Sheet basket feeding and discharging device and production line provided with sheet basket feeding and discharging device

Abstract

The utility model provides a piece basket feeding and discharging device and a production line provided with the piece basket feeding and discharging device, the piece basket feeding and discharging device comprises a feeding unit, a discharging unit and a conveying mechanism, and the feeding unit comprises a feeding platform and a feeding mechanism; the discharging unit comprises a discharging platform and a discharging mechanism. The feeding mechanism and the discharging mechanism each comprise a clamping assembly, a first-stage transverse moving assembly, a second-stage transverse moving assembly and a lifting assembly. A water tank and a sheet arranging device are arranged on the feeding platform; a rotating table is arranged on the discharging platform, and the discharging platform is connected with the sliding table in a sliding mode. According to the utility model, the loading unit and the unloading unit are arranged, so that the transmission mechanism is not limited by the space, the transmission route and the structure of the transmission mechanism any more, the turnover of wafer baskets is realized, the working efficiency is high, and silicon wafers are not easy to damage; the whole structure is simple, the occupied space is small, control and use are easy, automatic feeding and discharging are achieved through linkage cooperation of a control system, the labor intensity of workers is relieved, and meanwhile the production cost is reduced.

Description

Technical Field

[0001] This utility model belongs to the technical field of semiconductor silicon wafer production equipment, and in particular relates to a wafer basket loading and unloading device and a production line equipped with the device. Background Technology

[0002] Current silicon wafer production involves multiple processes, requiring wafers to move between various independent processing units. In the pre-cleaning process, limitations in the pre-cleaning equipment's structure, production area space, or complex transport routes prevent the existing transport mechanisms from directly feeding wafer baskets containing silicon wafers into the pre-cleaning equipment, nor from removing empty baskets. Manual basket handling is labor-intensive and inefficient, failing to meet the requirements of continuous operation and also increasing the risk of wafer breakage and contamination. Therefore, designing a wafer basket loading and unloading device for pre-cleaning equipment is crucial for improving silicon wafer processing efficiency and ensuring wafer quality. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a wafer basket loading and unloading device and a production line equipped with the device, which realizes automated loading and unloading, has high working efficiency, and is less likely to cause damage to silicon wafers.

[0004] The technical solution adopted by this utility model is: a sheet basket feeding and unloading device, comprising:

[0005] The feeding unit is equipped with a feeding platform and a feeding mechanism for transferring a fully loaded tray to the pre-cleaning equipment.

[0006] The unloading unit is equipped with an unloading platform and an unloading mechanism for removing empty trays from the pre-cleaning equipment;

[0007] A transmission mechanism is provided corresponding to the loading unit and the unloading unit, for delivering the full-loaded tray to the loading platform and removing the empty tray placed on the unloading platform.

[0008] Furthermore, the feeding mechanism and the unloading mechanism are both fixed on the same frame; the feeding platform is located below the feeding mechanism, and the unloading platform is located below the unloading mechanism.

[0009] Furthermore, the loading platform is equipped with a water tank for placing the fully loaded tray; the conveying mechanism is capable of placing the fully loaded tray into the water tank.

[0010] Furthermore, the loading platform is also equipped with a wafer sorter for sorting the silicon wafers in the full-load wafer basket before the loading mechanism puts the full-load wafer basket into the pre-cleaning equipment; the water tank and the wafer sorter are arranged along the direction of transport of the full-load wafer basket.

[0011] Furthermore, both the loading mechanism and the unloading mechanism include a clamping component, a primary lateral movement component, a secondary lateral movement component, and a lifting component; the clamping component is disposed on the secondary lateral movement component, the secondary lateral movement component is disposed on the primary lateral movement component; the primary lateral movement component is disposed on the lifting component, and the lifting component is disposed on the frame.

[0012] Furthermore, both the primary lateral movement component and the secondary lateral movement component include a lateral movement driver, a slide rail, and a lateral movement bracket, with the two slide rails arranged in parallel; the slide rail of the secondary lateral movement component is fixed to the lateral movement bracket of the primary lateral movement component; and the gripper assembly is fixed to the lateral movement bracket of the secondary lateral movement component.

[0013] Furthermore, the unloading platform is smaller than the loading platform, and the bottom of the unloading platform is also provided with a sliding table, and the unloading platform is slidably connected to the sliding table.

