Probe station with heat dissipation assembly

Abstract

The utility model provides a probe station with a heat dissipation assembly. The probe station comprises a machine shell, a test board, a calibration assembly and the heat dissipation assembly. The housing encloses to form an accommodating space and is provided with a top surface and a bottom surface which are arranged back to back; the test board is accommodated in the accommodating space, is arranged adjacent to the bottom surface and is provided with a bearing surface for bearing a tested sample; the calibration assembly is arranged on the top surface of the shell, is opposite to the bearing surface of the test board and is used for acquiring image information of the tested sample; the heat dissipation assembly comprises a heat conduction assembly and a fan, one part of the heat conduction assembly is contained in the containing space and connected to the calibration assembly, the other part of the heat conduction assembly is located outside the machine shell, and the fan is located outside the machine shell and arranged opposite to the heat conduction assembly. And the fan is matched with the heat conduction assembly to conduct heat of the calibration assembly to the outside of the shell. When the probe station with the heat dissipation assembly is applied to testing in a high-temperature environment, imaging of the calibration assembly is clear.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a probe station with a heat dissipation component. Background Technology

[0002] Integrated circuit components on semiconductor devices require electrical characterization and measurement before packaging to determine if they conform to standards. Probe station testing equipment is widely used in the semiconductor testing field due to its advantages such as low cost, wide application, ease of operation, and stable and objective test results. During use, the probe station requires precise alignment of the test points on the sample under test with the probe tips. Typically, the calibration components in the probe station are used to acquire the positional information of the sample under test on the test station to assist in achieving precise alignment between the test points and the probe tips. In some cases, it is necessary to test the performance of the sample under test in a high-temperature environment to further understand its performance. However, when the probe station is used to test the parameters of the sample under test in a high-temperature environment, the test station needs to be heated. When the test station is heated, the heat is conducted to the calibration components, causing the temperature of the calibration components to rise, which can lead to image blurring and affect the accuracy of the calibration. Utility Model Content

[0003] The technical problem to be solved by the embodiments of this application is that when existing probe stations are used for testing in high-temperature environments, the calibration components in the probe station are prone to overheating, resulting in blurred images. In response, this application provides a probe station with a heat dissipation component, which enables the calibration components in the probe station to clearly image the sample under test in a high-temperature environment.

[0004] This application provides a probe station with a heat dissipation component, the probe station comprising:

[0005] A housing that encloses and forms a receiving space, the housing having a top surface and a bottom surface that are arranged opposite to each other;

[0006] A test stand, which is housed within the housing space, is disposed adjacent to the bottom surface, and has a bearing surface for bearing the sample to be tested;

[0007] A calibration component, disposed on the top surface of the housing, is positioned opposite to the bearing surface of the test stage and is used to acquire image information of the sample under test; and

[0008] A heat dissipation assembly includes a heat-conducting component and a fan. A portion of the heat-conducting component is housed in the housing space and connected to the calibration component, while another portion is located outside the housing. The fan is located outside the housing and is disposed opposite to the heat-conducting component. The fan cooperates with the heat-conducting component to conduct the heat of the calibration component to the outside of the housing.

[0009] This application provides a probe station with a heat dissipation assembly. The probe station includes a housing, a test stage, a calibration assembly, and a heat dissipation assembly. The housing has a top surface and a bottom surface opposite to each other. The test stage is disposed adjacent to the bottom surface, and the calibration assembly is disposed on the top surface of the housing. The housing can accommodate the test stage and support the calibration assembly. The test stage has a bearing surface that can bear the sample being tested. The calibration assembly is disposed opposite to the bearing surface of the test stage and can acquire image information of the sample being tested. The heat dissipation assembly includes a heat-conducting component. A portion of the heat-conducting component is housed in the accommodating space and connected to the calibration assembly, while another portion is located outside the housing, thereby conducting heat from the calibration assembly to the outside of the housing. The heat dissipation component includes a fan located outside the housing and opposite to the heat-conducting component. The fan enhances convective heat transfer between the heat-conducting component and the ambient air, thereby assisting in transferring heat from the calibration component to the outside of the housing to reduce its temperature. The heat dissipation component cools the calibration component, ensuring that when the probe station is used to test samples in high-temperature environments, the calibration component will not experience blurred images due to temperature increases. The calibration component of the probe station with the heat dissipation component provided in this application exhibits clear imaging, and the position information of the tested sample obtained using the imaging of the calibration component is highly accurate.

[0010] In some embodiments, the thermally conductive component includes:

[0011] A first heat-conducting plate, the first heat-conducting plate having a first surface, a portion of the first surface being attached to the side of the calibration component facing the test stage, and another portion extending out of the calibration component; and

[0012] A first heat pipe assembly, comprising a plurality of first heat pipes, wherein the plurality of first heat pipes include connected first heat pipe portions and second heat pipe portions, wherein the first heat pipe portions are attached to the portion of the first surface extending out of the calibration component, and the second heat pipe portions extend out of the receiving space.

[0013] The probe station with a heat dissipation assembly provided in this application includes a first heat-conducting plate and a first heat pipe assembly. The first heat-conducting plate has a first surface, a portion of which is attached to the side of the calibration component facing the test stage, and another portion extends beyond the calibration component. The first heat-conducting plate can conduct heat from the calibration component to itself. The first heat pipe assembly includes multiple first heat pipes, each including connected first and second heat pipe sections. The first heat pipe section is attached to the portion of the first surface extending beyond the calibration component, and the second heat pipe section extends beyond the receiving space. The multiple first heat pipes can transfer heat from the heat-conducting plate to the outside of the housing, thereby transferring heat from the calibration component to the outside of the housing, achieving cooling of the calibration component.

[0014] In some embodiments, the first heat-conducting plate further has a second surface opposite to the first surface; the heat-conducting assembly includes:

[0015] A second heat-conducting plate, the second heat-conducting plate having a third surface, a portion of the third surface being attached to the second surface, and another portion extending out of the first heat-conducting plate; and

[0016] The second heat pipe assembly includes a plurality of second heat pipes, the plurality of second heat pipes including a connected third heat pipe section and a fourth heat pipe section, the third heat pipe section being attached to the portion of the third surface that extends out of the first heat-conducting plate, and the fourth heat pipe section extending out of the receiving space.

[0017] The probe station with a heat dissipation assembly provided in this application includes a first heat-conducting plate and a second surface opposite to the first surface. The heat-conducting assembly includes a second heat-conducting plate and a second heat pipe assembly. The second heat-conducting plate has a third surface, a portion of which is attached to the second surface, and another portion extends out of the first heat-conducting plate. The second heat-conducting plate can conduct heat from the first heat-conducting plate to itself, thereby further enhancing heat conduction from the calibration assembly to the outside of the calibration assembly. The second heat pipe assembly includes multiple second heat pipes, each including a connected third heat pipe section and a fourth heat pipe section. The third heat pipe section is attached to the portion of the third surface extending out of the first heat-conducting plate, and the fourth heat pipe section extends out of the receiving space. The multiple second heat pipes can transfer heat from the second heat-conducting plate to the outside of the housing, thereby transferring heat from the calibration assembly to the outside of the housing to achieve cooling of the calibration assembly.

[0018] In some implementations, the calibration component has:

[0019] The bottom wall surface, which is in contact with a portion of the first surface; and

[0020] The side wall surface is bent and connected to the bottom wall surface;

[0021] The thermally conductive component also includes:

[0022] At least one first heat spreader, the first heat spreader including a heat spreader sidewall and a heat spreader bottom wall bent and connected to the heat spreader sidewall, the heat spreader sidewall being attached to the sidewall surface, and the heat spreader bottom wall being attached to the side of the first heat pipe portion opposite to the first heat conduction plate; and

[0023] At least one second heat spreader plate is attached to the side of the third heat pipe portion opposite to the second heat conduction plate.

[0024] The probe station with a heat dissipation assembly provided in this application includes a calibration assembly having a bottom wall and a side wall that is bent and connected to the bottom wall. The bottom wall is in contact with a portion of the first surface of a first heat-conducting plate to conduct heat from the calibration assembly to the first heat-conducting plate. The heat-conducting assembly further includes at least one first heat-spreading plate and at least one second heat-spreading plate. The first heat-spreading plate includes a heat-spreading sidewall that is in contact with the side wall to conduct heat from the portion of the calibration assembly near the side wall to the first heat pipe portion. The first heat-spreading plate includes a heat-spreading bottom wall that is bent and connected to the heat-spreading sidewall. The heat-spreading bottom wall is in contact with the side of the first heat pipe portion away from the first heat-conducting plate to even out the heat distribution on the first heat pipe portion. The first heat-spreading plate reduces the temperature difference between the first heat pipe portions among the plurality of first heat pipes, thereby enhancing the heat conduction from the calibration assembly to the heat-conducting assembly. The second heat-spreading plate is in contact with the side of the third heat pipe portion away from the second heat-conducting plate to even out the heat distribution on the third heat pipe portion. The second heat spreader reduces the temperature difference between the third heat pipe sections of the plurality of second heat pipes, thereby enhancing the heat transfer from the calibration component to the heat-conducting component.

