Carrying manipulator for 8-inch wafer box

Abstract

The utility model provides a carrying manipulator for 8-inch wafer cassettes, which solves the problem that the existing wafer cassette carrying cannot meet the multi-angle requirement, and mainly comprises a base, a manipulator big arm, a manipulator small arm and an execution piece, one end of the base is vertically and rotatably connected with an exposed driving shaft, and the other end of the base is internally and fixedly provided with a driving piece; a first driven wheel is coaxially fixed to the bottom end of the driving shaft, a second driven wheel is coaxially and rotatably connected to the top end of the driving shaft, the driving part can independently drive the first driven wheel and the second driven wheel to rotate, and the large and small arms of the manipulator are in belt transmission with the execution part sequentially through the first driven shaft and the second driven shaft. The execution part comprises a supporting seat and supporting arms oppositely fixed on two sides of the supporting seat, embedded tables are fixed on opposite surfaces of the two supporting arms, and a positioning opening for limiting an external wafer box is concavely formed in the top surface of each embedded table.

Description

Technical Field

[0001] This utility model relates to the field of wafer cassette handling technology, and in particular to a handling robot for 8-inch wafer cassettes. Background Technology

[0002] In semiconductor manufacturing, wafer boxes primarily serve to place and transport wafers. To simplify transportation and minimize the risk of contamination, chip manufacturers utilize wafer boxes to handle and store wafers.

[0003] Currently, most existing wafer cassette handling methods rely on manual handling or simple linkage structures to achieve mechanized operations. However, the actual wafer cassette handling process has various angle requirements. Therefore, we propose a handling robot for 8-inch wafer cassettes to solve the above problems. Utility Model Content

[0004] The technical problem to be solved by this utility model is to overcome the defects of the existing technology. This utility model proposes a handling robot for 8-inch wafer cassettes that can rotate in multiple directions and meet the needs of handling wafer cassettes at various angles.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a handling robot for an 8-inch wafer cassette, comprising: a base, a robot arm, a robot forearm, and an actuator. One end of the base is vertically rotatably connected to an exposed drive shaft, and the other end has a drive actuator fixed internally. A first driven wheel is coaxially fixed to the bottom end of the drive shaft, and a second driven wheel is coaxially rotatably connected to its top end. The drive actuator can independently drive the first and second driven wheels to rotate. One end of the robot arm is coaxially fixed to the top of the drive shaft, and the other end is vertically rotatably connected to an exposed first driven shaft. A third driven wheel is coaxially fixed at the bottom of the drive shaft. The second driven wheel and the third driven wheel are driven by a belt. One end of the manipulator arm is rotatably connected to the top of the first driven shaft and coaxially fixed to a fifth driven wheel. The other end is coaxially fixed to the actuator via a second driven shaft that is rotatably connected. A fourth driven wheel is coaxially fixed at the bottom of the second driven shaft. The fourth driven wheel and the fifth driven wheel are driven by a belt. The actuator includes a support base and support arms fixed opposite to each other on both sides of the support base. The two support arms are fixed with a mounting plate on opposite sides. The top surface of each mounting plate is recessed to provide a positioning port for limiting the external wafer cassette.

[0006] Furthermore, the driving component includes a first motor and a second motor fixed in the base, and a first driving wheel and a second driving wheel rotatably connected in the base. The output end of the first motor is coaxially fixed with the first driving wheel, and the first driving wheel is belt driven with the first driven wheel. The output end of the second motor is coaxially fixed with the second driving wheel, and the second driving wheel is synchronously driven with the second driven wheel.

[0007] Furthermore, the bottom of the second driven wheel is also fixedly connected to a connecting block of an exposed base. The connecting block can be embedded in the robotic arm. A synchronous wheel is also fixed on its bottom surface. The synchronous wheel is belt-driven with the second driving wheel.

[0008] Furthermore, the first motor is vertically inverted, with its side end fixedly connected to the inner wall of the base side, and the second motor is vertically upright, with its bottom surface fixedly connected to the inner bottom of the base. The first motor and the second motor are independent of each other.

