Water machine check curtain and washing equipment

Abstract

The utility model provides a water machine check curtain and washing equipment, and relates to the technical field of semiconductor equipment. The water machine check curtain comprises a first baffle, a second baffle, an air extractor and an exhaust device. The second baffle and the first baffle are oppositely arranged. And the air extractor is arranged between the first baffle and the second baffle. An outlet of the air extractor is communicated with an inlet of the exhaust device. And the first baffle is connected with the air extractor and / or the exhaust device. And the second baffle plate is connected with the air extractor and / or the exhaust device. The water machine check curtain not only can prevent water spots from splashing out, but also can prevent water mist and water vapor from falling off to pollute products after being condensed into liquid.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor equipment technical field especially, it is water machine curtain and washing equipment. BACKGROUND

[0002] The washing process mainly refers to the use of the nozzle on the upper and lower sides of the mesh belt to spray the saponifier solvent to clean the solder resist residue on the flip-chip soldering bottom. In this cleaning process, high pressure and high temperature are used for saponifier softening reaction to completely remove the solder resist residue. Water stains and water mist will be generated in this process, which will pollute the cleaned products such as chips.

[0003] At present, most of the washing machines are designed with a curtain at the outlet to block the water stains. However, the existing curtain can only block the water stains and cannot prevent the generation of water mist. The water mist generated after cleaning will condense into water stains when cooled, which will easily fall onto the chip surface and cause the chip to be contaminated again. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a water machine curtain and washing equipment to solve the technical problem of preventing the water stains or water mist generated during cleaning from polluting the surface of the product.

[0005] The utility model is implemented as follows:

[0006] In a first aspect, the utility model provides a water machine curtain, which comprises:

[0007] A first baffle;

[0008] A second baffle, which is arranged opposite to the first baffle;

[0009] An air extraction device, which is arranged between the first baffle and the second baffle;

[0010] An air exhaust device, the outlet of the air extraction device is in communication with the inlet of the air exhaust device;

[0011] The first baffle is connected with the air extraction device and / or the air exhaust device;

[0012] The second baffle is connected with the air extraction device and / or the air exhaust device.

[0013] In an optional embodiment, the length of the first baffle in the height direction is greater than the length of the second baffle in the height direction.

[0014] In an optional embodiment, at least one of the first baffle, the air extraction device and the air exhaust device is provided with a mounting portion.

[0015] In an optional embodiment, the mounting portion comprises a mounting protrusion and / or a mounting hole.

[0016] In an optional embodiment, the exhaust device is arranged between the first baffle and the second baffle.

[0017] In an optional embodiment, the exhaust device at least partially protrudes the first baffle and the second baffle in the height direction.

[0018] In an optional embodiment, the exhaust device is provided with an exhaust pipe.

[0019] In an optional embodiment, the air extraction device is provided with a plurality of air extraction holes arranged at intervals, and the exhaust device is provided with a plurality of exhaust holes; the water machine baffle further comprises a communication pipe, the plurality of air extraction holes and the plurality of exhaust holes are connected one by one through the communication pipe; the exhaust holes and the exhaust pipe are in communication.

[0020] In an optional embodiment, the second baffle is provided with a heat dissipation through hole.

[0021] In a second aspect, the utility model embodiment provides a washing equipment, including washing machine platform and above-mentioned water machine baffle, water machine baffle is located on washing machine platform.

[0022] The water machine baffle and the washing equipment provided by the utility model embodiment have the beneficial effects, which include:

[0023] The water machine baffle provided by the utility model embodiment is provided with double first baffles and second baffles, can effectively prevent product pollution caused by water stain splashing. And is provided with air extraction device and exhaust device, can promptly discharge water mist, water vapor and gas containing cleaning agent generated in the cleaning process, etc., prevent water vapor, water mist from condensing into water stain and polluting products, improve the cleaning quality of products.

[0024] The washing equipment provided by the utility model embodiment includes the water machine baffle, can effectively block the splashing of water stain, and effectively discharge water vapor and water mist, etc., prevent the product surface from being polluted by condensing into water stain again, improve the cleaning effect of products. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the specific embodiments of the utility model or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0026] Fig. 1 The overall structure schematic diagram of the water machine baffle provided by the utility model embodiment is shown in the figure.

