Liquid supply device

Abstract

The utility model relates to a liquid supply device. The liquid supply device comprises a liquid supply tank used for storing liquid chemicals and provided with a first gas inlet and a first liquid outlet; the driving pipeline is communicated with the first gas inlet and is used for conveying driving gas into the liquid supply tank through the first gas inlet, so that the liquid chemicals in the liquid supply tank are output from the first liquid outlet under the action of gas pressure generated by the driving gas; the liquid supply pipeline comprises a liquid supply main pipe and a plurality of liquid supply branch pipes, one end of the liquid supply main pipe is communicated with the first liquid outlet, and each liquid supply branch pipe is communicated with the other end of the liquid supply main pipe and used for conveying the liquid chemicals in the liquid supply main pipe to a plurality of downstream devices. Therefore, liquid is supplied to the multiple downstream devices through the multiple liquid supply branch pipes under the action of the air pressure generated by the driving gas, so that the multiple downstream devices only need to be provided with one liquid supply device, multiple liquid supply devices do not need to be arranged, the number of the needed liquid supply devices is greatly reduced, and therefore the device cost is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, specifically to a liquid supply device. Background Technology

[0002] The semiconductor industry requires various chemical solutions. For example, in semiconductor vapor deposition (CVD) processes, a chemical supply device is needed to deliver liquid chemicals to the reaction chamber for CVD. The accuracy and stability of the chemical supply device's delivery of liquid chemicals directly affect the thickness and composition of the thin film material grown on the semiconductor substrate during CVD, thus directly impacting the performance of the semiconductor chip. However, current supply devices can only supply chemicals to one machine at a time. When multiple machines are operating simultaneously, multiple supply devices are required, resulting in significant equipment costs. Utility Model Content

[0003] Therefore, it is necessary to provide a liquid supply device that can supply liquid to multiple devices simultaneously, thereby reducing equipment costs.

[0004] A liquid supply device, comprising:

[0005] A liquid supply tank for storing liquid chemicals, the liquid supply tank having a first air inlet and a first liquid outlet;

[0006] A drive pipeline, connected to the first air inlet, is used to supply drive gas into the liquid supply tank through the first air inlet, so that the liquid chemicals in the liquid supply tank are output from the first liquid outlet under the pressure generated by the drive gas; and

[0007] The liquid supply pipeline includes a main liquid supply pipe and multiple branch liquid supply pipes. One end of the main liquid supply pipe is connected to the first liquid outlet, and each of the branch liquid supply pipes is connected to the other end of the main liquid supply pipe, for transporting the liquid chemicals in the main liquid supply pipe to multiple downstream devices respectively.

[0008] In some embodiments, a first control valve is installed on the main liquid supply pipe, the first control valve being used to control the opening or closing of the main liquid supply pipe.

[0009] In some embodiments, each of the liquid supply branches is equipped with a second control valve, and each second control valve is used to control the liquid supply branch to be connected or disconnected.

[0010] In some embodiments, a third control valve is installed on the main liquid supply pipe, and the liquid supply device further includes a degassing pipeline, which includes a first connecting pipe, a gas-liquid separator and a second connecting pipe.

[0011] The gas-liquid separator has an inlet and an outlet. The first connecting pipe is connected between the liquid supply main pipe located upstream of the third control valve and the inlet, and the second connecting pipe is connected between the liquid supply main pipe located downstream of the third control valve and the outlet.

[0012] In some embodiments, a fourth control valve is installed on the first connecting pipe, the fourth control valve being used to control the first connecting pipe to be open or closed.

[0013] A fifth control valve is installed on the second connecting pipe, which is used to control the second connecting pipe to be open or closed.

[0014] In some embodiments, the gas-liquid separator also has an air extraction port, and the degassing pipeline further includes a vacuum pipeline, one end of which is connected to the air extraction port, and the other end of which is connected to an external negative pressure source.

[0015] In some embodiments, the liquid supply device further includes a raw liquid tank and a connecting pipe. The raw liquid tank is used to store liquid chemicals and has a second air inlet and a second liquid outlet. The liquid supply tank also has a liquid inlet, and the connecting pipe connects the second liquid outlet and the liquid inlet.

[0016] The drive pipeline includes a drive main pipe, a first drive branch pipe, and a second drive branch pipe. One end of the drive main pipe is connected to an external drive air source, and the other end of the drive main pipe is connected to the first drive branch pipe and the second drive branch pipe. The end of the first drive branch pipe opposite to the drive main pipe is connected to the first air inlet, and the end of the second drive branch pipe opposite to the drive main pipe is connected to the second air inlet.

