Photoresist stripping liquid filtering device

Abstract

The utility model provides a photoresist stripper filtering device, which relates to the technical field of filtering devices and comprises a storage cylinder, a support ring is fixedly mounted in the middle of the storage cylinder, a cylinder cover is mounted on the surface of the upper end of the storage cylinder, a feed port is arranged on the upper surface of the cylinder cover, and a driving connecting device is arranged in the middle of the storage cylinder. The servo motor drives the gear to rotate, the gear drives the gear teeth and drives the rotating disc to rotate at the same time, the positioning rods are fixedly installed on the upper surface of the rotating disc at equal intervals, the positioning rods are fixedly installed on the upper surface of the rotating disc at equal intervals, and therefore the rotating disc can rotate conveniently. The top end of the positioning rod is arranged in the positioning hole, and meanwhile, the barrel cover is driven to rotate, and the filter barrel is driven to rotate at the same time, so that the filter barrel rotates at a high speed to prevent impurities from accumulating on the surface of the filter barrel.

Description

Technical Field

[0001] This utility model relates to the field of filtration device technology, and more specifically, to a photoresist stripping liquid filtration device. Background Technology

[0002] Photoresist stripping solution is a chemical liquid used to dissolve and remove photoresist. It is commonly used in the photolithography electronics industry. During the production process of photoresist stripping solution, filtration of the raw solution is required. For example, patent application CN202122071709.9 describes a multi-stage filtration device for stripping solution production, including a filter base and a multi-stage filtration mechanism. The multi-stage filtration mechanism is snap-fitted to the upper end of the filter base. The multi-stage filtration mechanism is divided into a primary filtration mechanism, a secondary filtration mechanism, a tertiary filtration mechanism, and a quaternary filtration mechanism from top to bottom. The filter base has a filter membrane with a pore size of 3 micrometers inside. The lower end of the filter base is fixedly connected to... The negative pressure device has a collection device located below its air outlet. This device accelerates filtration efficiency and reduces residual stripping liquid on the metal surface, thus improving liquid collection and reducing resource waste. All components are connected using snap-fit ​​mechanisms, allowing for quick disassembly and product collection after each use, as well as rapid cleaning, significantly improving production efficiency. However, in the above-mentioned technical solution, impurities easily accumulate on the filter screen during filtration, causing blockage and affecting the filtration speed. Utility Model Content

[0003] The main purpose of this invention is to provide a photoresist stripping solution filtration device, which can effectively solve the problem in the prior art where impurities after filtration tend to accumulate on the filter screen surface and cause blockage, thus affecting the filtration speed.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a photoresist stripping solution filtration device, comprising a storage cylinder, a support ring fixedly installed in the middle of the storage cylinder, a cylinder cover installed on the upper surface of the storage cylinder, a feed port provided on the upper surface of the cylinder cover, a drive connection device provided in the middle of the storage cylinder, the drive connection device being connected to the cylinder cover, and a filter cylinder installed on the lower surface of the cylinder cover.

[0005] Preferably, a number of support rods are fixedly installed at equal intervals on the lower surface of the support ring, and a discharge port is provided on the lower surface of the storage cylinder.

[0006] Preferably, the upper surface of the storage cylinder is provided with a rotating groove, and a rotating ring is fixedly installed on the lower surface of the cylinder cover, with the rotating ring rotatably disposed inside the rotating groove.

[0007] Preferably, the lower surface of the cylinder cover is provided with a mounting groove, the inner wall of the mounting groove is provided with an internal thread, the upper surface of the filter cylinder is fixedly installed with a mounting ring, the mounting ring is disposed inside the mounting groove, the side of the mounting ring is provided with an external thread, and the external thread is engaged with the internal thread.

[0008] Preferably, the drive connection device includes several positioning holes, a servo motor, a turntable, and a slide groove. The positioning holes are all opened on the lower surface of the cylinder cover, the servo motor is fixedly installed on the upper surface of the support ring, the turntable is rotatably installed in the middle of the storage cylinder, and the slide groove is opened on the circumference of the storage cylinder.

[0009] Preferably, a gear is fixedly installed at the output end of the servo motor, and a number of gear teeth are fixedly installed on the lower surface of the turntable, with the gear teeth meshing with the gear.

[0010] Preferably, a slip ring is fixedly installed on the inner wall of the turntable, and the slip ring is slidably installed inside the slide groove.

[0011] Preferably, a plurality of positioning rods are fixedly installed at equal intervals on the upper surface of the turntable, and the top ends of the positioning rods are disposed inside the positioning holes.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] (1) The gear is driven by a servo motor to rotate, which drives several gear teeth and drives the turntable to rotate. Since several positioning rods are fixedly installed at equal intervals on the upper surface of the turntable, and the top of the positioning rods is set inside the positioning hole, the cylinder cover will be driven to rotate, which will drive the filter cylinder to rotate, so that the filter cylinder rotates at high speed to prevent impurities from accumulating on the surface of the filter cylinder and affecting the filtration efficiency.