[0025] In some embodiments, the heat dissipation assembly further includes:

[0026] Multiple heat sinks are spaced apart and disposed on the outside of the housing, with the multiple heat sinks being disposed adjacent to the portion of the heat-conducting component located on the outside of the housing. The multiple heat sinks have receiving holes that receive either the second heat pipe portion or the fourth heat pipe portion.

[0027] The fan has the following features:

[0028] An air outlet is disposed adjacent to the plurality of heat sinks.

[0029] The probe station with a heat dissipation assembly provided in this application includes a plurality of spaced-apart heat sinks. The plurality of heat sinks are disposed on the exterior of the housing and adjacent to the portion of the heat-conducting assembly located on the exterior of the housing. The plurality of heat sinks have receiving holes for accommodating the second heat pipe portion or the fourth heat pipe portion. The heat sinks enable heat conduction from the second heat pipe portion or the fourth heat pipe portion to the outside, thereby transferring the heat of the calibration component to the exterior of the housing. A fan has an air outlet disposed adjacent to the plurality of heat sinks to increase the airflow velocity around the heat sinks, thereby enhancing convective heat transfer between the heat sinks and the outside environment, thus allowing the calibration component to dissipate heat to the exterior of the housing.

[0030] In some embodiments, the thermally conductive component further includes:

[0031] Multiple support members, the support members being used to fix the first heat-conducting plate to the calibration assembly, and the support members also being used to fix the second heat-conducting plate to the calibration assembly; and

[0032] Multiple fasteners are provided, which are used to fix the first heat pipe section to the first heat-conducting plate, and the fasteners are also used to fix the third heat pipe section to the second heat-conducting plate.

[0033] The probe station with a heat dissipation assembly provided in this application includes multiple support members and multiple fixing members. The support members securely connect the first heat-conducting plate and the calibration assembly, and also securely connect the second heat-conducting plate and the calibration assembly. The fixing members securely connect the first heat pipe section and the first heat-conducting plate, and also securely connect the third heat pipe section and the second heat-conducting plate.

[0034] In some embodiments, the test bench includes:

[0035] A motion component is located between the bearing surface and the bottom surface. The motion component is used to adjust the position of the sample under test and to drive the sample under test to rotate.

[0036] The probe station with a heat dissipation assembly provided in this application includes a motion component between the support surface and the bottom surface. The motion component can adjust the position of the sample under test and rotate the sample.

[0037] In some embodiments, the first heat-conducting plate further has a first through hole, the second heat-conducting plate further has a second through hole, and the calibration component further includes:

[0038] A first light source, the first light source being used to emit calibration light; and

[0039] A reflector is disposed adjacent to the first light source and is used to reflect the calibration light, wherein the reflected light reflected by the reflector illuminates the target position through the first through hole and the second through hole;

[0040] The motion component moves the test platform to the target position.

[0041] The probe station with a heat dissipation assembly provided in this application includes a first heat-conducting plate with a first through hole and a second heat-conducting plate with a second through hole. The calibration assembly further includes a first light source and a reflector. The reflector is adjacent to the first light source to reflect the calibration light. The reflected light, through the first and second through holes, illuminates the target position, and the motion assembly moves the test stage to the target position. The first light source, the reflector, the first through hole, and the second through hole together illuminate the target position with calibration light, thereby indicating the target position.

[0042] In some embodiments, the calibration component further includes:

[0043] First camera;

[0044] A second light source is used to emit test light, which is used to illuminate the sample being tested.

[0045] A prism, adjacent to the first through-hole, is used to transmit reflected light from the reflector to the first through-hole; the prism is also used to transmit test light reflected from the sample to the first camera; and

[0046] A first beam splitter is disposed between the prism and the reflector, and is configured to correspond to the first camera. The beam splitter, in conjunction with the prism, is used to reflect the test light reflected by the sample under test to the first camera.

[0047] The probe station with a heat dissipation component provided in this application includes a calibration component further comprising a first camera, a second light source, a prism, and a first beam splitter. The second light source emits test light, which illuminates the sample under test. The prism is adjacent to the first through-hole and can transmit reflected light from the reflector to the first through-hole, thereby assisting the first light source in indicating the target position. The prism can also transmit the test light reflected from the sample under test to the first camera. The first beam splitter is disposed between the prism and the reflector, and is positioned corresponding to the first camera. The first beam splitter, in conjunction with the prism, can reflect the test light reflected from the sample under test to the first camera, thereby enabling the first camera to acquire image information of the sample under test.

[0048] In some embodiments, the first camera has a first resolution, and the calibration component further includes:

[0049] A second camera, the second camera having a second resolution, wherein the second resolution is smaller than the first resolution; and

[0050] The second beam splitter is disposed between the first beam splitter and the reflector, and is configured to correspond to the second camera. The second beam splitter, in conjunction with the prism, is used to reflect the test light reflected by the sample under test to the second camera.

[0051] The probe station with a heat dissipation component provided in this application includes a calibration component that further comprises a second camera and a second beam splitter. The first camera has a first resolution, and the second camera has a second resolution, the second resolution being smaller than the first resolution. The first camera is used to acquire a high-magnification image of the sample under test, and the second camera is used to acquire a low-magnification image of the sample under test. The second beam splitter is disposed between the prism and the reflector, and is positioned corresponding to the second camera. The second beam splitter, in conjunction with the prism, can reflect the test light reflected from the sample under test to the second camera, thereby enabling the second camera to acquire image information of the sample under test. Attached Figure Description

[0052] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0053] Figure 1This is a front view of the three-dimensional structure of the probe station according to one embodiment of this application;

[0054] Figure 2 This is a schematic diagram of the internal structure of the probe station according to one embodiment of this application;

[0055] Figure 3 This is a three-dimensional structural diagram of the calibration component and heat dissipation component in a combined state according to an embodiment of this application;

[0056] Figure 4 This is a bottom-view perspective view of a three-dimensional structure in which the calibration component and the heat dissipation component are separated according to an embodiment of this application.

[0057] Figure 5 This is a top-view perspective view of a three-dimensional structure of an embodiment of this application, showing the calibration component and the heat dissipation component in a separated state.

[0058] Figure 6 This is a three-dimensional structural diagram of the calibration component and heat dissipation component in a combined state according to an embodiment of this application;

[0059] Figure 7 yes Figure 3 A partially enlarged schematic diagram of the calibration components and heat dissipation component I shown;

[0060] Figure 8 yes Figure 6 A partially enlarged schematic diagram of the calibration components and heat dissipation component II shown;

[0061] Figure 9 This is a front view schematic diagram of the internal structure of the probe station according to one embodiment of this application;

[0062] Figure 10 This is a three-dimensional schematic diagram of the internal structure of the calibration component according to one embodiment of this application;

[0063] Figure 11 This is a top view schematic diagram of the internal structure of the calibration component according to one embodiment of this application.

[0064] Explanation of reference numerals in the attached figures:

[0065] Probe station 1, housing 10, test stage 20, calibration assembly 30, heat dissipation assembly 40, housing space 101, top surface 102, bottom surface 103, support stage 210, support surface 211, motion assembly 220, displacement assembly 221, rotation assembly 222, receiving device 230, calibration base 310, bottom wall surface 311, side wall surface 312, first light source 320, calibration light base 321, reflector 330, reflector mount 331, first camera 340. First base 341, second light source 350, test light holder 351, prism 360, mounting block 361, first beam splitter 370, second base 371, second camera 380, third base 381, second beam splitter 390, fourth base 391, heat-conducting assembly 410, first heat-conducting plate 411, first heat pipe assembly 412, second heat-conducting plate 413, second heat pipe assembly 414, first heat spreader 415, second heat spreader 416, support member 417, solid. Component 418, fan 420, air outlet 421, heat sink sub-assembly 430, heat sink 431, first mechanism 2211, second mechanism 2212, third mechanism 2213, first main body 4111, first bending section 4112, first heat pipe 4120, first heat conduction pipe 4121, first heat spreader 4122, second main body 4131, second bending section 4132, second heat pipe 4140, second heat conduction pipe 4141, second heat spreader 4142. First support portion 4171, second support portion 4172, support body portion 4173, calibration through hole 310a, first surface 411a, second surface 411b, first through hole 411c, first heat pipe portion 412a, second heat pipe portion 412b, third surface 413a, second through hole 413b, third heat pipe portion 414a, fourth heat pipe portion 414b, heat-spreading sidewall 415a, heat-spreading bottom wall 415b, receiving hole 430a, receiving through hole 431a. Detailed Implementation

[0066] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0067] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0068] In this document, references to "embodiment" or "implementation" mean that a particular feature, structure, or characteristic described in connection with an embodiment or implementation may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0069] Please see Figure 1 and Figure 2 , Figure 1 This is a front view of the three-dimensional structure of the probe station according to one embodiment of this application; Figure 2 This is a schematic diagram of the internal structure of a probe station according to one embodiment of this application. One embodiment of this application provides a probe station 1 with a heat dissipation assembly 40. The probe station 1 includes a housing 10, a test stage 20, a calibration assembly 30, and the heat dissipation assembly 40. The housing 10 encloses a receiving space 101, and has a top surface 102 and a bottom surface 103 disposed opposite to each other. The test stage 20 is housed within the receiving space 101, is disposed adjacent to the bottom surface 103, and has a bearing surface 211 for bearing the sample to be tested. The calibration assembly 30 is disposed on the top surface 102 of the housing 10, is disposed opposite to the bearing surface 211 of the test stage 20, and is used to acquire image information of the sample to be tested. The heat dissipation assembly 40 includes a heat-conducting assembly 410 and a fan 420. A portion of the heat-conducting assembly 410 is housed in the housing space 101 and connected to the calibration assembly 30, while another portion is located outside the housing 10. The fan 420 is located outside the housing 10 and is disposed opposite to the heat-conducting assembly 410. The fan 420 cooperates with the heat-conducting assembly 410 to conduct the heat of the calibration assembly 30 to the outside of the housing 10.