[0017] In some embodiments, the liquid supply device further includes an exhaust pipe connected to the first drive branch pipe and the second drive branch pipe. The exhaust pipe is used to discharge gas from the liquid supply tank through the first drive branch pipe and to discharge gas from the raw liquid tank through the second drive branch pipe.

[0018] In some embodiments, the exhaust pipe includes an intake pipe, a vacuum generator, an exhaust pipe, and a suction pipe. The vacuum generator includes a third intake port, an outlet port, and a negative pressure port. The vacuum generator is configured to generate a negative pressure at the negative pressure port when gas is input into the third intake port. The intake pipe is connected to the third intake port and is used to deliver driving gas to the third intake port. The exhaust pipe is connected to the outlet port and is used to discharge gas that enters the vacuum generator from the third intake port and the negative pressure port. The suction pipe is connected between the negative pressure port and the first driving branch pipe and the second driving branch pipe.

[0019] In some embodiments, a one-way valve is installed on the suction pipe, the one-way valve being used to allow gas and / or liquid in the suction pipe to flow in a direction close to the negative pressure port and to prevent gas and / or liquid in the suction pipe from flowing in a direction away from the negative pressure port.

[0020] In one embodiment, the suction pipe includes a main suction pipe, a first suction branch pipe, and a second suction branch pipe. One end of the main suction pipe is connected to the negative pressure port, and the other end of the main suction pipe is connected to the first suction branch pipe and the second suction branch pipe. The end of the first suction branch pipe away from the main suction pipe is connected to the first drive branch pipe, and the end of the second suction branch pipe away from the main suction pipe is connected to the second drive branch pipe. The one-way valve is installed on the main suction pipe.

[0021] In actual use, the aforementioned liquid supply device delivers driving gas to the liquid supply tank via a drive pipeline, increasing the gas pressure inside the tank. Under this high pressure, the liquid chemicals in the tank are output from the first outlet to the main liquid supply pipe. The liquid chemicals in the main liquid supply pipe then enter various branch pipes, which in turn deliver the liquid chemicals to their respective downstream devices. In other words, the liquid supply device of this application, under the pressure generated by the driving gas, can supply liquid to multiple downstream devices through multiple branch pipes without interfering with each other. Therefore, multiple downstream devices only require one liquid supply device, eliminating the need for multiple devices and significantly reducing the number of required liquid supply units, thereby lowering equipment costs. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the liquid supply device in one embodiment of this application. Detailed Implementation

[0023] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0024] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0026] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0027] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0028] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0029] Please see Figure 1 This application provides a liquid supply device for simultaneously or asynchronously supplying liquid chemicals to multiple downstream devices. The device includes a supply tank 10, a drive line 20, and a supply line 30. The supply tank 10 stores liquid chemicals and has a first air inlet a1 and a first liquid outlet a2. The drive line 20 is connected to the first air inlet a1 of the supply tank 10 and supplies drive gas into the supply tank 10 through the inlet a1, increasing the pressure inside the tank. Under the pressure generated by the drive gas, the liquid chemicals in the supply tank 10 are then output through the first liquid outlet a2.

[0030] The liquid supply pipeline 30 includes a main liquid supply pipe 31 and multiple branch liquid supply pipes 33. One end of the main liquid supply pipe 31 is connected to the first outlet a2 of the liquid supply tank 10, and each branch liquid supply pipe 33 is connected to the other end of the main liquid supply pipe 31, so that the liquid chemicals output from the first outlet a2 of the liquid supply tank 10 can enter each branch liquid supply pipe 33 through the main liquid supply pipe 31, and then be transported to each downstream device by each branch liquid supply pipe 33, thus realizing the separate supply of liquid to multiple downstream devices.

[0031] In actual use, the aforementioned liquid supply device delivers driving gas to the liquid supply tank 10 via the drive pipeline 20, increasing the gas pressure within the tank. Under this high pressure, the liquid chemicals in the tank are output from the first outlet a2 to the main liquid supply pipe 31. The liquid chemicals in the main liquid supply pipe 31 then enter various branch pipes 33, which in turn deliver the liquid chemicals to downstream devices. In other words, the liquid supply device of this application, under the pressure generated by the driving gas, can supply liquid to multiple downstream devices through multiple branch pipes 33 without interfering with each other. Therefore, only one liquid supply device is needed for each downstream device, eliminating the need for multiple devices and significantly reducing the required number, thus lowering equipment costs.