[0009] Furthermore, both the upper arm and the lower arm of the robotic arm are elliptical structures, and their inner diameters decrease sequentially in the direction facing the actuator. The actuator is fixed to the end of the lower arm of the robotic arm away from the base.

[0010] Furthermore, the support base includes a base plate and a back plate vertically fixed to the base plate. The base plate is fixedly connected to the bottom end of the robotic arm away from the base. A reinforcing ladder integrated with the base plate is also fixed to the back of the back plate. The two support arms are vertically fixed to both sides of the back plate.

[0011] Furthermore, a first photoelectric sensor is provided on the top of the back plate, a laser sensor is fixed on the bottom plate, a seat sensor is fixed inside the positioning port of both support arms, and a second photoelectric sensor is fixed at the bottom of the end of one of the support arms.

[0012] Compared with the prior art, the beneficial effects of this utility model include: by driving multiple continuous driven shafts through the driving component, the robotic arm and the robotic forearm can be driven to rotate independently. With the synchronous cooperation of belt transmission and synchronous pulley rotation, the actuator of the end effector for lifting and placing wafer boxes can achieve multi-angle rotation effect. The overall structure is novel, practical and reliable. Attached Figure Description

[0013] The disclosure of this utility model is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. In the drawings, the same reference numerals are used to refer to the same parts. Wherein:

[0014] Figure 1 The schematic diagram shows an overall structural schematic diagram according to one embodiment of the present invention;

[0015] Figure 2 The schematic diagram shows an internal structure of a base according to one embodiment of the present invention;

[0016] Figure 3The schematic diagram shows the internal structure of the robotic arm according to one embodiment of the present invention.

[0017] Figure 4 The schematic diagram shows a schematic representation of the inner wall structure of the forearm of a robotic arm according to one embodiment of the present invention;

[0018] Figure 5 The diagram schematically shows an enlarged view of a partial structure of an actuator according to one embodiment of the present invention.

[0019] Labels in the diagram: 1. Base; 2. Robot arm; 3. Robot arm; 4. Actuator; 5. Drive shaft; 7. First driven wheel; 8. Second driven wheel; 9. First driven shaft; 10. Third driven wheel; 11. Support base; 12. Support arm; 13. Positioning port; 14. First motor; 15. Second motor; 16. First drive wheel; 17. Second drive wheel; 18. Connecting block; 19. Synchronous wheel; 20. Base plate; 21. Back plate; 22. Reinforced platform; 23. First photoelectric sensor; 24. Second photoelectric sensor; 25. Laser sensor; 26. Seating sensor; 27. Second driven shaft; 28. Fourth driven wheel; 29. ​​Fifth driven wheel. Detailed Implementation

[0020] It is readily understood that, based on the technical solution of this utility model, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of this utility model. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative descriptions of the technical solution of this utility model and should not be considered as the entirety of this utility model or as limitations or restrictions on the technical solution of this utility model.

[0021] According to one embodiment of the present invention, in conjunction with Figures 1-5 As shown.

[0022] like Figure 1 As shown, in this embodiment, a handling robot for an 8-inch wafer cassette includes: a base 1, a robot arm 2, a robot forearm 3, and an actuator 4. One end of the base 1 is vertically rotatably connected to an exposed drive shaft 5, and the other end is internally fixed with a drive actuator. The bottom end of the drive shaft 5 is coaxially fixed with a first driven wheel 7, and its top end is coaxially rotatably connected with a second driven wheel 8. The drive actuator can independently drive the first driven wheel 7 and the second driven wheel 8 to rotate.

[0023] like Figure 2As shown, for the specific driving process of the driving component, the driving component includes a first motor 14 and a second motor 15 fixed in the base 1, and a first driving wheel 16 and a second driving wheel 17 rotatably connected in the base 1. The output end of the first motor 14 is coaxially fixed with the first driving wheel 16, the first driving wheel 16 is belt driven with the first driven wheel 7, the output end of the second motor 15 is coaxially fixed with the second driving wheel 17, and the second driving wheel 17 is synchronously driven with the second driven wheel 8.

