Seed crystal structure and seed crystal chuck device

Abstract

The utility model discloses a seed crystal structure and a seed crystal chuck device, relates to the technical field of single crystal furnaces, and mainly aims to prevent impurities from clamping seed crystals under high-temperature expansion and greatly reduce the occurrence of rod falling and silicon leakage events of the single crystal furnace. According to the main technical scheme, the seed crystal structure comprises an upper inverted conical section and a lower cylindrical section, wherein the upper inverted-cone-shaped section and the lower cylindrical section are coaxially connected, and an annular groove is formed in the peripheral side of the connecting portion of the upper inverted-cone-shaped section and the lower cylindrical section.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, and in particular to a seed crystal structure and a seed crystal chuck device. Background Technology

[0002] A single-crystal furnace is an essential piece of equipment in the process of converting polycrystalline silicon into single-crystal silicon, and single-crystal silicon is a fundamental raw material in the photovoltaic power generation and semiconductor industries. As a key supporting material for modern information society, single-crystal silicon is one of the most important single-crystal materials in the world. It is not only a major functional material for the development of computers and integrated circuits, but also a major functional material for photovoltaic power generation to utilize solar energy.

[0003] The higher the concentricity between the seed crystal component and the crucible component during the crystal pulling process in a single crystal furnace, the better the quality of the seed crystal. Therefore, during the installation of the single crystal furnace, it is necessary to determine the concentricity between the seed crystal component and the crucible component through a seed crystal mechanism. The seed crystal mechanism can enable the crystal to grow more stably. In the process of pulling silicon single crystals, the seed crystal eliminates dislocations in the silicon crystal by passing through the necking section pulled by the seed crystal mechanism, thus ensuring the crystal's uniformity.

[0004] The application document with application number 201020509568.3 proposes a seed crystal chuck mechanism for a single crystal furnace. The seed crystal connectors in this mechanism are connected by a tapered circular hole for positioning, resulting in high concentricity. However, the disadvantage of this mechanism is that the lower edge rounded corner of the seed crystal cone is in close contact with the corresponding rounded corner of the seed crystal chuck. If impurity particles are introduced, they will cause the seed crystal to get stuck during the crystal pulling process, posing a risk of silicon leakage and rod falling. Utility Model Content

[0005] In view of this, the present invention provides a seed crystal structure and a seed crystal chuck device, the main purpose of which is to prevent foreign objects from jamming the seed crystal under high temperature expansion, and greatly reduce the occurrence of single crystal furnace rod drop and silicon leakage incidents.

[0006] To achieve the above objectives, this utility model mainly provides the following technical solutions:

[0007] On the one hand, this utility model provides a seed crystal structure, which includes: an upper inverted conical segment and a lower cylindrical segment;

[0008] The upper inverted conical segment and the lower cylindrical segment are coaxially connected, and an annular groove is provided around the connection between the upper inverted conical segment and the lower cylindrical segment.

[0009] The purpose of this utility model and the technical problems to be solved can be further achieved by the following technical measures.

[0010] Optionally, the lower cylindrical segment includes an upper frustum segment and a lower cylindrical segment coaxially connected, wherein the upper diameter of the upper frustum segment is smaller than the lower diameter of the upper inverted conical segment.

[0011] On the other hand, this utility model provides a seed crystal chuck device, which includes:

[0012] The chuck body and the aforementioned seed crystal structure are provided. The chuck body is provided with an axial cavity, which includes a through upper conical cavity and a lower cylindrical cavity. The size of the upper conical cavity matches the size of the upper inverted conical segment, and the size of the lower cylindrical cavity matches the size of the lower cylindrical segment.

[0013] Optionally, the taper of the upper conical chamber and the taper of the upper inverted conical section are both 30°.

[0014] By employing the above technical solution, this utility model has at least the following advantages:

[0015] The connection between the upper conical chamber and the lower cylindrical chamber adopts an annular arc surface design. After the seed crystal structure is embedded in the axial chamber of the chuck body, the groove of the annular groove of the seed crystal structure corresponds to the arc surface design, forming an annular accommodating space, providing expansion space for possible impurities, preventing impurities from jamming the seed crystal structure under high temperature expansion, and greatly reducing the occurrence of single crystal furnace rod drop and silicon leakage events. Attached Figure Description

[0016] Figure 1 A side view of a seed crystal structure provided for an embodiment of this utility model;

[0017] Figure 2 An axial cross-sectional view of a seed crystal chuck device provided in an embodiment of this utility model;

[0018] Figure 3 for Figure 2 Enlarged view of part A in the middle.