[0032] It should be noted that the liquid supply device in this application outputs liquid chemicals from the liquid supply tank 10 by introducing driving gas into the liquid supply tank 10. Therefore, the feeding speed and feeding amount can be controlled by controlling the gas pressure in the liquid supply tank 10, which is beneficial to improving the accuracy and stability of the feeding.

[0033] Optionally, the feeding device also includes a first electronic scale 80, on which the liquid supply tank 10 is mounted. The first electronic scale 80 is used to weigh the liquid supply tank 10, thereby enabling real-time monitoring of the amount of liquid chemicals in the liquid supply tank 10 and further improving the accuracy of feeding.

[0034] Specifically, in this embodiment, a first control valve 34 is installed on the main liquid supply pipe 31. This first control valve 34 is used to control the opening or closing of the main liquid supply pipe 31. Thus, when liquid supply is needed, the first control valve 34 is opened, thereby opening the main liquid supply pipe 31 and allowing the liquid chemicals in the liquid supply tank 10 to enter the various liquid supply branch pipes 33 through the main liquid supply pipe 31. When liquid supply is not needed, the first control valve 34 is closed, thereby closing the main liquid supply pipe 31 and preventing the liquid chemicals in the liquid supply tank 10 from entering the various liquid supply branch pipes 33 through the main liquid supply pipe 31.

[0035] Specifically, in this embodiment, each liquid supply branch pipe 33 is equipped with a second control valve 35, which controls the opening or closing of the liquid supply branch pipe 33 to which it belongs. Thus, when one or more downstream devices require liquid supply, the second control valve 35 on the corresponding liquid supply branch pipe 33 is opened, allowing the liquid supply branch pipe 33 to open and thus enabling the liquid chemicals in the main liquid supply pipe 31 to enter the corresponding liquid supply branch pipe 33. The liquid supply branch pipe 33 then delivers the liquid chemicals to the corresponding downstream devices, achieving simultaneous liquid supply to one or more downstream devices. When the liquid supply is complete, the second control valve 35 is closed, thus closing the corresponding liquid supply branch pipe 33.

[0036] It should be noted that each liquid supply branch pipe 33 is connected to each downstream device in a corresponding manner. When some downstream devices need liquid supply, the second control valve 35 on the liquid supply branch pipe 33 connected to that downstream device is opened, while the second control valve 35 on the remaining liquid supply branch pipe 33 remains closed.

[0037] In the embodiments of this application, a third control valve 36 is also installed on the liquid supply main pipe 31, and the liquid supply device further includes a degassing pipeline 40, which includes a first connecting pipe 41, a gas-liquid separator 42, and a second connecting pipe 43. The gas-liquid separator 42 has an inlet and an outlet. The first connecting pipe 41 is connected between the portion of the liquid supply main pipe 31 upstream of the third control valve 36 and the inlet of the gas-liquid separator 42. The second connecting pipe 43 is connected between the portion of the liquid supply main pipe 31 downstream of the third control valve 36 and the outlet of the gas-liquid separator 42. Thus, when degassing of the liquid chemicals entering the main supply pipe 31 is required, the third control valve 36 is closed, preventing the liquid chemicals from directly entering the various supply branch pipes 33. Instead, they enter the gas-liquid separator 42 through the first connecting pipe 41 for gas-liquid separation. After gas-liquid separation, the liquid chemicals return to the main supply pipe 31 through the second connecting pipe 43, and then enter the various supply branch pipes 33, finally being transported to the downstream equipment. When degassing of the liquid chemicals entering the main supply pipe 31 is not required, the third control valve 36 is opened, allowing the liquid chemicals in the main supply pipe 31 to directly enter the various supply branch pipes 33, and finally being transported to the downstream equipment.

[0038] Furthermore, a fourth control valve 45 is installed on the first connecting pipe 41, which is used to control the opening or closing of the first connecting pipe 41. When the fourth control valve 45 is open, the first connecting pipe 41 is open. When the fourth control valve 45 is closed, the first connecting pipe 41 is closed.

[0039] A fifth control valve 46 is installed on the second connecting pipe 43. This fifth control valve 46 is used to control the opening or closing of the second connecting pipe 43. When the fifth control valve 46 is open, the second connecting pipe 43 is open. When the fifth control valve 46 is closed, the second connecting pipe 43 is closed.