[0014] (2) Remove the cover from the upper surface of the storage cylinder, and the filter cylinder can be removed from the inside of the storage cylinder. At this time, the staff can rotate the filter cylinder while keeping the cover fixed. This will disengage the external thread from the internal thread, allowing the mounting ring to be removed from the mounting groove. The filter cylinder can then be removed from the lower surface of the cover. Conversely, it can be installed, making it convenient for the staff to clean the filter cylinder. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a photoresist stripping liquid filtration device according to the present invention;

[0016] Figure 2 This is a schematic side view of the overall structure of a photoresist stripping liquid filtration device according to the present invention;

[0017] Figure 3This is a schematic diagram of the storage cylinder structure of a photoresist stripping liquid filtration device according to the present invention;

[0018] Figure 4 This is a schematic diagram of the overall structure of the cylinder cover of a photoresist stripping liquid filtration device according to the present invention;

[0019] Figure 5 This is a schematic diagram of the lower surface structure of the cylinder cover of a photoresist stripping liquid filtration device according to the present invention;

[0020] Figure 6 This is a schematic diagram of the filter cylinder structure of a photoresist stripping liquid filtration device according to the present invention;

[0021] Figure 7 This is a schematic diagram of the rotary structure of a photoresist stripping liquid filtration device according to the present invention.

[0022] In the diagram: 1. Storage cylinder; 2. Drive connection device; 201. Positioning hole; 202. Servo motor; 203. Gear; 204. Turntable; 205. Gear tooth; 206. Positioning rod; 207. Slide groove; 208. Slip ring; 3. Support ring; 4. Support rod; 5. Discharge port; 6. Cylinder cover; 7. Inlet; 8. Rotary groove; 9. Rotary ring; 10. Filter cylinder; 11. Mounting groove; 12. Internal thread; 13. Mounting ring; 14. External thread. Detailed Implementation

[0023] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0024] like Figure 1 , 2 As shown in Figure 3, a photoresist stripping solution filtration device includes a storage cylinder 1, a support ring 3 fixedly installed in the middle of the storage cylinder 1, a cylinder cover 6 installed on the upper surface of the storage cylinder 1, a feed inlet 7 provided on the upper surface of the cylinder cover 6, a drive connection device 2 provided in the middle of the storage cylinder 1, the drive connection device 2 being connected to the cylinder cover 6, and a filter cylinder 10 installed on the lower surface of the cylinder cover 6.

[0025] like Figure 1 As shown, several support rods 4 are fixedly installed at equal intervals on the lower surface of the support ring 3, and a discharge port 5 is provided on the lower surface of the storage cylinder 1, which can provide support for this device.

[0026] like Figure 3 , 4As shown, a rotating groove 8 is provided on the upper surface of the storage cylinder 1, and a rotating ring 9 is fixedly installed on the lower surface of the cylinder cover 6. The rotating ring 9 is rotatably disposed inside the rotating groove 8, which can improve the connection between the cylinder cover 6 and the storage cylinder 1.

[0027] like Figure 5 , 6 As shown, the lower surface of the cover 6 is provided with a mounting groove 11, and the inner wall of the mounting groove 11 is provided with an internal thread 12. The upper surface of the filter cylinder 10 is fixedly installed with a mounting ring 13, which is located inside the mounting groove 11. The side of the mounting ring 13 is provided with an external thread 14, which meshes with the internal thread 12. When the filter cylinder 10 needs to be cleaned, the cover 6 is removed from the upper surface of the storage cylinder 1, and the filter cylinder 10 can be removed from the storage cylinder 1. At this time, by rotating the filter cylinder 10 while keeping the cover 6 fixed, the external thread 14 can be disengaged from the internal thread 12, and the mounting ring 13 can be removed from the mounting groove 11, so that the filter cylinder 10 can be removed from the lower surface of the cover 6. Conversely, it can be installed, which facilitates the cleaning of the filter cylinder 10 by the operator.

[0028] like Figure 2 , 3 As shown in Figure 7, the drive connection device 2 includes several positioning holes 201, a servo motor 202, a turntable 204, and a sliding groove 207. The positioning holes 201 are all located on the lower surface of the cylinder cover 6. The servo motor 202 is fixedly mounted on the upper surface of the support ring 3. The turntable 204 is rotatably mounted in the middle of the storage cylinder 1. The sliding groove 207 is located on the circumference of the storage cylinder 1. A gear 203 is fixedly mounted on the output end of the servo motor 202. Several gear teeth 205 are fixedly mounted on the lower surface of the turntable 204, and these gear teeth 205 mesh with the gear 203. A slip ring 208 is fixedly mounted on the inner wall of the turntable 204, and the slip ring 208 is slidably mounted inside the sliding groove 207. The turntable 204 has several positioning rods 206 fixedly installed at equal intervals on its upper surface. The top ends of the positioning rods 206 are located inside the positioning holes 201. During the filtration process, the servo motor 202 drives the gear 203 to rotate, which in turn drives several gear teeth 205, thereby driving the turntable 204 to rotate. Since the positioning rods 206 are fixedly installed at equal intervals on the upper surface of the turntable 204, and the top ends of the positioning rods 206 are located inside the positioning holes 201, the cylinder cover 6 is also driven to rotate, which in turn drives the filter cylinder 10 to rotate. This high-speed rotation of the filter cylinder 10 prevents impurities from clogging the filter holes in the filter cylinder 10 and affecting the filtration efficiency.

