Semiconductor silicon boat groove cutting machine

Abstract

The utility model relates to the technical field of semiconductor processing equipment, and discloses a semiconductor silicon boat groove cutting machine, which comprises a base and a door-shaped support fixed on the base. A cutter adjusting mechanism is arranged on the door-shaped support; the cutter adjusting mechanism comprises a driving seat capable of lifting, translating and rotating; a cutter driving mechanism is fixed on the driving seat, the cutter driving mechanism comprises a driving shaft, and one end of the driving shaft is connected with a cutter. The occupied space on the rear side of the cutter can be reduced through the cutter driving mechanism, and various cutters with different sizes and specifications can be matched, so that the grooving work of silicon boats with different sizes can be completed, and the practicability of the grooving and cutting machine is improved; by adjusting the angle of the cutter, the bearing groove and the guide conical part at the opening part of the bearing groove can be formed on the silicon boat at one time, so that the bearing groove can be conveniently processed, and the processing efficiency and the processing precision can be improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a semiconductor silicon boat trench cutting machine. Background Technology

[0002] A silicon boat is a component used to store and transfer wafers. Several support grooves are evenly distributed on the support rods on both sides of the silicon boat. During use, the wafer is placed between the support grooves on both sides, and the edges of the wafer are supported by the support grooves, thus facilitating the storage and transfer of semiconductor wafers. The support grooves of the silicon boat are generally cut by a trench cutter. The cutter blade of the trench cutter is directly driven by a motor. However, due to the large size of the motor, it is easy for the motor to interfere with the silicon boat, and it can generally only cut larger silicon boats, making the trench cutter less practical. Utility Model Content

[0003] The purpose of this utility model is to provide a semiconductor silicon boat trenching machine. Through the cutter drive mechanism, the space occupied behind the cutter can be reduced, and it can be matched with cutters of various sizes and specifications, thereby completing the trenching work of silicon boats of different sizes and improving the practicality of the trenching machine.

[0004] By adjusting the cutting angle, the bearing groove and the guide cone at the opening of the bearing groove can be formed on the silicon boat in one step, which can facilitate the processing of the bearing groove and improve processing efficiency and accuracy.

[0005] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0006] A semiconductor silicon boat trenching machine includes a base and a portal support fixed on the base, wherein a worktable is provided on the base;

[0007] The portal support is equipped with a cutter adjustment mechanism; the cutter adjustment mechanism includes a drive seat that can be raised, lowered, translated, and rotated;

[0008] A cutter drive mechanism is fixed on the drive base. The cutter drive mechanism includes a drive shaft, one end of which is connected to a cutter.

[0009] The grooved silicon boat is placed at an appropriate position on the worktable. The drive mechanism rotates the cutter, while the adjustment mechanism moves the cutter downwards simultaneously, bringing it closer to the silicon boat for grooving. After one groove is cut, the cutter moves upwards away from the boat. The adjustment mechanism then moves the boat a certain distance before the cutter moves downwards again to cut the second groove. When a beveled cut is needed at the groove opening, the adjustment mechanism rotates the drive seat by a certain angle, tilting the cutter at that angle before it proceeds to cut the beveled cut at the groove opening. This adjustable cutter angle allows for complete grooving on the silicon boat in a single pass, improving both processing efficiency and accuracy.

[0010] The present invention is further configured such that: one end of the drive shaft connected to the cutter is formed with a shoulder and a stud; the cutter is inserted into the stud, a locking nut is screwed onto the stud, and the cutter is clamped between the locking nut and the shoulder;

[0011] The cutter comes in various sizes.

[0012] With the above technical solution, the cutter can be replaced by removing the locking nut, which facilitates the installation and disassembly of the cutter; at the same time, the cutter is available in various specifications and can cut silicon boats of different sizes.

[0013] The present invention is further configured such that: the cutting blade adjustment mechanism further includes a connecting shaft fixedly connected to the drive seat, the connecting shaft being rotatably connected to the base, the base having a worm gear and a worm inside, the worm gear being fixedly connected to the connecting shaft, the worm engaging with the worm gear, the worm being rotatably connected to the base, the worm being connected to a first servo motor that drives it to rotate, the first servo motor being fixed to the base, and the first servo motor being electrically connected to a controller.

[0014] Through the above technical solution, the first servo motor drives the worm to rotate, the worm drives the worm wheel to rotate, the worm wheel drives the drive seat to rotate through the connecting shaft, and the drive seat drives the cutter to rotate through a certain angle through the cutter drive mechanism to tilt the cutter, thereby facilitating oblique processing by the cutter. The angle through which the drive seat rotates can be precisely controlled by the first servo motor.