[0070] The probe station 1 with heat dissipation components provided in this application is a process testing instrument used in the fields of information science and systems science. The probe station 1 is used to test the performance parameters of a sample under test in a test environment. The sample under test can be, but is not limited to, wafers, light-emitting diodes (LEDs), power devices, circuit boards, liquid crystal panels, and solar cells. The test environment can be, but is not limited to, temperature environments, pressure environments, current environments, and light environments. It is understood that the probe station 1 can be used for radio frequency testing of wafers, high-temperature environment testing of LEDs, low-current testing of power devices, high-voltage and high-current testing of circuit boards, radiation environment testing of solar cells, and resistivity testing of material surfaces. The above are examples of application scenarios for the probe station 1 with heat dissipation components provided in this application and should not be construed as limiting the application scenarios of the probe station 1 with heat dissipation components provided in this application.

[0071] The housing 10 encloses a receiving space 101, which can accommodate the sample under test, the test stage 20, the calibration component 30, and partially accommodate the heat dissipation component 40. In some embodiments, the receiving space 101 may also accommodate, but is not limited to, a cooling component, a heating component, a pressure component, an electromagnetic component, and an optical simulation component. Understandably, the cooling component and the heating component can regulate the temperature of the test environment within the test chamber; the pressure component can regulate the pressure of the test environment within the test chamber; the electromagnetic component can regulate the magnetic field of the test environment within the test chamber; and the optical simulation component can regulate the light environment within the test chamber.

[0072] The housing 10 has a top surface 102 and a bottom surface 103 disposed opposite to each other. Understandably, the housing 10 includes a top wall and a bottom wall, the surface of the top wall facing the receiving space 101 being the top surface 102, and the surface of the bottom wall facing the receiving space 101 being the bottom surface 103. Optionally, the housing 10 further includes at least one side wall, the side wall, the top wall, and the bottom wall enclosing the receiving space 101. In one possible embodiment, the probe station 1 further includes a needle holder assembly, the needle holder assembly and the housing 10 enclosing a sealed space. This sealed space can isolate the sample under test from the external space, preventing external contamination of the sample and thus affecting the test results. The sealed space can also isolate the components housed in the receiving space within the probe station 1 from the external space, preventing external contamination from damaging the components housed in the receiving space.

[0073] The test stage 20 is housed within the receiving space 101. The test stage 20 is disposed adjacent to the bottom surface 103 and has a bearing surface 211 for bearing the sample to be tested. Optionally, the test stage 20 is directly disposed on and connected to the bottom surface 103. Optionally, the test stage 20 is disposed on the bottom surface 103 via a support member. Optionally, the bottom wall of the housing 10 includes a first mating portion, and the side of the test stage 20 facing the bottom surface 103 has a second mating portion that mates with the first mating portion. The first and second mating portions mate to connect the test stage 20 to the housing 10. The bearing surface 211 in the test stage 20 can bear the sample to be tested.

[0074] The calibration component 30 is disposed on the top surface 102 of the housing 10. Optionally, the calibration component 30 is attached to the top surface 102 on the side facing the top surface 102. Optionally, the system includes multiple calibration components and a calibration housing. The calibration components are housed within the calibration housing, and the calibration housing is attached to the top surface 102 on the side facing the top surface 102. The calibration component 30 is disposed on the top surface 102 of the housing 10, allowing it to be close to the housing 10, facilitating heat transfer from the calibration component 30 to the outside of the housing 10. The calibration component 30 is positioned opposite the bearing surface 211 of the test stage 20 to acquire image information of the sample under test. The acquired image information is used for processing and analysis to determine the position of the sample under test, thereby assisting in precise alignment of the test points of the sample under test with the tips of the probes of the probe stage 1 when the probe stage 1 is used to test the sample.

[0075] In related technologies, when the probe station 1 is used to test the parameters of the sample under test in a high-temperature environment above 100°C, the test stage 20 needs to be heated. At this time, the heat from the test stage 20 is conducted to the calibration component 30, causing the temperature of the calibration component 30 to rise, resulting in blurred images and affecting the accuracy of the calibration. Based on this technical problem, the probe station 1 with a heat dissipation component provided in this application includes a heat dissipation component 40. The heat dissipation component 40 can dissipate heat from the calibration component 30, ensuring that the temperature of the calibration component 30 remains stable during the use of the probe station 1. The heat dissipation component 40 can prevent the temperature of the calibration component 30 from remaining stable when the probe station 1 is used to test the parameters of the sample under test in a high-temperature environment above 100°C, and prevent blurred images caused by workpiece expansion due to temperature rise.

[0076] The heat dissipation assembly 40 includes a heat-conducting assembly 410, a portion of which is housed in the housing space 101 and connected to the calibration assembly 30. Optionally, the heat-conducting assembly 410 has a first contact surface, and the calibration assembly 30 has a second contact surface, with the first contact surface connected to the second contact surface, thereby conducting heat from the calibration assembly 30 to the heat-conducting assembly 410 to reduce the temperature of the calibration assembly 30. Another portion of the heat-conducting assembly 410 is located outside the housing 10 to conduct heat from the portion of the heat-conducting assembly 410 housed in the housing space 101 to the outside of the housing 10. The heat-conducting assembly 410 can conduct heat from the calibration assembly 30 to the outside of the housing 10.

[0077] The fan 420 is located outside the housing 10 and is positioned opposite the heat-conducting component 410. The fan 420 can be positioned opposite the portion of the heat-conducting component 410 located outside the housing 10. The fan 420 cooperates with the heat-conducting component 410 to conduct heat from the calibration component 30 to the outside of the housing 10. The fan 420 can direct airflow towards the portion of the heat-conducting component 410 located outside the housing 10, increasing the airflow velocity around this portion and enhancing convective heat transfer between the portion of the heat-conducting component 410 and the ambient air. The fan 420 enables active heat dissipation of the calibration component 30, increasing its heat dissipation efficiency to the outside of the housing 10 and ensuring that when the probe station 1 is used to test samples in high-temperature environments, the calibration component 30 will not experience image blurring due to temperature increases. The calibration component 30 of the probe station 1 with heat dissipation components provided in this application embodiment has clear imaging, and the position information of the sample under test obtained by the imaging of the calibration component 30 is highly accurate.

[0078] In summary, the probe station 1 with a heat dissipation component provided in this application includes a housing 10, a test stage 20, a calibration component 30, and a heat dissipation component 40. The housing 10 has a top surface 102 and a bottom surface 103 disposed opposite to each other. The test stage 20 is disposed adjacent to the bottom surface 103, and the calibration component 30 is disposed on the top surface 102 of the housing 10. The housing 10 can accommodate the test stage 20 and support the calibration component 30. The test stage 20 has a bearing surface 211, which can bear the sample being tested. The calibration component 30 is disposed opposite to the bearing surface 211 of the test stage 20, and the calibration component 30 can acquire image information of the sample being tested. The heat dissipation assembly 40 includes a heat-conducting component 410. A portion of the heat-conducting component 410 is housed in the housing space 101 and connected to the calibration component 30, while another portion is located outside the housing 10, thereby transferring heat from the calibration component 30 to the outside of the housing 10. The heat dissipation assembly 40 also includes a fan 420, located outside the housing 10 and opposite to the heat-conducting component 410. The fan 420 enhances convective heat transfer between the heat-conducting component 410 and the ambient air, thus assisting in transferring heat from the calibration component 30 to the outside of the housing 10 to reduce the temperature of the calibration component 30. The heat dissipation assembly 40 can dissipate heat from the calibration component 30 to reduce its temperature, ensuring that when the probe station 1 is used to test samples in a high-temperature environment, the calibration component 30 will not experience image blurring due to temperature rise. The calibration component 30 of the probe station 1 with heat dissipation components provided in this application embodiment has clear imaging, and the position information of the sample under test obtained by the imaging of the calibration component 30 is highly accurate.

