Clamping device

Abstract

The utility model relates to the technical field of semiconductor production, in particular to a clamping device which comprises a fixed frame, a bidirectional threaded rod, two clamping plates, two sliding rods, two limiting plates, a spring, two clamping plates, two frosted pads, a power unit, a mounting unit, two rotating units and an auxiliary unit. The power unit is turned on to drive the bidirectional threaded rod to rotate, the two clamping plates move oppositely until the frosted pad makes contact with the semiconductor substrate due to the fact that the screwing directions of threads are inconsistent, springs are compressed by the clamping plates and the clamping plates, and the clamping pressure on the semiconductor substrate can be relieved; and the auxiliary unit supports the clamping plate to slide, so that the damage to the surface wall of the semiconductor substrate is reduced, the subsequent processing and use of the semiconductor substrate are ensured, and the fatigue strength of workers is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production especially relates to a clamping device. BACKGROUND

[0002] With the development of electronic information industry, the semiconductor belongs to the important component of hardware industry, and the semiconductor is the material between conductor and insulator at normal temperature, and the conductivity can be controlled through external conditions such as temperature, illumination or doping, which makes the semiconductor have wide application in electronic equipment, and common semiconductor materials include silicon, germanium and gallium arsenide, wherein silicon is the most influential and widely used material, and the clamping device needs to be used in the production process of semiconductor substrate.

[0003] The existing clamping device mainly transports the semiconductor substrate from one process to another process.

[0004] The current clamping device is easy to hurt the surface wall of the semiconductor substrate, which affects the subsequent processing and use of the semiconductor substrate. UTILITY MODEL CONTENT

[0005] The utility model discloses a kind of clamping devices, to solve the current clamping device is easy to hurt the surface wall of the semiconductor substrate, which affects the subsequent processing and use of the semiconductor substrate.

[0006] To achieve the above object, the utility model provides a kind of clamping device, including fixed frame, two-way threaded rod, two clamping plates, two slide rods, two limit plates, spring, two clamping plates, two frosted pads, power unit, installation unit, two rotating units and auxiliary unit, two The rotating unit is all set in the inner side wall of the fixed frame, the two-way threaded rod is connected with two rotating units, two clamping plates are respectively connected with the two-way threaded rod screw thread, and are respectively located the outer side wall of the two-way threaded rod, the fixed frame has strip hole, the strip hole is slidably matched with two clamping plates, two clamping plates are respectively fixedly connected with corresponding clamping plate, and are located below the clamping plate, two clamping plates are respectively provided with slide hole, the slide hole is slidably matched with two slide rods, two clamping plates are respectively fixedly connected with corresponding slide rod, and are located in one side of the slide rod, two ends of the spring are respectively fixedly connected with the clamping plate and the clamping plate, two frosted pads are respectively fixedly connected with corresponding clamping plate, and are located in one side of the clamping plate, two limit plates are respectively fixedly connected with corresponding slide rod, and are located in one end of the slide rod, the power unit is set in the inner side wall of the fixed frame, the auxiliary unit is set in the inner side wall of the fixed frame.

[0007] The power unit comprises a stepping motor, a first gear and a second gear, the stepping motor is fixedly connected with the fixed frame and located at the inner top wall of the fixed frame, the first gear is fixedly connected with the bidirectional threaded rod and located at the outer side wall of the bidirectional threaded rod, and the second gear is fixedly connected with the stepping motor and located at the output end of the stepping motor, and the second gear is engaged with the first gear.

[0008] The mounting unit comprises a connecting plate and a mounting rod, the connecting plate is fixedly connected with the fixed frame and located above the fixed frame, and the mounting rod is fixedly connected with the connecting plate and located above the connecting plate.

[0009] The rotating unit comprises a rotating seat and a connecting shaft, the rotating seat is fixedly connected with the fixed frame and located at the inner side wall of the fixed frame, the connecting shaft is fixedly connected with the bidirectional threaded rod and located at one end of the bidirectional threaded rod, and the connecting shaft is rotationally matched with the rotating seat.

[0010] The auxiliary unit comprises a round rod and a buffer ring, the round rod is fixedly connected with the fixed frame and located at the inner side wall of the fixed frame, the round rod is slidingly matched with the two clamping plates, and the buffer ring is fixedly connected with the round rod and located at the outer side wall of the round rod.

[0011] The auxiliary unit further comprises a connecting rib, and the two ends of the connecting rib are fixedly connected with the round rod and the fixed frame respectively.

[0012] The utility model discloses a clamping device, first utilize the mounting unit and move the fixed frame on the working device, open the power unit and drive the bidirectional threaded rod to rotate, because the screw rotation direction is inconsistent, and the two clamping plates move towards each other at this time, until the frosted pad contacts the semiconductor substrate, the spring is compressed by the clamping plate and the clamping plate, can slow down the semiconductor substrate clamping pressure, the rotating unit is used for assisting the bidirectional threaded rod to rotate, the auxiliary unit supports the clamping plate to slide, reduces the damage to the semiconductor substrate surface wall through the mode, guarantees the subsequent processing use of semiconductor substrate, reduces the fatigue strength of staff. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical scheme in the embodiment of the present application or prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description.

