a second flange plate are arranged at the two ends of each pipe body, the two first flange plates are connected with a top connector and a bottom connector of the pressure container respectively, the two second flange plates are connected with the two flange connectors in a one-to-one correspondence mode, and the detection elements face the pipe bodies so as to detect the liquid level of the pressure container. Due to the fact that the corrosion-resistant membrane is attached to the surface of the detection element, the detection element can be prevented from making contact with chemical liquid, the multiple layers of throttling baffles are arranged in the pipe body at intervals, the throttling holes allowing fluid to pass through are formed in each layer of throttling baffle, pressure reduction buffering can be carried out during inflation pressurization or exhaust pressure relief, and the detection element can be protected from being damaged. The adhesion between the corrosion-resistant membrane and the detection element is improved, and the service life and the detection precision of the liquid level detection assembly are improved.

Description

Technical Field

[0001] This application relates to the field of chemical liquid storage device technology, and more specifically, to a liquid level detection component and a chemical liquid storage system. Background Technology

[0002] To ensure smooth and bubble-free chemical delivery, the semiconductor industry typically uses pressure vessels to pressurize the chemicals and employs differential pressure transmitters to detect the liquid level in the pressure vessels.

[0003] However, chemical liquids are usually corrosive. Long-term contact between chemical liquids and the sensing elements of differential pressure transmitters will reduce the service life of differential pressure transmitters and affect the detection accuracy. Utility Model Content

[0004] In view of the above-mentioned shortcomings, this application provides a liquid level detection component and a chemical liquid storage system to improve the problems of easy corrosion of detection elements and low detection accuracy of differential pressure transmitters when detecting liquid level in chemical liquid pressure vessels.

[0005] This application is implemented as follows:

[0006] In a first aspect, an example of this application provides a liquid level detection assembly, comprising: a differential pressure transmitter body and two pipe bodies. Both detection ends of the differential pressure transmitter body include flange joints, with a detection element disposed inside the flange joints, and a corrosion-resistant diaphragm affixed to the surface of the detection element; each pipe body has a first flange and a second flange at both ends, the two first flanges being used to connect to two interfaces of a pressure vessel respectively, and the two second flanges being connected to the two flange joints in a one-to-one correspondence, with the detection element facing the pipe body to detect the liquid level of the pressure vessel; along the axial direction of the pipe body, multiple layers of throttling baffles are spaced apart inside the pipe body, each layer of throttling baffles having a throttling orifice for fluid passage.

[0007] In the above implementation process, when using the above-mentioned liquid level detection component to detect the liquid level of the chemical liquid in the pressure vessel, one of the flange joints of the differential pressure transmitter is connected to the interface at the bottom of the pressure vessel through a pipe body, and the other flange joint is connected to the interface at the top of the pressure vessel through another pipe body. The detection elements in the two flange joints can detect the pressure values ​​at the top and bottom of the pressure vessel respectively, and the liquid level in the pressure vessel can be calculated by the pressure difference between the two pressure values.

[0008] Since chemical liquids are often corrosive, direct contact between the sensing element and the liquid can easily damage the element, affecting its lifespan and accuracy. Therefore, in the liquid level detection assembly provided in this application, a corrosion-resistant diaphragm is attached to the surface of the sensing element of the differential pressure transmitter. This prevents the chemical liquid from directly contacting the sensing element, thus avoiding corrosion and improving the lifespan and accuracy of the differential pressure transmitter.

[0009] Before and after pressure vessel operation, it is usually necessary to replenish gas for pressurization and exhaust gas for depressurization. Over time, this can cause the corrosion-resistant diaphragm to loosen, affecting the detection accuracy. Therefore, in the liquid level detection component provided in this application, the flange joint of the differential pressure transmitter is connected to the port of the pressure vessel through a pipe. Since multiple layers of throttling baffles are installed inside the pipe, and each layer of throttling baffles is equipped with throttling orifices, during gas replenishment for pressurization and exhaust gas for depressurization, the airflow in the pressure vessel will pass through the throttling orifices at each layer of throttling baffles in sequence. The orifice diameter is smaller than the inner diameter of the pipe, and the pressure decreases when the airflow passes through the throttling orifice, which buffers the impact force of the fluid. Through multiple buffering, the impact of the airflow on the corrosion-resistant diaphragm can be reduced, the probability of the corrosion-resistant diaphragm loosening can be reduced, and the detection accuracy and service life can be further improved.