[0024] Furthermore, the first motor 14 is vertically inverted, with its side end fixedly connected to the inner wall of the base 1. The second motor 15 is vertically upright, with its bottom surface fixedly connected to the inner bottom of the base 1. The first motor 14 and the second motor 15 are independent of each other. The robotic arm 2 and the robotic forearm 3 are both elliptical structures, with their inner diameters decreasing sequentially in the direction facing the actuator 4. The actuator 4 is fixed to the end of the robotic forearm 3 away from the base 1.

[0025] With the above structure, after the first motor 14 rotates in conjunction with the first drive wheel 16, it can drive the first driven wheel 7 at the bottom of the drive shaft 5 to rotate, thereby realizing the rotation of the robotic arm 2. Similarly, in order to cooperate with the subsequent independent robotic forearm 3, a second driven wheel 8 is rotatably connected to the top of the drive shaft 5 through a synchronous wheel 19 and a connecting block 18, so as to realize the independent driving rotation at the upper and lower ends of the same drive shaft 5.

[0026] like Figure 3 As shown, in the transmission process of the robotic arm 2, one end of the robotic arm 2 is coaxially fixed to the top of the drive shaft 5, and the other end is vertically rotatably connected to an exposed first driven shaft 9. The bottom end of the first driven shaft 9 is coaxially fixed to a third driven wheel 10. The second driven wheel 8 and the third driven wheel 10 are driven by a belt. The bottom of the second driven wheel 8 is also fixedly connected to a connecting block 18 of an exposed base 1. The connecting block 18 can be embedded in the robotic arm 2. The bottom surface of the connecting block 18 is also fixed to a synchronous wheel 19. The synchronous wheel 19 is driven by a belt with the second driving wheel 17.

[0027] like Figure 4 As shown, in the transmission process of the robotic arm 3, one end of the robotic arm 3 is rotatably connected to the top of the first driven shaft 9 and a fifth driven wheel 29 is coaxially fixed thereon, and the other end is coaxially fixed to the actuator 4 through a second driven shaft 27 rotatably connected. A fourth driven wheel 28 is coaxially fixed to the bottom of the second driven shaft 27, and the fourth driven wheel 28 and the fifth driven wheel 29 are driven by a belt.

[0028] With the above structure, in order to achieve free rotation of the subsequent actuator 4, this utility model also adds a first driven shaft 9 for the end of the robotic arm 2 away from the base 1. The first driven shaft 9 is inserted into and rotatably connected to one end of the robotic arm 3, while the other end of the robotic arm 3 is rotatably connected to a second driven shaft 27. The two driven shafts are coaxially fixed with a fourth driven wheel 28 and a fifth driven wheel 29 at the same horizontal position, and the two driven wheels are belt driven, so that the driving effect of the second motor 15 is finally converted into the rotation of the actuator 4 at the end of the robotic arm 3.

[0029] like Figure 5 As shown, the specific structure of the actuator 4 includes a support base 11 and support arms 12 fixed opposite to each other on both sides of the support base 11. Each support arm 12 has a recessed platform on its opposite side. Each platform has a recessed positioning port 13 on its top surface for limiting the position of an external wafer cassette. Specifically, in this embodiment, the support base 11 includes a base plate 20 and a back plate 21 vertically fixed to the base plate 20. The base plate 20 is fixedly connected to the bottom end of the robotic arm 3 away from the base 1. A reinforcing ladder 22, integrally formed with the base plate 20, is also fixed to the back of the back plate 21. The two support arms 12 are vertically fixed to both sides of the back plate 21. Further, a first photoelectric sensor 23 is provided on the top of the back plate 21, a laser sensor 25 is fixed on the base plate 20, and a seat sensor 26 is fixed to the bottom of the positioning port 13 of each support arm 12. A second photoelectric sensor 24 is also fixed to the bottom of the end of one of the support arms 12.