[0019] The reference numerals in the accompanying drawings include: upper inverted conical section 1, lower cylindrical section 2, upper frustum section 201, lower cylindrical section 202, chuck body 3, and annular groove 4. Detailed Implementation

[0020] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the specific implementation methods, structures, features, and effects according to this utility model application are described in detail below with reference to the accompanying drawings and preferred embodiments. In the following description, different "embodiments" or "embodiments" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0021] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0022] like Figure 1 and Figure 2 As shown, one embodiment of the present invention provides a seed crystal structure, which includes: an upper inverted conical segment 1 and a lower cylindrical segment 2;

[0023] The upper inverted conical segment 1 and the lower cylindrical segment 2 are coaxially connected, and an annular groove 4 is provided around the connection between the upper inverted conical segment 1 and the lower cylindrical segment 2.

[0024] like Figure 2 and Figure 3 As shown, in a specific embodiment, the lower cylindrical segment 2 includes an upper frustum segment 201 and a lower cylindrical segment 202 that are coaxially connected. The upper diameter of the upper frustum segment 201 is smaller than the lower diameter of the upper inverted conical segment 1.

[0025] In this embodiment, specifically, the upper diameter of the upper frustum section 201 is smaller than the lower diameter of the upper frustum section 201, and the lower diameter of the upper frustum section 201 is equal to the diameter of the lower cylindrical section 202. The upper end of the upper frustum section 201 is fixedly connected to the lower end of the upper inverted conical section 1. Thus, the axial cross-section of the annular groove 4 formed below the upper inverted conical section 1 is triangular, which is wider at the top and narrower at the bottom. When the seed crystal is placed, as the seed crystal structure is inserted into the axial cavity, any impurities that may exist on the axial side of the seed crystal are concentrated and moved into the annular groove 4 with a triangular axial cross-section.

[0026] like Figure 2 As shown, another embodiment of the present invention provides a seed crystal chuck device, which includes:

[0027] The chuck body 3 and the aforementioned seed crystal structure are provided. The chuck body 3 is provided with an axial cavity. The axial cavity includes a through upper conical cavity and a lower cylindrical cavity. The size of the upper conical cavity matches the size of the upper inverted conical segment 1, and the size of the lower cylindrical cavity matches the size of the lower cylindrical segment 2.

[0028] The working process of the seed crystal structure is as follows:

[0029] The connection between the upper conical chamber and the lower cylindrical chamber adopts an annular arc surface design. After the seed crystal structure is embedded in the axial chamber of the chuck body 3, the groove of the annular groove 4 of the seed crystal structure corresponds to the arc surface design, forming an annular accommodating space, providing expansion space for possible impurities, preventing impurities from jamming the seed crystal structure under high temperature expansion, and greatly reducing the occurrence of single crystal furnace rod drop and silicon leakage events.

[0030] Specifically, this seed crystal structure is made of single-crystal silicon material and is produced by processing standard single-crystal round bars.

[0031] Specifically, the annular groove 4 on the lower edge of the inverted conical surface of the seed crystal structure can accommodate impurities brought in when placing the seed crystal, preventing impurities from jamming the seed crystal under high temperature expansion, and greatly reducing the occurrence of silicon leakage and rod falling off in the single crystal furnace.

[0032] Specifically, after the seed crystal structure is inserted into the axial cavity, the upper inverted conical section 1 and the upper conical cavity cooperate with each other to prevent the seed crystal structure from detaching downward from the chuck body 3. At the same time, the annular groove 4 provides space for impurities to be accommodated, preventing impurities from jamming the seed crystal and reducing the occurrence of silicon leakage events caused by the single crystal furnace dropping the rod.

[0033] Specifically, the chuck body 3 uses a graphite chuck.

[0034] like Figure 2 As shown, in a specific embodiment, the taper of the upper conical chamber and the taper of the upper inverted conical segment 1 are both 30°.

[0035] In this embodiment, specifically, the taper of the conical cavity on the chuck body 3 is set to 30°, which can prevent the seed crystal structure from falling off. At the same time, the upper wall thickness of the solid part of the chuck body 3 does not change too much relative to the lower wall thickness, thereby ensuring that the structural strength of the chuck body 3 is balanced and consistent from top to bottom.

[0036] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A seed crystal structure, characterized in that, include: The upper inverted tapered section; Lower cylindrical section; The upper inverted conical segment and the lower cylindrical segment are coaxially connected, and an annular groove is provided around the connection between the upper inverted conical segment and the lower cylindrical segment.

2. The seed crystal structure according to claim 1, characterized in that, The lower cylindrical section includes an upper frustum section and a lower cylindrical section coaxially connected, and the upper diameter of the upper frustum section is smaller than the lower diameter of the upper inverted conical section.

3. A seed crystal chuck device, characterized in that, include: The chuck body and the seed crystal structure according to claim 1 or 2, wherein the chuck body is provided with an axial cavity, the axial cavity including a through upper conical cavity and a lower cylindrical cavity, the size of the upper conical cavity matching the size of the upper inverted conical segment, and the size of the lower cylindrical cavity matching the size of the lower cylindrical segment.

4. The seed crystal chuck device according to claim 3, characterized in that, The taper of the upper conical chamber and the taper of the upper inverted conical section are both 30°.

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