[0079] Please refer to it again. Figure 1 and Figure 2 And please see Figure 3 , Figure 4 and Figure 5 , Figure 3 This is a three-dimensional structural diagram of the calibration component and heat dissipation component in a combined state according to an embodiment of this application; Figure 4 This is a bottom-view perspective view of a three-dimensional structure in which the calibration component and the heat dissipation component are separated according to an embodiment of this application. Figure 5This is a top-view perspective view of the calibration component and heat dissipation component in a separated state according to one embodiment of this application. Further, in some embodiments, the heat-conducting component 410 includes a first heat-conducting plate 411 and a first heat pipe assembly 412. The first heat-conducting plate 411 has a first surface 411a, a portion of which is attached to the side of the calibration component 30 facing the test stage 20, and another portion extends out of the calibration component 30. The first heat pipe assembly 412 includes a plurality of first heat pipes 4120, each of which includes a connected first heat pipe portion 412a and a second heat pipe portion 412b. The first heat pipe portion 412a is attached to the portion of the first surface 411a extending out of the calibration component 30, and the second heat pipe portion 412b extends out of the receiving space 101.

[0080] A portion of the first surface 411a is attached to the side of the calibration component 30 facing the test stage 20, such that the first heat-conducting plate 411 is in full contact with the calibration component 30, thereby achieving heat conduction from the calibration component 30 to the first heat-conducting plate 411. The first heat-conducting plate 411 simultaneously absorbs heat from the receiving space 101, thereby dispersing the heat transferred from the receiving space 101 to the calibration component 30.

[0081] The heat-conducting component 410 includes a first heat pipe group 412, which includes a plurality of first heat pipes 4120. Each of the plurality of first heat pipes 4120 includes a connected first heat pipe section 412a and a second heat pipe section 412b. It can be understood that the plurality of first heat pipes 4120 includes a plurality of first heat-conducting pipes 4121 and a plurality of first heat-spreading pipes 4122; the first heat-conducting pipe 4121 includes a connected first heat pipe section 412a and a second heat pipe section 412b, and the first heat-spreading pipe 4122 includes the first heat pipe section 412a.

[0082] The first heat pipe portion 412a is attached to the portion of the first surface 411a that extends out of the calibration assembly 30, and the second heat pipe portion 412b extends out of the receiving space 101. In an optional embodiment, the first heat pipe 4121 and the first heat spreader 4122 are spaced apart and closely arranged. The first heat pipe 4121 is used to conduct heat from the first heat plate 411 to the outside of the housing 10, and the first heat pipe 4121 is also used to absorb heat from adjacent first heat spreaders 4122 and conduct it to the outside of the housing 10. The first heat spreader 4122 is used to absorb heat from the first heat plate 411 and transfer the absorbed heat to adjacent first heat pipes 4121, thereby increasing the efficiency of the first heat pipe 4121 in conducting heat from the first heat plate 411 to the outside of the housing 10.

[0083] The first heat pipe portion 412a is attached to the portion of the first surface 411a that extends out of the calibration component 30, thereby enabling the first heat pipe portion 412a to absorb heat from the first heat-conducting plate 411. In an optional embodiment, the first heat pipe portion 412a has a first heat pipe surface, and the surface of the first heat pipe 4120 is attached to the portion of the first surface 411a that extends out of the calibration component 30. The surface of the first heat pipe 4120 can increase the contact area between the first heat pipe portion 412a and the first surface 411a, thereby increasing the heat transfer efficiency between the first heat pipe portion 412a and the first heat-conducting plate 411. The second heat pipe portion 412b extends out of the receiving space 101. In an optional embodiment, the second heat pipe portion 412b has a circular cross-section, so that the second heat pipe portion 412b and the outside air outside the housing 10 have a larger contact area, thereby increasing the heat transfer efficiency between the second heat pipe portion 412b and the outside air outside the housing 10.

[0084] In summary, the probe station 1 with a heat dissipation component provided in this application includes a heat-conducting component 410 comprising a first heat-conducting plate 411 and a first heat pipe assembly 412. The first heat-conducting plate 411 has a first surface 411a, a portion of which is attached to the side of the calibration component 30 facing the test stage 20, and another portion extends out of the calibration component 30. The first heat-conducting plate 411 can conduct heat from the calibration component 30 to itself. The first heat pipe assembly 412 includes a plurality of first heat pipes 4120, each of which includes a connected first heat pipe portion 412a and a second heat pipe portion 412b. The first heat pipe portion 412a is attached to the portion of the first surface 411a that extends out of the calibration component 30, and the second heat pipe portion 412b extends out of the receiving space 101. The plurality of first heat pipes 4120 can transfer the heat of the heat-conducting plate to the outside of the housing 10, thereby transferring the heat of the calibration component 30 to the outside of the housing 10 to achieve cooling of the calibration component 30.

[0085] Please refer to it again. Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5Furthermore, in some embodiments, the first heat-conducting plate 411 also has a second surface 411b, which is opposite to the first surface 411a. The heat-conducting assembly 410 includes a second heat-conducting plate 413 and a second heat pipe assembly 414. The second heat-conducting plate 413 has a third surface 413a, a portion of which is attached to the second surface 411b, and another portion extends out of the first heat-conducting plate 411. The second heat pipe assembly 414 includes a plurality of second heat pipes 4140, each of which includes a connected third heat pipe portion 414a and a fourth heat pipe portion 414b. The third heat pipe portion 414a is attached to the portion of the third surface 413a that extends out of the first heat-conducting plate 411, and the fourth heat pipe portion 414b extends out of the receiving space 101.

[0086] The second heat-conducting plate 413 has a third surface 413a, a portion of which is attached to the second surface 411b, and another portion extends out of the first heat-conducting plate 411. A portion of the third surface 413a is attached to the side of the first heat-conducting plate 411 facing the test stage 20, ensuring full contact between the second heat-conducting plate 413 and the first heat-conducting plate 411, thereby facilitating heat conduction from the first heat-conducting plate 411 to the second heat-conducting plate 413. Furthermore, the second heat-conducting plate 413 simultaneously absorbs heat from the receiving space 101, thereby reducing heat conduction from the receiving space 101 to the first heat-conducting plate 411 and the calibration component 30, thus lowering the temperature of the calibration component 30 and improving the efficiency of heat conduction from the heat-conducting component 410 to the outside of the housing 10.

[0087] The heat-conducting assembly 410 includes a second heat pipe group 414, which includes a plurality of second heat pipes 4140. Each of the plurality of second heat pipes 4140 includes a connected third heat pipe section 414a and a fourth heat pipe section 414b. Understandably, the plurality of second heat pipes 4140 includes a plurality of second heat-conducting pipes 4141 and a plurality of second heat-spreading pipes 4142; each second heat-conducting pipe 4141 includes a connected third heat pipe section 414a and a fourth heat pipe section 414b, and each second heat-spreading pipe 4142 includes the third heat pipe section 414a.

[0088] The third heat pipe portion 414a is attached to the portion of the third surface 413a that extends out of the first heat-conducting plate 411, and the fourth heat pipe portion 414b extends out of the receiving space 101. In an optional embodiment, the second heat-conducting pipe 4141 and the second heat-spreading pipe 4142 are spaced apart and closely arranged. The second heat-conducting pipe 4141 is used to conduct heat from the second heat-conducting plate 413 to the outside of the housing 10, and the second heat-conducting pipe 4141 is also used to absorb heat from the adjacent second heat-spreading pipe 4142 and conduct it to the outside of the housing 10. The second heat-spreading pipe 4142 is used to absorb heat from the second heat-conducting plate 413 and transfer the absorbed heat to the adjacent second heat-conducting pipe 4141, thereby increasing the efficiency of the second heat-conducting pipe 4141 in conducting heat from the second heat-conducting plate 413 to the outside of the housing 10.

[0089] The third heat pipe portion 414a is attached to the portion of the third surface 413a that extends out of the first heat-conducting plate 411, thereby enabling the third heat pipe portion 414a to absorb heat from the second heat-conducting plate 413. In an optional embodiment, the third heat pipe portion 414a has a third heat pipe surface, which is attached to the portion of the third surface 413a that extends out of the first heat-conducting plate 411. The third heat pipe surface can increase the contact area between the third heat pipe portion 414a and the third surface 413a, thereby increasing the heat transfer efficiency between the third heat pipe portion 414a and the second heat-conducting plate 413. The fourth heat pipe portion 414b extends out of the receiving space 101. In an optional embodiment, the fourth heat pipe portion 414b has a circular cross-section, allowing for a larger contact area between the fourth heat pipe portion 414b and the outside air outside the housing 10, thereby increasing the heat transfer efficiency between the fourth heat pipe portion 414b and the outside air outside the housing 10.