[0029] Working principle of a photoresist stripping fluid filtration device:

[0030] When using this device to filter the stripping fluid raw material, the stripping fluid raw material first flows from the inlet 7 into the storage cylinder 1. At this time, the stripping fluid raw material passes through the filter cylinder 10, which filters out impurities in the stripping fluid raw material. The filtered raw liquid flows into the storage cylinder 1 and out from the outlet 5. During the filtration process, the servo motor 202 drives the gear 203 to rotate, causing the gear 203 to drive several gear teeth 205, which in turn drives the turntable 204 to rotate. Since several positioning rods 206 are fixedly installed at equal intervals on the upper surface of the turntable 204, and the top of the positioning rods 206 is set inside the positioning hole 201, the cylinder cover is also driven. Rotating the cover 6 simultaneously drives the filter cylinder 10 to rotate at high speed, preventing impurities from clogging the filter holes and affecting filtration efficiency. When cleaning the filter cylinder 10, the cover 6 is removed from the upper surface of the storage cylinder 1, allowing the filter cylinder 10 to be removed from the storage cylinder 1. At this time, by rotating the filter cylinder 10 while keeping the cover 6 in place, the external thread 14 can disengage from the internal thread 12, allowing the mounting ring 13 to be removed from the mounting groove 11, and the filter cylinder 10 can be removed from the lower surface of the cover 6. Conversely, it can be installed, facilitating cleaning of the filter cylinder 10.

[0031] The above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. Any obvious variations or modifications derived from the technical solutions of this utility model are still within the protection scope of this utility model.

Claims

1. A photoresist stripping solution filtration device, comprising a storage cylinder (1), characterized in that: A support ring (3) is fixedly installed in the middle of the storage cylinder (1). A cylinder cover (6) is installed on the upper surface of the storage cylinder (1). A feed inlet (7) is provided on the upper surface of the cylinder cover (6). A drive connection device (2) is provided in the middle of the storage cylinder (1). The drive connection device (2) is connected to the cylinder cover (6). A filter cylinder (10) is installed on the lower surface of the cylinder cover (6).

2. The photoresist stripping solution filtration device according to claim 1, characterized in that: The lower surface of the support ring (3) is fixedly equipped with several support rods (4) at equal intervals, and the lower surface of the storage cylinder (1) is provided with a discharge port (5).

3. The photoresist stripping solution filtration device according to claim 2, characterized in that: The upper surface of the storage cylinder (1) is provided with a rotating groove (8), and a rotating ring (9) is fixedly installed on the lower surface of the cylinder cover (6). The rotating ring (9) is rotatably disposed inside the rotating groove (8).

4. The photoresist stripping solution filtration device according to claim 3, characterized in that: The lower surface of the cylinder cover (6) is provided with an installation groove (11), and the inner wall of the installation groove (11) is provided with an internal thread (12). The upper surface of the filter cylinder (10) is fixedly installed with an installation ring (13), which is located inside the installation groove (11). The side of the installation ring (13) is provided with an external thread (14), which meshes with the internal thread (12).

5. The photoresist stripping solution filtration device according to claim 1, characterized in that: The drive connection device (2) includes several positioning holes (201), a servo motor (202), a turntable (204), and a slide groove (207). Several positioning holes (201) are opened on the lower surface of the cylinder cover (6). The servo motor (202) is fixedly installed on the upper surface of the support ring (3). The turntable (204) is rotatably installed in the middle of the storage cylinder (1). The slide groove (207) is opened on the circumference of the storage cylinder (1).

6. The photoresist stripping solution filtration device according to claim 5, characterized in that: The output end of the servo motor (202) is fixedly equipped with a gear (203), and a number of gear teeth (205) are fixedly installed on the lower surface of the turntable (204). The number of gear teeth (205) mesh with the gear (203).

7. The photoresist stripping solution filtration device according to claim 6, characterized in that: A slip ring (208) is fixedly installed on the inner wall of the turntable (204), and the slip ring (208) is slidably installed inside the slide groove (207).

8. The photoresist stripping solution filtration device according to claim 7, characterized in that: A number of positioning rods (206) are fixedly installed at equal intervals on the upper surface of the turntable (204), and the top of the positioning rods (206) is set inside the positioning hole (201).

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