Particle detector adjusting device

Abstract

The utility model belongs to the field of electron beam detection, and relates to a particle detector adjusting device, comprising a sealed container, one end of which is sealed by a fixed pedestal, and the upper wall and the lower wall of which are provided with electron beam holes; the fixed base is connected with the electrode adapter in the sealed container through a corrugated pipe in a vacuum sealing welding manner; an adjusting piece is installed in an adjusting hole of the fixed base, and the other end of the adjusting piece is screwed into a blind hole of the electrode adapter and used for controlling stretching and retracting of the corrugated pipe. A particle detector is installed on the electrode adapter and provided with a detection hole. The expansion and contraction of the corrugated pipe are controlled through the adjusting piece, so that the front-back fine adjustment of the particle detector is realized, the detection hole and the electron beam hole are coaxially aligned, the adjusting efficiency and reliability are improved, and the device is suitable for electron beam detection equipment in various high-precision occasions.

Description

Technical Field

[0001] This utility model belongs to the technical field of electron beam detection equipment, and specifically relates to a particle detector adjustment device. Background Technology

[0002] In electron beam inspection equipment, particle detectors are an indispensable component, used to detect and acquire signal electrons. Electron beam inspection equipment uses two particle detectors, one above the other, each with a pinhole. The electron beam is emitted by an electron gun, accelerated by an electric field, focused by a condenser lens, and deflected by a deflector, precisely scanning the wafer surface. To ensure the electron beam successfully reaches and scans the wafer, the pinholes on the two particle detectors must be precisely aligned. Therefore, accurate alignment is crucial during particle detector installation. Inaccurate alignment can block the electron beam, directly affecting its quality and potentially causing equipment malfunction. However, due to unavoidable errors during manufacturing and assembly, precise alignment of the particle detector pinholes is often difficult to achieve, which not only affects electron beam quality but can also cause serious damage to the equipment.

[0003] Traditional particle detector adjustment methods suffer from low efficiency and are prone to vacuum leakage, necessitating improvement. Specifically, one type of particle detector mounting structure in existing electron beam detection equipment is as follows: Figure 1 and Figure 2 As shown, the particle detector 4' in the sealed cavity 1' is mounted on a horizontal support, which is fixed to the vacuum feed-through 5'. The vacuum feed-through 5' transmits signals from the atmosphere to the vacuum. The deformation of the sealing O-ring 6' is controlled by adjusting the combination of screw groups 2' and 3', thereby adjusting the detector's aperture alignment. During adjustment, screw group 3' must first be loosened, then screw group 2' is tightened against the end face of the sealed cavity 1', controlling the movement of the vacuum feed-through 5' to move the detector, ultimately achieving the alignment adjustment of the detector's aperture. However, after adjustment, due to sealing requirements, screw group 3' must be tightened again, which causes a slight shift in the detector's position, thus changing the already adjusted alignment. Therefore, the above adjustment process must be repeated continuously to find a stable equilibrium point, which is quite difficult in practice.

[0004] Existing particle detector adjustment mechanisms typically rely on the compression and deformation of the O-ring to center the pinhole. However, this method has several problems. First, the compression of the O-ring is very limited, resulting in a restricted adjustment range and an inability to handle large centering deviations. Second, the compression and rebound process of the O-ring is complex and unstable, easily leading to repeated adjustments during the adjustment process, increasing operational difficulty and time costs. Furthermore, the O-ring is prone to wear or aging during long-term use, further exacerbating the difficulty of adjustment. More seriously, uneven compression of the O-ring can also cause vacuum leakage, which can not only affect the normal operation of the equipment but also potentially damage it. Therefore, traditional particle detector adjustment mechanisms can no longer meet the requirements of modern high-precision electron beam detection equipment.

[0005] With the advancement of technology and the development of industry, the requirements for the accuracy and reliability of electron beam detection equipment are becoming increasingly stringent. Therefore, there is an urgent need for a new type of particle detector adjustment mechanism to replace traditional adjustment methods. This new adjustment mechanism should be able to solve the problems existing in traditional adjustment methods, improve adjustment efficiency and reliability, and avoid risks such as vacuum leakage. Utility Model Content

[0006] To address the shortcomings of existing technologies, this invention provides a particle detector adjustment device that replaces O-ring compression deformation adjustment with bellows telescopic adjustment, thereby improving adjustment efficiency and reliability, avoiding vacuum leakage problems, and extending the service life of the equipment.

[0007] The particle detector adjustment device includes:

[0008] A sealed container, one end of which is sealed by a fixed base, and both the upper and lower walls of the sealed container are provided with electron beam holes;

[0009] The fixed base is connected to the electrode adapter in the sealed container by a bellows-sealed welding method.

