Multi-station scanning probe microscope

Abstract

The utility model provides a multi-station scanning probe microscope, which comprises a workbench and a support frame, an optical microscope and a detection head corresponding to the optical microscope are arranged on the support frame, a positioning mechanism is arranged on the workbench, an electric cabinet, a positioning table and a sample seat are sequentially arranged at the upper end of the positioning mechanism, and a vacuum chuck is arranged in the positioning table. The sample seat comprises a rotating motor and a plurality of sample tables. The utility model has the beneficial effects that a plurality of stations are automatically switched to realize continuous scanning detection action, the tedious operation of taking and placing samples for multiple times during detection is reduced, the operation is more convenient, and the electric control box is arranged at the lower end of the positioning table to form an integrated equipment structure, so that the overall space of the equipment is reduced, and the use of a detection environment is more facilitated.

Description

Technical Field

[0001] This utility model mainly relates to the field of microscope technology, specifically to a multi-station scanning probe microscope. Background Technology

[0002] A scanning probe microscope system generally includes a probe, a controller, and a computer. The working principle of a scanning probe microscope is to use a probe to scan and image the sample point by point for detection. When in use, the sample is placed on the detection stage, and the detection area on the sample surface needs to be selected by moving the atomic force detection head in the left-right direction or moving the detection stage in the front-back direction.

[0003] During the operation of specific embodiments, the inventors discovered the following defects:

[0004] Existing scanning probe microscopes typically have only one testing station. Since scanning, testing, and imaging require a certain processing time, after manually placing the sample on the testing stage, the operator must wait beside the equipment so that the sample can be removed immediately after testing and the next sample can be placed in. This method consumes a lot of the operator's time, and the increased sample handling time also reduces testing efficiency.

[0005] It should be noted that the above content falls within the scope of the inventor's technical knowledge. Due to the vast and complex nature of the technical content in this field, the above content of this application does not necessarily constitute prior art. Utility Model Content

[0006] 1. The technical problem to be solved by the utility model:

[0007] This invention provides a multi-station scanning probe microscope to solve the technical problems existing in the background art.

[0008] 2. Technical Solution:

[0009] To achieve the above objectives, the technical solution provided by this utility model is as follows: a multi-station scanning probe microscope, including a worktable and a support frame, wherein an optical microscope and a corresponding detection head are provided on the support frame, a positioning mechanism is provided on the worktable, and an electrical control box, a positioning stage and a sample holder are sequentially arranged on the upper end of the positioning mechanism, a vacuum suction cup is provided inside the positioning stage, and the sample holder includes a rotary motor and multiple sample stages.

[0010] Furthermore, the positioning stage is located at the lower end of the sample stage, and the upper end of the positioning stage is provided with a magnetic suction ring that matches the sample stage.

[0011] Furthermore, the magnetic suction ring is embedded in the vacuum suction cup, and the magnetic suction ring is provided with multiple magnetic columns.

[0012] Furthermore, the sample holder also includes a rotating stage, with multiple sample stages embedded in the rotating stage. The rotating stage is provided with a positioning bearing, and the drive end of the rotating motor is connected to the positioning bearing. The rotating stage is provided with multiple positioning holes corresponding to the magnetic columns.

[0013] Furthermore, multiple sample stages are arranged at equal intervals with the positioning bearing as the center, and multiple vacuum suction rails are provided on the sample stages.

[0014] Furthermore, the vacuum suction cup has multiple vacuum chambers, which are arranged corresponding to the vacuum suction rail.

[0015] Furthermore, the positioning mechanism includes an X-axis moving module and a Y-axis moving module, with the upper end of the X-axis moving module fixedly connected to the electrical control box.

[0016] Furthermore, the support frame includes two guide columns fixedly connected to the worktable, a support back plate is mounted on the two guide columns, a positioning column is provided on the support back plate, and the optical microscope is movably connected to the positioning column through a connector.

[0017] Furthermore, the detection head is located below the optical microscope, and the rear end of the detection head is fixedly connected to the support back plate.

[0018] 3. Beneficial effects:

[0019] Compared with the prior art, the technical solution provided by this utility model has the following advantages:

[0020] By using a rotatable multi-station sample stage in conjunction with a positioning stage with vacuum adsorption function, the system can automatically switch between multiple stations to achieve continuous scanning and detection. This reduces the tedious operation of repeatedly picking up and putting down samples during detection, making it more convenient. Furthermore, by placing the electrical control box at the bottom of the positioning stage, an integrated equipment structure is formed, reducing the overall space of the equipment and making it more suitable for use in the detection environment.