[0090] In summary, the probe station 1 with heat dissipation components provided in this application embodiment has a first heat-conducting plate 411 that also has a second surface 411b opposite to the first surface 411a. The heat-conducting component 410 includes a second heat-conducting plate 413 and a second heat pipe assembly 414. The second heat-conducting plate 413 has a third surface 413a, a portion of which is attached to the second surface 411b, and another portion extends out of the first heat-conducting plate 411. The second heat-conducting plate 413 can conduct heat from the first heat-conducting plate 411 to itself, thereby further enhancing the heat conduction from the calibration component 30 to the outside of the calibration component 30. The second heat pipe assembly 414 includes a plurality of second heat pipes 4140, and the plurality of second heat pipes 4140 include connected third heat pipe portions 414a and fourth heat pipe portions 414b. The third heat pipe portion 414a is attached to the portion of the third surface 413a that extends out of the first heat-conducting plate 411, and the fourth heat pipe portion 414b extends out of the receiving space 101. The plurality of second heat pipes 4140 can transfer the heat of the second heat-conducting plate 413 to the outside of the housing 10, thereby transferring the heat of the calibration component 30 to the outside of the housing 10 to achieve cooling of the calibration component 30.

[0091] Please refer to it again. Figure 3 , Figure 4 and Figure 5 And please see Figure 6 , Figure 6 This is a three-dimensional structural diagram of a calibration component and a heat dissipation component in a combined state according to one embodiment of this application. Further, in some embodiments, the calibration component 30 has a bottom wall surface 311 and a side wall surface 312. The bottom wall surface 311 is abutted against a portion of the first surface 411a. The side wall surface 312 is bent and connected to the bottom wall surface 311. The heat-conducting component 410 further includes at least one first heat spreader 415 and at least one second heat spreader 416. The first heat spreader 415 includes a heat spreader sidewall 415a and a heat spreader bottom wall 415b bent and connected to the heat spreader sidewall 415a. The heat spreader sidewall 415a is abutted against the side wall surface 312, and the heat spreader bottom wall 415b is abutted against the side of the first heat pipe portion 412a opposite to the first heat-conducting plate 411. The second heat spreader 416 is abutted against the side of the third heat pipe portion 414a opposite to the second heat-conducting plate 413.

[0092] The calibration component 30 has a bottom wall surface 311 and a side wall surface 312. The bottom wall surface 311 is in contact with a portion of the first surface 411a. This allows the surface of the calibration component 30 facing the test stage 20 to make full contact with the first heat-conducting plate 411, thereby achieving heat conduction from the calibration component 30 to the first heat-conducting plate 411.

[0093] The first heat spreader 415 includes a heat spreader sidewall 415a and a heat spreader bottom wall 415b that is bent and connected to the heat spreader sidewall 415a. The heat spreader sidewall 415a is attached to the sidewall surface 312, and the heat spreader bottom wall 415b is attached to the side of the first heat pipe portion 412a opposite to the first heat conduction plate 411. The heat spreader sidewall 415a is attached to the sidewall surface 312 of the calibration component 30 to realize the heat conduction of the calibration component 30 to the first heat spreader 415. The heat spreader bottom wall 415b is attached to the side of the first heat pipe portion 412a opposite to the first heat conduction plate 411 to balance the heat distribution on the first heat pipe portion 412a. The heat spreader bottom wall 415b can reduce the temperature difference between the first heat pipe portions 412a in the plurality of first heat pipes 4120, thereby enhancing the heat conduction from the calibration component 30 to the heat conduction component 410. In one possible implementation, the first heat pipe portion 412a further has a third heat pipe surface, which is attached to the surface of the first heat spreader 415 facing the first heat conduction plate 411. The third heat pipe surface can increase the contact area between the first heat pipe portion 412a and the first heat spreader 415, thereby increasing the heat dissipation efficiency of the first heat spreader 415.

[0094] The second heat spreader 416 is attached to the side of the third heat pipe portion 414a facing away from the second heat conducting plate 413 to even out the heat distribution on the third heat pipe portion 414a. The second heat spreader 416 can reduce the temperature difference between the third heat pipe portions 414a among the plurality of second heat pipes 4140, thereby enhancing the heat conduction from the first heat conducting plate 411 to the second heat conducting plate 413. In one possible embodiment, the third heat pipe portion 414a further has a fourth heat pipe surface, which is attached to the surface of the second heat spreader 416 facing the second heat conducting plate 413. The fourth heat pipe surface can increase the contact area between the third heat pipe portion 414a and the second heat spreader 416, thereby increasing the heat dissipation efficiency of the second heat spreader 416.

[0095] In summary, the probe station 1 with a heat dissipation assembly provided in this application includes a calibration assembly 30 having a bottom wall surface 311 and a side wall surface 312 bent and connected to the bottom wall surface 311. The bottom wall surface 311 is in contact with a portion of the first surface 411a of the first heat-conducting plate 411 to conduct heat from the calibration assembly 30 to the first heat-conducting plate 411. The heat-conducting assembly 410 also includes at least one first heat-spreading plate 415 and at least one second heat-spreading plate 416. The first heat-spreading plate 415 includes a heat-spreading sidewall 415a, which is in contact with the side wall surface 312 to conduct heat from the portion of the calibration assembly 30 near the side wall surface 312 to the first heat pipe portion 412a. The first heat spreader 415 includes a heat spreader bottom wall 415b that is bent and connected to the heat spreader sidewall 415a. The heat spreader bottom wall 415b is attached to the side of the first heat pipe portion 412a opposite to the first heat conducting plate 411 to balance the heat distribution on the first heat pipe portion 412a. The first heat spreader 415 reduces the temperature difference between the first heat pipe portions 412a in the plurality of first heat pipes 4120, thereby enhancing the heat conduction from the calibration component 30 to the heat conducting component 410. The second heat spreader 416 is attached to the side of the third heat pipe portion 414a opposite to the second heat conducting plate 413 to balance the heat distribution on the third heat pipe portion 414a. The second heat spreader 416 reduces the temperature difference between the third heat pipe portions 414a in the plurality of second heat pipes 4140, thereby enhancing the heat conduction from the calibration component 30 to the heat conducting component 410.

[0096] Please refer to it again. Figure 3 and Figure 5 And please see Figure 7 , Figure 7 yes Figure 3 The diagram shows a partially enlarged view of the calibration assembly and heat dissipation assembly I. Further, in some embodiments, the heat dissipation assembly 40 includes a plurality of spaced-apart heat sinks 431. The plurality of heat sinks 431 are disposed on the exterior of the housing 10, adjacent to the portion of the heat-conducting assembly 410 located outside the housing 10. Each heat sink 431 has a receiving hole 430a, which receives either the second heat pipe portion 412b or the fourth heat pipe portion 414b. The fan 420 has an air outlet 421, which is disposed adjacent to the plurality of heat sinks 431.

[0097] The heat dissipation assembly 40 further includes a plurality of heat sinks 431 spaced apart, each heat sink 431 having a receiving hole 430a. It is understood that the heat dissipation assembly 40 also includes a plurality of heat dissipation sub-groups, each sub-group including a plurality of heat sinks 431 spaced apart. It is understood that each heat sink 431 has a receiving through hole 431a, and the receiving through holes 431a of the plurality of heat sinks 431 within the heat dissipation sub-group collectively form the receiving hole 430a. Optionally, the plurality of heat sinks 431 within the heat dissipation sub-group have the same shape. Optionally, the receiving through holes 431a of the plurality of heat sinks 431 within the heat dissipation sub-group have the same shape.

[0098] The plurality of heat sinks 431 are disposed on the exterior of the housing 10. The receiving hole 430a receives either the second heat pipe portion 412b or the fourth heat pipe portion 414b. It is understood that either the second heat pipe portion 412b or the fourth heat pipe portion 414b passes through the receiving hole 431a. It is also understood that the heat dissipation sub-assembly receives either the second heat pipe portion 412b of the first heat pipe 4121 or the second heat pipe portion 4141. The heat sinks 431 can facilitate heat conduction from the second heat pipe portion 412b to the outside, and also facilitate heat conduction from the fourth heat pipe portion 414b to the outside, thereby transferring the heat from the calibration component 30 to the exterior of the housing 10.

[0099] The plurality of heat sinks 431 are disposed adjacent to the portion of the heat-conducting component 410 located outside the housing 10. The fan 420 has an air outlet 421 disposed adjacent to the plurality of heat sinks 431. When the probe station 1 is used to test the parameters of the sample under test in a high-temperature environment, the fan 420 is activated, and the fan 420 blows air through the air outlet 421 onto the plurality of heat sinks 431. The fan 420 can increase the airflow velocity around the heat sinks 431, thereby enhancing the convective heat transfer between the heat sinks 431 and the outside environment, thus enabling the calibration component 30 to dissipate heat to the outside of the housing 10.