[0010] In conjunction with the first aspect, in one alternative implementation, the throttling orifices at every two adjacent layers of throttling baffles are staggered along the axial direction.

[0011] In the above implementation process, the throttling orifices at each of the two adjacent layers of throttling baffles are staggered along the axial direction of the pipe body, which can further improve the buffering effect of the throttling baffles and throttling orifices in the pipe body, and further improve the service life and detection accuracy of the liquid level detection component.

[0012] In conjunction with the first aspect, in one alternative embodiment, the internal space of the pipe is provided with 10 layers of throttling baffles.

[0013] In the above implementation process, 10 layers of throttling baffles are set at intervals inside the pipe body. This can improve detection efficiency while ensuring fluid flow and buffering the impact force of the fluid, thereby improving the service life and detection accuracy of the liquid level detection component.

[0014] In conjunction with the first aspect, in one alternative embodiment, the throttling orifices at the multi-layer throttling baffle are arranged spirally along the axial direction.

[0015] In the above implementation process, the throttling orifices at the multi-layer throttling baffle are arranged spirally along the axial direction, which can improve the buffering effect of the throttling baffle and the throttling orifices.

[0016] In conjunction with the first aspect, in one alternative implementation, the orifice diameter is 5-10 mm.

[0017] In the above implementation process, the orifice diameter is 5-10mm, which can reduce the probability of fluid blockage due to the orifice diameter being too small, and can also avoid the buffering effect being affected by the orifice diameter being too large.

[0018] In conjunction with the first aspect, in one optional embodiment, a bushing is provided inside the pipe body, the two ends of the bushing extending out of the pipe body along the axial direction and provided with flanges, the two flanges respectively overlapping the first flange and the second flange; each layer of throttling baffle is connected to the inner wall of the bushing.

[0019] In the above implementation process, the throttling baffle is connected to the inner wall of the bushing, the bushing is located in the pipe body, and the two ends of the bushing are provided with flanges to overlap with the flanges at both ends of the pipe body. This can stably fix the multi-layer throttling baffle in the pipe body and improve the structural stability of the liquid level detection component.

[0020] In conjunction with the first aspect, in an alternative embodiment, the flange joint includes a third flange and a connector connected to the third flange; the detection element is located inside the connector and along the axial direction of the connector, the detection element does not extend outside the connector; a corrosion-resistant diaphragm is affixed to the end of the detection element away from the third flange.

[0021] In the above implementation process, the detection element is arranged inside the joint and does not protrude outside the joint. When the third flange is connected to the second flange of the pipe body, the second flange can be prevented from pressing against the detection element.

[0022] In conjunction with the first aspect, in an optional embodiment, the corrosion-resistant diaphragm extends to the end wall of the joint at the edge corresponding to the detection element, and a sealing ring is provided between the flange joint and the first flange, the sealing ring being pressed against the edge of the corrosion-resistant diaphragm corresponding to the detection element.

[0023] In the above implementation process, a sealing ring is set between the flange joint and the first flange, which can improve the connection sealing between the liquid level detection component and the pressure vessel.

[0024] In conjunction with the first aspect, in one alternative embodiment, a plurality of retaining rings are spaced apart along the circumferential edge of the sealing ring, and the second flange is connected to the third flange by fasteners passing through the retaining rings.

[0025] In the above implementation process, multiple fixing rings are set at intervals along the circumferential edge of the sealing ring. When connecting the flange joint to the second flange, the fasteners at the second flange can be passed through the fixing rings of the sealing ring and then fixed to the third flange at the flange joint, which can improve the fixing stability of the sealing ring.

[0026] In a second aspect, an example of this application provides a chemical liquid storage system, including a pressure vessel and a liquid level detection component provided in the first aspect; along the height direction of the pressure vessel, a first connection port is provided at the bottom of the pressure vessel, and a second connection port is provided at the top of the pressure vessel; two first flanges are respectively connected to the first connection port and the second connection port flange.