[0021] It should be noted that the structures not described in this utility model are the same as or can be implemented using existing technology, and will not be elaborated here, as they do not involve the design points and improvement directions of this utility model. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the overall structure of this utility model from another angle;

[0024] Figure 3 It is a schematic diagram of the local structure of the utility model;

[0025] Figure 4 This is a partial structural diagram of the present invention from another angle.

[0026] Figure label:

[0027] 1. Worktable; 2. Support frame; 21. Guide column; 22. Support back plate; 23. Positioning column; 3. Optical microscope; 4. Detection head; 5. Positioning mechanism; 51. X-axis moving module; 52. Y-axis moving module; 6. Electrical control box; 7. Positioning stage; 71. Vacuum chuck; 711. Vacuum chamber; 72. Magnetic ring; 73. Magnetic column; 8. Sample holder; 81. Rotary motor; 82. Sample stage; 821. Vacuum suction rail; 83. Rotary stage; 831. Positioning bearing; 832. Positioning hole. Detailed Implementation

[0028] To facilitate understanding of this utility model, a more comprehensive description of the utility model will be given below with reference to the accompanying drawings, which show several embodiments of the utility model. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the utility model will be more thorough and complete.

[0029] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "page", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0031] In this utility model, unless otherwise explicitly specified and limited, the terms "installed," "connected," "linked," "fixed," "provided with," and "located in" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. Example

[0032] See attached document Figure 1-4 A multi-station scanning probe microscope includes a stage 1 and a support frame 2. The support frame 2 is equipped with an optical microscope 3 and a corresponding detection head 4. The stage 1 is equipped with a positioning mechanism 5. The upper end of the positioning mechanism 5 is equipped with an electrical control box 6, a positioning stage 7 and a sample holder 8. The positioning stage 7 is equipped with a vacuum suction cup 71. The sample holder 8 includes a rotary motor 81 and multiple sample stages 82.

[0033] The positioning stage 7 is located at the lower end of the sample stage 82. The upper end of the positioning stage 7 is equipped with a magnetic ring 72 that matches the sample stage 82. The magnetic ring 72 is embedded in the vacuum chuck 71. The magnetic ring 72 is equipped with multiple magnetic columns 73. The lower end of the magnetic columns 73 is connected to the power supply via a cable. The magnetic ring 72 is placed between the positioning stage 7 and the sample holder 8. The rotating stage 83 is made of magnetically conductive material. When the sample stage 82 rotates to the upper end of the vacuum chuck 71 via the rotating stage 83, the magnetic columns 73 are powered on and generate magnetic force to drive the magnetic ring 73 to be attracted upward to the lower end of the rotating stage 83. The magnetic columns 73 are inserted into the positioning hole 832 for positioning. The vacuum chuck 71 and the sample stage 82 are connected by the magnetic ring 73 to achieve a sealed connection.

[0034] The sample holder 8 also includes a rotary stage 83, with multiple sample stages 82 embedded in the rotary stage 83. The rotary stage 83 is provided with a positioning bearing 831, and the drive end of the rotary motor 81 is connected to the positioning bearing 831. The rotary stage 83 has multiple positioning holes 832 corresponding to the magnetic columns 73. The multiple sample stages 82 are arranged at equal distances with the positioning bearing 831 as the center. The sample stages 82 are provided with multiple vacuum suction rails 821. There are at least three sample stages 82, which have three scanning stations and are arranged around the rotary stage 83. The rotary stage 83 can be driven by the rotary motor 81 at its lower end to rotate intermittently and dock with the positioning stage 7. Samples are placed on the sample stages 82, and three samples can be placed at a time. During detection, after docking with the positioning stage 7 at the lower end, the samples are vacuum adsorbed and positioned before scanning.

[0035] The positioning mechanism 5 includes an X-axis moving module 51 and a Y-axis moving module 52. The upper end of the X-axis moving module 51 is fixedly connected to the electrical control box 6, which is located at the lower end of the positioning stage 7, forming an integrated equipment structure. This saves laboratory testing space and makes it more convenient to use. After the sample is adsorbed and positioned, the positioning mechanism 5 automatically moves in the X and Y axes, driving the electrical control box 6, the positioning stage 7, and the sample stage 8 at its upper end to move simultaneously to complete the overall scanning and detection of the sample. After the sample at the first station is scanned, detected, and imaged, the rotary motor 81 is started to rotate the second sample stage 82 to the detection station, realizing the operation of switching to the second station. The above operation steps are repeated to achieve scanning of three samples at once, saving loading time and improving detection efficiency.