[0014] Furthermore, a rotary table is provided on the upper part of the unloading platform, and a rotary motor is provided on the inner side of the unloading platform. The output shaft of the rotary motor is connected to the rotary table, driving the rotary table to rotate so that the orientation of the empty tray is adapted to the transmission mechanism.

[0015] Furthermore, the output shaft is connected to one end of the rotary table, causing the rotary table to rotate eccentrically.

[0016] A production line is equipped with the tray loading and unloading device as described above, and also includes a control system, which is electrically connected to the loading unit, the unloading unit, the pre-cleaning equipment and the transmission mechanism respectively.

[0017] The advantages and positive effects of this utility model are as follows: By setting up a feeding unit and a discharging unit, the transmission mechanism is no longer limited by space, transmission route and its own structure, realizing the turnover of wafer baskets, with high working efficiency and less risk of damaging silicon wafers; the overall structure is simple, occupies little space, and is easy to control and use. Through the coordinated operation of the pre-cleaning mechanism, feeding unit, discharging unit and transmission mechanism, automated feeding and discharging are realized, reducing the labor intensity of workers and reducing production costs. Attached Figure Description

[0018] Figure 1 This is a schematic diagram illustrating the use of a specific embodiment of this utility model;

[0019] Figure 2 This is a schematic diagram of the structure of a specific embodiment of the present utility model;

[0020] Figure 3This is a schematic diagram of the feeding unit structure of a specific embodiment of this utility model;

[0021] Figure 4 This is a schematic diagram of the feeding unit structure of a specific embodiment of this utility model.

[0022] In the picture:

[0023] 10. Feeding unit; 11. Feeding platform; 12. Feeding mechanism

[0024] 121. Gripping assembly; 1211. Gripper; 1212. Gripping driver

[0025] 122, Primary transverse component; 1221, Transverse actuator; 1222, Slide rail

[0026] 123. Secondary transverse movement assembly; 124. Lifting assembly; 1241. Lifting guide rail.

[0027] 1242, Lifting frame; 13, Water tank; 14, Film handler

[0028] 20. Feeding unit; 21. Feeding platform; 211. Rotary table

[0029] 22. Slide table; 23. Feeding mechanism; 30. Frame.

[0030] 40. Conveying mechanism; 50. Pre-cleaning equipment Detailed Implementation

[0031] The embodiments of this utility model will now be described with reference to the accompanying drawings.

[0032] like Figure 1 , Figure 2 As shown, this utility model proposes a tablet basket loading and unloading device for transferring tablet baskets before and after the pre-cleaning process. It includes a loading unit 10, an unloading unit 20, and a conveying mechanism 40. The loading unit 10 is adapted to the position of the inlet of the pre-cleaning equipment 50, and is equipped with a loading platform 11 and a loading mechanism 12 for transferring a fully loaded tablet basket to the pre-cleaning equipment 50. The unloading unit 20 is adapted to the position of the outlet of the pre-cleaning equipment 50, and is equipped with a unloading platform 21 and an unloading mechanism 23 for removing an empty tablet basket from the pre-cleaning equipment 50. The conveying mechanism 40 is configured corresponding to the loading unit 10 and the unloading unit 20, and is used to deliver a fully loaded tablet basket to the loading platform 11 and to remove an empty tablet basket placed on the unloading platform 21.

[0033] The transfer mechanism 40 in this application is used to transport the trays, allowing them to flow between multiple process devices. This transfer mechanism 40 is equipped with a support device for accommodating the trays and a robotic arm for gripping them. However, when interfacing with the existing pre-cleaning equipment 50, the robotic arm cannot directly reach into the inlet and outlet of the pre-cleaning equipment 50. This application, by setting up a loading unit 10 and a unloading unit 20, allows the robotic arm of the transfer mechanism 40 to place the fully loaded trays from the support device onto the loading platform 11, and then the loading mechanism 12 to further place the fully loaded trays into the pre-cleaning equipment 50. Subsequently, the unloading mechanism 23 removes the empty trays from the pre-cleaning equipment 50 and places them on the unloading platform 21. Finally, the robotic arm of the transfer mechanism 40 removes the empty trays from the unloading platform 21 and places them on the support device for transport to the next process, enabling the trays to flow between different processes. In this application, by setting up a loading unit 10 and a unloading unit 20, the transfer of wafer baskets is realized, which has high working efficiency and is less likely to cause damage to silicon wafers. It is set up to correspond to the pre-cleaning equipment 50, which solves the problem that the transmission mechanism 40 is unable to load or unload due to space, transmission route and its own structure. It is convenient to use and easy to control.

