Testing device for electron beam detector

Abstract

The embodiment of the utility model provides a testing device for an electron beam detector, which comprises a supporting seat, a laser, an optical module and at least one position adjusting part, and is characterized in that the laser is arranged on the supporting seat and is provided with a transmitting end, and the laser is used for transmitting laser through the transmitting end; the optical module is arranged on the supporting seat and located on one side of the transmitting end of the laser. The fixing module is arranged on the supporting seat and located on the side, away from the laser, of the optical module and used for fixing the detector. Each position adjusting part comprises a sliding seat and a sliding block, the sliding seat is connected to the supporting seat, and the sliding block is movably arranged relative to the sliding seat and is connected with one of the laser, the optical module and the fixing module, so that at least one of the laser, the optical module and the fixing module can move relative to the supporting seat. The position adjusting part is simple in structure, the test process can be simplified, and the performance of the detector can be accurately tested.

Description

Technical Field

[0001] This application relates to the field of testing equipment technology, and in particular to a testing device for an electron beam detector. Background Technology

[0002] With the development of the semiconductor industry, electron beam equipment has developed rapidly, and the requirements for detectors are becoming increasingly stringent. In order to verify the good performance of the detectors before they are put into operation, signal tests are performed on the detectors. The existing test devices have relatively complex structures. Utility Model Content

[0003] This application provides a testing device for electron beam detectors, which aims to simplify structural design and testing process, and improve testing accuracy.

[0004] An embodiment of the first aspect of this application provides a testing apparatus for an electron beam detector, comprising: a support base, a laser, an optical module, and at least one position adjustment unit. The laser is disposed on the support base and has an emitting end, and the laser is used to emit laser light through the emitting end. The optical module is disposed on the support base and located on the side of the emitting end of the laser. A fixing module is disposed on the support base and located on the side of the optical module opposite to the laser, and the fixing module is used to fix the detector. Each position adjustment unit includes a slide and a slider. The slide is connected to the support base, and the slider is movably disposed relative to the slide and connected to one of the laser, the optical module, and the fixing module, so that at least one of the laser, the optical module, and the fixing module is movable relative to the support base.

[0005] According to the embodiments of this application, the fixing module and any one of the lasers are interconnected through two or more position adjustment parts and support bases. The sliders of the two or more position adjustment parts move in different directions, so that the fixing module and any one of the lasers can move relative to the support base in two or more directions.

[0006] According to the embodiments of this application, the fixing module is interconnected with each other through two or more position adjustment parts and support bases, the laser and the optical module are interconnected with each other through one position adjustment part and support base, and the slider connected to the position adjustment part of the laser and the slider connected to the position adjustment part of the optical module move in different directions.

[0007] According to the embodiments of this application, the fixing module is connected to the support base through three position adjustment parts, so that the fixing module is movable along the first direction, the second direction and the third direction, the laser is movable along the first direction, the optical module is movable along the second direction, the first direction, the second direction and the third direction intersect each other, and the first direction and the second direction are parallel to the support surface of the support base, and the third direction is perpendicular to the support surface.

[0008] According to the embodiments of this application, two or more position adjustment parts are connected to each other by a first adapter plate and a second adapter plate, the first adapter plate is connected to one of the position adjustment parts, and the second adapter plate is connected to the other position adjustment part.

[0009] According to an embodiment of this application, the fixing module is connected to the support base via three position adjustment parts, including a vertical adjustment part, a first adjustment part, and a second adjustment part. The fixing module is connected to the vertical adjustment part, which drives the fixing module to move along a third direction. The vertical adjustment part is connected to the second adjustment part, which drives the vertical adjustment part to move along one of a first direction and a second direction. The second adjustment part is connected to the first adjustment part, which drives the second adjustment part to move along the other of the first direction and the second direction.

[0010] According to an embodiment of this application, the slider of the vertical adjustment part is disposed on the side of the slide of the vertical adjustment part facing the transmitter end, and a reinforcing part is connected to the side of the slide of the vertical adjustment part away from the transmitter end. The reinforcing part is connected between the slide of the vertical adjustment part and the slider of the second adjustment part.

[0011] According to an embodiment of this application, the optical module includes an attenuator module and a light homogenizer module arranged sequentially in the direction away from the emitting end, and the attenuator module and the light homogenizer module are connected to a slider of the same position adjustment part.

