Quantitative determination device for precipitation amount of acid-base substances in organic membrane

Abstract

The utility model discloses a device for quantitatively measuring the precipitation amount of acid-base substances in an organic membrane, which comprises a bearing disc, at least one water passing groove is arranged at the top of the bearing disc, a water outlet is arranged at one end of the bearing disc, a water inlet is arranged at the other end of the bearing disc, and the water inlet and the water outlet are respectively communicated with the water passing groove through a through groove pipe. One end of the water inlet is fixedly communicated with a water conveying pipe, and a water conveying pump is fixedly mounted on the water conveying pipe; the soft gasket is placed at the top of the bearing disc; the gland is tightly pressed on the wafer; the pressing cover locking component can conveniently press the pressing cover downwards, manpower is saved, operation is convenient, in addition, the pressing position can be automatically locked after the pressing cover is pressed downwards through the pressing cover locking component, the stability of the pressing cover on a wafer pressing test is ensured, and the wafer pressing test efficiency is improved. Therefore, the consistency and accuracy of test results are ensured.

Description

Technical Field

[0001] This utility model relates to the field of organic membrane technology, specifically to a device for quantitatively measuring the amount of acidic and alkaline substances precipitated from an organic membrane. Background Technology

[0002] With the continuous development of semiconductor technology, organic films are increasingly widely used in semiconductor manufacturing. Organic films used in the semiconductor field include photoresists, anti-reflective films, and hard masks. The preparation of organic films involves the use of acids and alkalis, which can lead to the precipitation of these substances. This precipitation affects the lifespan of the organic film. Therefore, accurate measurement of the amount of acid and alkali precipitated from organic films is crucial.

[0003] Currently, there is a need to design a measuring device that can accurately measure the amount of acid and alkali substances precipitated on the surface of organic membranes, with a simple testing method, and that can meet the actual production requirements. Utility Model Content

[0004] The purpose of this invention is to provide a device for quantitatively measuring the amount of acid and alkali substances precipitated in organic membranes, thereby solving the problems of complex equipment, cumbersome operation, and insufficient accuracy in existing methods for measuring the amount of acid and alkali substances precipitated on the surface of organic membranes.

[0005] To achieve the above objectives, the main technical solution adopted by this utility model includes: a device for quantitatively determining the amount of acid and alkali substances precipitated in an organic membrane, comprising: a support plate, the top of which has at least one water-passing groove, one end of which has a water outlet and the other end has a water inlet, the water inlet and the water outlet being connected to the water-passing groove through a through-groove pipe, the water outlet being fixedly connected to a waste liquid collector through a drain pipe, one end of the water inlet being fixedly connected to a water supply pipe, and a water supply pump being fixedly installed on the water supply pipe; a soft pad, which contacts the wafer coated with the organic membrane, the soft pad being placed on the top of the support plate, and the soft pad having water-passing holes that perfectly match the position and shape of the water-passing groove; a pressure cap, the bottom of which has an integrally formed pressure platform, the pressure cap being pressed tightly onto the wafer; and a pressure cap locking component, which is connected to the pressure cap, the pressure cap locking component being able to push the pressure cap downward to press it tight, and the pressure cap locking component being detachably connected to the pressure cap.

[0006] As a preferred technical solution, the pressure cap locking component includes a mounting bracket, a mounting post, a clamping bolt, and a pressure plate. A fixing block is fixedly installed on the bearing plate, the mounting bracket is fixedly installed on the fixing block, the mounting post is fixedly installed on the mounting bracket, the clamping bolt is threaded onto the mounting post, the pressure plate is installed at the lower end of the clamping bolt, and the bottom of the pressure plate abuts against the top of the bearing plate.

[0007] As a preferred technical solution, a pressure frame is fixedly installed on the top of the pressure cover. The pressure frame is composed of multiple pressure rods, and the multiple pressure rods are respectively connected to the top edge of the pressure cover.

[0008] As a preferred technical solution, the center points of the clamping bolt, the pressure plate, the pressure groove, and the pressure cover are located on the same axis.

[0009] As a preferred technical solution, a bearing is fixedly installed on the top of the pressure plate, and the lower end of the clamping bolt is fixedly installed in the inner ring of the bearing.

[0010] As a preferred technical solution, the top of the bearing plate is integrally formed with a boss, and the bottom of the pressure cover is provided with a slot, and the boss is fitted and locked inside the slot.

[0011] As a preferred technical solution, the top of the pressure frame is provided with a pressure groove, and the pressure plate is fitted and pressed into the inside of the pressure groove.

