Nickel cup collector and neutralizer

Abstract

The utility model relates to a nickel cup collector and a neutralizer. The nickel cup collector comprises a nickel cup body, a plate-shaped support and a fixing part, the nickel cup body is of a non-closed-loop cylindrical structure, the plate-shaped support is arranged at the bottom of the nickel cup body, the two ends of the plate-shaped support are connected with the side wall of the nickel cup body, and the fixing part is used for fixedly connecting the plate-shaped support and the porcelain cup discharge chamber. During use, the two ends of the plate-shaped support are connected with the side walls of the nickel cup body respectively, the plate-shaped support is arranged at the bottom of the nickel cup body, and the plate-shaped support and the porcelain cup discharge chamber are fixed together through the fixing piece, so that positioning and fixing positions of the plate-shaped support and the porcelain cup discharge chamber are accurate; the nickel cup collector is prevented from being deformed in the use process, so that the structural stability of the neutralizer is improved.

Description

Technical Field

[0001] This application relates to the field of vacuum coating equipment technology, and in particular to a nickel cup collector and neutralizer for a vacuum evaporation coating machine. Background Technology

[0002] The neutralizer in current vacuum coating machines has two main functions: first, to provide the necessary electrons when the ion source is started, thus acting as an igniter that is easy to discharge; and second, to neutralize the ion beam during irradiation, so as to avoid the divergence of the ion beam and the disorder of the beam shape caused by the space charge force (repulsion force) of positive ions.

[0003] Existing technologies include current collectors that use nickel-plated steel clips to hold metal oxide cathodes, but this holding method has the drawbacks of inaccurate positioning and easy deformation.

[0004] Therefore, how to improve the structural stability of the neutralizer is a technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0005] This application provides a nickel cup collector and a neutralizer to improve the structural stability of the neutralizer.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A nickel cup collector is provided for use with a ceramic cup discharge chamber to uniformly collect electrons inside the ceramic cup discharge chamber. The nickel cup collector includes a nickel cup body, a plate-shaped support, and a fixing member. The nickel cup body is a non-closed-loop cylindrical structure. The plate-shaped support is arranged at the bottom of the nickel cup body, and both ends of the plate-shaped support are respectively connected to the side wall of the nickel cup body. The fixing member is used to fix the plate-shaped support to the ceramic cup discharge chamber.

[0008] Optionally, in the above-mentioned nickel cup collector, the plate-shaped support is a centrally symmetrical structure, and the geometric center of the plate-shaped support is located on the axis of the cylindrical structure.

[0009] Optionally, in the nickel cup collector described above, the cylindrical structure includes an axially extending opening, the width direction of which is parallel to the length direction of the plate-shaped support.

[0010] Optionally, in the above-mentioned nickel cup collector, the nickel cup body and the plate-shaped support are an integral structure.

[0011] Optionally, in the above-mentioned nickel cup collector, the fixing member is a fixing nut, and the plate-shaped bracket has a fixing hole that matches the fixing nut.

[0012] Optionally, in the above-mentioned nickel cup collector, the fixing nut and the plate-shaped support are separate structures, and the center of the fixing hole coincides with the center of the nickel cup body.

[0013] Optionally, in the nickel cup collector described above, the fixing nut is welded to the plate-shaped support.

[0014] Optionally, in the above-mentioned nickel cup collector, the fixing nut and the plate-shaped support are an integral structure.

[0015] Optionally, in the above-mentioned nickel cup collector, the connection position between the plate-shaped support and the side wall of the nickel cup body is set as an arc structure, the edge of the arc structure is set as a rounded corner, and the radius of the rounded corner is 0.5mm to 3mm.

[0016] The nickel cup collector provided by this utility model has two ends of a plate-shaped support connected to the side wall of the nickel cup body, and the plate-shaped support is arranged at the bottom of the nickel cup body. The fixing component fixes the plate-shaped support and the ceramic cup discharge chamber together, thereby making the positioning of the plate-shaped support and the ceramic cup discharge chamber accurate and the fixing position precise, avoiding deformation of the nickel cup collector during use, and thus improving the structural stability of the neutralizer.

[0017] This application also provides a neutralizer, including a ceramic cup discharge chamber and a nickel cup collector as described in any of the above embodiments, wherein the plate-shaped support of the nickel cup collector is fixedly connected to the ceramic cup discharge chamber.

[0018] The neutralizer provided by this utility model adopts all the technical solutions of all the above embodiments, and therefore has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described in detail here. Attached Figure Description

[0019] The accompanying drawings, incorporated in and forming part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, those skilled in the art can obtain other drawings based on these drawings without creative effort. One or more embodiments are illustrated by way of example through the corresponding images in the accompanying drawings. These exemplary descriptions do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings represent similar elements. Unless otherwise stated, the figures in the drawings do not constitute a limitation on scale.