[0027] Fig. 2 The drawing shows the split structure of the air extraction device and the air exhaust device of the water machine blocking curtain provided by the embodiment of the present application.

[0028] Fig. 3 The drawing shows another view of the split structure of the air extraction device and the air exhaust device of the water machine blocking curtain provided by the embodiment of the present application.

[0029] Icon: 100-water machine blocking curtain; 110-first baffle; 120-second baffle; 121-heat dissipation through hole; 130-air extraction device; 131-air extraction hole; 140-air exhaust device; 141-air exhaust pipe; 142-communication pipe; 143-mounting hole. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0032] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0033] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships commonly placed when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third", etc. are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.

[0034] In addition, the terms "horizontal", "vertical", "overhang", and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that it is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0035] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "arrangement", "installation", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0036] Some embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the case of no conflict, the following examples and features in the examples can be combined with each other.

[0037] In combination Figs. 1 to 3 , the water machine curtain 100 provided by the embodiment of the present application is used on a washing equipment. The washing equipment can be used to clean the residual solder resist on the bottom of the flip-chip soldering.

[0038] The water machine curtain 100 includes a first baffle 110, a second baffle 120, an air extraction device 130 and an air exhaust device 140. The second baffle 120 and the first baffle 110 are oppositely arranged. The air extraction device 130 is arranged between the first baffle 110 and the second baffle 120. The outlet of the air extraction device 130 is in communication with the inlet of the air exhaust device 140. The first baffle 110 is connected with the air extraction device 130 and / or the air exhaust device 140. The second baffle 120 is connected with the air extraction device 130 and / or the air exhaust device 140. The water machine curtain 100 can not only prevent water stains from splashing out, but also prevent water mist and water vapor from condensing into liquid and falling to contaminate the product.

[0039] It can be understood that the first baffle 110 is connected with the air extraction device 130, or the first baffle 110 is connected with the air exhaust device 140. Alternatively, the first baffle 110 is connected with the air extraction device 130 and the air exhaust device 140 respectively. The second baffle 120 is connected with the air extraction device 130, or the second baffle 120 is connected with the air exhaust device 140. Alternatively, the second baffle 120 is connected with the air extraction device 130 and the air exhaust device 140 respectively. Herein, no specific limitation is made.

[0040] In the embodiment, the first baffle 110 is connected with the air extraction device 130 and the air exhaust device 140 respectively. The second baffle 120 is connected with the air extraction device 130 and the air exhaust device 140 respectively. The air extraction device 130 and the air exhaust device 140 are arranged between the first baffle 110 and the second baffle 120. In this way, the structure is compact. Moreover, the first baffle 110 and the second baffle 120 are separated by the air extraction device 130 and the air exhaust device 140, forming a certain gas flow space, which facilitates the air extraction device 130 to extract more gas into the air exhaust device 140.

[0041] Optionally, the air exhaust device 140 is located above the air extraction device 130. That is, the air extraction device 130 is closer to the lower side and closer to the cleaning area, which is conducive to extracting more gas in the cleaning area and reducing the formation of condensate.

[0042] It can be understood that when the product enters the water washing equipment for cleaning, it will pass through at least three areas in turn, i.e., the to-be-cleaned area, the cleaning area, and the cleaned area. The product includes but is not limited to a wafer, a chip, or other devices. In the cleaning area, a saponification softening reaction needs to be carried out by using high temperature and high pressure, and water stains, water vapor, and water mist are generated during cleaning. The water stains are easy to sputter out of the cleaning area, i.e., easy to cause secondary pollution to the products that have been cleaned. In addition, the water vapor and the water mist are easy to condense into liquid state due to temperature influence, thereby dripping along the baffle curtain. When the cleaned products are output from the baffle curtain, the condensate formed by the water vapor and the water mist is easy to drip onto the cleaned products, causing secondary pollution to the products, and the generated water vapor and water mist also pollute the environment to a certain extent.