[0034] like Figure 2 As shown, the feeding mechanism 12 and the unloading mechanism 23 are both fixed on the same frame 30; the feeding platform 11 is located below the feeding mechanism 12, and the unloading platform 21 is located below the unloading mechanism 23; the frame 30 in this application can be a one-piece frame 30, or it can be a frame 30 with several strip-shaped slats, as long as the feeding mechanism 12 and the unloading mechanism 23 can be fixed on the frame 30; in this application, the frame 30 is a cuboid frame structure, and the feeding mechanism 12 and the unloading mechanism 23 are arranged opposite to each other at both ends of the frame 30, with a gap between them to avoid mutual interference; the feeding platform 11 and the unloading platform 21 can be connected to the frame 30 respectively, or they can be not connected to the frame 30; preferably, the feeding platform 11 and the unloading platform 21 in this application are not connected to the frame 30, and both the feeding platform 11 and the unloading platform 21 are equipped with rollers, making them easier to move and able to be moved to the outside of the frame 30 as needed.

[0035] like Figure 2 , Figure 3As shown, the loading platform 11 is equipped with a water tank 13 for holding a full-load wafer basket to meet the loading requirements of the pre-cleaning equipment 50. This allows the full-load wafer basket to be placed on the loading platform 11 for any period of time, while preventing the silicon wafers from being exposed to air for an extended period before loading. Preferably, the liquid in the water tank 13 is in an overflow state, ensuring that the silicon wafers in the wafer basket are always immersed in flowing liquid. The full-load wafer basket can be placed in the water tank 13 until the pre-cleaning equipment 50 issues a loading notification. Then, the full-load wafer basket is transferred to the pre-cleaning equipment 50 via the loading mechanism 12. This allows the loading unit 10 to better cooperate with the pre-cleaning equipment 50, controlling the rotation, stopping, and movement of the wafer basket to adapt to various working conditions. The water tank 13 in this application has a water trough and an overflow mechanism adapted to the wafer basket, and can automatically read the identification code of the full-load wafer basket. The water tank 13 can be any water tank 13 with this function in the prior art, and there is no limitation here. Preferably, the water tank 13 can hold a greater number of trays than the number of trays transported by the conveying mechanism 40 at one time, so that the trays can be temporarily stored in the water tank when the pre-cleaning equipment 50 does not issue a feeding notification, thus providing good protection.

[0036] In one specific embodiment, the transmission mechanism 40 uses an AGV (Automated Guided Vehicle) that can transport two fully loaded trays at a time, while the water tank 13 can also hold two fully loaded trays at the same time.

[0037] Furthermore, the loading platform 11 is also equipped with a wafer sorter 14, which is used to sort the silicon wafers in the full-load wafer basket before the loading mechanism 12 puts the full-load wafer basket into the pre-cleaning equipment 50. The water tank 13 and the wafer sorter 14 are arranged along the direction of the full-load wafer basket transmission. Specifically, the water tank 13 is located closer to the transmission mechanism 40, and the wafer sorter 14 is located closer to the pre-cleaning equipment 50. When the pre-cleaning equipment 50 issues a loading notification, the loading mechanism 12 takes the full-load wafer basket out of the water tank 13 and puts it into the wafer sorter 14. After being sorted by the wafer sorter 14, the full-load wafer basket is taken out and put into the pre-cleaning equipment 50. The function of the wafer sorter 14 is to sort the silicon wafers in the full-load wafer basket and adjust the posture of the silicon wafers to make them consistent, so as to better meet the requirements of the pre-cleaning operation. Therefore, the wafer sorter 14 can be any wafer sorter 14 with the same function in the prior art, and there is no limitation here.

[0038] like Figure 3As shown, the feeding mechanism 12 includes a clamping component 121, a primary lateral movement component 122, a secondary lateral movement component 123, and a lifting component 124. The clamping component 121 is mounted on the secondary lateral movement component 123, and the secondary lateral movement component 123 is mounted on the primary lateral movement component 122. The clamping component 121 is used to clamp a full-load tray. The lifting component 124 is used to drive the primary lateral movement component 122, the secondary lateral movement component 123, and the clamping component 121 to move up and down along the height direction of the frame 30. The secondary lateral movement component 123 is used to drive the full-load tray to move laterally, cooperating with the lifting component 124 to transfer the full-load tray from the water tank 13 to the tray sorter 14. The primary lateral movement component 122 is used to drive the secondary lateral movement component 123 and the clamping component 121 to continue moving laterally until they enter the pre-cleaning equipment 50, where they cooperate with the lifting component 124 to place the full-load tray into the pre-cleaning equipment 50.