[0012] According to an embodiment of this application, the slide block is provided with a rack, and the slider is provided with an adjustment component. The adjustment component includes a gear and an adjustment knob connected to the gear. The gear and the rack mesh with each other, and the adjustment knob is used to drive the gear to rotate so that the slider moves on the slide block along the extension direction of the rack.

[0013] According to an embodiment of this application, the adjustment component further includes a locking member connected to the slider. The locking member has a locking end and is movable in a direction toward or away from the slide block, such that the locking end abuts against the slide block or the locking end is spaced apart from the slide block. The locking member is configured such that the locking end abuts against the slide block and the locking end locks the slider.

[0014] In this embodiment, the optical module is used for optical adjustment of the laser, and the fixing module is used to fix the detector. The laser emitted from the laser's emitting end is adjusted by the optical module and then projected onto the detector fixed by the fixing module. The testing device can be used to perform laser optical testing on the detector. The testing device includes at least one position adjustment unit. Each position adjustment unit includes a slide block and a slider. The slider is slidably connected to the slide block, and one of the laser, optical module, and fixing module connected to the slider is connected to the slider, so that one of the laser, optical module, and fixing module connected to the slider is movable. The position adjustment unit has a simple structure, which helps to simplify the testing process, facilitates accurate performance testing of the detector, reduces the impact on detector signal testing, and makes the test results more realistic and reliable. When multiple position adjustment units are included, each position adjustment unit has the same structure, which helps to simplify the structure of the testing device and save costs. Attached Figure Description

[0015] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings, wherein the same or similar reference numerals denote the same or similar features.

[0016] Figure 1 This is a schematic diagram of the structure of a testing device provided in an embodiment of this application;

[0017] Figure 2 This is a schematic diagram of the structure of a position adjustment part provided in an embodiment of this application;

[0018] Figure 3 This is a schematic diagram of the structure of a fixing module and a position adjustment part provided in an embodiment of this application;

[0019] Figure 4 This is a schematic diagram of another fixing module and position adjustment part provided in the embodiments of this application;

[0020] Figure 5 This is a schematic diagram of a laser and a position adjustment unit provided in an embodiment of this application.

[0021] Explanation of reference numerals in the attached drawings: 10 Detector; 100 Support base; 101 Support surface; 102 Mounting surface; 200 Laser; 201 Emitter; 300 Optical module; 310 Attenuator module; 311 First support rod; 320 Beam leveler module; 321 Second support rod; 400 Fixing module; 500 Position adjustment part; 501 Vertical adjustment part; 502 First adjustment part; 503 Second adjustment part; 510 Slide; 520 Slider; 530 Rack; 540 Slide rail; 550 Adjustment knob; 560 Rotating shaft; 570 Locking element; 571 Locking end; 610 First adapter plate; 620 Second adapter plate; 700 Reinforcing part; 800 Handle; 900 Machine base; Y, Second direction; Z, Third direction. Detailed Implementation

[0022] The features and exemplary embodiments of various aspects of this application will now be described in detail. Numerous specific details are set forth in the following detailed description to provide a comprehensive understanding of this application. However, it will be apparent to those skilled in the art that this application can be implemented without requiring some of these specific details. The following description of embodiments is merely intended to provide a better understanding of this application by illustrating examples. In the accompanying drawings and the following description, at least some well-known structures and techniques are not shown to avoid unnecessarily obscuring the application; and, for clarity, the dimensions of some structures may be exaggerated. Furthermore, the features, structures, or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0023] In the description of this application, it should be noted that, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," etc., indicating orientation or positional relationships are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] The directional terms appearing in the following description refer to the directions shown in the figures and are not intended to limit the specific structure of the embodiments of this application. It should also be noted in the description of this application that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0025] like Figure 1 and Figure 2 As shown in the embodiment of this application, a testing device for an electron beam detector 10 is proposed, comprising: a support base 100, a laser 200, an optical module 300, and at least one position adjustment unit 500. The laser 200 is disposed on the support base 100 and has an emitting end 201, which is used to emit laser light through the emitting end 201. The optical module 300 is disposed on the support base 100 and located on one side of the emitting end 201 of the laser 200. A fixing module 400 is disposed on the support base 100. The optical module 300 is located on the side opposite to the laser 200, and the fixed module 400 uses the fixed detector 10; each position adjustment part 500 includes a slide 510 and a slider 520. The slide 510 is connected to the support base 100, and the slider 520 is movably disposed relative to the slide 510 and connected to one of the laser 200, the optical module 300 and the fixed module 400, so that at least one of the laser 200, the optical module 300 and the fixed module 400 is movable relative to the support base 100.