[0027] In the above implementation process, in the chemical liquid storage system, the liquid level detection component provided in the first aspect is used to detect pressure in the pressure vessel. Because a corrosion-resistant diaphragm is attached to the detection element in the liquid level detection component, the diaphragm can transmit pressure to the detection element and prevent the detection element from directly contacting the chemical liquid, thereby improving the service life of the differential pressure transmitter and increasing detection accuracy. Before and after storing the chemical liquid in the pressure vessel, the pressure vessel needs to be pressurized by adding gas and depressurized by venting gas. During pressurization and depressurization, the multi-layered throttling baffles and throttling orifices inside the pipe body can buffer the airflow multiple times, reducing the impact on the corrosion-resistant diaphragm. This reduces the probability of the corrosion-resistant diaphragm loosening and failing to accurately transmit pressure to the detection element, thus improving detection accuracy. Attached Figure Description

[0028] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art.

[0029] Figure 1 A schematic plan view of a chemical liquid storage system provided as an example in this application;

[0030] Figure 2 A plan view of the liquid level detection component provided as an example in this application;

[0031] Figure 3 A cross-sectional schematic diagram of the flange joint of the differential pressure transmitter provided as an example in this application;

[0032] Figure 4 A schematic diagram of the tube structure provided as an example in this application;

[0033] Figure 5 A schematic cross-sectional view of the tube provided as an example in this application;

[0034] Figure 6 A schematic diagram showing the connection between the bushing and the throttling baffle provided as an example in this application;

[0035] Figure 7 A planar schematic diagram of the sealing ring provided as an example in this application.

[0036] Icons: 100-Chemical liquid storage system; 1-Level detection assembly; 10-Differential pressure transmitter body; 11-Flange joint; 111-Third flange; 112-Joint; 12-Detection element; 13-Corrosion resistant diaphragm; 21-Pipe body; 211-First flange; 212-Second flange; 22-Throttle baffle; 23-Throttle orifice; 24-Bushing; 25-Flange; 31-Sealing ring; 32-Fixing ring; 2-Pressure vessel; D1-Axial. Detailed Implementation

[0037] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this application; the terms “comprising” and “having”, and any variations thereof, in the specification and the foregoing description of the drawings are intended to cover non-exclusive inclusion.

[0039] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0040] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0041] To ensure smooth and bubble-free chemical delivery, the semiconductor industry typically uses pressure vessels to pressurize the chemicals and employs differential pressure transmitters to detect the liquid level in the pressure vessels.

[0042] For example, the two connectors of the differential pressure transmitter are connected to the top and bottom interfaces of the pressure vessel, respectively. The pressure at the top and bottom of the pressure vessel is detected by the sensing elements in the connectors, and the obtained differential pressure signal is converted into a corresponding electrical signal and transmitted to the converter or processor to output the detection result.

[0043] However, chemical liquids are usually corrosive. If chemical liquids come into contact with the sensing element of the differential pressure transmitter for a long time, it will reduce the service life of the differential pressure transmitter and affect the detection accuracy.

[0044] Therefore, this application provides a liquid level detection component 1 and a chemical liquid storage system, which can improve the detection accuracy and service life of differential pressure transmitters to a certain extent. To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.

[0045] See also Figure 1 The chemical liquid storage system 100 provided in this application example includes a liquid level detection component 1 and a pressure vessel 2.

[0046] Please refer to Figure 2 The liquid level detection component 1 includes a differential pressure transmitter body 10 and two tubes 21.

[0047] In this regard, please combine Figure 1 , Figure 2 and Figure 3 The differential pressure transmitter body 10 has two detection ends, each of which includes a flange joint 11. Each flange joint 11 has a detection element 12 inside, and each detection element 12 has a corrosion-resistant diaphragm 13 attached to its surface.