[0012] As a preferred technical solution, the clamping bolt is a handle bolt.

[0013] As a preferred technical solution, the bearing plate, the water supply pipe, the drain pipe, and the pressure cap are all made of polytetrafluoroethylene.

[0014] As a preferred technical solution, the water pump is a peristaltic pump.

[0015] This utility model has at least the following beneficial effects:

[0016] This invention provides a device for quantitatively determining the precipitation amount of acidic and alkaline substances in an organic film. The device involves placing a wafer coated with an organic film on a soft pad, ensuring the film-coated side of the wafer adheres to the pad. A pressure plate is then placed on top, and rotating the clamping bolt moves the pressure plate downwards. During this downward movement, the pressure plate pushes the cover down, and the groove on the lower end face of the cover engages with the protrusion on the support plate. The pressure plate on the lower end face of the cover presses the wafer firmly against the soft pad, ensuring the wafer is fixed in position and tightly adhered to the pad. This completes the clamping and fixing of the wafer. The cover locking mechanism facilitates the pressing down of the cover, saving manpower and simplifying operation. Furthermore, the locking mechanism automatically locks the pressed position after the cover is pressed down, ensuring the stability of the wafer clamping test and thus ensuring the consistency and accuracy of the test results. Attached Figure Description

[0017] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0018] Figure 1 This is a three-dimensional diagram of the device for quantitatively measuring the amount of acid and alkali substances precipitated in the organic membrane of this invention.

[0019] Figure 2 This is a partially exploded view of the device for quantitatively determining the amount of acid and alkali substances precipitated in the organic membrane of this invention.

[0020] Figure 3 This is a cross-sectional view of the device for quantitatively determining the amount of acid and alkali substances precipitated in the organic membrane of this invention.

[0021] Explanation of icon numbers:

[0022] 1. Support plate; 101. Water passage groove; 102. Through groove pipe; 1021. Water outlet; 1022. Water inlet; 103. Boss; 104. Fixing block; 2. Water supply pipe; 3. Drain pipe; 4. Waste liquid collector; 5. Water pump; 6. Soft pad; 601. Water passage hole; 7. Wafer; 8. Cover; 801. Slot; 9. Pressure frame; 901. Pressure groove; 10. Mounting frame; 1001. Mounting column; 1002. Clamping bolt; 1003. Bearing; 1004. Pressure plate. Detailed Implementation

[0023] The following will describe in detail the implementation of this application with reference to the accompanying drawings and embodiments, so that the implementation process of how this application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0024] Example

[0025] Please refer to Figures 1 to 3As shown, this embodiment provides a device for quantitatively determining the amount of acidic and alkaline substances precipitated from an organic membrane, comprising: a support plate 1, the top of which has at least one water-passing groove 101; one end of the support plate 1 has a water outlet 1021 and the other end has a water inlet 1022; the water inlet 1022 and the water outlet 1021 are respectively connected to the water-passing groove 101 through a through-groove pipe 102; the water outlet 1021 is fixedly connected to a waste liquid collector 4 through a drain pipe 3; one end of the water inlet 1022 is fixedly connected to a water supply pipe 2, and a water pump 5 is fixedly installed on the water supply pipe 2; a soft pad 6, which contacts the wafer 7 coated with the organic membrane, and the soft pad 6 is placed on the support plate 1. At the top, the soft pad 6 has a water passage hole 601 that perfectly matches the position and shape of the water passage groove 101; the pressure cover 8 has a pressure platform integrally formed at its bottom, and the pressure cover 8 is pressed tightly onto the wafer 7; and the pressure cover locking component is connected to the pressure cover 8. The pressure cover locking component can push the pressure cover 8 downward to press it tightly, and the pressure cover locking component is detachably connected to the pressure cover 8. The pressure cover locking component can easily press the pressure cover 8 down, saving manpower and making it easy to operate. In addition, after the pressure cover 8 is pressed down, the pressure cover locking component can automatically lock the pressed position to ensure the stability of the pressure cover 8 pressing the wafer 7, thereby ensuring the consistency and accuracy of the test results.

[0026] The pressure cap locking component includes a mounting bracket 10, a mounting post 1001, a clamping bolt 1002, and a pressure plate 1004. A fixing block 104 is fixedly installed on the bearing plate 1. The mounting bracket 10 is fixedly installed on the fixing block 104. The mounting post 1001 is fixedly installed on the mounting bracket 10. The clamping bolt 1002 is threaded onto the mounting post 1001. The pressure plate 1004 is installed at the lower end of the clamping bolt 1002. The bottom of the pressure plate 1004 abuts against the top of the bearing plate 1. By rotating the clamping bolt 1002, the pressure plate 1004 is driven to press down, so that the pressure plate 1004 can drive the pressure cap 8 to press down on the wafer 7 on the top of the soft pad 6. During the pressing process, the bottom pressure plate of the pressure cap 8 presses the wafer 7 and the soft pad 6 tightly, ensuring that the wafer 7 is fixed in position and tightly attached to the soft pad 6.