[0039] The aforementioned lifting assembly 124 is located in the middle of the frame 30 along the basket conveying direction and is fixed to the frame 30 by a mounting plate. The lifting assembly 124 includes a lifting driver, a lifting guide rail 1241, and a lifting frame 1242. The lifting frame 1242 is connected to the driving end of the lifting driver and moves up and down along the lifting guide rail 1241 under the action of the lifting driver. The lifting assembly 124 can be a chain drive, a gear and rack drive, a cylinder, or other lifting device, whichever is selected according to actual needs. No specific requirements are made here. In this embodiment, the lifting assembly 124 is a gear and rack drive, and the first-stage transverse component 122 is installed on the lifting frame 1242.

[0040] In this application, the primary transverse component 122 includes a transverse driver 1221, a slide rail 1222, and a transverse support. The slide rail 1222 of the primary transverse component 122 is horizontally arranged along the basket conveying direction and fixed on the lifting frame 1242 of the lifting component 124. The lifting frame 1242 is preferably a plate-shaped structure with a certain length, and its length direction is the same as the length direction of the slide rail 1222 of the primary transverse component 122, so that the slide rail 1222 of the primary transverse component 122 is more stably fixed on the lifting frame 1242. The transverse support is connected to the driving end of the transverse driver 1221, so that the transverse support can move along the slide rail 1222 under the action of the transverse driver 1221. The primary transverse component 122 can be a chain drive, a gear and rack drive, a cylinder, or other transmission device. In this application, a cylinder drive is used, and the transverse driver 1221 is disposed at one end of the slide rail 1222.

[0041] In this application, the secondary lateral movement component 123 also includes a lateral movement driver 1221, a slide rail 1222, and a lateral movement bracket. The specific structures of the lateral movement driver 1221 and the slide rail 1222 are the same as those of the primary lateral movement component 122, and will not be described in detail here. The slide rail 1222 of the secondary lateral movement component 123 is fixed to the lateral movement bracket of the primary lateral movement component 122 and is parallel to the slide rail 1222 of the primary lateral movement component 122. When the primary lateral movement component 122 is not activated, one end of the slide rail 1222 of the secondary lateral movement component 123 is aligned with one end of the slide rail 1222 of the primary lateral movement component 122. After the primary lateral movement component 122 is activated, the primary lateral movement component 123... The transverse support of the transverse component 122 drives the slide rail 1222 of the secondary transverse component 123 to move along the slide rail 1222 of the primary transverse component 122, so that the slide rail 1222 of the secondary transverse component 123 extends out of the frame 30 and has sufficient length to extend into the pre-cleaning equipment 50; preferably, the slide rail 1222 of the secondary transverse component 123 is lower than the slide rail 1222 of the primary transverse component 122, and the clamping component 121 is connected to the slide rail 1222 of the secondary transverse component 123 through the transverse support and is set at the lower part of the slide rail 1222 of the secondary transverse component 123 so as to facilitate the clamping component 121 to clamp or lower the tray.

[0042] The aforementioned gripping assembly 121 includes grippers 1211 and gripping actuators 1212 for driving the grippers 1211 to move closer or further apart. The grippers 1211 are oriented downwards and their shape matches the outer wall of the tray, enabling them to clamp the tray when they move closer together and release it when they move further apart, thus achieving the gripping and releasing of the tray. The gripping assembly 121 is mounted on the transverse support of the secondary transverse assembly 123 and can move along the slide rail 1222 of the secondary transverse assembly 123. Preferably, the gripping actuators 1212 are cylinder-driven, and there are two grippers 1211 symmetrically arranged. Each gripper 1211 is connected to the piston of the cylinder of each gripping actuator 1212. Through the extension and retraction of the piston of the cylinder, the two grippers 1211 move towards each other or away from each other, thus achieving the gripping or separation of the grippers 1211.

[0043] like Figure 2 , Figure 4 As shown, the unloading mechanism 23 also includes a clamping component 121, a primary transverse component 122, a secondary transverse component 123, and a lifting component 124. Through the coordinated operation of the primary transverse component 122 and the secondary transverse component 123, the empty tray is removed from the pre-cleaning mechanism and placed on the unloading platform 21.