[0048] Please refer to Figure 4 Each pipe body 21 has a first flange 211 and a second flange 212 at both ends. The two first flanges 211 are used for flange connections to the two interfaces of the pressure vessel 2, respectively. The two second flanges 212 are connected one-to-one to the two flange joints 11, with the sensing element 12 facing the pipe body 21 to detect the liquid level in the pressure vessel 2. Please refer to [link / reference]. Figure 5 Along the axial direction D1 of the pipe body 21, multiple layers of throttling baffles 22 are provided at intervals inside the pipe body 21, and each layer of throttling baffles 22 is provided with throttling holes 23 for fluid to pass through.

[0049] When storing chemical liquids using the chemical liquid storage system 100 provided in this application example, the liquid level detection component 1 can be used to detect the liquid level of the chemical liquid in the pressure vessel 2.

[0050] When using the level detection component 1 to detect the level of the chemical liquid inside the pressure vessel 2, please refer to [the relevant documentation]. Figure 1The top interface of the pressure vessel 2 can be connected to the first flange 211 of one of the pipe bodies 21, and the second flange 212 of the pipe body 21 can be connected to one of the flange joints 11 at the differential pressure transmitter body 10; the bottom interface of the pressure vessel 2 can be connected to the first flange 211 of another pipe body 21, and the second flange 212 of the pipe body 21 can be connected to another flange joint 11 at the differential pressure transmitter body 10. The top air pressure and bottom hydraulic pressure of the pressure vessel 2 can be detected by two sensing elements 12 respectively, the pressure difference can be calculated, and the liquid level height data can be obtained.

[0051] Since chemical liquids are generally corrosive, prolonged contact between these liquids and the sensing element 12 can corrode or damage it, reducing the accuracy and lifespan of the differential pressure transmitter. To reduce the likelihood of corrosion or damage to the sensing element 12 due to contact with the chemical liquid, a corrosion-resistant diaphragm 13 is attached to the surface of the sensing element 12 of the differential pressure transmitter body 10 provided in this application example. The corrosion-resistant diaphragm 13 protects the sensing element 12 from contact with the chemical liquid. The corrosion-resistant diaphragm 13 also ensures that the pressure is completely transmitted to the sensing element 12, enabling accurate detection.

[0052] Before and after the pressure vessel 2 is in operation, it is usually necessary to replenish gas for pressurization and exhaust gas for depressurization. Over time, this will cause the corrosion-resistant diaphragm 13 to loosen from the surface of the detection element 12, affecting pressure transmission and detection accuracy. In order to further improve detection accuracy, in the chemical liquid storage system 100 provided in this application example, a pipe body 21 is provided between the flange joint 11 of the differential pressure transmitter body 10 and the flange of the pressure vessel 2. Since multiple layers of throttling baffles 22 are provided inside the pipe body 21, and each layer of throttling baffle 22 is provided with a throttling orifice 23, the orifice diameter of the throttling orifice 23 is smaller than the inner diameter of the pipe body 21. Therefore, when the pressure vessel 2 is pressurized or depressurized, the airflow in the pressure vessel 2 will pass through the throttling orifice 23 of each layer of throttling baffle 22 in sequence. After multiple buffering and pressure adjustment by the throttling orifice 23, it will flow to the corrosion-resistant diaphragm 13, thereby reducing the impact on the corrosion-resistant diaphragm 13 when the pressure vessel 2 is pressurized and depressurized, reducing the probability of the corrosion-resistant diaphragm 13 loosening, and further improving detection accuracy and service life.

[0053] The liquid level detection component 1 provided in this application example is described in further detail below with reference to the accompanying drawings.

[0054] The differential pressure transmitter body 10 is used for level detection of the pressure vessel 2. The differential pressure transmitter body 10 has two sensing ends, each sensing end including a flange joint 11, and each flange joint 11 including a third flange 111 and a connector 112. The sensing element 12 is located inside the connector 112, and the end of the sensing element 12 does not protrude outside the connector 112 to avoid squeezing the sensing element 12.

[0055] This application does not limit how the detection element 12 detects pressure and outputs a signal through the differential pressure transmitter body 10. The detection principle and model of the differential pressure transmitter body 10 are the same as those of commercially available dual-flange differential pressure transmitters.