[0043] The length of the first baffle 110 in the height direction is greater than the length of the second baffle 120 in the height direction. That is, the first baffle 110 is longer in the height direction, which is more conducive to blocking the sputtering of water stains. In the installation and use process, the water machine baffle curtain 100 can be installed at the water inlet or the water discharge mesh belt outlet of the water washing machine table. The first baffle 110 is installed towards the cleaning area, i.e., the first baffle 110 is installed towards the inner side, and the second baffle 120 is relatively located on the outer side. The length of the second baffle 120 in the height direction is shorter, which is more conducive to air circulation, increases the contact area of air with the first baffle 110, the second baffle 120, and the air extraction device 130, and is conducive to rapid heat dissipation and cooling, reducing the formation of condensed liquid.

[0044] Optionally, at least one of the first baffle 110, the air extraction device 130 and the air exhaust device 140 is provided with a mounting portion. The mounting portion includes a mounting protrusion and / or a mounting hole 143. The mounting portion is used to mount the water machine baffle 100 to the washing machine platform. In the embodiment, the mounting portion is the mounting hole 143 provided on the air exhaust device 140. The air exhaust device 140 is located between the first baffle 110 and the second baffle 120. Moreover, the air exhaust device 140 at least partially protrudes the first baffle 110 and the second baffle 120 in the height direction.

[0045] Optionally, in the height direction, the first baffle 110 and the second baffle 120 are flush at the top end. Because the second baffle 120 is shorter, the lower end of the second baffle 120 is higher than the lower end of the first baffle 110. The air exhaust device 140 partially protrudes the top end of the first baffle 110 and the second baffle 120, so that the mounting hole 143 on the air exhaust device 140 is exposed, facilitating installation. The air extraction device 130 is located below the air exhaust device 140. That is, the air extraction device 130 is completely located between the first baffle 110 and the second baffle 120.

[0046] Optionally, the air exhaust device 140 is provided with an air exhaust pipe 141. The air exhaust pipe 141 is used to exhaust gas, prevent water mist, water vapor from condensing into water stains, and also prevent water mist and water vapor from polluting the environment.

[0047] Optionally, the air extraction device 130 is provided with a plurality of air extraction holes 131 arranged at intervals, and the air exhaust device 140 is provided with a plurality of air exhaust holes; the water machine baffle 100 further includes a communication pipe 142, the plurality of air extraction holes 131 and the plurality of air exhaust holes are connected one by one through the communication pipe 142; the air exhaust hole and the air exhaust pipe 141 are communicated.

[0048] It should be noted that the air extraction hole 131 is a through hole, one end of which serves as an air inlet, and the other end of which serves as an air outlet. One end of the air exhaust hole is communicated with the air outlet of the air extraction hole 131, and the other end is communicated with the air exhaust pipe 141. The communication pipe 142 is used to communicate the air extraction hole 131 and the air exhaust hole. The communication pipe 142 can be independently provided and connected separately with the air extraction device 130 and the air exhaust device 140. Alternatively, the communication pipe 142 is integrally formed with the air extraction device 130. Alternatively, the communication pipe 142 is integrally formed with the air exhaust device 140. Herein, no specific limitation is made.

[0049] In the embodiment, the communication pipe 142 and the air exhaust device 140 are integrally formed. Moreover, the communication pipe 142 and the air extraction hole 131 of the air extraction device 130 are inserted and matched, which is compact in structure, convenient in connection and saves installation space.

[0050] Optionally, the air exhaust pipe 141 and the air exhaust device 140 can also be selectively integrally formed or separately connected.

[0051] Optionally, the second baffle 120 is provided with a heat dissipation through hole 121. The heat dissipation through hole 121 penetrates the second baffle 120 along the thickness direction of the second baffle 120. The heat dissipation through hole 121 is beneficial to improve the heat dissipation performance, thereby further preventing the condensation of water vapor and water mist to form water stains.

[0052] Optionally, the first baffle 110 and the second baffle 120 are made of waterproof materials, including but not limited to metal or rubber, etc.