[0036] The support frame 2 includes two guide columns 21 fixedly connected to the worktable 1. A support back plate 22 is mounted on the two guide columns 21. The support back plate 22 is fitted onto the guide columns 21 on both sides and locked with screws. The guide columns 21 have multiple holes, and the height of the support back plate 22 can be adjusted according to the detection requirements. The support back plate 22 is provided with a positioning column 23. The optical microscope 3 is movably connected to the positioning column 23 through a connector. The optical microscope 3 is positioned directly above the positioning stage 7 and is fixedly fastened to the positioning column 23 through the connector. The installation height can also be adjusted according to the detection requirements. In another embodiment, the optical microscope 3 can also be installed on the side guide column 21. The detachable structure is more flexible to ensure the detection imaging effect.

[0037] In this embodiment, the vacuum suction cup 71 provided in the positioning stage 7 has multiple vacuum chambers 711, which correspond to the vacuum suction rails 821 on the sample stage 82. In use, the multiple vacuum chambers 711 can be controlled independently. According to the detection requirements, multiple vacuum chambers 711 can be used for simultaneous adsorption or a single vacuum chamber 711 can be used for independent adsorption. There is a rotation clearance space between the upper end of the positioning stage 7 and the sample stage 82. When vacuum adsorption is turned on, this clearance space can be automatically adsorbed upward by the magnetic suction ring 72 and magnetic column 73 embedded in the positioning stage 7, and positioned with the rotating seat 81. After adsorption, the vacuum chamber 711 is sealed during detection.

[0038] In this embodiment, a sample stage that can rotate intermittently is used to achieve switching operations between multiple scanning stations. In the early stage of scanning and detection, at least three samples can be loaded at one time, which efficiently saves the sample loading and unloading time and improves the scanning and detection efficiency.

[0039] In summary, the multi-station scanning probe microscope provided by this utility model uses a rotatable multi-station sample stage in conjunction with a positioning stage with vacuum adsorption function, which reduces the tedious operation of repeatedly picking up and putting down samples during detection, making it more convenient. Furthermore, the electrical control box is set at the lower end of the positioning stage, forming an integrated equipment structure, which reduces the overall space of the equipment and is more conducive to the use of the detection environment.

[0040] The above-described embodiments are merely illustrative of certain implementations of this utility model, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A multi-station scanning probe microscope, comprising a stage (1) and a support frame (2), characterized in that: The support frame (2) is equipped with an optical microscope (3) and a corresponding detection head (4). The worktable (1) is equipped with a positioning mechanism (5). The upper end of the positioning mechanism (5) is equipped with an electrical control box (6), a positioning stage (7) and a sample holder (8). The positioning stage (7) is equipped with a vacuum suction cup (71). The sample holder (8) includes a rotary motor (81) and multiple sample stages (82).

2. The multi-station scanning probe microscope according to claim 1, characterized in that: The positioning stage (7) is located at the lower end of the sample stage (82), and the upper end of the positioning stage (7) is provided with a magnetic suction ring (72) that matches the sample stage (82).

3. A multi-station scanning probe microscope according to claim 2, characterized in that: The magnetic ring (72) is embedded in the vacuum suction cup (71), and the magnetic ring (72) is provided with multiple magnetic columns (73).

4. A multi-station scanning probe microscope according to claim 3, characterized in that: The sample holder (8) also includes a rotating stage (83), and multiple sample stages (82) are embedded in the rotating stage (83). The rotating stage (83) is provided with a positioning bearing (831), and the driving end of the rotating motor (81) is connected to the positioning bearing (831). The rotating stage (83) is provided with multiple positioning holes (832) corresponding to the magnetic column (73).

5. A multi-station scanning probe microscope according to claim 4, characterized in that: Multiple sample stages (82) are arranged at equal distances with the positioning bearing (831) as the center, and multiple vacuum suction rails (821) are provided on the sample stages (82).

6. A multi-station scanning probe microscope according to claim 5, characterized in that: The vacuum suction cup (71) has multiple vacuum chambers (711), and the multiple vacuum chambers (711) are arranged corresponding to the vacuum suction rail (821).

7. A multi-station scanning probe microscope according to claim 1, characterized in that: The positioning mechanism (5) includes an X-axis moving module (51) and a Y-axis moving module (52), with the upper end of the X-axis moving module (51) fixedly connected to the electrical control box (6).

8. A multi-station scanning probe microscope according to claim 1, characterized in that: The support frame (2) includes two guide columns (21) fixedly connected to the worktable (1), a support back plate (22) is mounted on the two guide columns (21), a positioning column (23) is mounted on the support back plate (22), and the optical microscope (3) is movably connected to the positioning column (23) through a connector.

9. A multi-station scanning probe microscope according to claim 8, characterized in that: The detection head (4) is located below the optical microscope (3), and the rear end of the detection head (4) is fixedly connected to the support back plate (22).

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