[0014] Figure 1 It is the structure schematic diagram of the clamping device of the utility model.

[0015] Figure 2This is a right view of the clamping device of this utility model.

[0016] Figure 3 This is the utility model Figure 2 A sectional view along line AA.

[0017] Figure 4 This is the utility model Figure 2 BB line section view.

[0018] 101-Fixed frame, 102-Double threaded rod, 103-Clamping plate, 104-Slide rod, 105-Limiting plate, 106-Spring, 107-Clamping plate, 108-Frosted pad, 109-Stepper motor, 110-First gear, 111-Second gear, 112-Connecting plate, 113-Mounting rod, 114-Rotating seat, 115-Connecting shaft, 116-Round rod, 117-Buffer ring, 118-Connecting rib, 119-Strip hole, 120-Sliding hole. Detailed Implementation

[0019] Please see Figures 1 to 4 ,in, Figure 1 This is a schematic diagram of the clamping device of this utility model. Figure 2 This is a right view of the clamping device of this utility model. Figure 3 This is the utility model Figure 2 AA-line sectional view, Figure 4 This is the utility model Figure 2 BB line section view.

[0020] This utility model provides a clamping device, including a fixed frame 101, a bidirectional threaded rod 102, two clamping plates 103, two sliding rods 104, two limiting plates 105, a spring 106, two clamping plates 107, two frosted pads 108, a power unit, an installation unit, two rotating units, and an auxiliary unit. The power unit includes a stepper motor 109, a first gear 110, and a second gear 111. The installation unit includes a connecting plate 112 and an installation rod 113. The rotating unit includes a rotating seat 114 and a connecting shaft 115. The auxiliary unit includes a round rod 116, a buffer ring 117, and a connecting rib 118. The fixed frame 101 has a strip hole 119, and the two clamping plates 103 each have a sliding hole 120.

[0021] Two rotating units are arranged on the inner side wall of the fixed frame 101, the bidirectional threaded rod 102 is connected with the two rotating units, two clamping plates 103 are respectively connected with the bidirectional threaded rod 102 in a threaded manner and are respectively located on the outer side wall of the bidirectional threaded rod 102, the fixed frame 101 has a strip-shaped hole 119, the strip-shaped hole 119 is in sliding fit with the two clamping plates 103, two clamping plates 107 are respectively fixedly connected with the corresponding clamping plates 103 and are located below the clamping plates 103, the two clamping plates 103 are respectively provided with sliding holes 120, the sliding holes 120 are in sliding fit with the two sliding rods 104, the two clamping plates 107 are respectively fixedly connected with the corresponding sliding rods 104 and are located on one side of the sliding rods 104, both ends of the spring 106 are respectively fixedly connected with the clamping plates 103 and the clamping plates 107, two ground glass pads 108 are respectively fixedly connected with the corresponding clamping plates 107 and are located on one side of the clamping plates 107, two limiting plates 105 are respectively fixedly connected with the corresponding sliding rods 104 and are located on one end of the sliding rods 104, the power unit is arranged on the inner side wall of the fixed frame 101, and the auxiliary unit is arranged on the inner side wall of the fixed frame 101.

[0022] In the embodiment, the fixed frame 101 is first moved to a working device by using the mounting unit, the bidirectional threaded rod 102 is rotated by turning on the power unit, the two clamping plates 103 move towards each other due to the inconsistent thread rotation direction, and the ground glass pads 108 are in contact with the semiconductor substrate until the spring 106 is compressed by the clamping plates 107 and the clamping plates 103, so that the clamping pressure on the semiconductor substrate is reduced, the rotating unit is used for assisting the rotation of the bidirectional threaded rod 102, the auxiliary unit supports the sliding of the clamping plates 103, and in this way, the damage to the surface wall of the semiconductor substrate is reduced, the subsequent processing and use of the semiconductor substrate are ensured, and the fatigue strength of workers is reduced.

[0023] Further, the stepping motor 109 is fixedly connected with the fixed frame 101 and is located on the inner top wall of the fixed frame 101, the first gear 110 is fixedly connected with the bidirectional threaded rod 102 and is located on the outer side wall of the bidirectional threaded rod 102, the second gear 111 is fixedly connected with the stepping motor 109 and is located on the output end of the stepping motor 109, and the second gear 111 is in meshing engagement with the first gear 110.

[0024] In this embodiment, the step motor 109 is started to drive the second gear 111 to rotate, and the first gear 110 drives the bidirectional threaded rod 102 to rotate to drive the clamping plates 103 to move towards each other to clamp the semiconductor substrate.