[0100] In summary, the probe station 1 with a heat dissipation assembly provided in this application includes a plurality of spaced heat sinks 431 in the heat dissipation assembly 40. The plurality of heat sinks 431 are disposed on the exterior of the housing 10 and adjacent to the portion of the heat-conducting assembly 410 located outside the housing 10. Each of the plurality of heat sinks 431 has a receiving hole 430a for receiving the second heat pipe portion 412b or the fourth heat pipe portion 414b. The heat sinks 431 enable heat conduction from the second heat pipe portion 412b or the fourth heat pipe portion 414b to the outside, thereby transferring the heat from the calibration assembly 30 to the exterior of the housing 10. The fan 420 has an air outlet 421 disposed adjacent to the plurality of heat sinks 431 to increase the airflow velocity around the heat sinks 431, thereby enhancing convective heat transfer between the heat sinks 431 and the outside environment, thus allowing the calibration assembly 30 to dissipate heat to the exterior of the housing 10.

[0101] Please refer to it again. Figure 6 And please see Figure 8 , Figure 8 yes Figure 6 The diagram shows a partially enlarged view of the calibration assembly and heat dissipation assembly II. Further, in some embodiments, the heat-conducting assembly 410 further includes a plurality of support members 417 and a plurality of fixing members 418. The support members 417 are used to fix the first heat-conducting plate 411 to the calibration assembly 30, and the support members 417 are also used to fix the second heat-conducting plate 413 to the calibration assembly 30. The fixing members 418 are used to fix the first heat pipe portion 412a to the first heat-conducting plate 411, and the fixing members 418 are also used to fix the third heat pipe portion 414a to the second heat-conducting plate 413.

[0102] The support member 417 is used to fix the first heat-conducting plate 411 to the calibration assembly 30, and the support member 417 is also used to fix the second heat-conducting plate 413 to the calibration assembly 30. Understandably, the first heat-conducting plate 411 has a portion that conforms to the calibration assembly 30 and a portion that extends beyond the calibration assembly 30. The portion of the first heat-conducting plate 411 that conforms to the calibration assembly 30 may, but is not limited to, being fixedly connected to the bottom wall surface 311 of the calibration assembly 30. The support member 417 fixes the portion of the first heat-conducting plate 411 that extends beyond the calibration assembly 30 to the calibration assembly 30, making the connection between the first heat-conducting plate 411 and the calibration assembly 30 more stable. Understandably, the second heat-conducting plate 413 has a portion that conforms to the first heat-conducting plate 411 and a portion that extends beyond the first heat-conducting plate 411. The portion of the second heat-conducting plate 413 that adheres to the first heat-conducting plate 411 may, but is not limited to, being fixedly connected to the first heat-conducting plate 411, thereby achieving the connection between the second heat-conducting plate 413 and the calibration component 30. The support member 417 fixes the portion of the second heat-conducting plate 413 extending out of the calibration component 30 to the calibration component 30, making the connection between the second heat-conducting plate 413 and the calibration component 30 more stable.

[0103] Optionally, the first heat-conducting plate 411 includes a first main body 4111 and a first bent portion 4112. The first main body 4111 is attached to the calibration component 30 and also to the first conduit portion. The first bent portion 4112 is bent and connected to the end of the first main body 4111 opposite to the calibration component 30, and the first bent portion 4112 and the calibration component 30 are located on the same side of the first main body 4111. One end of the support member 417 is fixedly connected to the side wall surface 312 of the calibration component 30, and the other end is fixedly connected to the first bent portion 4112, thereby realizing that the support member 417 fixes the first heat-conducting plate 411 to the calibration component 30. Optionally, the second heat-conducting plate 413 includes a second main body 4131 and a second bent portion 4132. The second main body 4131 is attached to the first heat-conducting plate 411, and the second main body 4131 is also attached to the third conduit portion. The second bent portion 4132 is bent and connected to the end of the second main body 4131 away from the calibration component 30, and the second bent portion 4132 and the calibration component 30 are located on the same side of the second main body 4131. One end of the support member 417 is fixedly connected to the side wall 312 of the calibration component 30, and the other end is fixedly connected to the second bent portion 4132, thereby realizing that the support member 417 fixes the second heat-conducting plate 413 to the calibration component 30.

[0104] Optionally, the support member 417 includes a first support portion 4171, a second support portion 4172, and a support body 4173. The first support portion 4171 is fixedly connected to the calibration component 30. One end of the support body 4173 is connected to the first support portion 4171, and the other end is connected to the second support portion 4172. The second support portion 4172 is fixedly connected to the first bending portion 4112 or the second bending portion 4132, thereby enabling the support member 417 to fix the first heat-conducting plate 411 or the second heat-conducting plate 413 to the calibration component 30. Optionally, one end of the support body 4173 is bent and connected to the first support portion 4171, and the other end is bent and connected to the second support portion 4172. The first support portion 4171 and the second support portion 4172 are located on opposite sides of the support body 4173.

[0105] The fastener 418 is used to fix the first heat pipe portion 412a to the first heat-conducting plate 411, and the fastener 418 is also used to fix the third heat pipe portion 414a to the second heat-conducting plate 413. The fastener 418 ensures that the first heat pipe portion 412a and the first heat-conducting plate 411 are in close contact, thereby strengthening the heat conduction between the first heat-conducting plate 411 and the first heat pipe assembly 412 while fixing the first heat pipe portion 412a. The fastener 418 also ensures that the second heat pipe portion 412b and the second heat-conducting plate 413 are in close contact, thereby strengthening the heat conduction between the second heat-conducting plate 413 and the second heat pipe assembly 414 while fixing the third heat pipe portion 414a.

[0106] In summary, the probe station 1 with a heat dissipation assembly provided in this application includes a plurality of support members 417 and a plurality of fixing members 418. The support members 417 provide a fixed connection between the first heat-conducting plate 411 and the calibration assembly 30, and a fixed connection between the second heat-conducting plate 413 and the calibration assembly 30. The fixing members 418 provide a fixed connection between the first heat pipe section 412a and the first heat-conducting plate 411, and a fixed connection between the third heat pipe section 414a and the second heat-conducting plate 413.

[0107] Please see Figure 9 , Figure 9 This is a front view schematic diagram of the internal structure of a probe station according to one embodiment of this application. Further, in some embodiments, the test stage 20 includes a motion component 220. The motion component 220 is located between the bearing surface 211 and the bottom surface 103. The motion component 220 is used to adjust the position of the sample under test, and the motion component 220 is also used to drive the sample under test to rotate.

[0108] In related technologies, the test stage 20 is fixed to the housing 10, and the calibration component 30 includes a motion sub-component that can move in different directions to adjust the position of the calibration component 30. When the probe station 1 is used to test the parameters of the sample under test, the calibration component 30 moves above the test stage 20 to collect image information of the sample under test, thereby obtaining the position information of the sample under test. In related technologies, the calibration component is movable. When the calibration component collects image information of the sample under test during its movement, the image information collected by the calibration component 30 is easily blurred, which further leads to low accuracy of the obtained position information. Based on this technical problem, the probe station 1 with a heat dissipation component provided in this application embodiment, wherein the calibration component 30 is fixedly connected to the housing 10, and the test stage 20 further includes a motion component 220. The motion component 220 realizes the displacement and rotation of the test stage 20, so that the calibration component 30 can acquire the image information of the sample under test without moving, thereby further avoiding the problem that the image information acquired by the calibration component 30 is blurry when it moves, resulting in low accuracy of the acquired position information.

[0109] Optionally, the test stage 20 includes a support platform 210 having a support surface 211, and the motion component 220 is located between the support platform 210 and the bottom wall. Understandably, the motion component 220 may include a displacement component 221 and a rotation component 222. The displacement component 221 can move in different directions, thereby moving the sample under test in different directions. When the probe station 1 is used to test the parameters of the sample under test, the motion component 220 can be used to move the test stage 20 below the calibration component 30 to obtain image information of the sample under test, thereby enabling the calibration component 30 to obtain the position information of the sample under test. The motion component 220 can also be used to move the sample under test below the tip of the probe that cooperates with the probe station 1 to test the sample under test, thereby aligning the test point of the sample under test with the tip of the probe. The rotating component 222 can rotate about the normal vector of the bearing surface 211 passing through the center of the bearing surface 211, thereby causing the sample under test to rotate about the normal vector of the bearing surface 211 passing through the center of the bearing surface 211. When the probe station 1 is used to test the parameters of the sample under test, the motion component 220 can be used to rotate the sample under test so that the test point of the sample under test faces the tip of the probe, thereby aligning the test point of the sample under test with the tip of the probe.

[0110] In one possible implementation, the displacement component 221 may include, but is not limited to, a first mechanism 2211, a second mechanism 2212, and a third mechanism 2213. The first mechanism 2211 is used to translate the test stage 20 in a first direction, the second mechanism 2212 is used to translate the test stage 20 in a second direction, and the third mechanism 2213 is used to translate the test stage 20 in a third direction. The first direction is perpendicular to the second direction, the first direction is perpendicular to the third direction, and the second direction is perpendicular to the third direction. The first mechanism 2211, the second mechanism 2212, and the third mechanism 2213 cause the displacement component 221 to move in different directions, thereby adjusting the position of the test stage 20 to further adjust the position of the sample under test on the test stage 20.