[0026] In this embodiment, the optical module 300 is used for optical adjustment of the laser, and the fixing module 400 is used for fixing the detector 10. The laser emitted from the emitting end 201 of the laser 200 is adjusted by the optical module 300 and then projected onto the detector 10 fixed by the fixing module 400. The testing device can be used to perform laser optical testing on the detector 10. The testing device includes at least one position adjustment part 500. Each position adjustment part 500 includes a slide 510 and a slider 520. The slider 520 is slidably connected to the slide 510 in a sliding direction a. At least one of the laser 200, the optical module 300, and the fixing module 400 is connected to the slider 520, so that at least one of the laser 200, the optical module 300, and the fixing module 400 connected to the slider 520 is movable. When the laser 200 is connected to the support base 100 via the position adjustment unit 500, the laser 200 can move relative to the fixed module 400 and the optical module 300 to adjust the relative position between the laser beam and the fixed module 400 and the optical module 300, thereby enabling laser optical testing at different positions of the detector 10. When the optical module 300 is connected to the support base 100 via the position adjustment unit 500, the optical module 300 can be moved relative to the fixed module 400 and the laser 200 to perform optical adjustment of the laser and improve the laser testing effect. When the fixed module 400 is connected to the support base 100 via the position adjustment unit 500, the fixed module 400 can move relative to the laser 200 and the optical module 300 to direct the laser beam to different positions of the detector 10, or to adjust the distance between the fixed module 400 and the laser 200 and the optical module 300. The position adjustment unit 500 has a simple structure, which helps to simplify the test process, facilitates accurate performance testing of the detector 10, reduces the impact on the signal testing of the detector 10, and makes the test results more realistic and reliable.

[0027] Optional, such as Figure 1 and Figure 2 As shown, the testing device includes two or more position adjustment units 500. At least two of the laser 200, optical module 300, and fixing module 400 are respectively connected to sliders 520 of the two or more position adjustment units 500, so that at least two of the laser 200, optical module 300, and fixing module 400 are movably arranged relative to the support base 100. The two position adjustment units 500 have identical structures, which helps to simplify the structure of the testing device and save costs.

[0028] like Figure 1 and Figure 3As shown, in some optional embodiments, the fixing module 400 is interconnected with the support base 100 through two or more position adjustment parts 500, and the sliders 520 of the two or more position adjustment parts 500 move in different directions, so that the fixing module 400 can move relative to the support base 100 in two or more directions.

[0029] In these optional embodiments, the fixing module 400 is interconnected with the support base 100 through two or more position adjustment parts 500. Each position adjustment part 500 includes a slider 520 and a slide base 510, and the slider 520 of each position adjustment part 500 moves in different directions, thereby enabling the fixing module 400 to move relative to the support base 100 in two or more directions. In other words, the fixing module 400 can move relative to the laser 200 in two or more directions, so that the laser 200 can be projected to more positions of the detector 10 for laser optical testing.

[0030] like Figure 1 and Figure 4 As shown, in some optional embodiments, the laser 200 is interconnected with the support base 100 via two or more position adjustment parts 500, and the sliders 520 of the two or more position adjustment parts 500 move in different directions, so that the laser 200 can move relative to the support base 100 in two or more directions.

[0031] In these optional embodiments, the laser 200 is interconnected with the support base 100 via two or more position adjustment parts 500. Each position adjustment part 500 includes a slider 520 and a slide base 510, and the slider 520 of each position adjustment part 500 moves in different directions, thereby enabling the laser 200 to move relative to the support base 100 in two or more directions. In other words, the laser 200 can move relative to the fixed module 400 in two or more directions, allowing the laser 200 to reach more positions on the detector 10 for laser optical testing.

[0032] like Figure 1 , Figure 3 and Figure 5 As shown, in some optional embodiments, the fixing module 400 is interconnected with the support base 100 through two or more position adjustment parts 500, the laser 200 and the optical module 300 are interconnected with the support base 100 through one position adjustment part 500 and the support base 100 respectively, and the slider 520 connected to the position adjustment part 500 of the laser 200 and the slider 520 connected to the position adjustment part 500 of the optical module 300 have different moving directions.