[0030] The actuator 4 is mainly used for gripping and placing products. Its structure is equipped with various sensors for feedback on abnormal problems and safety detection during the operation of the handling robot. Specifically, the first photoelectric sensor 23 detects whether there is a product on the end effector unit of the robot; the second photoelectric sensor 24 detects whether there is already a product at the product placement point in front, preventing the handling robot from re-inserting; the seating sensor 26 detects whether the product is gripped correctly, whether the ears on both sides of the product are fully placed in the slots, and whether the product is tilted during handling; the laser sensor 25 measures the height difference between the two sensors, representing the distance the end effector unit of the handling robot descends or rises when placing and gripping products. This allows for the detection of whether the placement and gripping points are correctly positioned.

[0031] The technical scope of this utility model is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this utility model, and all such modifications and variations should fall within the protection scope of this utility model.

Claims

1. A handling robot for an 8-inch wafer cassette, characterized in that, include: The system comprises a base, a robotic arm, a robotic forearm, and actuators. One end of the base is vertically rotatably connected to an exposed drive shaft, while the other end has a drive actuator fixed internally. A first driven wheel is coaxially fixed to the bottom of the drive shaft, and a second driven wheel is coaxially rotatably connected to its top. The drive actuator can independently drive both the first and second driven wheels to rotate. One end of the robotic arm is coaxially fixed to the top of the drive shaft, and the other end is vertically rotatably connected to an exposed first driven shaft. A third driven wheel is coaxially fixed to the bottom of the first driven shaft, and the second driven wheel… With the third driven wheel belt drive, one end of the robotic arm is rotatably connected to the top of the first driven shaft and coaxially fixed with a fifth driven wheel, and the other end is rotatably connected to the second driven shaft and coaxially fixed with the actuator. A fourth driven wheel is coaxially fixed at the bottom of the second driven shaft. The fourth driven wheel and the fifth driven wheel are belt driven. The actuator includes a support base and support arms fixed opposite to each other on both sides of the support base. The two support arms are fixed with a platform on opposite sides. The top surface of each platform is recessed to provide a positioning port for limiting the external wafer cassette.

2. The robotic arm for handling 8-inch wafer cassettes according to claim 1, characterized in that: The driving component includes a first motor and a second motor fixed in the base, and a first driving wheel and a second driving wheel rotatably connected in the base. The output end of the first motor is coaxially fixed with the first driving wheel, and the first driving wheel and the first driven wheel are driven by a belt. The output end of the second motor is coaxially fixed with the second driving wheel, and the second driving wheel and the second driven wheel are driven synchronously.

3. The robotic arm for handling 8-inch wafer cassettes according to claim 2, characterized in that: The bottom of the second driven wheel is also fixedly connected to a connecting block of an exposed base. The connecting block can be embedded in the robotic arm. A synchronous wheel is also fixed on its bottom surface. The synchronous wheel is belt-driven with the second driving wheel.

4. A handling robot for an 8-inch wafer cassette according to claim 2, characterized in that: The first motor is vertically inverted, and its side end is fixedly connected to the inner wall of the base. The second motor is vertically upright, and its bottom surface is fixedly connected to the inner bottom of the base. The first motor and the second motor are independent of each other.

5. A handling robot for an 8-inch wafer cassette according to claim 1, characterized in that: Both the upper arm and the lower arm of the robotic arm are elliptical structures, and their inner diameters decrease sequentially in the direction facing the actuator. The actuator is fixed to the end of the lower arm of the robotic arm away from the base.

6. A handling robot for an 8-inch wafer cassette according to claim 1, characterized in that: The support base includes a base plate and a back plate vertically fixed to the base plate. The base plate is fixedly connected to the bottom end of the robotic arm away from the base. A reinforcing ladder integrated with the base plate is also fixed to the back of the back plate. The two support arms are vertically fixed to both sides of the back plate.

7. A handling robot for an 8-inch wafer cassette according to claim 6, characterized in that: The top of the back plate is also provided with a first photoelectric sensor, the bottom plate is also fixed with a laser sensor, the bottom of the positioning port of both support arms is fixed with a seat sensor, and the bottom of the end of one of the support arms is also fixed with a second photoelectric sensor.

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