[0040] Thus, when it is necessary to degas the liquid chemicals entering the main liquid supply pipe 31, the third control valve 36 is closed, and the fourth control valve 45 and the fifth control valve 46 are opened, so that the liquid chemicals in the main liquid supply pipe 31 enter the gas-liquid separator 42 through the first connecting pipe 41 for gas-liquid separation. After gas-liquid separation, the liquid chemicals return to the main liquid supply pipe 31 through the second connecting pipe 43, and then enter each liquid supply branch pipe 33, and finally are transported to each downstream device by each liquid supply branch pipe 33.

[0041] When it is not necessary to degas the liquid chemicals entering the main liquid supply pipe 31, the third control valve 36 is opened and the fourth control valve 45 and the fifth control valve 46 are closed, so that the liquid chemicals in the main liquid supply pipe 31 can directly enter each liquid supply branch pipe 33 along the main liquid supply pipe 31, and finally be transported to each downstream device by each liquid supply branch pipe 33.

[0042] Furthermore, the gas-liquid separator 42 also has an air extraction port, and the degassing pipeline 40 includes a vacuum pipeline 44. One end of the vacuum pipeline 44 is connected to the air extraction port, and the other end of the vacuum pipeline 44 has a first connector 47, through which the vacuum pipeline 44 is connected to an external negative pressure source. Thus, the external negative pressure source evacuates the gas-liquid separator 42 through the vacuum pipeline 44 and the air extraction port, creating a negative pressure state inside the gas-liquid separator 42, which improves the gas-liquid separation effect of the gas-liquid separator 42 on liquid chemicals. It should be noted that the external negative pressure source can be a vacuum pump or other equipment capable of creating a vacuum; the specific structure is not specifically limited here.

[0043] Optionally, a sixth control valve 37 is also installed on the main supply pipe 31. This sixth control valve 37 is located at the end of the main supply pipe 31 near the first outlet a2 of the supply tank 10, while the aforementioned first control valve 34 is located at the end of the main supply pipe 31 near the supply branch pipe 33. The sixth control valve 37 is upstream of the third control valve 36, and the first control valve 34 is downstream of the third control valve 36. A first connecting pipe 41 communicates with the portion of the main supply pipe 31 between the third control valve 36 and the sixth control valve 37, and a second connecting pipe 43 communicates with the portion of the main supply pipe 31 between the third control valve 36 and the first control valve 34. When the sixth control valve 37 is open, the liquid chemicals in the supply tank 10 can be output from the first outlet a2 to the main supply pipe 31; when the sixth control valve 37 is closed, the liquid chemicals in the supply tank 10 cannot be output from the first outlet a2 to the main supply pipe 31.

[0044] In embodiments of this application, the liquid supply device further includes a stock solution tank 50 and a connecting pipe 60. The stock solution tank 50 is used to store liquid chemicals and has a second air inlet b1 and a second liquid outlet b2. The liquid supply tank 10 also has a liquid inlet a3, and the connecting pipe 60 connects the second liquid outlet b2 of the stock solution tank 50 and the liquid inlet a3 of the liquid supply tank 10, so that the liquid chemicals output from the second liquid outlet b2 of the stock solution tank 50 can be injected into the liquid supply tank 10 through the connecting pipe 60 from the liquid inlet a3.

[0045] The drive pipeline 20 includes a main drive pipe 21, a first drive branch pipe 22, and a second drive branch pipe 23. One end of the main drive pipe 21 has a second connector 29, through which it is connected to an external drive gas source, allowing the drive gas supplied by the external drive gas source to be transported along the main drive pipe 21. The other end of the main drive pipe 21 is connected to the first drive branch pipe 22 and the second drive branch pipe 23. The end of the first drive branch pipe 22 furthest from the main drive pipe 21 is connected to the first air inlet a1 of the liquid supply tank 10, and the end of the second drive branch pipe 23 furthest from the main drive pipe 21 is connected to the second air inlet b1 of the raw liquid tank 50.

[0046] Thus, when liquid needs to be supplied to downstream equipment, the driving gas provided by the external driving gas source enters the liquid supply tank 10 through the first air inlet a1 via the driving main pipe 21 and the first driving branch pipe 22, thereby increasing the gas pressure inside the liquid supply tank 10 and pushing the liquid chemicals inside the liquid supply tank 10 out through the first liquid outlet a2. The liquid chemicals output from the first liquid outlet a2 of the liquid supply tank 10 are transported to the respective downstream equipment through the liquid supply main pipe 31 and each liquid supply branch pipe 33.