[0033] In these optional embodiments, the testing apparatus includes four or more position adjustment units 500, and the fixing module 400 is interconnected with the support base 100 through two or more position adjustment units 500, enabling the fixing module 400 to move relative to the support base 100 in two or more directions. The laser 200 and the optical module 300 are interconnected with the support base 100 through one position adjustment unit 500, and the slider 520 connected to the position adjustment unit 500 of the laser 200 moves in a different direction than the slider 520 connected to the position adjustment unit 500 of the optical module 300, so that the position adjustment direction between the laser 200 and the fixing module 400 is different from the position adjustment direction between the optical module 300 and the fixing module 400, facilitating the fulfillment of more testing requirements.

[0034] Optional, such as Figure 1 As shown, the slider 520 connected to the optical module 300 is movable in the direction of approaching and moving away from the laser 200 and the fixture, so that the optical module 300 can be moved in the direction of approaching and moving away from the laser 200 and the fixture.

[0035] like Figure 1 , Figure 3 and Figure 5 As shown, in some optional embodiments, the fixing module 400 is connected to the support base 100 through three position adjustment parts 500, so that the fixing module 400 is movable along the first direction, the second direction Y and the third direction Z, the laser 200 is movable along the first direction, and the optical module 300 is movable along the second direction Y. The first direction, the second direction Y and the third direction Z intersect each other, and the first direction and the second direction Y are parallel to the support surface 101 of the support base 100, and the third direction Z is perpendicular to the support surface 101.

[0036] In these optional embodiments, the fixing module 400 is connected to the support base 100 via three position adjustment parts 500. The sliders 520 of the three position adjustment parts 500 are movable along a first direction, a second direction Y, and a third direction Z, respectively, so that the fixing module 400 is movable along these directions. The fixing module 400 is used to fix the detector 10. Its movable arrangement along the first direction Y and the third direction Z allows adjustment of the laser irradiation at different positions of the detector 10, and also allows adjustment of the distance between the fixing module 400 and the optical module 300 to adjust the effect of the laser beam on the detector 10. Furthermore, the combined volume of the fixing module 400 and the detector 10 is smaller than the volume of the laser 200, and the connection of the fixing module 400 to the support base 100 via three position adjustment parts 500 facilitates adjustment.

[0037] The laser 200 is connected to the support base 100 via a position adjustment part 500, and the slider 520 of the position adjustment part 500 is movable in a first direction to drive the laser 200 to be movable in the first direction.

[0038] The optical module 300 is connected to the support base 100 via a position adjustment part 500, and the slider 520 of this position adjustment part 500 is movable along the second direction Y to drive the optical module 300 to be movable along the second direction Y. The first direction and the second direction Y are parallel to the support surface 101 of the support base 100, and the third direction Z is perpendicular to the support surface 101. When the support surface 101 is a horizontal plane, the first direction and the second direction Y are horizontal directions, and the third direction Z is a vertical direction. Optionally, the second direction Y is the direction closer to and farther away from the laser 200 and the fixture.

[0039] Optionally, the first direction, the second direction Y, and the third direction Z are mutually perpendicular.

[0040] like Figure 1 , Figure 3 and Figure 4 As shown, in some optional embodiments, two or more position adjustment parts 500 are connected to each other by a first adapter plate 610 and a second adapter plate 620, wherein the first adapter plate 610 is connected to one of the position adjustment parts 500 and the second adapter plate 620 is connected to the other position adjustment part 500.

[0041] In these optional embodiments, one position adjustment part 500 is connected to the first adapter plate 610, and the other position adjustment part 500 is connected to the second adapter plate 620. The first adapter plate 610 and the second adapter plate 620 are then interconnected. The structural design of the first adapter plate 610 is adapted to one of the position adjustment parts 500, and the structural design of the second adapter plate 620 is adapted to the other position adjustment part 500. This simplifies the structural design, requiring only the structural design of the first adapter plate 610 and the second adapter plate 620, without the need to design the structure of two adjacent position adjustment parts 500. This contributes to the uniformity of the structure among the position adjustment parts 500. Optionally, the structures of the position adjustment parts 500 are identical.

[0042] like Figure 3As shown, in some optional embodiments, the fixing module 400 is connected to the support base 100 via three position adjustment parts 500. The three position adjustment parts 500 include a vertical adjustment part 501, a first adjustment part 502, and a second adjustment part 503. The fixing module 400 is connected to the vertical adjustment part 501, which drives the fixing module 400 to move along a third direction Z. The vertical adjustment part 501 is connected to the second adjustment part 503, which drives the vertical adjustment part 501 to move along one of a first direction and a second direction Y. The second adjustment part 503 is connected to the first adjustment part 502, which drives the second adjustment part 503 to move along the other of the first direction and the second direction Y.