[0010] The electrode adapter is provided with a blind hole facing the fixed base, and the fixed base is provided with adjustment holes that are matched one-to-one with the blind holes; the adjustment member passes through the adjustment hole and is screwed into the blind hole to control the expansion and contraction of the bellows.

[0011] A particle detector is installed on the electrode adapter, and the particle detector is provided with a detection hole;

[0012] The expansion and contraction of the bellows is controlled by the adjusting component, thereby enabling fine-tuning of the particle detector to ensure that the detection aperture is coaxially aligned with the electron beam aperture.

[0013] Preferably, the adjusting element is a set screw, and the adjusting element is threadedly connected to both the adjusting hole and the blind hole of the electrode adapter. The extension and retraction distance of the bellows can be precisely adjusted by turning the set screw.

[0014] Preferably, two sets of adjusting members are symmetrically arranged on the fixed base. These two sets of adjusting members can more evenly adjust the extension and retraction lengths of the bellows on opposite sides, facilitating rapid centering of the particle detector. The adjusting members are located inside the bellows; this structure ensures the bellows's airtightness and prevents vacuum leakage.

[0015] Preferably, the sealed container is also provided with a guide hole adapted to the electrode adapter seat for moving and guiding the electrode adapter seat, effectively avoiding vertical tilting and horizontal swinging when the bellows is adjusted and extended, and ensuring that the particle detector is easily and accurately centered.

[0016] Furthermore, a protrusion is provided at the rear end of the electrode adapter, and an electrode is mounted on the protrusion. A recessed hole adapted to the protrusion is provided on the fixing base. When the electrode adapter moves towards the fixing base, the protrusion retracts into the recessed hole. This mating structure of the protrusion and the recessed hole further guides the electrode adapter when it retracts, preventing the electrode adapter from shifting.

[0017] Preferably, the protrusion is located inside the bellows. This structure also ensures the bellows's airtightness and prevents vacuum leakage.

[0018] Furthermore, the feature is that a sealing ring is installed within the sealing surface between the fixed base and the sealing container, and the sealing ring is located outside the bellows. The sealing ring further ensures the sealing effect between the sealing container and the fixed base.

[0019] Furthermore, the electrode adapter is equipped with a bracket for supporting the particle detector. The bracket has a groove along its length, within which the particle detector is positioned. The bracket also has an elongated hole, within which the particle detector is secured with screws. The position of the particle detector within the elongated hole can be flexibly adjusted, enhancing its applicability.

[0020] Preferably, the fixed base, electrode adapter, and particle detector are all made of non-magnetic stainless steel. Using non-magnetic stainless steel can avoid magnetic field interference.

[0021] Preferably, the electrode adapter and the bracket are integrally formed or separately connected.

[0022] The beneficial effects of this utility model are as follows:

[0023] By optimizing the centering adjustment structure, this invention enables the particle detector to capture signal electrons more accurately, thereby improving the overall performance of the electron beam detection equipment.

[0024] This invention utilizes a specific connection structure between the sealed container, bellows, fixed base, adjusting component, and electrode adapter. This allows for direct fine-tuning of the adjusting component to control the alignment position of the particle detector, eliminating the need for multiple adjustments by loosening or tightening other screws. This simplifies operation and increases efficiency. After adjustment, the entire assembly is directly installed on the vacuum chamber of the electron beam detector (with the sealed container inside the vacuum chamber), eliminating the need to adjust the set screws within the vacuum chamber. This reduces the complexity of installation and maintenance.

[0025] This invention utilizes a bellows telescopic adjustment mechanism, which is fast and accurate, significantly simplifying the adjustment process and greatly improving adjustment efficiency. The bellows replaces the O-ring, fundamentally avoiding vacuum leakage problems caused by O-ring wear and uneven compression, ensuring stable operation of the equipment in a high vacuum environment, and effectively preventing equipment failures caused by vacuum leakage. The telescopic adjustment method of the bellows means that the adjustment range is no longer limited by the compression of the O-ring, allowing for a more relaxed approach to the requirements of the processed parts and surface treatment.

[0026] Compared to traditional adjustment methods, the bellows adjustment mechanism has a significantly longer service life. The absence of easily worn parts such as O-rings reduces the frequency of replacement and maintenance, lowering equipment operating costs. Furthermore, the reduced reliance on high-precision components lowers production costs. Simultaneously, its long lifespan and low maintenance requirements also reduce subsequent operating costs.