[0111] In summary, the probe station 1 with heat dissipation components provided in this application includes a motion component 220 between the bearing surface 211 and the bottom surface 103 of the test stage 20. The motion component 220 can adjust the position of the sample under test and rotate the sample. When the probe station 1 is used to test the parameters of the sample, the motion component 220 can move the test stage 20 below the calibration component 30 to obtain image information of the sample, thereby enabling the calibration component 30 to obtain the position information of the sample. The motion component 220 can also be used to move the sample under test below the tip of the probe that cooperates with the probe station 1 to test the sample; and to rotate the sample so that the test point of the sample faces the tip of the probe, thereby aligning the test point of the sample with the tip of the probe.

[0112] Please refer to it again. Figure 4 , Figure 5 and Figure 9 And please see Figure 10 and Figure 11 , Figure 10 This is a three-dimensional schematic diagram of the internal structure of the calibration component according to one embodiment of this application; Figure 11This is a top view schematic diagram of the internal structure of a calibration component according to one embodiment of this application. Further, in some embodiments, the first heat-conducting plate 411 also has a first through-hole 411c, and the second heat-conducting plate 413 also has a second through-hole 413b. The calibration component 30 also includes a first light source 320 and a reflector 330. The first light source 320 is used to emit calibration light. The reflector 330 is disposed adjacent to the first light source 320, and the reflector 330 is used to reflect the calibration light. The reflected light, reflected by the reflector 330, illuminates the target position via the first through-hole 411c and the second through-hole 413b. The motion component 220 moves the test stage 20 to the target position.

[0113] Understandably, the calibration light is used to instruct the test stage 20 to move to the target position, thereby enabling image acquisition of the sample under test on the test stage 20. The first light source 320 may, but is not limited to, emitting calibration light to form a calibration pattern on the surface of the entity. In an optional embodiment, the test stage 20 further includes a receiving device 230, which is used to acquire the calibration pattern and determine the positional relationship between the probe station 1 and the target position based on the acquired pattern information, thereby instructing the motion component 220 in the test stage 20 to move to move the sample under test to the target position.

[0114] The reflector 330 is disposed adjacent to the first light source 320, and the reflector 330 is used to reflect the calibration light. It is understood that the reflector 330 may be, but is not limited to, a mirror. The reflector 330, disposed adjacent to the first light source 320, can reflect the calibration light to illuminate the target position. When the calibration component 30 acquires image information of the sample under test, the first light source 320 directs the calibration light toward the reflector 330, which reflects the calibration light so that the receiving device 230 on the test stage 20 can receive the calibration light, thereby determining the positional relationship between the calibration component 30 and the test stage 20, and instructing the motion component 220 to move to move the sample under test to the target position.

[0115] Optionally, the calibration assembly 30 further includes a calibration base 310, a calibration light seat 321, and a reflector seat 331. The calibration base 310 has a bottom wall surface 311 and a base surface opposite to the bottom wall surface 311. The base surface supports the first light source 320 and the reflector 330. The calibration light seat 321 houses the first light source 320 and is connected to the calibration base 310. The calibration light seat 321 is used to fix the first light source 320 to the calibration base 310. The calibration base 310 and the calibration light seat 321 ensure that the position between the first light source 320 and the calibration base 310 is fixed during use, thereby ensuring the accuracy of the position determination of the calibration assembly 30. The reflector seat 331 is connected to the calibration base 310 and also to the reflector 330 to achieve a fixed connection between the reflector 330 and the calibration base 310. The calibration base 310 and the reflector mount 331 fix the position between the reflector 330 and the calibration base 310 during use, thereby ensuring the accuracy of the position determination of the calibration component 30.

[0116] The first heat-conducting plate 411 further has a first through hole 411c, and the second heat-conducting plate 413 further has a second through hole 413b. The reflected light reflected by the reflector 330 illuminates the target position through the first through hole 411c and the second through hole 413b. Understandably, the first through hole 411c and the second through hole 413b are correspondingly arranged to allow the reflected light to pass through to the target position. In an optional embodiment, the calibration assembly 30 further includes a calibration base 310, which has a calibration through hole 310a corresponding to the first through hole 411c, allowing the reflected light to pass through the calibration through hole 310a and illuminate the target position.

[0117] In summary, the probe station 1 with heat dissipation components provided in this application embodiment has a first heat-conducting plate 411 with a first through hole 411c and a second heat-conducting plate 413 with a second through hole 413b. The calibration component 30 further includes a first light source 320 and a reflector 330. The reflector 330 is adjacent to the first light source 320 to reflect the calibration light. The reflected light reflected by the reflector 330 illuminates the target position through the first through hole 411c and the second through hole 413b, and the motion component 220 moves the test stage 20 to the target position. The first light source 320, the reflector 330, the first through hole 411c, and the second through hole 413b together illuminate the target position with calibration light, thereby indicating the target position.

[0118] Please refer to it again. Figure 4 , Figure 5 , Figure 9 , Figure 10 and Figure 11 Further, in some embodiments, the calibration component 30 further includes: a first camera 340, a second light source 350, a prism 360, and a first beam splitter 370. The second light source 350 emits test light, which illuminates the sample under test. The prism 360 is adjacent to the first through-hole 411c and transmits reflected light from the reflector 330 to the first through-hole 411c; the prism 360 also transmits test light reflected from the sample under test to the first camera 340. The first beam splitter 370 is disposed between the prism 360 and the reflector 330, and is positioned corresponding to the first camera 340. The beam splitter, in conjunction with the prism 360, reflects the test light reflected from the sample under test to the first camera 340.

[0119] The prism 360 is adjacent to the first through-hole 411c and is used to transmit reflected light from the reflector 330 to the first through-hole 411c. Understandably, in this embodiment, when the calibration component 30 is used to acquire an image of the sample under test to determine the position information of the sample under test, the first light source 320 emits calibration light towards the reflector 330, the reflector 330 reflects the calibration light to the prism 360, the reflected light passes through the prism 360 to the first through-hole 411c, and then through the first through-hole 411c and the second through-hole 413b to the target position. Optionally, the calibration component 30 further includes a mounting block 361, which is connected to the calibration base 310 and also connected to the prism 360, to achieve a fixed connection between the prism 360 and the calibration base 310. The calibration base 310 and the mounting block 361 fix the position between the prism 360 and the calibration base 310 during use, thereby ensuring the accuracy of the position determination of the calibration component 30.

[0120] The second light source 350 is used to emit test light, and the prism 360 is also used to transmit the test light reflected by the sample under test to the first camera 340. The beam splitter, in conjunction with the prism 360, is used to reflect the test light reflected by the sample under test to the first camera 340. Understandably, when the calibration component 30 is used to acquire an image of the sample under test to determine its position information, the second light source 350 emits test light to the sample under test, the sample under test reflects the test light, and the reflected test light passes sequentially through the second through-hole 413b, the first through-hole 411c, the prism 360, and the first beam splitter 370 to the first camera 340, whereby the first camera 340 acquires the image information of the sample under test.

[0121] Optionally, the calibration component 30 further includes a test light base 351, a first base 341, and a second base 371. The test light base 351 is connected to the calibration base 310 and also to the second light source 350, thereby achieving a fixed connection between the second light source 350 and the calibration base 310. The calibration base 310 and the test light base 351 ensure that the position between the second light source 350 and the calibration base 310 is fixed during use, thus guaranteeing the accuracy of the position determination of the calibration component 30. The first base 341 is connected to the calibration base 310 and also to the first camera 340, thereby achieving a fixed connection between the first camera 340 and the calibration base 310. The calibration base 310 and the first base 341 ensure that the position between the first camera 340 and the calibration base 310 is fixed during use, thus guaranteeing the accuracy of the position determination of the calibration component 30. The second base 371 is connected to the calibration base 310, and also to the first beam splitter 370, to achieve a fixed connection between the first beam splitter 370 and the calibration base 310. The calibration base 310 and the second base 371 ensure that the position between the first beam splitter 370 and the calibration base 310 is fixed during use, thereby guaranteeing the accuracy of the position determination of the calibration component 30.

[0122] In summary, the probe station 1 with heat dissipation components provided in this application includes a calibration component 30 that further comprises a first camera 340, a second light source 350, a prism 360, and a first beam splitter 370. The second light source 350 emits test light, which illuminates the sample under test. The prism 360 is adjacent to the first through-hole 411c and can transmit reflected light from the reflector 330 to the first through-hole 411c, thereby assisting the first light source 320 in indicating the target position. The prism 360 can also transmit the test light reflected from the sample under test to the first camera 340. The first beam splitter 370 is disposed between the prism 360 and the reflector 330, and is positioned corresponding to the first camera 340. The first beam splitter 370, in conjunction with the prism 360, can reflect the test light reflected from the sample under test to the first camera 340, thereby enabling the first camera 340 to acquire image information of the sample under test.