[0043] In these optional embodiments, the vertical adjustment unit 501, the first adjustment unit 502, and the second adjustment unit 503 all include a slider 520 and a slide block 510, with the slider 520 slidably connected to the slide block 510. The fixing module 400 is connected to the slider 520 of the vertical adjustment unit 501, and the slider 520 of the vertical adjustment unit 501 is movably configured along a third direction Z, so that the vertical adjustment unit 501 can drive the fixing module 400 to move along the third direction Z. The slide block 510 of the vertical adjustment unit 501 is connected to the slider 520 of the second adjustment unit 503, and the slider 520 of the second adjustment unit 503 is movably configured along one of a first direction and a second direction Y, so that the second adjustment unit 503 can drive the vertical adjustment unit 501 to move along one of the first direction and the second direction Y, thereby causing the fixing module 400 to move along one of the first direction and the second direction Y via the vertical adjustment unit 501. The slide 510 of the first adjustment part 502 is connected to the support base 100, and the slide 510 of the second adjustment part 503 is connected to the slider 520 of the first adjustment part 502. The slider 520 of the first adjustment part 502 is movable along the other of the first direction and the second direction Y, so that the first adjustment part 502 can drive the second adjustment part 503 to move along the other of the first direction and the second direction Y. Then, the second adjustment part 503 and the vertical adjustment part 501 drive the fixing module 400 to move along the other of the first direction and the second direction Y, so that the fixing module 400 is movable along the first direction, the second direction Y and the third direction Z.

[0044] Optional, such as Figure 3 As shown, the third direction Z is the vertical direction. The slider 520 of the vertical adjustment part 501 is connected to the fixing module 400. The slider 520 of the vertical adjustment part 501 is movable in the vertical direction to raise and lower the fixing module 400. Since raising and lowering the fixing module 400 is done to overcome gravity, the slider 520 of the vertical adjustment part 501 is connected to the fixing module 400, which helps to reduce the difficulty of operation.

[0045] Optional, such as Figure 3 As shown, the slider 520 of the first adjustment unit 502 is movable along the first direction, and the slider 520 of the second adjustment unit 503 is movable along the second direction Y.

[0046] Optional, such as Figure 3 As shown, the first adjustment part 502 and the second adjustment part 503 are connected to each other through a connecting component. The connecting component includes a first connecting plate 610 and a second connecting plate 620 that are connected to each other. The first connecting plate 610 is connected to the slide 510 of the second adjustment part 503, and the second connecting plate 620 is connected to the slider 520 of the first adjustment part 502.

[0047] like Figure 1 and Figure 3 As shown, in some optional embodiments, the slider 520 of the vertical adjustment part 501 is disposed on the side of the slide 510 facing the transmitter 201, and a reinforcing part 700 is connected to the side of the slide 510 of the vertical adjustment part 501 away from the transmitter 201. The reinforcing part 700 is connected between the slide 510 of the vertical adjustment part 501 and the slider 520 of the second adjustment part 503.

[0048] In these optional embodiments, the slider 520 of the vertical adjustment section 501 is disposed on the side of the slide block 510 facing the transmitter 201. The fixing module 400 is used to fix the detector 10 and is connected to the slider 520 of the vertical adjustment section 501, reducing the interference of the slide block 510 of the vertical adjustment section 501 on the detector 10 receiving laser tests. The reinforcing section 700 is disposed on the side of the slide block 510 of the vertical adjustment section 501 away from the transmitter 201, reducing the interference of the reinforcing section 700 on the detector 10 receiving laser tests. The slide block 510 extends in the vertical direction so that the slider 520 can move in the third direction Z. To enhance the connection strength between the slider 520 of the vertical adjustment section 501 and the second adjustment section 503, the reinforcing section 700 is provided and connected between the slide block 510 of the vertical adjustment section 501 and the slider 520 of the second adjustment section 503.

[0049] Optional, such as Figure 3 As shown, the slide 510 of the vertical adjustment part 501 extends along the first direction, and the reinforcing part 700 is disposed on one side of the slide 510 along the second direction Y and extends along the second direction Y. The orthographic projection of the slide 510 of the vertical adjustment part 501 and the reinforcing part 700 on the support base 100 forms a "T" shape, which is beneficial to enhance the supporting effect of the reinforcing part 700.