[0044] Since the unloading platform 21 is only used as a turnover platform, the empty tray is placed on the unloading platform 21 and then directly taken out by the transmission mechanism 40. Therefore, the unloading platform 21 requires less space and only needs to be able to support one tray. In a specific embodiment, unlike the loading unit 10, the unloading platform 21 is smaller than the loading platform 11. When the unloading platform 21 is in an empty state, it is placed on the side close to the pre-cleaning equipment 50. The lower part of the unloading platform 21 is also provided with a slide table 22. The unloading platform 21 is slidably connected to the slide table 22, so that the unloading platform 21 can move along the slide table 22 to be aligned and connected with the transverse mechanism and the transmission mechanism 40 respectively. It is understood that the slide table 22 is set along the conveying direction of the empty tray. When the unloading platform 21 moves to the side near the pre-cleaning equipment 50, it can be aligned and connected with the unloading mechanism 23, making it convenient for the unloading mechanism 23 to place the empty tray on the unloading platform 21. When the unloading platform 21 moves to the side near the transmission mechanism 40, it can be aligned and connected with the transmission mechanism 40, making it convenient for the transmission mechanism 40 to remove the tray. By setting the slide table 22, the position of the unloading platform 21 can be adjusted according to the position of the transmission mechanism 40 to adapt to the conveying route of the empty tray. Preferably, the length of the slide rail 1222 of the unloading mechanism 23 can be set as needed, and can be less than the length of the slide rail 1222 of the loading mechanism 12, as long as it can drive the empty tray to the position of the unloading platform 21, so as to reduce space occupation. The bottom of the slide table 22 is provided with rollers to facilitate the adjustment of the position of the slide table 22.

[0045] In one specific embodiment, when the loading mechanism 12 removes the empty tray from the pre-cleaning equipment 50 and places it on the unloading platform 21, there is an angular difference between the orientation of the tray and the robotic arm of the transmission mechanism 40 and the tray support device. To solve this problem, this application provides a rotating platform 211 on the upper part of the unloading platform 21. The rotating platform 211 is used to place the empty tray. A rotary motor is provided inside the unloading platform 21. The output shaft of the rotary motor is connected to the rotating platform 211, driving the rotating platform 211 to rotate and change the orientation of the empty tray on its upper part to adapt to the transmission mechanism 40.

[0046] Furthermore, the output shaft of the rotary motor is connected to one end of the rotary table 211, causing the rotary table 211 to rotate eccentrically. This allows the position of the empty tray to be adjusted while rotating, ensuring it is compatible with the transmission mechanism 40. Preferably, the rotary table 211 is equipped with a positioning block to position and limit the empty tray, preventing it from moving during rotation.

[0047] In one specific embodiment, the direction of the support device on the transmission mechanism 40 is 90 degrees to the direction when the empty tray is placed on the rotary table 211, and there is a misalignment in the transmission direction; the rotary motor drives the rotary table 211 to rotate 90 degrees, thereby rotating the empty tray 90 degrees and displacing it to align with the support device on the transmission mechanism 40, so that the transmission mechanism 40 can remove the empty tray from the unloading platform 21 and place it on the support device.

[0048] This application also proposes a production line equipped with a tray loading and unloading device as proposed in this application, and a control system. The control system is electrically connected to the loading unit 10, the unloading unit 20, the pre-cleaning equipment 50 and the transmission mechanism 40, respectively, so as to achieve precise coordination between the various mechanisms and realize automated loading and unloading.

[0049] The working process of this example is as follows:

[0050] Feeding process: The pre-cleaning equipment 50 issues a material preparation notification, the control system controls the transmission mechanism 40 to run and reach the preset position, and docks with the feeding platform 11; the transmission mechanism 40 puts the full-loaded tray into the water tank 13 of the feeding unit 10, the water tank 13 automatically reads the identification code of the full-loaded tray and verifies the identification code with the pre-cleaning equipment 50 through network interaction. After verification, the feeding unit 10 initiates a feeding request, the pre-cleaning equipment 50 prepares for feeding and issues a feeding notification; the feeding mechanism 12 runs, takes the full-loaded tray out of the water tank 13 and puts it into the tray sorter 14, the tray sorter 14 performs the tray sorting operation and issues a tray sorting completion notification, the feeding mechanism 12 continues to run, takes out the full-loaded tray and puts it into the pre-cleaning equipment 50, and the feeding mechanism 12 resets after the feeding is completed;

[0051] Unloading process: The pre-cleaning equipment 50 initiates an unloading notification, the control system controls the transmission mechanism 40 to run and reach the preset position, and docks with the unloading platform 21; the unloading unit 20 initiates an unloading request to the pre-cleaning equipment 50, the pre-cleaning equipment 50 prepares for unloading and issues an unloading permission notification; the unloading mechanism 23 takes out a tray from the pre-cleaning equipment 50 and places it on the rotary table 211. After the rotary table 211 rotates by a set angle, the unloading platform 21 slides along the slide table 22 to another preset position, the transmission mechanism 40 takes out the empty tray and puts it into the support device; the unloading unit 20 resets.