[0123] Please refer to it again. Figure 4 , Figure 5 , Figure 9 , Figure 10 and Figure 11 Further, in some embodiments, the first camera 340 has a first resolution. The calibration assembly 30 also includes a second camera 380 and a second beam splitter 390. The second camera 380 has a second resolution, which is less than the first resolution. The second beam splitter 390 is disposed between the first beam splitter 370 and the reflector 330, and the second beam splitter 390 is positioned corresponding to the second camera 380. The second beam splitter 390, in conjunction with the prism 360, is used to reflect the test light reflected by the sample under test to the second camera 380.

[0124] The calibration component 30 further includes a second camera 380. The first camera 340 has a first resolution, and the second camera 380 has a second resolution. Understandably, the first camera 340 is a high-magnification camera with a higher first resolution; the second camera 380 is a low-magnification camera with a lower second resolution and a larger field of view. When the calibration component 30 is used to acquire image information of the sample under test, the second camera 380 is used to acquire a low-magnification image of the sample under test, thereby achieving preliminary acquisition of the sample's position information; the first camera 340 is used to acquire a high-magnification image of the sample under test, thereby achieving precise acquisition of the sample's position information.

[0125] The second beam splitter 390 is disposed between the first beam splitter 370 and the reflector 330, and the second beam splitter 390 is configured corresponding to the second camera 380. The second beam splitter 390, in conjunction with the prism 360, is used to reflect the test light reflected by the sample under test to the second camera 380. Understandably, when the calibration component 30 is used to acquire an image of the sample under test to determine its position information, the second light source 350 emits test light to the sample under test, the sample under test reflects the test light, and the reflected test light sequentially passes through the second through-hole 413b, the first through-hole 411c, the prism 360, the first beam splitter 370, and the second beam splitter 390 to the second camera 380, whereby the second camera 380 acquires the image information of the sample under test.

[0126] Optionally, the calibration component 30 further includes a third base 381 and a fourth base 391. The third base 381 is connected to the calibration base 310 and also to the second camera 380, thereby achieving a fixed connection between the second camera 380 and the calibration base 310. The calibration base 310 and the third base 381 ensure that the position between the second camera 380 and the calibration base 310 is fixed during use, thus guaranteeing the accuracy of the position determination of the calibration component 30. The fourth base 391 is connected to the calibration base 310 and also to the second beam splitter 390, thereby achieving a fixed connection between the second beam splitter 390 and the calibration base 310. The calibration base 310 and the fourth base 391 ensure that the position between the second beam splitter 390 and the calibration base 310 is fixed during use, thus guaranteeing the accuracy of the position determination of the calibration component 30.

[0127] In summary, the probe station 1 with a heat dissipation component provided in this application includes a calibration component 30 that further comprises a second camera 380 and a second beam splitter 390. The first camera 340 has a first resolution, and the second camera 380 has a second resolution, which is smaller than the first resolution. The first camera 340 is used to acquire a high-magnification image of the sample under test, and the second camera 380 is used to acquire a low-magnification image of the sample under test. The second beam splitter 390 is disposed between the prism 360 and the reflector 330, and is positioned corresponding to the second camera 380. The second beam splitter 390, in conjunction with the prism 360, can reflect the test light reflected from the sample under test to the second camera 380, thereby enabling the second camera 380 to acquire image information of the sample under test.

[0128] In this application, the terms "embodiment" and "implementation" mean that a specific feature, structure, or characteristic described in connection with an embodiment can be included in at least one embodiment of this application. The appearance of these phrases in various locations throughout the specification does not necessarily refer to the same embodiment, nor are they independent or alternative embodiments mutually exclusive with other embodiments. Those skilled in the art will understand, explicitly and implicitly, that the embodiments described in this application can be combined with other embodiments. Furthermore, it should be understood that the features, structures, or characteristics described in the various embodiments of this application can be arbitrarily combined to form another embodiment that does not depart from the spirit and scope of the technical solution of this application, provided there is no contradiction between them.

[0129] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. A probe station with a heat dissipation component, characterized in that, The probe station includes: A housing that encloses and forms a receiving space, the housing having a top surface and a bottom surface that are arranged opposite to each other; A test stand, which is housed within the housing space, is disposed adjacent to the bottom surface, and has a bearing surface for bearing the sample to be tested; A calibration component, disposed on the top surface of the housing, is positioned opposite to the bearing surface of the test stage and is used to acquire image information of the sample under test; and A heat dissipation assembly includes a heat-conducting component and a fan. A portion of the heat-conducting component is housed in the housing space and connected to the calibration component, while another portion is located outside the housing. The fan is located outside the housing and is disposed opposite to the heat-conducting component. The fan cooperates with the heat-conducting component to conduct the heat of the calibration component to the outside of the housing.

2. The probe station as described in claim 1, characterized in that, The thermally conductive component includes: A first heat-conducting plate, the first heat-conducting plate having a first surface, a portion of the first surface being attached to the side of the calibration component facing the test stage, and another portion extending out of the calibration component; and A first heat pipe assembly, comprising a plurality of first heat pipes, wherein the plurality of first heat pipes include connected first heat pipe portions and second heat pipe portions, wherein the first heat pipe portions are attached to the portion of the first surface extending out of the calibration component, and the second heat pipe portions extend out of the receiving space.

3. The probe station as described in claim 2, characterized in that, The first heat-conducting plate further has a second surface, the second surface being opposite to the first surface; the heat-conducting assembly includes: A second heat-conducting plate, the second heat-conducting plate having a third surface, a portion of the third surface being attached to the second surface, and another portion extending out of the first heat-conducting plate; and The second heat pipe assembly includes a plurality of second heat pipes, the plurality of second heat pipes including a connected third heat pipe section and a fourth heat pipe section, the third heat pipe section being attached to the portion of the third surface that extends out of the first heat-conducting plate, and the fourth heat pipe section extending out of the receiving space.

4. The probe station as described in claim 3, characterized in that, The calibration component has: The bottom wall surface is in contact with a portion of the first surface; and The side wall surface is bent and connected to the bottom wall surface; The thermally conductive component also includes: At least one first heat spreader, the first heat spreader including a heat spreader sidewall and a heat spreader bottom wall bent and connected to the heat spreader sidewall, the heat spreader sidewall being attached to the sidewall surface, and the heat spreader bottom wall being attached to the side of the first heat pipe portion opposite to the first heat conduction plate; and At least one second heat spreader plate is attached to the side of the third heat pipe portion opposite to the second heat conduction plate.

5. The probe station as described in claim 3, characterized in that, The heat dissipation component also includes: Multiple heat sinks are spaced apart and disposed on the outside of the housing, with the multiple heat sinks being disposed adjacent to the portion of the heat-conducting component located on the outside of the housing. The multiple heat sinks have receiving holes that receive either the second heat pipe portion or the fourth heat pipe portion. The fan has the following features: An air outlet is disposed adjacent to the plurality of heat sinks.

6. The probe station as described in claim 4, characterized in that, The thermally conductive component also includes: Multiple support members, the support members being used to fix the first heat-conducting plate to the calibration assembly, and the support members also being used to fix the second heat-conducting plate to the calibration assembly; and Multiple fasteners are provided, which are used to fix the first heat pipe section to the first heat-conducting plate, and the fasteners are also used to fix the third heat pipe section to the second heat-conducting plate.

7. The probe station as described in claim 3, characterized in that, The test bench includes: A motion component is located between the bearing surface and the bottom surface. The motion component is used to adjust the position of the sample under test and to drive the sample under test to rotate.

8. The probe station as described in claim 7, characterized in that, The first heat-conducting plate also has a first through hole, the second heat-conducting plate also has a second through hole, and the calibration component further includes: A first light source, the first light source being used to emit calibration light; and A reflector is disposed adjacent to the first light source and is used to reflect the calibration light, wherein the reflected light reflected by the reflector illuminates the target position through the first through hole and the second through hole; The motion component moves the test platform to the target position.

9. The probe station as described in claim 8, characterized in that, The calibration component also includes: First camera; A second light source is used to emit test light, which is used to illuminate the sample being tested. A prism, adjacent to the first through-hole, is used to transmit reflected light from the reflector to the first through-hole; the prism is also used to transmit test light reflected from the sample to the first camera; and A first beam splitter is disposed between the prism and the reflector, and is configured to correspond to the first camera. The beam splitter, in conjunction with the prism, is used to reflect the test light reflected by the sample under test to the first camera.

10. The probe station as described in claim 9, characterized in that, The first camera has a first resolution, and the calibration component further includes: A second camera, the second camera having a second resolution, wherein the second resolution is smaller than the first resolution; and The second beam splitter is disposed between the first beam splitter and the reflector, and is configured to correspond to the second camera. The second beam splitter, in conjunction with the prism, is used to reflect the test light reflected by the sample under test to the second camera.

Images