[0047] When liquid chemicals need to be injected into the supply tank 10, the driving gas supplied by the external driving gas source enters the raw liquid tank 50 through the second inlet b1 via the driving main pipe 21 and the second driving branch pipe 23, thereby increasing the gas pressure inside the raw liquid tank 50 and pushing the liquid chemicals out of the raw liquid tank 50 through the second outlet b2. The liquid chemicals output from the second outlet b2 of the raw liquid tank 50 enter the supply tank 10 through the connecting pipe 60 via the inlet a3 of the supply tank 10, thus realizing the injection of liquid chemicals from the raw liquid tank 50 into the supply tank 10.

[0048] Optionally, the feeding device also includes a second electronic scale 90, on which the raw liquid tank 50 is mounted. The second electronic scale 90 is used to weigh the raw liquid tank 50, thereby enabling real-time monitoring of the amount of liquid chemicals in the raw liquid tank 50, which helps to improve the accuracy of injecting liquid into the supply tank 10.

[0049] Furthermore, a seventh control valve 24 is installed on the drive main pipe 21, which is used to control the opening or closing of the drive main pipe 21. Thus, when the seventh control valve 24 is open, the drive main pipe 21 is open, allowing the drive gas supplied by the external drive gas source to reach the first drive branch pipe 22 or the second drive branch pipe 23 through the drive main pipe 21. When the seventh control valve 24 is closed, the drive main pipe 21 is closed, preventing the drive gas supplied by the external drive gas source from reaching the first drive branch pipe 22 or the second drive branch pipe 23 through the drive main pipe 21.

[0050] Furthermore, an eighth control valve 25 is installed on the first drive branch pipe 22. This eighth control valve 25 is used to control the opening or closing of the first drive branch pipe 22. Thus, when the eighth control valve 25 is open, the first drive branch pipe 22 is open, allowing the drive gas in the drive main pipe 21 to enter the supply tank 10 through the first drive branch pipe 22. When the eighth control valve 25 is closed, the first drive branch pipe 22 is closed, preventing the drive gas in the drive main pipe 21 from entering the supply tank 10 through the first drive branch pipe 22.

[0051] A ninth control valve 26 is installed on the second drive branch pipe 23. This ninth control valve 26 is used to control the opening or closing of the second drive branch pipe 23. When the ninth control valve 26 is open, the second drive branch pipe 23 is open, allowing the drive gas in the drive main pipe 21 to enter the raw material tank 50 through the second drive branch pipe 23. When the ninth control valve 26 is closed, the second drive branch pipe 23 is closed, preventing the drive gas in the drive main pipe 21 from entering the raw material tank 50 through the second drive branch pipe 23.

[0052] Furthermore, a first pressure regulating valve 221 and a first pressure detector 223 are also installed on the first drive branch pipe 22, with the first pressure detector 223 located downstream of the first pressure regulating valve 221. The first pressure regulating valve 221 is used to regulate the air pressure in the first drive branch pipe 22, and the first pressure detector 223 is used to monitor the air pressure in the first drive branch pipe 22 in real time. Thus, the air pressure in the first drive branch pipe 22 can be adjusted by the first pressure regulating valve 221 according to the detection result of the first pressure detector 223 until the air pressure in the first drive branch pipe 22 stabilizes within a preset range or preset value.

[0053] Furthermore, a second pressure regulating valve 231 and a second pressure detector 233 are also installed on the second drive branch pipe 23, with the second pressure detector 233 located downstream of the second pressure regulating valve 231. The second pressure regulating valve 231 is used to regulate the air pressure in the second drive branch pipe 23, and the second pressure detector 233 is used to monitor the air pressure in the second drive branch pipe 23 in real time. Thus, the air pressure in the second drive branch pipe 23 can be adjusted by the second pressure regulating valve 231 according to the detection result of the second pressure detector 233 until the air pressure in the second drive branch pipe 23 stabilizes within a preset range or preset value.

[0054] Furthermore, a tenth control valve 27 is also installed on the first drive branch pipe 22. This tenth control valve 27 is located at the end of the first drive branch pipe 22 near the first air inlet a1 of the supply tank 10, and is used to control the opening or closing of the first drive branch pipe 22. An eleventh control valve 28 is also installed on the second drive branch pipe 23. This eleventh control valve 28 is located at the end of the second drive branch pipe 23 near the second air inlet b1 of the raw material tank 50, and is used to control the opening or closing of the second drive branch pipe 23.