[0027] The adjusting component mounting structure of this invention can maintain the vacuum environment inside the sealed container. The adjusting component is mounted on the electrode adapter and located inside the bellows. The electrode adapter has a blind hole for mounting the adjusting component, so the adjusting component is excluded from the vacuum environment of the sealed container and vacuum chamber. The assembly gap between the adjusting component and the adjusting hole and blind hole of the fixed base will not affect the vacuum environment inside the sealed container, thus avoiding vacuum leakage inside the container. Attached Figure Description

[0028] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0029] Figure 1 It is the external structure of a particle detector adjustment device in the prior art;

[0030] Figure 2 yes Figure 1 Cross-sectional view along the AA direction;

[0031] Figure 3 This is an external structural diagram of the present invention;

[0032] Figure 4 This is a cross-sectional view of the inside of the sealed container of this utility model;

[0033] Figure 5 This is a partial schematic diagram of the fixed base, bellows, electrode adapter and particle detector mounting structure of this utility model;

[0034] Figure 6 This is a bottom view schematic diagram illustrating the particle detector and bracket mounting structure of this utility model;

[0035] Figure 7 This is a side view of the present invention;

[0036] Figure 8 yes Figure 7 Cross-sectional view along the BB direction.

[0037] The following are marked in the diagram: 1. Sealed container; 11. Electron beam aperture; 12. Guide hole; 2. Fixed base; 21. Adjustment hole; 22. Embedded hole; 3. Bellows; 4. Adjustment component; 5. Electrode adapter; 51. Blind hole; 52. Protrusion; 6. Particle detector; 61. Detection hole; 7. Sealing ring; 8. Support; 81. Track groove; 82. Long strip hole. Detailed Implementation

[0038] like Figures 3 to 8 As shown, the particle detector 6 adjustment device includes a sealed container 1, a fixed base 2, a bellows 3, an adjustment component 4, an electrode adapter 5, and a particle detector 6.

[0039] Please refer to Figure 3 The sealed container 1 has electron beam apertures 11 on both its upper and lower walls. A particle detector 6 is located inside the sealed container 1, and a detection hole 61 is provided on the particle detector 6. Moving the particle detector 6 left and right aligns its detection hole 61 with the two electron beam apertures 11 on the same axis, facilitating the smooth passage of the electron beam. This application does not limit the external shape of the sealed container; it can be a cuboid, cylinder, or other shapes.

[0040] The fixed base 2 is installed at one end of the sealed container 1 in a sealed connection, and is used to provide structural support and positioning reference for the electrode adapter 5 and the particle detector 6.

[0041] The bellows 3 is a welded bellows, which is connected to the fixed base 2 and the electrode adapter 5 respectively through vacuum sealing welding technology to achieve telescopic adjustment. The adjustment distance of the welded bellows is determined by the telescopic limit of the bellows, and its welding length can be freely selected, with a wide range of adjustment distances.

[0042] Please refer to Figures 6 to 8 The fixed base 2 is provided with multiple adjustment holes 21, and the electrode adapter 5 is provided with multiple blind holes 51 accordingly. One end of the adjustment member 4 is installed in the adjustment hole 21 and the other end is installed in the blind hole 51, thereby connecting the fixed base 2 and the electrode adapter 5. The operation of the adjustment member 4 can control the extension and retraction of the bellows 3.

[0043] In one specific embodiment, the adjusting component 4 is a set screw, and both the adjusting hole 21 and the blind hole 51 are threaded holes. At least two set screws are symmetrically installed on the fixed base 2, so as to more evenly extend and retract the bellows 3, avoid asymmetrical extension and retraction of the bellows 3, and ensure the stability and accuracy of the particle detector 6 in a vacuum environment.

[0044] The adjusting component 4 is located inside the bellows 3, and the hole 51 on the electrode adapter 5 for mounting the adjusting component 4 is a blind hole. Therefore, the adjusting component 4 is excluded from the vacuum environment (the sealed container is installed on the vacuum chamber wall of the detection equipment and is located inside the vacuum chamber). The assembly gap between the adjusting component 4 and the adjusting hole 21 of the fixed base 2 and the blind hole 51 will not affect the vacuum environment inside the sealed container, thus avoiding vacuum leakage. The "inside the bellows" described in this application refers to the adjusting component being located inside the annular tube body formed by the bellows, which is relative to the space outside the tube body.

[0045] The electrode adapter 5 is connected to the fixed base 2 via the bellows 3, serving as the electrical connection and mechanical support component of the detector.

[0046] Please refer to Figure 4 The sealed container 1 has a guide hole 12 at its end that matches the front end shape of the electrode adapter 5. The electrode adapter 5 moves telescopically along the guide hole 12, preventing it from tilting vertically or swaying horizontally, thus ensuring the stable operation and detection accuracy of the entire particle detection system. In one specific embodiment, the gap between the front end of the electrode adapter 5 and the guide hole 12 is approximately 10-20 micrometers. The guide hole 12 of the sealed container 1 is slightly deeper than the front end of the electrode adapter 5 to ensure precise positioning of the electrode adapter 5 during its movement.