[0025] Further, the connecting plate 112 is fixedly connected with the fixed frame 101 and located above the fixed frame 101, and the mounting rod 113 is fixedly connected with the connecting plate 112 and located above the connecting plate 112.

[0026] In this embodiment, the mounting rod 113 above the connecting plate 112 is used for quick installation of the device.

[0027] Further, the rotating seat 114 is fixedly connected with the fixed frame 101 and located on the inner side wall of the fixed frame 101, the connecting shaft 115 is fixedly connected with the bidirectional threaded rod 102 and located at one end of the bidirectional threaded rod 102, and the connecting shaft 115 is rotationally connected with the rotating seat 114.

[0028] In this embodiment, the rotating seat 114 and the connecting shaft 115 assist the rotation of the bidirectional threaded rod 102 to ensure the normal operation of the bidirectional threaded rod 102.

[0029] Further, the round rod 116 is fixedly connected with the fixed frame 101 and located on the inner side wall of the fixed frame 101, and the round rod 116 is slidingly connected with the two clamping plates 103, and the buffer ring 117 is fixedly connected with the round rod 116 and located on the outer side wall of the round rod 116.

[0030] In this embodiment, the round rod 116 supports the movement of the clamping plates 103 to avoid being stuck, and the buffer ring 117 can avoid the two clamping plates 103 being adhered to limit the movement distance of the clamping plates 103.

[0031] Further, the two ends of the connecting rib 118 are fixedly connected with the round rod 116 and the fixed frame 101 respectively.

[0032] In this embodiment, the connecting rib 118 can improve the connection between the round rod 116 and the fixed frame 101, limit the movement distance of the clamping plates 103, and avoid the clamping plates 103 from being separated from the bidirectional threaded rod 102.

[0033] The above disclosure is only a preferred embodiment of the present application, and cannot limit the scope of the present application. Those skilled in the art can understand that all or part of the processes described above can be implemented, and equivalent changes can be made according to the claims of the present application, which still belong to the scope covered by the present application.

Claims

1. A clamping device, characterized in that, comprising a fixed frame, a two-way threaded rod, two clamping plates, two sliding rods, two limit plates, a spring, two clamping plates, two frosted pads, a power unit, a mounting unit, two rotating units and an auxiliary unit, both of the rotating units are arranged on the inner side wall of the fixed frame, the two-way threaded rod is connected with the two rotating units, both of the clamping plates are threadedly connected with the two-way threaded rod and are respectively located on the outer side wall of the two-way threaded rod, the fixed frame has a strip-shaped hole, the strip-shaped hole is in sliding fit with both of the clamping plates, both of the clamping plates are fixedly connected with the corresponding clamping plates and are located below the clamping plates, both of the clamping plates have sliding holes, the sliding holes are in sliding fit with both of the sliding rods, both of the clamping plates are fixedly connected with the corresponding sliding rods and are located on one side of the sliding rods, both ends of the spring are fixedly connected with the clamping plates and the clamping plates, both of the frosted pads are fixedly connected with the corresponding clamping plates and are located on one side of the clamping plates, both of the limit plates are fixedly connected with the corresponding sliding rods and are located on one end of the sliding rods, the power unit is arranged on the inner side wall of the fixed frame, and the auxiliary unit is arranged on the inner side wall of the fixed frame. The power unit comprises a stepper motor, a first gear and a second gear, the stepper motor is fixedly connected with the fixed frame and is located on the inner top wall of the fixed frame, the first gear is fixedly connected with the two-way threaded rod and is located on the outer side wall of the two-way threaded rod, the second gear is fixedly connected with the stepper motor and is located on the output end of the stepper motor, and the second gear is in meshing engagement with the first gear. The mounting unit comprises a connecting plate and a mounting rod, the connecting plate is fixedly connected with the fixed frame and is located above the fixed frame, and the mounting rod is fixedly connected with the connecting plate and is located above the connecting plate.

2. The clamping device of claim 1, characterized in that, The rotating unit comprises a rotating seat and a connecting shaft, the rotating seat is fixedly connected with the fixed frame and is located on the inner side wall of the fixed frame, the connecting shaft is fixedly connected with the two-way threaded rod and is located on one end of the two-way threaded rod, and the connecting shaft is in rotating fit with the rotating seat.

3. The clamping device of claim 2, characterized in that, The auxiliary unit comprises a round rod and a buffer ring, the round rod is fixedly connected with the fixed frame and is located on the inner side wall of the fixed frame, and the round rod is in sliding fit with both of the clamping plates, the buffer ring is fixedly connected with the round rod and is located on the outer side wall of the round rod.

4. The clamping device of claim 3, characterized in that, The auxiliary unit further comprises a connecting rib, both ends of the connecting rib are fixedly connected with the round rod and the fixed frame.

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