[0050] like Figure 1As shown, in some optional embodiments, the optical module 300 includes an attenuator module 310 and a light homogenizer module 320 arranged sequentially in a direction away from the emitting end 201, and the attenuator module 310 and the light homogenizer module 320 are connected to the slider 520 of the same position adjustment part 500.

[0051] In these optional embodiments, the attenuator module 310 is used to reduce the intensity of the laser and reduce damage to the detector 10 from the laser 200. The beam homogenizer module is used to evenly distribute the light emitted by the laser 200, reduce light spots and shadows, and make the light softer and more uniform. The attenuator module 310 and the beam homogenizer module 320 are connected to the slider 520 of the same position adjustment unit 500, so that the slider 520 can drive the attenuator module 310 and the beam homogenizer module 320 to move synchronously, and keep the distance between the attenuator module 310 and the beam homogenizer module 320 equal during the movement. This reduces the interference to the test results caused by the change in distance between the attenuator module 310 and the beam homogenizer module 320 during the movement, and improves the test efficiency.

[0052] Optional, such as Figure 1 As shown, the attenuator module 310 is connected to the slider 520 of the position adjustment unit 500 via a first support rod 311, and the homogenizing module is connected to the slider 520 of the position adjustment unit 500 via a second support rod 321. The first support rod 311 and the second support rod 321 extend vertically to increase the height of the attenuator module 310 and the homogenizing module, ensuring that the transmitter 201 is at the same height as the attenuator module 310 and the homogenizing module. The attenuator module 310 is detachably connected to the first support rod 311, facilitating adjustment of the number of attenuators in the attenuator module 310 or replacement with attenuators of more suitable parameters. The homogenizing module is detachably connected to the second support rod 321, facilitating adjustment of the number of homogenizers in the homogenizing module or replacement with homogenizers of more suitable parameters.

[0053] like Figure 2 As shown, in some optional embodiments, the slide 510 is provided with a rack 530, and the slider 520 is provided with an adjustment assembly. The adjustment assembly includes a gear and an adjustment knob 550 connected to the gear. The gear and the rack 530 mesh with each other, and the adjustment knob 550 is used to drive the gear to rotate so that the slider 520 moves on the slide 510 along the extension direction of the rack 530.

[0054] In these optional embodiments, the adjusting component is fixedly connected to the slider 520 so that the adjusting component and the slider 520 move synchronously on the slide block 510. The adjusting component includes a gear and an adjusting knob 550 connected to the gear, and the gear meshes with a rack 530. The adjusting knob 550 is connected to the gear through a rotating shaft 560. The rotation of the adjusting knob 550 drives the gear to rotate through the rotating shaft 560, so that the gear moves along the extension direction of the rack 530, thereby driving the slider 520 to move along the extension direction of the rack 530, thereby realizing the adjustment of the position of the slider 520.

[0055] Optional, such as Figure 2 As shown, the slide block 510 is also provided with a slide rail 540, the extension direction of which is parallel to the extension direction of the rack 530. The slider 520 is movably connected to the slide rail 540 along the extension direction of the slide rail 540. The slide rail 540 can improve the accuracy of the slider 520's movement direction, thereby improving the accuracy of laser testing. Optionally, the slide rail 540 includes two slides, with the two sliders 520 located on both sides of the rack 530.

[0056] like Figure 2 As shown, in some optional embodiments, the adjustment assembly further includes a locking member 570 connected to the slider 520. The locking member 570 has a locking end 571 and is movably configured in a direction approaching or away from the slide block 510, such that the locking end 571 abuts against the slide block 510 or is spaced apart from the slide block 510. The locking member 570 is configured such that the locking end 571 abuts against the slide block 510 and locks the slider 520.

[0057] In these optional embodiments, the locking member 570 is fixedly connected to the slider 520 so that the locking member 570 and the slider 520 move synchronously on the slide block 510. The locking member 570 has a locking end 571 and is movably configured in the direction of approaching or moving away from the slide block 510. When the locking end 571 abuts against the slide block 510, friction is generated between the locking end 571 and the slide block 510 to fix the position of the slider 520 on the slide block 510. When the position of the slider 520 is adjusted, the slider 520 is fixed on the slide block 510 to fix the position of the laser 200, optical module 300, or fixed module 400, reducing the impact of the movement of the laser 200, optical module 300, or fixed module 400 on the test results. When the position of the slider 520 needs to be adjusted, the locking end 571 is spaced apart from the slide block 510, and the slider 520 can move relative to the slide block 510.