[0020] Figure 1 This is a schematic diagram of the structure of the nickel cup collector provided in the embodiments of this application;

[0021] Figure 2 This is a schematic diagram of the structure of the ceramic cup discharge chamber provided in the embodiments of this application;

[0022] Figure 3 A schematic diagram illustrating the positional relationship between the nickel cup and the ceramic cup in the neutralizer provided in this embodiment of the application;

[0023] Figure 4 This is a schematic diagram of the bottom cross-section of the nickel cup collector provided in an embodiment of this application;

[0024] Explanation of reference numerals in the attached figures:

[0025] The components include a ceramic discharge chamber 100, a nickel cup body 200, an opening 201, a plate-shaped support 300, a connecting part 301, a fixing part 400, a first straight line 500, and a second straight line 600. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0027] The following disclosure provides numerous different embodiments or examples for implementing various structures of this application. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, various specific examples of processes and materials are provided in this application; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0028] For ease of description, spatial relative terms may be used in the text to describe the relative position or movement of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "front," "back," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure undergoes a positional flip, orientation change, or change of motion, these directional indications will change accordingly. For instance, an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0029] To address the problems of deformation and decreased electron uniformity in the nickel cup of neutralizers in the prior art after long-term use and maintenance, this application provides a neutralizer nickel cup device with a plate-shaped support and fasteners integrated at the bottom and connected to the nickel cup body at both ends.

[0030] See Figure 1 and Figure 2 This application provides a nickel cup collector for use with a ceramic cup discharge chamber 100 to uniformly collect electrons inside the ceramic cup discharge chamber 100. The nickel cup collector includes a nickel cup body 200, a plate-shaped support 300, and a fixing member 400. The nickel cup body 200 is a non-closed-loop cylindrical structure. The plate-shaped support 300 is arranged at the bottom of the nickel cup body 200, and both ends of the plate-shaped support 300 are respectively connected to the side wall of the nickel cup body 200. The fixing member 400 is used to fix the plate-shaped support 300 to the ceramic cup discharge chamber 100.

[0031] The nickel cup collector provided by this utility model has two ends of the plate-shaped support 300 connected to the side wall of the nickel cup body 200, and the plate-shaped support 300 is arranged at the bottom of the nickel cup body 200. The fixing member 400 fixes the plate-shaped support 300 and the ceramic cup discharge chamber 100 together, so that the plate-shaped support 300 and the ceramic cup discharge chamber 100 are accurately positioned and precisely fixed, avoiding deformation of the nickel cup collector during use, thereby improving the structural stability of the neutralizer.

[0032] This nickel cup collector is designed to work in conjunction with the ceramic cup discharge chamber 100. Its unique structure promotes a uniform electron distribution within the chamber, thereby improving the neutralizer's performance and optimizing the ion beam neutralization effect. Specifically, by optimizing the electron distribution, it reduces ion beam divergence and beam shape disorder, thus improving coating quality and efficiency. Simultaneously, the nickel cup collector design enhances the neutralizer's durability and reliability, reduces maintenance costs, and provides strong support for the stable operation of the vacuum coating machine.

[0033] To optimize the above technical solution, the plate-shaped support 300 is a centrally symmetrical structure, and the geometric center of the plate-shaped support 300 is located on the axis of the cylindrical structure.

[0034] This scheme further clarifies the structural features of the plate-shaped support 300. This design aims to ensure the balance and stability of the nickel cup collector during operation, avoid vibration and deviation caused by structural asymmetry, and make the mechanical and thermal stresses experienced by the nickel cup collector more uniform when it expands due to heat.

[0035] This solution employs a centrally symmetrical plate-shaped support 300 design, which enables the nickel cup collector to maintain better balance and stability during operation. This reduces performance degradation and failure risk caused by vibration and deviation, improves the neutralizer's operating efficiency, and extends its service life.

[0036] To optimize the above technical solution, the cylindrical structure includes an axially extending opening 201, the width of which is parallel to the length of the plate-shaped support 300. This design aims to optimize the electron flow path of the nickel cup collector, improve the uniformity of electron distribution, and enhance the flexibility of the structure.

[0037] refer to Figure 4 At the bottom of the nickel cup collector, the cross-section formed by the cylindrical structure and the plate-shaped support 300 is arc-shaped. Within the cross-section, the direction connecting the midpoint of the chord formed by the opening 201 to the center of the cross-section is the first straight line 500, and the direction extending along the length of the plate-shaped support 300 and passing through the center of the circle is the second straight line 600. The first straight line 500 and the second straight line 600 are perpendicular.