[0055] It should be noted that the aforementioned external driving gas source can be any gas supply device capable of providing driving gas, and its specific structure is not limited here. The driving gas can be helium, or other gases that do not chemically react with liquid chemicals, and this is not limited here.

[0056] In embodiments of this application, the liquid supply device further includes an exhaust pipe 70, which is connected to a first drive branch pipe 22 and a second drive branch pipe 23. The exhaust pipe 70 is used to discharge excess gas in the liquid supply tank 10 through the first drive branch pipe 22 and excess gas in the raw liquid tank 50 through the second drive branch pipe 23.

[0057] Specifically, in this embodiment, the exhaust pipe 70 includes an intake pipe 71, a vacuum generator 72, an exhaust pipe 73, and a suction pipe 74. The vacuum generator 72 has a third intake port, an exhaust port, and a negative pressure port. The vacuum generator 72 is configured to generate a negative pressure at the negative pressure port when gas is input into the third intake port (i.e., the third intake port is at positive pressure). The intake pipe 71 communicates with the third intake port of the vacuum generator 72 and is used to supply control gas to the third intake port, thereby causing the vacuum generator 72 to generate a negative pressure at the negative pressure port. The exhaust pipe 73 communicates with the exhaust port of the vacuum generator 72 and is used to discharge the gas that enters the vacuum generator 72 through the third intake port and the negative pressure port. The suction pipe 74 is connected between the negative pressure port of the vacuum generator 72 and the first drive branch pipe 22 and the second drive branch pipe 23, so that under the negative pressure at the negative pressure port of the vacuum generator 72, excess gas in the supply tank 10 is extracted through the first drive branch pipe 22, and excess gas in the original liquid tank 50 is extracted through the second drive branch pipe 23.

[0058] Thus, when exhaust is required, the intake pipe 71 supplies control gas to the third intake port of the vacuum generator 72, thereby creating a negative pressure at the negative pressure port of the vacuum generator 72. Under the suction effect of this negative pressure, the gas in the supply tank 10 sequentially enters the vacuum generator 72 through the first drive branch pipe 22, the suction pipe 74, and the negative pressure port, while the gas in the raw liquid tank 50 sequentially enters the vacuum generator 72 through the second drive branch pipe 23, the suction pipe 74, and the negative pressure port. The gas entering the vacuum generator 72 is then discharged sequentially through the outlet and the exhaust pipe 73. When exhaust is complete, the intake pipe 71 stops supplying drive gas to the third intake port of the vacuum generator 72, so that the negative pressure port of the vacuum generator 72 does not generate a negative pressure, thereby stopping the suction of gas from the supply tank 10 and the raw liquid tank 50.

[0059] It should be noted that the end of the inlet pipe 71 furthest from the third inlet of the vacuum generator 72 has a third connector 710. The inlet pipe 71 is connected to an external control gas source through this third connector 710, allowing the control gas provided by the external control gas source to be delivered along the inlet pipe 71 to the third inlet of the vacuum generator 72. This external control gas source can be any gas supply device capable of providing control gas, and its specific structure is not limited here. The control gas can be nitrogen, or other gases that do not chemically react with liquid chemicals, and is not limited here.

[0060] Specifically, in this embodiment, a one-way valve 76 is installed on the extraction pipe 74. This one-way valve 76 allows gas and / or liquid within the extraction pipe 74 to flow towards the negative pressure port of the vacuum generator 72, and prevents gas and / or liquid within the extraction pipe 74 from flowing away from the negative pressure port of the vacuum generator 72. Thus, the one-way valve 76 prevents backflow of gas and / or liquid within the extraction pipe 74, and prevents external contaminants from entering the raw material tank 50 and the supply tank 10, thereby preventing contamination of the liquid chemicals.