[0053] The utility model embodiment further provides a kind of washing equipment, including washing machine platform and above-mentioned water machine baffle curtain 100, and water machine baffle curtain 100 is located on washing machine platform. Optionally, water machine baffle curtain 100 can be installed at the water inlet or the water discharge mesh belt export of washing machine platform, first baffle 110 is installed towards cleaning area, i.e. first baffle 110 is installed towards inside, and second baffle 120 is located relatively outside.

[0054] During cleaning operation, the first baffle 110 can prevent water stains from splashing. The air extraction device 130 extracts the gas, water mist, etc. in the cleaning area to the exhaust device 140. The exhaust device 140 is used to discharge the gas, water mist, etc. along the exhaust pipe 141 to prevent the condensation of water vapor and water mist into liquid water stains and falling onto the product surface, as well as preventing the pollution of water vapor and water mist to the environment. The second baffle 120 is beneficial to increase the air contact area and improve the heat dissipation performance, so as to quickly dissipate heat and cool down, thereby further preventing the condensation of water vapor and water mist into liquid water stains and falling onto the product surface.

[0055] In summary, the water machine baffle curtain 100 and the washing equipment provided by the utility model embodiment have the following advantages, including:

[0056] The water machine baffle curtain 100 provided by the utility model embodiment is provided with double first baffles 110 and second baffles 120, which can effectively prevent product pollution caused by water stain splashing. The air extraction device 130 and the exhaust device 140 can timely discharge water mist, water vapor, and gas containing cleaning agent generated during the cleaning process, prevent water vapor and water mist from condensing into water stains to pollute the product and the environment, improve the cleaning quality of the product, prevent the cleaned product from being secondarily polluted, and be more environmentally friendly.

[0057] The washing equipment provided by the utility model embodiment includes the above-mentioned water machine baffle curtain 100, which can effectively block the splashing of water stains and effectively discharge water vapor and water mist, prevent the condensation of water stains to pollute the product surface, and improve the cleaning effect of the product.

[0058] Finally, it should be noted that: the above embodiments are used to illustrate the technical solutions of the present application, but not limited to them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; any modification, equivalent replacement, improvement, etc. made should be included in the protection scope of the present application.

Claims

1. A water machine drape, characterized by, The water machine curtain comprises: a first baffle plate; a second baffle plate, which is arranged opposite to the first baffle plate; an air extraction device, which is arranged between the first baffle plate and the second baffle plate; an air exhaust device, an outlet of the air extraction device being communicated with an inlet of the air exhaust device; the first baffle plate being connected with the air extraction device and / or the air exhaust device; the second baffle plate being connected with the air extraction device and / or the air exhaust device.

2. The water machine drape of claim 1, wherein, The length of the first baffle plate in the height direction is greater than the length of the second baffle plate in the height direction.

3. The water machine drape of claim 1, wherein, At least one of the first baffle plate, the air extraction device and the air exhaust device is provided with a mounting portion.

4. The water machine drape of claim 3, wherein, The mounting portion comprises a mounting protrusion and / or a mounting hole.

5. The water machine drape of claim 1, wherein, The air exhaust device is arranged between the first baffle plate and the second baffle plate.

6. The water machine drape of claim 5, wherein, The air exhaust device at least partially protrudes the first baffle plate and the second baffle plate in the height direction.

7. The water machine drape of claim 1, wherein, The air exhaust device is provided with an air exhaust pipe.

8. The water machine drape of claim 7, wherein, The air extraction device is provided with a plurality of spaced air extraction holes, and the air exhaust device is provided with a plurality of air exhaust holes; the water machine curtain further comprises a communication pipe, the plurality of air extraction holes and the plurality of air exhaust holes being connected one by one through the communication pipe; the air exhaust holes are communicated with the air exhaust pipe.

9. The water machine drape of any one of claims 1 to 8, wherein, The second baffle plate is provided with a heat dissipation through hole.

10. A water washing apparatus characterized by comprising: The water machine curtain comprises a water washing machine and the water machine curtain as claimed in any one of claims 1 to 9, the water machine curtain being arranged on the water washing machine.

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