[0038] The plate-shaped support 300 is located at the bottom of the nickel cup body 200, and the centerline of the plate-shaped support 300 passes precisely through the center of the opening 201 of the nickel cup body 200 and is connected to the opposite side wall of the nickel cup body 200. This design not only ensures a stable connection between the plate-shaped support 300 and the nickel cup body 200, but also optimizes the overall mechanical structure.

[0039] During operation, when the nickel cup collector is subjected to external mechanical forces or thermal expansion, the alignment of the length direction of the plate-shaped support 300 with the width direction of the opening 201, and the connection method between the plate-shaped support 300 and the sidewall, allow the entire structure to evenly distribute and bear these stresses. Mechanical stress is evenly transmitted to all parts of the nickel cup body 200 through the plate-shaped support 300, while thermal stress is effectively alleviated due to the good contact between the plate-shaped support 300 and the nickel cup body 200. This design ensures the stability and reliability of the nickel cup collector in complex working environments.

[0040] The design of the opening 201 in this scheme allows electrons to enter and exit the nickel cup body 200 more smoothly, reducing electron accumulation and scattering inside, thereby improving the uniformity of electron distribution. At the same time, the parallel relationship between the opening 201 and the plate-shaped support 300 in the length direction significantly improves the structural stability of the nickel cup collector and extends the service life of the product.

[0041] To optimize the above technical solution, the nickel cup body 200 and the plate-shaped support 300 are integrated into a single structure. This design aims to improve the overall integrity and stability of the structure.

[0042] Specifically, the nickel cup body 200 and the plate-shaped support 300 can be welded together. In order to avoid the solder being different from the material of the nickel cup body 200 and to ensure the production quality of the nickel cup collector, the solder is preferably made of nickel.

[0043] The integrated structure design of this solution reduces the risk of performance degradation and failure due to loose or damaged connections. At the same time, this design enhances the overall integrity and stability of the structure, improves the durability and reliability of the nickel cup collector, and simplifies the manufacturing process and reduces costs.

[0044] To optimize the above technical solution, the fixing component 400 is a fixing nut, and the plate-shaped bracket 300 has fixing holes that are compatible with the fixing nut. This design aims to provide a simple and reliable fixing method to ensure a stable connection between the nickel cup collector and the ceramic cup discharge chamber 100.

[0045] In use, the plate-shaped support 300 of the nickel cup collector needs to be fixedly connected to the ceramic cup discharge chamber 100 with screws and nuts. The design that the two ends of the plate-shaped support 300 are respectively connected to the side wall of the nickel cup body 200 can avoid axial and radial bending deformation when the screws and nuts are fixed, thus avoiding affecting the collection effect.

[0046] The connection between the fixing nut and the fixing hole allows the nickel cup collector to be easily and quickly connected to the ceramic cup discharge chamber 100, and the connection is firm and reliable. This design not only improves the convenience of installation and disassembly, but also ensures the stability and safety of the neutralizer during operation.

[0047] To optimize the above technical solution, the fixing nut and the plate-shaped bracket 300 are separate structures, and the center of the fixing hole coincides with the center of the nickel cup body 200.

[0048] Specifically, the ceramic cup discharge chamber 100 is also provided with mounting holes that cooperate with screws and nuts. In use, the operator places the nickel cup collector with plate-shaped bracket 300 inside the ceramic cup discharge chamber 100 and uses screws and nuts to cooperate with the fixing holes and mounting holes to fix the ceramic cup discharge chamber 100 and the nickel cup collector together.

[0049] By employing a split-structure fixing nut and plate-shaped bracket 300, and ensuring that the center of the fixing hole coincides with the center of the nickel cup body 200, the connection between the nickel cup collector and the ceramic cup discharge chamber 100 can be made more accurate and stable. This design reduces the risk of failure due to inaccurate connection. At the same time, the split-structure design also allows the fixing nut and plate-shaped bracket 300 to be replaced and repaired separately, improving the maintainability and service life of the product.

[0050] To optimize the above technical solution, the fixing nut is welded to the plate-shaped bracket 300.

[0051] Specifically, the plate-shaped support 300 is preferably made of nickel. In order to avoid any discrepancy between the solder and the material of the plate-shaped support 300 and to ensure the production quality of the nickel cup collector, the solder used when welding the fixing nut to the plate-shaped support 300 is preferably made of nickel.

[0052] The welded connection design makes the connection between the fixing nut and the plate bracket 300 more robust and stable, capable of withstanding greater forces and vibrations without easily loosening or being damaged. This design not only improves the durability and reliability of the nickel cup collector but also reduces the risk of failure due to loose connections. Simultaneously, the welded connection also provides a certain degree of corrosion resistance and oxidation resistance, extending the product's service life and performance.