[0027] The pressure frame 9 is fixedly installed on the top of the pressure cover 8. The pressure frame 9 is composed of multiple pressure rods, and the multiple pressure rods are respectively connected to the top edge of the pressure cover 8. By fixing the pressure frame 9 on the top of the pressure cover 8, the pressure plate 1004 applies more uniform pressure to the pressure cover 8, thereby improving the fit between the wafer 7 and the soft pad 6.

[0028] The center points of the clamping bolt 1002, the pressure plate 1004, the pressure groove 901, and the pressure cover 8 are located on the same axis, which further makes the pressure of the pressure plate 1004 on the pressure cover 8 more uniform and improves the fit between the wafer 7 and the soft pad 6.

[0029] The bearing 1003 is fixedly installed on the top of the pressure plate 1004, and the lower end of the clamping bolt 1002 is fixedly installed in the inner ring of the bearing 1003. By fixing the bearing 1003 on the top of the pressure plate 1004, the pressure cover 8 will not be rotated when the clamping bolt 1002 is rotated, thus improving the stability of clamping the wafer 7.

[0030] The top of the carrier plate 1 is integrally formed with a boss 103, and the bottom of the pressure cover 8 is provided with a slot 801. The boss 103 is fitted and engaged inside the slot 801. When the pressure cover 8 is placed on the carrier plate 1, the engagement of the boss 103 and the slot 801 can accurately position the pressure cover 8, so that the pressure cover 8 can be accurately pressed on a specific position of the wafer 7. This can prevent the wafer 7 from moving during the test and ensure that the area on the wafer 7 coated with organic film corresponds accurately to the water passage hole 601 on the soft pad 6, thereby ensuring the accuracy of the test results.

[0031] The top of the pressure frame 9 is provided with a pressure groove 901, and the pressure plate 1004 is fitted and pressed into the inside of the pressure groove 901. The setting of the pressure groove 901 can increase the stability of the pressure plate 1004 pressing down.

[0032] Among them, the clamping bolt 1002 is a handle bolt, which is convenient for personnel to operate.

[0033] Among them, the bearing plate 1, water supply pipe 2, drainage pipe 3 and pressure cover 8 are all made of polytetrafluoroethylene (PTFE). PTFE structure can effectively resist the corrosion of chemical substances, ensuring that the device maintains stable performance during long-term use and improving the reliability of the device.

[0034] Among them, water pump 5 is a peristaltic pump, model BT102S, which can precisely control the flow rate and volume of deionized water to achieve precise flow control.

[0035] As is well known to those skilled in the art, the working principle and wiring method of the water pump 5 are commonplace and are all conventional methods or common knowledge. Therefore, they will not be described in detail here. Those skilled in the art can select any model according to their needs or convenience.

[0036] Working principle: In use, place the wafer 7 coated with organic film on the soft pad 6, so that the side of the wafer 7 coated with organic film is in contact with the soft pad 6. Then, cover it with the pressure cover 8. By rotating the clamping bolt 1002, the pressure plate 1004 is moved down. During the downward movement of the pressure plate 1004, the pressure cover 8 is pushed down. During the downward movement, the slot 801 on the lower end face of the pressure cover 8 matches the boss 103 on the carrier plate 1. The pressure plate on the lower end face of the pressure cover 8 presses the wafer 7 and the soft pad 6 together, ensuring that the wafer 7 is fixed in position and in close contact with the soft pad 6, thus completing the pressing and fixing of the wafer 7.

[0037] Then, the water pump 5 is started. The water pump 5 is a peristaltic pump, which can precisely control the flow rate and volume of deionized water. The deionized water enters the inlet 1022 of the support plate 1 through the water pipe 2, and then flows into the water passage groove 101 through the through groove pipe 102 inside the support plate 1. Since the water passage hole 601 on the soft pad 6 is perfectly matched with the position and shape of the water passage groove 101, the deionized water will come into contact with the position of the wafer 7 that is in contact with the water passage hole 601. The position of the wafer 7 that is not in contact with the water passage hole 601 will not come into contact with the deionized water. The acid and alkaline substances in the organic film will leach into the deionized water during the contact process. The waste liquid after the test flows out from the outlet 1021 of the water passage groove 101 and enters the waste liquid collector 4 through the drain pipe 3. By detecting and analyzing the deionized water in the waste liquid collector 4, the concentration of acid or alkaline substances in it is determined by ion chromatography, and the precipitation of acid and alkaline substances in the organic film on the wafer can be determined.