[0061] Furthermore, the extraction pipe 74 includes a main extraction pipe 741, a first extraction branch pipe 742, and a second extraction branch pipe 743. One end of the main extraction pipe 741 is connected to the negative pressure port of the vacuum generator 72, and the other end of the main extraction pipe 741 is connected to the first extraction branch pipe 742 and the second extraction branch pipe 743. The end of the second extraction branch pipe 743 away from the main extraction pipe 741 is connected to the first drive branch pipe 22, and the end of the second extraction branch pipe 743 away from the main extraction pipe 741 is connected to the second drive branch pipe 23. The aforementioned one-way valve 76 is installed on the main extraction pipe 741. Thus, during exhaust, the gas in the supply tank 10 sequentially enters the vacuum generator 72 through the first inlet a1, the first drive branch pipe 22, the first suction branch pipe 742, the main suction pipe 741, and the negative pressure port; the gas in the raw liquid tank 50 sequentially enters the vacuum generator 72 through the second inlet b1, the second drive branch pipe 23, the second suction branch pipe 743, the main suction pipe 741, and the negative pressure port. The gas entering the vacuum generator 72 is then discharged through the exhaust pipe 73.

[0062] Furthermore, a twelfth control valve 771 is installed on the first extraction branch pipe 742. This twelfth control valve 771 is used to control the opening or closing of the first extraction branch pipe 742. When the twelfth control valve 771 is open, the first extraction branch pipe 742 is open, allowing gas in the first drive branch pipe 22 to enter the main extraction pipe 741 through the first extraction branch pipe 742. When the twelfth control valve 771 is closed, the first extraction branch pipe 742 is closed, preventing gas in the first drive branch pipe 22 from entering the main extraction pipe 741 through the first extraction branch pipe 742.

[0063] A thirteenth control valve 781 is installed on the second extraction branch pipe 743. This thirteenth control valve 781 is used to control the opening or closing of the second extraction branch pipe 743. When the thirteenth control valve 781 is open, the second extraction branch pipe 743 is open, allowing gas in the second drive branch pipe 23 to enter the main extraction pipe 741 through the second extraction branch pipe 743. When the thirteenth control valve 781 is closed, the second extraction branch pipe 743 is closed, preventing gas in the second drive branch pipe 23 from entering the main extraction pipe 741 through the second extraction branch pipe 743.

[0064] Furthermore, a third pressure detector 772 is also installed on the first extraction branch pipe 742, which is used to monitor the air pressure in the first extraction branch pipe 742 in real time.

[0065] A fourth pressure detector 782 is also installed on the second extraction branch pipe 743. The fourth pressure detector 782 is used to monitor the air pressure in the second extraction branch pipe 743 in real time.

[0066] In embodiments of this application, the liquid supply device further includes a control unit (not shown), which includes a control module, a compressed air pipeline, and a solenoid valve assembly. One end of the compressed air pipeline is connected to an external compressed air source, enabling the external compressed air source to supply compressed air to the compressed air pipeline. All of the aforementioned control valves (i.e., the first to thirteenth control valves 781) are pneumatic valves, and the compressed air pipeline is connected to these control valves (i.e., the first to thirteenth control valves 781) via the solenoid valve assembly. The solenoid valve assembly is communicatively connected to the control module, which controls the connection or disconnection of each control valve with the compressed air pipeline by controlling the on / off state of each solenoid valve in the solenoid valve assembly, thereby achieving the purpose of controlling the opening or closing of each control valve.

[0067] It is understandable that when a compressed air line is connected to a control valve, the control valve opens under the driving force of the compressed air in the line. When the compressed air line is disconnected from the control valve, the control valve closes. The aforementioned external compressed air source can be a compressor, or other equipment capable of generating compressed air; this is not limited here.

[0068] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0069] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A liquid supply device, characterized in that, include: A liquid supply tank (10) for storing liquid chemicals, the liquid supply tank (10) having a first air inlet (a1) and a first liquid outlet (a2); A drive pipe (20), connected to the first air inlet (a1), is used to supply drive gas into the liquid supply tank (10) through the first air inlet (a1), so that the liquid chemicals in the liquid supply tank (10) are output from the first liquid outlet (a2) under the pressure generated by the drive gas; and The liquid supply pipeline (30) includes a main liquid supply pipe (31) and multiple liquid supply branch pipes (33). One end of the main liquid supply pipe (31) is connected to the first liquid outlet (a2), and each of the liquid supply branch pipes (33) is connected to the other end of the main liquid supply pipe (31) to transport the liquid chemicals in the main liquid supply pipe (31) to multiple downstream devices.

2. The liquid supply device according to claim 1, characterized in that, A first control valve (34) is installed on the liquid supply main pipe (31), and the first control valve (34) is used to control the liquid supply main pipe (31) to be turned on or off.