[0053] To optimize the above technical solution, the fixing nut and the plate bracket 300 are integrated into one structure.

[0054] Specifically, this solution involves integrally molding a fixing nut onto the plate-shaped bracket 300 during production, thereby improving the overall integrity and stability of the structure.

[0055] The integrated structure design of this solution reduces the risk of performance degradation and failure due to loose or damaged connections.

[0056] In use, the fixing nut and plate bracket 300 are integrated into the nickel cup body 200. The operator only needs to connect the nickel cup body 200 to the ceramic cup discharge chamber 100 with screws, which simplifies the installation and disassembly steps of the neutralizer.

[0057] Furthermore, compared to the separate structure of the fixing nut and plate bracket 300, the integrated structure is simpler and more convenient to manufacture and process, reducing production costs and time costs.

[0058] To optimize the above technical solution, the connection between the plate-shaped support 300 and the side wall of the nickel cup body 200 is set as an arc structure, and the edge of the arc structure is set as a rounded corner with a radius of 0.5mm to 3mm.

[0059] Specifically, the connection between the plate-shaped support 300 and the side wall of the nickel cup body 200 is usually a sharp-angle structure, which often becomes a high-risk point for stress concentration. Under the combined action of mechanical stress (such as external load, vibration, etc.) and thermal stress (such as material expansion or contraction caused by temperature changes), these sharp-angle structures are prone to cracking. To prevent this phenomenon, the connection between the plate-shaped support 300 and the side wall of the nickel cup body 200 is set as an arc structure, which aims to reduce stress concentration, damage and wear at the connection, further improve the durability and reliability of the nickel cup collector, and extend its service life and performance.

[0060] The preferred radius of the fillet in this application is 0.5mm to 3mm.

[0061] See Figure 3 This application also provides a neutralizer, including a ceramic cup discharge chamber 100 and a nickel cup collector as described above, wherein the plate-shaped support 300 of the nickel cup collector is fixedly connected to the ceramic cup discharge chamber 100.

[0062] The neutralizer provided by this utility model adopts all the technical solutions of all the above embodiments, and therefore has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described in detail here.

[0063] It should be noted that the nickel cup collector and neutralizer provided by this utility model can be used in the field of vacuum coating equipment technology or other fields. Other fields refer to any field other than the field of vacuum coating equipment technology. The above are merely examples and do not limit the application areas of the nickel cup collector and neutralizer provided by this utility model.

[0064] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0065] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0066] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A nickel cup collector, characterized in that, The nickel cup collector, used to cooperate with the ceramic cup discharge chamber and to uniformly distribute electrons inside the ceramic cup discharge chamber, includes a nickel cup body, a plate-shaped support, and a fixing member. The nickel cup body is a non-closed-loop cylindrical structure. The plate-shaped support is arranged at the bottom of the nickel cup body, and both ends of the plate-shaped support are respectively connected to the side wall of the nickel cup body. The fixing member is used to fix the plate-shaped support to the ceramic cup discharge chamber.

2. The nickel cup collector according to claim 1, characterized in that, The plate-shaped support is a centrally symmetrical structure, and the geometric center of the plate-shaped support is located on the axis of the cylindrical structure.

3. The nickel cup collector according to claim 2, characterized in that, The cylindrical structure includes an axially extending opening, the width of which is parallel to the length of the plate-shaped support.

4. The nickel cup collector according to claim 3, characterized in that, The nickel cup body and the plate-shaped support are an integral structure.

5. The nickel cup collector according to claim 1, characterized in that, The fastener is a fixing nut, and the plate-shaped bracket has a fixing hole that matches the fixing nut.

6. The nickel cup collector according to claim 5, characterized in that, The fixing nut and the plate-shaped bracket are separate structures, and the center of the fixing hole coincides with the center of the nickel cup body.

7. The nickel cup collector according to claim 6, characterized in that, The fixing nut is welded to the plate-shaped bracket.

8. The nickel cup collector according to claim 5, characterized in that, The fixing nut and the plate-shaped bracket are an integral structure.

9. The nickel cup collector according to claim 1, characterized in that, The connection between the plate-shaped support and the side wall of the nickel cup body is set as an arc structure, and the edge of the arc structure is set as a rounded corner with a radius of 0.5mm to 3mm.

10. A neutralizer, characterized in that, It includes a ceramic cup discharge chamber and a nickel cup collector as described in any one of claims 1 to 9, wherein the plate-shaped support of the nickel cup collector is fixedly connected to the ceramic cup discharge chamber.

Images