[0056] To reduce the likelihood of the detection element 12 coming into contact with chemicals, the liquid level detection assembly 1 provided in this application example has a corrosion-resistant diaphragm 13 attached to the surface of the detection element 12. The corrosion-resistant diaphragm 13 has a certain degree of flexibility and corrosion resistance, and can completely transmit pressure to the detection element 12 while protecting the detection element 12 from contact with chemical liquids.

[0057] This application does not limit the specific material of the corrosion-resistant membrane 13. In some possible embodiments, the material of the corrosion-resistant membrane 13 is selected from Teflon.

[0058] Furthermore, in order to improve the adhesion between the corrosion-resistant membrane 13 and the surface of the detection element 12, in one possible embodiment, fluorinated oil can be applied between the corrosion-resistant membrane 13 and the detection element 12.

[0059] Furthermore, the corrosion-resistant diaphragm 13 can be extended to the end wall of the connector 112 at the edge corresponding to the detection element 12, and connected to the arcuate outer wall of the connector 112.

[0060] In order to buffer the impact on the corrosion-resistant diaphragm 13 when the pressure vessel 2 is pressurized and depressurized, a pipe body 21 is provided between the flange joint 11 of the differential pressure transmitter and the interface of the pressure vessel 2. Multiple layers of throttling baffles 22 are provided inside the pipe body 21 at intervals, and each layer of throttling baffles 22 is provided with a throttling orifice 23.

[0061] Because the orifice 23 has a small diameter, when the pressure vessel 2 is pressurized and depressurized, the airflow will pass through the smaller orifice 23 from the pipe body with a larger diameter. According to Bernoulli's principle, the pressure decreases as the orifice diameter decreases. Therefore, through the buffering effect of the orifice 23 at the multi-layer throttling baffle 22, the impact of the airflow on the corrosion-resistant diaphragm 13 can be reduced, and the adhesion stability of the corrosion-resistant diaphragm 13 and the detection element 12 can be improved.

[0062] This application does not limit the specific number of layers of the throttling baffle 22. In one possible embodiment, please refer to [the relevant documentation]. Figure 5 The number of layers of the throttling baffle 22 can be 10.

[0063] Alternatively, in some possible embodiments, the number of layers of the throttling baffle 22 can be 2-10; or the number of layers of the throttling baffle can be 10-15, or more.

[0064] To further enhance the buffering effect of the throttling baffle 22 and the throttling orifice 23, in some possible embodiments, the throttling orifices 23 at each of two adjacent layers of throttling baffle 22 are staggered along the axial direction.

[0065] The throttling holes 23 at each of two adjacent layers of throttling baffles 22 are staggered along the axial direction D1, meaning that the projections of the throttling holes 23 at each of two adjacent layers of throttling baffles 22 in the axial direction D1 do not overlap.

[0066] For example, the throttling holes 23 at the multi-layer throttling baffle 22 are arranged in a spiral along the axial direction.

[0067] Furthermore, this application does not limit the specific diameter of the throttling orifice 23. In some possible embodiments, the diameter of the throttling orifice 23 can be 5-10 mm.

[0068] For example, the orifice diameter of the throttling orifice 23 can be one of 5 mm, 6 mm, 7 mm, 8 mm, 9 mm or 10 mm or any range between two of them.

[0069] To facilitate the connection of the pipe body 21 to the interface of the flange joint 11 and the pressure vessel 2, the pipe body 21 provided in this application example is also provided with a first flange 211 and a second flange 212 at both ends along its axial direction D1. The first flange 211 can be connected to the interface of the pressure vessel 2, and the second flange 212 can be connected to the third flange 111 of the flange joint 11.

[0070] Furthermore, to facilitate the spaced arrangement of the multi-layer throttling baffles 22 inside the pipe body 21, in some possible embodiments, please refer to... Figure 5 and Figure 6 A bushing 24 can be installed inside the pipe body 21. The multi-layer throttling baffle 22 is connected to the inner wall of the bushing 24. The bushing 24 extends out of the pipe body at both ends along the axial direction D1 and is provided with two flanges 25 respectively. The two flanges 25 overlap with the first flange 211 and the second flange 212 respectively to fix the bushing 24 and the throttling baffle 22 to the pipe body 21.