[0038] The foregoing description illustrates and describes several preferred embodiments of the present invention. However, as previously stated, it should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the inventive concept described herein through the foregoing teachings or techniques or knowledge in related fields. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the protection scope of the appended claims.

Claims

1. A device for quantitatively determining the amount of acidic and basic substances precipitated from an organic membrane, characterized in that, include: The support plate (1) has at least one water-passing groove (101) on its top. One end of the support plate (1) is provided with a water outlet (1021) and the other end is provided with a water inlet (1022). The water inlet (1022) and the water outlet (1021) are respectively connected to the water-passing groove (101) through the through groove pipe (102). The water outlet (1021) is fixedly connected to a waste liquid collector (4) through a drain pipe (3). One end of the water inlet (1022) is fixedly connected to a water supply pipe (2). A water pump (5) is fixedly installed on the water supply pipe (2). A soft pad (6) is in contact with a wafer (7) coated with an organic film. The soft pad (6) is placed on top of the carrier plate (1). A water passage hole (601) is provided on the soft pad (6) that is perfectly matched in position and shape with the water passage groove (101). A pressure cap (8) having a pressure platform integrally formed on its bottom, the pressure cap (8) being pressed against the wafer (7); and A cover locking component is connected to the cover (8). The cover locking component can push the cover (8) downward to press it tight, and the cover locking component is detachably connected to the cover (8).

2. The device for quantitatively determining the amount of acidic and alkaline substances precipitated from an organic membrane according to claim 1, characterized in that: The pressure cap locking component includes a mounting bracket (10), a mounting post (1001), a clamping bolt (1002), and a pressure plate (1004). A fixing block (104) is fixedly installed on the bearing plate (1). The mounting bracket (10) is fixedly installed on the fixing block (104). The mounting post (1001) is fixedly installed on the mounting bracket (10). The clamping bolt (1002) is threaded onto the mounting post (1001). The pressure plate (1004) is installed at the lower end of the clamping bolt (1002). The bottom of the pressure plate (1004) abuts against the top of the bearing plate (1).

3. The device for quantitatively determining the amount of acidic and alkaline substances precipitated from an organic membrane according to claim 2, characterized in that: A pressure frame (9) is fixedly installed on the top of the pressure cover (8). The pressure frame (9) is composed of multiple pressure rods, and the multiple pressure rods are respectively connected to the top edge of the pressure cover (8).

4. The device for quantitatively determining the amount of acidic and alkaline substances precipitated from an organic membrane according to claim 3, characterized in that: The center points of the clamping bolt (1002), the pressure plate (1004), the pressure groove (901), and the pressure cap (8) are located on the same axis.

5. The device for quantitatively determining the amount of acidic and alkaline substances precipitated from an organic membrane according to claim 4, characterized in that: A bearing (1003) is fixedly installed on the top of the pressure plate (1004), and the lower end of the clamping bolt (1002) is fixedly installed in the inner ring of the bearing (1003).

6. The device for quantitatively determining the amount of acidic and alkaline substances precipitated from an organic membrane according to claim 1, characterized in that: The top of the bearing plate (1) is integrally formed with a boss (103), and the bottom of the pressure cover (8) is provided with a slot (801). The boss (103) is fitted and snapped into the inside of the slot (801).

7. The device for quantitatively determining the amount of acidic and alkaline substances precipitated from an organic membrane according to claim 3, characterized in that: The top of the pressure frame (9) is provided with a pressure groove (901), and the pressure plate (1004) is fitted and pressed into the inside of the pressure groove (901).

8. The device for quantitatively determining the amount of acidic and alkaline substances precipitated from an organic membrane according to claim 2, characterized in that: The clamping bolt (1002) is a handle bolt.

9. The device for quantitatively determining the amount of acidic and alkaline substances precipitated from an organic membrane according to claim 1, characterized in that: The bearing plate (1), the water supply pipe (2), the drain pipe (3), and the pressure cap (8) are all made of polytetrafluoroethylene.

10. A device for quantitatively determining the amount of acidic or alkaline substances precipitated from an organic membrane according to any one of claims 1-9, characterized in that: The water pump (5) is a peristaltic pump.

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