Low-reflection optical filter coating device

Abstract

The utility model discloses a low-reflection optical filter coating device which comprises a coating device main body, a coating chamber is arranged in the coating device main body, and a pole target is fixedly arranged on the lower side wall of the coating chamber. The driving assembly drives the tray to drive the low-reflection optical filter to move, so that the low-reflection optical filter moves to the position between the connecting covers, the electric push rod drives the output end to push the gas outlet cover to drive the gas distribution plate to move downwards, and compressed nitrogen is conveyed into the gas outlet cover through the gas conveying assembly; nitrogen and dust on the surface of the low-reflection optical filter are blown off through the gas distribution plate, and the nitrogen and the dust are collected through the collection assembly, so that the situation that dust particles become an impurity source in a vacuum environment when the optical filter enters a vacuum chamber of coating equipment due to the fact that the dust is not thoroughly removed before coating is avoided, and the service life of the coating equipment is prolonged. And the condition that the flatness and the uniformity of the coating film surface are damaged by dust is avoided.

Description

Technical Field

[0001] This utility model relates to the field of low-reflection filter coating technology, and in particular to a low-reflection filter coating device. Background Technology

[0002] Low-reflection filters are optical elements that reduce the reflection of light on their surface. They achieve this by depositing one or more thin films on the substrate surface. The coating of low-reflection filters requires a coating device to form a protective film on the surface of the filter. They are widely used in optical instruments such as microscopes and telescopes.

[0003] However, in actual use, existing filter coating devices often involve manually placing the original glass sheet onto the coating rack before coating. During this process, dust easily accumulates on the surface, which damages the smoothness and uniformity of the coating surface, thus severely affecting the quality of the filter coating. Furthermore, if the dust is not thoroughly removed before coating, the dust particles will become a source of impurities in the vacuum environment when the filter enters the vacuum chamber of the coating device. Based on the above problems, this application proposes a low-reflection filter coating device. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a low-reflection filter coating device to solve the problems mentioned in the background section.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A low-reflection filter coating apparatus includes a coating apparatus body, a coating chamber inside the coating apparatus body, a target fixedly mounted on the lower side wall of the coating chamber, a fixed plate fixedly mounted on the upper side wall of the coating chamber, a fixed ring fixedly mounted on the surface of the fixed plate, a limiting ring rotatably mounted inside the fixed ring, a tray fixedly mounted inside the limiting ring, a driving assembly mounted on the top of the fixed ring, a mounting plate fixedly mounted on the rear side wall of the coating chamber, a connecting cover fixedly mounted inside the mounting plate, an L-shaped plate fixedly mounted on the top of the connecting cover, an electric push rod fixedly mounted on the top of the L-shaped plate, a gas outlet hood fixedly mounted on the output end of the electric push rod, the gas outlet hood slidably mounted inside the connecting cover, a gas distribution plate fixedly mounted inside the gas outlet hood, a gas conveying assembly on the top of the gas outlet hood, and a collection assembly mounted on the rear side of the coating apparatus body.

[0007] Preferably, the drive assembly includes a connecting plate fixedly mounted on the top of the fixing ring, a mounting circular plate fixedly disposed at the end of the connecting plate, a servo motor fixedly disposed on the top of the mounting circular plate, and the output end of the servo motor fixedly mounted on the top of the tray.

[0008] Preferably, the gas delivery assembly includes an outlet pipe fixedly installed on the top of the outlet hood, a corrugated pipe fixedly installed on the top of the outlet pipe, an inlet pipe fixedly installed on the top of the corrugated pipe, and the inlet pipe fixedly installed inside the main body of the coating device.

[0009] Preferably, the collection component includes a collection box fixedly installed on the rear side of the coating device body, a collection pipe fixedly installed inside the collection box, an air inlet end of the collection pipe fixedly installed on the surface of the connecting cover, an exhaust hole for dust and gas discharge through the surface of the connecting cover, and a dust suction fan, an adsorption plate and a filter screen fixedly installed inside the collection pipe.

[0010] Preferably, there are two connecting covers, and the two connecting covers are symmetrically distributed vertically. The connecting covers are made of stainless steel.

[0011] Preferably, the adsorption plate has a rectangular structure and is a carbon molecular sieve.

[0012] Preferably, a protective door is installed on the front side of the coating device body via a hinge, and a transparent observation window is fixedly installed inside the protective door.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: This low-reflection filter coating device drives the tray to move the low-reflection filter through the drive component, so that the low-reflection filter moves between the connecting covers. The electric push rod drives the output end to push the gas outlet cover, which in turn moves the gas distribution plate downward. Compressed nitrogen is delivered to the inside of the gas outlet cover through the gas delivery component and blown onto the low-reflection filter through the gas distribution plate, blowing off the dust on the surface of the low-reflection filter. The nitrogen and dust are collected by the collection component, thereby avoiding the situation where dust particles become a source of impurities in the vacuum environment when the filter enters the vacuum chamber of the coating equipment if the dust is not thoroughly removed before coating. This also avoids the situation where dust damages the flatness and uniformity of the coating surface. Attached Figure Description

[0014] Figure 1 This is an isometric drawing of the structure of this utility model;

[0015] Figure 2 This is a partial structural diagram of the present invention;

[0016] Figure 3 This is a schematic diagram of the internal structure of the fixing ring of this utility model;

[0017] Figure 4 This is a partial sectional view of the present invention.