3. The liquid supply device according to claim 1, characterized in that, Each of the liquid supply branch pipes (33) is equipped with a second control valve (35), and each second control valve (35) is used to control the liquid supply branch pipe (33) to be connected or disconnected.

4. The liquid supply device according to claim 1, characterized in that, The liquid supply main pipe (31) is equipped with a third control valve (36), and the liquid supply device also includes a degassing pipeline (40), which includes a first connecting pipe (41), a gas-liquid separator (42) and a second connecting pipe (43). The gas-liquid separator (42) has an inlet and an outlet. The first connecting pipe (41) is connected between the inlet and the part of the liquid supply main pipe (31) upstream of the third control valve (36). The second connecting pipe (43) is connected between the outlet and the part of the liquid supply main pipe (31) downstream of the third control valve (36).

5. The liquid supply device according to claim 4, characterized in that, A fourth control valve (45) is installed on the first connecting pipe (41), and the fourth control valve (45) is used to control the first connecting pipe (41) to be open or closed; A fifth control valve (46) is installed on the second connecting pipe (43), and the fifth control valve (46) is used to control the second connecting pipe (43) to be open or closed.

6. The liquid supply device according to claim 4, characterized in that, The gas-liquid separator (42) also has an air extraction port, and the degassing pipeline (40) further includes a vacuum pipeline (44). One end of the vacuum pipeline (44) is connected to the air extraction port, and the other end of the vacuum pipeline (44) is used to connect to an external negative pressure source.

7. The liquid supply device according to claim 1, characterized in that, The liquid supply device also includes a raw liquid tank (50) and a connecting pipe (60). The raw liquid tank (50) is used to store liquid chemicals. The raw liquid tank (50) has a second air inlet (b1) and a second liquid outlet (b2). The liquid supply tank (10) also has a liquid inlet (a3). The connecting pipe (60) connects the second liquid outlet (b2) and the liquid inlet (a3). The drive pipeline (20) includes a drive main pipe (21), a first drive branch pipe (22), and a second drive branch pipe (23). One end of the drive main pipe (21) is connected to an external drive air source, and the other end of the drive main pipe (21) is connected to the first drive branch pipe (22) and the second drive branch pipe (23). The end of the first drive branch pipe (22) away from the drive main pipe (21) is connected to the first air inlet (a1), and the end of the second drive branch pipe (23) away from the drive main pipe (21) is connected to the second air inlet (b1).

8. The liquid supply device according to claim 7, characterized in that, The liquid supply device further includes an exhaust pipe (70), which is connected to the first drive branch pipe (22) and the second drive branch pipe (23). The exhaust pipe (70) is used to discharge the gas in the liquid supply tank (10) through the first drive branch pipe (22) and to discharge the gas in the original liquid tank (50) through the second drive branch pipe (23).

9. The liquid supply device according to claim 8, characterized in that, The exhaust pipe (70) includes an intake pipe (71), a vacuum generator (72), an exhaust pipe (73), and a suction pipe (74). The vacuum generator (72) includes a third intake port, an exhaust port, and a negative pressure port. The vacuum generator (72) is configured to generate a negative pressure at the negative pressure port when gas is input into the third intake port. The intake pipe (71) is connected to the third intake port and is used to deliver driving gas to the third intake port. The exhaust pipe (73) is connected to the exhaust port and is used to discharge the gas that enters the vacuum generator (72) from the third intake port and the negative pressure port. The suction pipe (74) is connected between the negative pressure port and the first driving branch pipe (22) and the second driving branch pipe (23).

10. The liquid supply device according to claim 9, characterized in that, A one-way valve (76) is installed on the suction pipe (74). The one-way valve (76) is used to allow the gas and / or liquid in the suction pipe (74) to flow in the direction close to the negative pressure port and to prevent the gas and / or liquid in the suction pipe (74) from flowing in the direction away from the negative pressure port.

11. The liquid supply device according to claim 10, characterized in that, The suction pipe (74) includes a main suction pipe (741), a first suction branch pipe (742), and a second suction branch pipe (743). One end of the main suction pipe (741) is connected to the negative pressure port, and the other end of the main suction pipe (741) is connected to the first suction branch pipe (742) and the second suction branch pipe (743). The end of the first suction branch pipe (742) away from the main suction pipe (741) is connected to the first drive branch pipe (22), and the end of the second suction branch pipe (743) away from the main suction pipe (741) is connected to the second drive branch pipe (23). The one-way valve (76) is installed on the main suction pipe (741).

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