[0071] Understandably, the flange 25 does not obstruct the connection holes at the first flange 211 and the second flange 212.

[0072] Furthermore, to improve the connection sealing of the liquid level detection assembly 1, a sealing ring 31 may be provided in some possible embodiments. The sealing ring 31 is pressed between the edge of the corrosion-resistant diaphragm 13 corresponding to the outer edge of the detection element 12 and the second flange 212.

[0073] For further information, see Figure 7 Furthermore, multiple retaining rings 32 can be spaced apart along the circumferential edge of the sealing ring 31. When connecting the flange joint 11 to the pipe body 21, the second flange 212 at the pipe body 21 can be connected to the third flange 111 by fasteners passing through the retaining rings 32.

[0074] For example, both the second flange 212 and the third flange 111 have four threaded holes, and four retaining rings 32 corresponding to the threaded holes can be provided at the circumferential edge of the sealing ring 31.

[0075] Understandably, in the chemical liquid storage system 100, components that come into contact with chemicals, such as the pressure vessel 2, pipe 21, and throttling baffle 22, need to have a certain degree of corrosion resistance. For example, a corrosion-resistant lining can be installed inside the pressure vessel 2, and the pipe 21 and throttling baffle 22 can be made of corrosion-resistant materials.

[0076] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A liquid level detection component, characterized in that, include: The differential pressure transmitter body has two detection ends, each of which includes a flange joint. The flange joint is provided with a detection element, and the surface of the detection element is covered with a corrosion-resistant diaphragm. Two pipe bodies are provided, each with a first flange and a second flange at both ends. The two first flanges are used to connect to the two interfaces of the pressure vessel respectively, and the two second flanges are connected to the two flange joints in a one-to-one correspondence, with the detection element facing the pipe body to detect the liquid level of the pressure vessel. Along the axial direction of the pipe body, multiple layers of throttling baffles are provided at intervals inside the pipe body, and each layer of throttling baffles is provided with throttling holes for fluid to pass through.

2. The liquid level detection component according to claim 1, characterized in that, The throttling holes at each of the two adjacent layers of the throttling baffles are staggered along the axial direction.

3. The liquid level detection component according to claim 2, characterized in that, The tube body is provided with 10 layers of throttling baffles at intervals inside.

4. The liquid level detection component according to claim 3, characterized in that, The throttling orifices at the multi-layered throttling baffle are arranged spirally along the axial direction.

5. The liquid level detection component according to claim 1, characterized in that, The diameter of the throttling orifice is 5-10 mm.

6. The liquid level detection component according to any one of claims 1-5, characterized in that, The pipe body is provided with a bushing inside, and the bushing extends out of the pipe body at both ends along the axial direction and is provided with flanges. The two flanges overlap the first flange and the second flange respectively; each layer of the throttling baffle is connected to the inner wall of the bushing.

7. The liquid level detection component according to claim 1, characterized in that, The flange joint includes a third flange and a connector connected to the third flange; the detection element is located inside the connector and along the axial direction of the connector, and the detection element does not extend outside the connector; the corrosion-resistant diaphragm is attached to the end of the detection element away from the third flange.

8. The liquid level detection component according to claim 7, characterized in that, The corrosion-resistant diaphragm extends to the end wall of the joint from the edge corresponding to the detection element. A sealing ring is provided between the flange joint and the first flange, and the sealing ring is pressed against the edge of the corrosion-resistant diaphragm corresponding to the detection element.

9. The liquid level detection component according to claim 8, characterized in that, The sealing ring has multiple fixing rings spaced apart along its circumferential edge, and the second flange is connected to the third flange by fasteners passing through the fixing rings.

10. A chemical liquid storage system, characterized in that, It includes a pressure vessel and the liquid level detection assembly according to any one of claims 1-9; along the height direction of the pressure vessel, a first connection port is provided at the bottom of the pressure vessel, and a second connection port is provided at the top of the pressure vessel; two first flanges are respectively flange-connected to the first connection port and the second connection port.

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