[0018] Figure 5 This is a right sectional view of another partial structure of this utility model.

[0019] In the diagram: 1. Main body of the coating device; 2. Coating chamber; 3. Target; 4. Fixing plate; 5. Fixing ring; 6. Limiting ring; 7. Tray; 8. Connecting plate; 9. Mounting circular plate; 10. Servo motor; 11. Connecting cover; 12. Exhaust hood; 13. Gas distribution plate; 14. L-shaped plate; 15. Electric push rod; 16. Filter screen; 17. Exhaust pipe; 18. Corrugated pipe; 19. Inlet pipe; 20. Collection pipe; 21. Collection box; 22. Dust suction fan; 23. Adsorption plate. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Reference Figure 1-5A low-reflection filter coating apparatus includes a coating apparatus body 1, a coating chamber 2 inside the coating apparatus body 1, a protective door hinged to the front of the coating apparatus body 1, and a transparent observation window fixedly installed inside the protective door. The protective door can seal the opening of the coating chamber 2, preventing the vacuum environment inside the coating chamber 2 from being affected, while the transparent observation window facilitates observation of the low-reflection filter coating process inside the coating chamber 2. A target 3 is fixedly installed on the lower side wall of the coating chamber 2, and a fixing plate 4 is fixedly installed on the upper side wall of the coating chamber 2. A fixing ring 5 is fixedly installed on the surface of the fixing plate 4. The rotating part is equipped with a limiting ring 6, and a tray 7 is fixedly installed inside the limiting ring 6. The driving assembly includes a connecting plate 8 fixedly installed on the top of the fixing ring 5. A mounting circular plate 9 is fixedly installed at the end of the connecting plate 8, and a servo motor 10 is fixedly installed on the top of the mounting circular plate 9. The output end of the servo motor 10 is fixedly installed on the top of the tray 7. The servo motor 10 can drive the tray 7 to rotate, thereby moving the tray 7 to move the low-reflection filter between the connecting covers 11, which facilitates the cleaning of the low-reflection filter one by one. The rotation of the tray 7 driven by the servo motor 10 facilitates the cleaning of the low-reflection filter. The filters are placed one by one inside the tray 7. A drive assembly is installed on the top of the fixing ring 5. A mounting plate is fixedly installed on the rear side wall of the coating chamber 2. A connecting cover 11 is fixedly installed inside the mounting plate. There are two connecting covers 11, which are symmetrically distributed vertically. The connecting covers 11 are made of stainless steel. An L-shaped plate 14 is fixedly installed on the top of the connecting cover 11. An electric push rod 15 is fixedly installed on the top of the L-shaped plate 14. An exhaust hood 12 is fixedly installed at the output end of the electric push rod 15. The exhaust hood 12 is slidably installed inside the connecting cover 11. A gas distribution device is fixedly installed inside the exhaust hood 12. Plate 13, gas delivery assembly at the top of the gas hood 12, the gas delivery assembly includes a gas outlet pipe 17 fixedly installed at the top of the gas outlet hood 12, a corrugated pipe 18 fixedly installed at the top of the gas outlet pipe 17, and a gas inlet pipe 19 fixedly installed at the top of the corrugated pipe 18. The gas inlet pipe 19 is fixedly installed inside the coating device body 1. The compressed nitrogen gas is conveniently delivered to the inside of the gas outlet hood 12 through the gas inlet pipe 19, the corrugated pipe 18 and the gas outlet pipe 17, so as to facilitate blowing the nitrogen gas towards the low reflection filter. The corrugated pipe 18 can extend and retract with the movement of the gas outlet hood 12. A collection assembly is provided at the rear of the coating device body 1.