[0058] Optionally, the testing device also includes a machine base 900, a support base 100 having a support surface 101 and a mounting surface 102, the support base 100 being mounted on the machine base 900 via the mounting surface 102, the laser 200, the optical module 300 and the fixing module 400 being located on the support surface 101, the support surface 101 also being provided with a handle 800, the handle 800 being used to move the position of the support base 100 on the machine base 900.

[0059] Although this application has been described with reference to preferred embodiments, various modifications can be made thereto and components can be replaced with equivalents without departing from the scope of this application. In particular, the technical features mentioned in the various embodiments can be combined in any manner, provided there is no structural conflict. This application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A testing device for an electron beam detector, characterized in that, include: Support base; A laser, disposed on the support base and having an emitting end, is used to emit laser light through the emitting end; An optical module is disposed on the support base and located on one side of the emitting end of the laser; A fixing module is disposed on the support base and located on the side of the optical module opposite to the laser; the fixing module is used to fix the detector. At least one position adjustment unit, each of the position adjustment units including a slide and a slider, the slide being connected to the support base, the slider being movably disposed relative to the slide and connected to one of the laser, the optical module and the fixing module, so that at least one of the laser, the optical module and the fixing module is movable relative to the support base.

2. The testing apparatus according to claim 1, characterized in that, The fixing module and any one of the lasers are interconnected via two or more position adjustment parts and the support base. The sliders of the two or more position adjustment parts move in different directions, so that the fixing module and any one of the lasers can move relative to the support base in two or more directions.

3. The testing apparatus according to claim 2, characterized in that, The fixed module is interconnected with the support base through two or more of the position adjustment parts, the laser and the optical module are interconnected with the support base through one of the position adjustment parts, and the slider of the position adjustment part connected to the laser moves in a different direction than the slider of the position adjustment part connected to the optical module.

4. The testing apparatus according to claim 3, characterized in that, The fixing module is connected to the support base through three position adjustment parts, so that the fixing module is movable along the first direction, the second direction and the third direction. The laser is movable along the first direction and the optical module is movable along the second direction. The first direction, the second direction and the third direction intersect each other, and the first direction and the second direction are parallel to the support surface of the support base, while the third direction is perpendicular to the support surface.

5. The testing apparatus according to claim 4, characterized in that, The fixing module is connected to the support base via three position adjustment parts, including a vertical adjustment part, a first adjustment part, and a second adjustment part. The fixing module is connected to the vertical adjustment part, which drives the fixing module to move along the third direction. The vertical adjustment part is connected to the second adjustment part, which drives the vertical adjustment part to move along one of the first and second directions. The second adjustment part is connected to the first adjustment part, which drives the second adjustment part to move along the other of the first and second directions.

6. The testing apparatus according to claim 5, characterized in that, The slider of the vertical adjustment part is disposed on the side of the slide of the vertical adjustment part facing the transmitter end, and a reinforcing part is connected to the side of the slide of the vertical adjustment part away from the transmitter end. The reinforcing part is connected between the slide of the vertical adjustment part and the slider of the second adjustment part.

7. The testing apparatus according to claim 3, characterized in that, Two or more position adjustment parts are connected to each other by a first adapter plate and a second adapter plate, wherein the first adapter plate is connected to one of the position adjustment parts and the second adapter plate is connected to the other position adjustment part.

8. The testing apparatus according to claim 1, characterized in that, The optical module includes an attenuator module and a light homogenizer module arranged sequentially in a direction away from the emitting end, and the attenuator module and the light homogenizer module are connected to the slider of the same position adjustment part.

9. The testing apparatus according to claim 1, characterized in that, The slide block is provided with a rack, and the slider is provided with an adjustment component. The adjustment component includes a gear and an adjustment knob connected to the gear. The gear meshes with the rack, and the adjustment knob is used to drive the gear to rotate so that the slider moves on the slide block along the extension direction of the rack.

10. The testing apparatus according to claim 9, characterized in that, The adjustment assembly further includes a locking member connected to the slider. The locking member has a locking end and is movable in a direction toward or away from the slide block, such that the locking end abuts against the slide block or is spaced apart from the slide block. The locking member is configured such that the locking end abuts against the slide block and locks the slider.

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