[0052] The loading and unloading processes can be run independently or sequentially, or they can be continuously loaded or unloaded, depending on the usage requirements. In this embodiment, each loading and unloading process is repeated twice to achieve loading of two full-load trays and unloading of two empty trays each time.

[0053] This application sets up a loading unit and a unloading unit, so that the transmission mechanism is no longer limited by space, transmission route and its own structure, realizing the turnover of wafer baskets, with high working efficiency and less risk of silicon wafer damage; the overall structure is simple, occupies little space, and is easy to control and use. Through the coordinated operation of the pre-cleaning mechanism, loading unit, unloading unit and transmission mechanism, automated loading and unloading are realized, reducing the labor intensity of workers and reducing production costs.

[0054] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made in accordance with the claims of this utility model should still fall within the patent coverage of this utility model.

Claims

1. A feeding and unloading device for sheet baskets, characterized in that, include: The feeding unit is equipped with a feeding platform and a feeding mechanism for transferring a fully loaded tray to the pre-cleaning equipment. The unloading unit is equipped with an unloading platform and an unloading mechanism for removing empty trays from the pre-cleaning equipment; A transmission mechanism is provided corresponding to the loading unit and the unloading unit, for delivering the full-loaded tray to the loading platform and removing the empty tray placed on the unloading platform.

2. The sheet basket feeding and unloading device according to claim 1, characterized in that: The feeding mechanism and the unloading mechanism are both fixed on the same frame; the feeding platform is located below the feeding mechanism, and the unloading platform is located below the unloading mechanism.

3. The sheet basket feeding and unloading device according to claim 2, characterized in that: The loading platform is equipped with a water tank for placing the fully loaded tray; the conveying mechanism is capable of placing the fully loaded tray into the water tank.

4. The sheet basket feeding and unloading device according to claim 3, characterized in that: The loading platform is also equipped with a wafer sorter, which is used to sort the silicon wafers in the full-load wafer basket before the loading mechanism puts the full-load wafer basket into the pre-cleaning equipment; the water tank and the wafer sorter are arranged along the direction of the full-load wafer basket transport.

5. A tray feeding and unloading device according to any one of claims 2-4, characterized in that: Both the loading mechanism and the unloading mechanism include a clamping component, a primary lateral movement component, a secondary lateral movement component, and a lifting component; the clamping component is disposed on the secondary lateral movement component, the secondary lateral movement component is disposed on the primary lateral movement component; the primary lateral movement component is disposed on the lifting component, and the lifting component is disposed on the frame.

6. The sheet basket feeding and unloading device according to claim 5, characterized in that: Both the primary lateral movement component and the secondary lateral movement component include a lateral movement driver, a slide rail, and a lateral movement bracket, with the two slide rails arranged in parallel; the slide rail of the secondary lateral movement component is fixed to the lateral movement bracket of the primary lateral movement component; the clamping component is fixed to the lateral movement bracket of the secondary lateral movement component.

7. A tray feeding and unloading device according to any one of claims 1-4 and 6, characterized in that: The unloading platform is smaller than the loading platform, and the bottom of the unloading platform is also provided with a sliding table, and the unloading platform is slidably connected to the sliding table.

8. The sheet basket feeding and unloading device according to claim 7, characterized in that: The upper part of the unloading platform is provided with a rotating table, and the inner side of the unloading platform is provided with a rotary motor. The output shaft of the rotary motor is connected to the rotating table, driving the rotating table to rotate so that the orientation of the empty tray is adapted to the transmission mechanism.

9. The sheet basket feeding and unloading device according to claim 8, characterized in that: The output shaft is connected to one end of the rotary table, causing the rotary table to rotate eccentrically.

10. A production line, characterized in that: The device is equipped with a tray loading and unloading device as described in any one of claims 1-9, and further includes a control system, which is electrically connected to the loading unit, the unloading unit, the pre-cleaning equipment and the transmission mechanism respectively.

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