[0022] Specifically, the collection assembly includes a collection box 21 fixedly installed on the rear side of the coating device body 1. A collection pipe 20 is fixedly installed inside the collection box 21. The air inlet end of the collection pipe 20 is fixedly installed on the surface of the connecting cover 11. An exhaust hole for dust and gas discharge is provided through the surface of the connecting cover 11. A dust suction fan 22, an adsorption plate 23, and a filter screen 16 are fixedly installed inside the collection pipe 20. The adsorption plate 23 has a rectangular structure and is made of carbon molecular sieve. When the dust attached to the surface of the low-reflection filter is blown off, the output end is driven upward by the electric push rod 15 to move the exhaust cover 12 upward. The movement causes the exhaust hood 12 to move upward, causing the gas distribution plate 13 to move upward, allowing the exhaust hole on the connecting cover 11 to leak out. Then, by activating the dust suction fan 22, the collection pipe 20 draws the nitrogen and dust from the connecting cover 11 into the collection box 21. The dust is blocked by the filter screen 16, leaving it inside the collection box 21. The filter screen 16 also adsorbs the cleaned nitrogen. Because nitrogen and oxygen molecules have different diffusion rates, nitrogen molecules diffuse relatively slowly in the micropores of the carbon molecular sieve, making it easier for nitrogen molecules to be adsorbed inside the micropores.

[0023] The low-reflection filter coating device is connected to a 220V mains power supply, and the main controller can be a conventional known device such as a computer for control.

[0024] In use: The servo motor 10 drives the tray 7 to move the low-reflection filter, while the tray 7 drives the limiting ring 6 to rotate inside the fixed ring 5. The limiting ring 6 limits the position of the tray 7, allowing the low-reflection filter to move between the connecting covers 11. The electric push rod 15 drives the output end to push the exhaust cover 12 downward, and the exhaust cover 12 drives the gas distribution plate 13 to move, so that the gas distribution plate 13 moves closer to the low-reflection filter. The compressed nitrogen gas is delivered to the inlet pipe 19 through the external conveying equipment, and enters the exhaust pipe 17 through the corrugated pipe 18. Finally, it enters the exhaust cover 12 through the exhaust pipe 17 and is sprayed onto the low-reflection filter through the gas distribution plate 13. The nitrogen gas with a certain flow rate blows the surface of the low-reflection filter, blowing the dust off the low-reflection filter.

[0025] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0026] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A low-reflection filter coating apparatus, comprising a coating apparatus body (1), characterized in that, The coating device body (1) has a coating chamber (2) inside. A target (3) is fixedly installed on the lower side wall of the coating chamber (2). A fixing plate (4) is fixedly installed on the upper side wall of the coating chamber (2). A fixing ring (5) is fixedly installed on the surface of the fixing plate (4). A limit ring (6) is rotatably installed inside the fixing ring (5). A tray (7) is fixedly installed inside the limit ring (6). A driving component is installed on the top of the fixing ring (5). A mounting plate is fixedly installed on the rear side wall of the coating chamber (2). The mounting plate has a... A connecting cover (11) is fixedly installed. An L-shaped plate (14) is fixedly installed on the top of the connecting cover (11). An electric push rod (15) is fixedly installed on the top of the L-shaped plate (14). An exhaust hood (12) is fixedly installed at the output end of the electric push rod (15). The exhaust hood (12) is slidably installed inside the connecting cover (11). A gas distribution plate (13) is fixedly installed inside the exhaust hood (12). A gas conveying assembly is installed on the top of the exhaust hood (12). A collection assembly is installed on the rear side of the coating device body (1).

2. The low-reflection filter coating apparatus according to claim 1, characterized in that, The drive assembly includes a connecting plate (8) fixedly installed on the top of the fixing ring (5), a mounting circular plate (9) fixedly installed at the end of the connecting plate (8), a servo motor (10) fixedly installed on the top of the mounting circular plate (9), and the output end of the servo motor (10) fixedly installed on the top of the tray (7).

3. The low-reflection filter coating apparatus according to claim 1, characterized in that, The gas delivery assembly includes an outlet pipe (17) fixedly installed on the top of the outlet hood (12), a corrugated pipe (18) fixedly installed on the top of the outlet pipe (17), an inlet pipe (19) fixedly installed on the top of the corrugated pipe (18), and the inlet pipe (19) fixedly installed inside the coating device body (1).

4. The low-reflection filter coating apparatus according to claim 1, characterized in that, The collection assembly includes a collection box (21) fixedly installed on the rear side of the coating device body (1). A collection pipe (20) is fixedly installed inside the collection box (21). The air inlet end of the collection pipe (20) is fixedly installed on the surface of the connecting cover (11). An exhaust hole for dust and gas discharge is provided through the surface of the connecting cover (11). A dust suction fan (22), an adsorption plate (23), and a filter screen (16) are fixedly installed inside the collection pipe (20).

5. The low-reflection filter coating apparatus according to claim 1, characterized in that, The number of connecting covers (11) is two, and the two connecting covers (11) are distributed symmetrically in the upper and lower positions. The connecting covers (11) are made of stainless steel.

6. The low-reflection filter coating apparatus according to claim 4, characterized in that, The adsorption plate (23) has a rectangular structure and is a carbon molecular sieve.

7. The low-reflection filter coating apparatus according to claim 1, characterized in that, The coating device body (1) has a protective door installed on the front side via a hinge, and a transparent observation window is fixedly installed inside the protective door.

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