[0047] The electrode adapter 5 has a protrusion 52 at its rear end, on which an electrode is mounted. The fixed base 2 has a fitting hole 22 that matches the protrusion 52. When the electrode adapter 5 moves toward the fixed base 2, the protrusion 52 retracts into the fitting hole 22. The protrusion 52 and the fitting hole 22 cooperate to further position the extension and retraction process of the electrode adapter 5.

[0048] The protrusion 52 is also located inside the bellows 3, so the gap between the protrusion 52 and the hole 22 does not affect the vacuum environment inside the vacuum chamber.

[0049] A sealing ring 7 is installed inside the sealing surface between the fixed base 2 and the sealing container 1. The sealing ring 7 is located outside the bellows 3, which further improves the sealing performance between the sealing container 1 and the fixed base 2.

[0050] Please refer to Figure 5 and Figure 6 The electrode adapter 5 is equipped with a bracket 8 for supporting the particle detector 6. The bracket 8 can be integrally formed with the electrode adapter 5 or it can be separately fixedly connected. The bracket 8 has a track groove 81 along its length, which allows the particle detector 6 to be quickly positioned in the track groove 81 during installation, resulting in higher assembly efficiency and accuracy. The bracket 8 also has multiple elongated holes 82, in which the particle detector 6 is locked with screws, facilitating flexible and coarse adjustment of the particle detector 6's installation position on the bracket.

[0051] The entire material of this embodiment is made of non-magnetic stainless steel, which can avoid magnetic field interference.

[0052] Working principle

[0053] By rotating the set screw, the extension and retraction length of the bellows 3 can be precisely controlled, thereby driving the particle detector 6 to make fine adjustments forward and backward to achieve centering adjustment. The centered and adjusted sealed container can be directly installed as a whole into the vacuum chamber of the electron beam detection equipment via a fixed base, eliminating the need for adjustment on the vacuum chamber itself (existing adjustment mechanisms require screws to press the container against the surface of the vacuum chamber for multiple adjustments, which is very inconvenient). The adjustment method of this application not only simplifies the adjustment process and reduces the number of repetitive operations, but also allows for adjustments no longer limited by the compression of the O-ring, thus relaxing the requirements for processed parts and surface treatments, which is beneficial for cost control. Furthermore, adjustment using the bellows 3 allows for flexible adjustment under vacuum, preventing vacuum leakage caused by changes in the compression of the O-ring during adjustment, effectively protecting the equipment.

[0054] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A particle detector adjustment device, characterized in that, include: A sealed container, one end of which is sealed by a fixed base, and both the upper and lower walls of the sealed container are provided with electron beam holes; the fixed base is connected to the electrode adapter inside the sealed container by vacuum sealing welding through a bellows. The electrode adapter has a blind hole facing the fixed base, and the fixed base has adjustment holes that match the blind holes one by one; the adjustment member passes through the adjustment hole and is screwed into the blind hole to control the expansion and contraction of the bellows. A particle detector is installed on the electrode adapter, and the particle detector is provided with a detection hole; The extension and retraction of the bellows is controlled by the adjusting component, thereby enabling fine-tuning of the particle detector's front and rear distances, and ensuring that the detection aperture and the electron beam aperture are coaxially aligned.

2. The particle detector adjustment device according to claim 1, characterized in that: The adjusting component is a set screw, and the adjusting component is threadedly connected to both the adjusting hole and the blind hole of the electrode adapter.

3. The particle detector adjustment device according to claim 1, characterized in that: Two sets of adjusting members are symmetrically arranged on the fixed base. The adjusting members are located inside the bellows to ensure the sealing performance of the bellows.

4. The particle detector adjustment device according to claim 1, characterized in that: The sealed container is also provided with a guide hole that is adapted to the electrode adapter seat for moving and guiding the electrode adapter seat.

5. The particle detector adjustment device according to claim 4, characterized in that: The electrode adapter has a protrusion at its rear end, and an electrode is mounted on the protrusion. The fixed base has a recessed hole that matches the protrusion. When the electrode adapter moves toward the fixed base, the protrusion retracts into the recessed hole.

6. The particle detector adjustment device according to claim 5, characterized in that: The bump is located inside the bellows.

7. The particle detector adjustment device according to any one of claims 1 to 6, characterized in that: A sealing ring is installed on the sealing surface between the fixed base and the sealed container, and the sealing ring is located outside the bellows.

8. The particle detector adjustment device according to claim 7, characterized in that: The electrode adapter is provided with a bracket for supporting the particle detector. The bracket has a groove along its length, and the particle detector is positioned in the groove. The bracket is also provided with an elongated hole, and the particle detector is locked in the elongated hole by screws.

9. The particle detector adjustment device according to claim 7, characterized in that: The fixed base, electrode adapter, and particle detector are all made of non-magnetic stainless steel.

10. The particle detector adjustment device according to claim 7, characterized in that: The electrode adapter and the bracket can be integrally formed or separately connected.

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