[0015] The present invention is further configured such that: the cutter adjustment mechanism further includes a lifting slider fixedly connected to the base, the lifting slider being slidably connected to the vertical guide rail, and the vertical guide rail being fixed to the translation slider;

[0016] The lifting slider is screwed onto a vertically arranged first screw rod, and the two ends of the first screw rod are rotatably connected to a first support block. A second servo motor that drives the first screw rod to rotate is fixed on one of the first support blocks; the first support block is fixed on the translation slider.

[0017] The translation slider is slidably connected to the transverse guide rail, the transverse guide rail is fixed to the base plate, and the base plate is fixed to the portal support;

[0018] The translation slider is screwed onto a horizontally arranged second screw. The two ends of the second screw are rotatably connected to a second support block. A third servo motor that drives the second screw to rotate is connected to one of the second support blocks. The second support block is fixed to the base plate. Both the second and third servo motors are electrically connected to the controller.

[0019] Through the above technical solution, the third servo motor drives the second screw to rotate, and the second screw can drive the translation slider to move left or right. The translation slider drives the lifting slider to move horizontally through the vertical guide rail. The second servo motor drives the first screw to rotate, and the first screw drives the lifting slider to move up or down. The lifting slider drives the drive seat to move. Through the cooperation of the second servo motor and the third servo motor, the translation and lifting of the drive seat are realized.

[0020] The present invention is further configured such that: the cutter driving mechanism further includes a drive housing fixed on the drive base in a “7” shape, and a large pulley and a small pulley arranged vertically inside the drive housing, the large pulley and the small pulley being connected by a belt; the large pulley is fixed on the motor shaft of the fourth motor, the fourth motor is fixed inside the drive housing; the small pulley is fixed at the other end of the drive shaft, and the fourth motor is electrically connected to the controller.

[0021] Through the above technical solution, the fourth motor drives the large pulley to rotate, the large pulley drives the small pulley to rotate via a belt, and the small pulley drives the cutter to rotate via a drive shaft. The transmission ratio between the large pulley and the small pulley can increase the speed of the cutter.

[0022] The present invention is further configured such that the middle part of the drive shaft is rotatably connected inside the support sleeve, and the support sleeve is fixed to the drive housing by a connecting block.

[0023] The support sleeve can improve the stability of the drive shaft rotation, reduce the drive shaft wobble, and thus improve machining accuracy.

[0024] Meanwhile, the cutter is connected to one end of the drive shaft and the rear part of the cutter is small in size, which can avoid interference between the rear part of the cutter and the crystal boat when cutting smaller grooves, thereby improving the practicality of the entire groove cutting machine and enabling it to cut more sizes of crystal boat grooves.

[0025] The present invention is further configured such that the base and the gate-shaped support are made of marble.

[0026] By installing a marble base and a marble gate-shaped support, the vibration of the entire equipment can be reduced during cutting, thereby further improving the cutting accuracy.

[0027] The present invention is further configured such that: a shielding plate is provided below the workbench, and a power mechanism for driving the workbench to move back and forth is provided below the shielding plate; the front and rear ends of the shielding plate are fixed to the base by end support plates.

[0028] By placing the power mechanism below the shielding platform, it is possible to effectively prevent silicon sludge cut from the crystal boat from entering the power mechanism, thereby reducing wear and contamination of the various components of the power mechanism.

[0029] The present invention is further configured such that the left and right ends of the shielding plate are each formed with a downward-curved edge. By setting the downward-curved edge, the cutting fluid carrying silica sludge can be prevented from flowing onto the bottom surface of the shielding plate.

[0030] The present invention is further configured such that: the power mechanism includes a longitudinal guide rail disposed below the shielding platform, a longitudinally arranged third screw, and a drive block; the drive block is slidably connected to the longitudinal guide rail and screwed to the third screw; one end of the third screw is connected to a fifth servo motor that drives it to rotate; both ends of the third screw are rotatably connected to a third support block; the fifth servo motor is fixed to one of the third support blocks; the third support block and the longitudinal guide rail are fixed to the base; and the fifth servo motor is electrically connected to the controller.

[0031] The drive block extends to the left and right ends of the shielding plate, and each end is fixed with a support block. The worktable is fixed on the support blocks.

[0032] Through the above technical solution, the fifth servo motor drives the third screw to rotate, the third screw drives the drive block to move forward or backward, the drive block drives the worktable to move through the support block, and the worktable drives the crystal boat to move, thereby further facilitating the processing of the crystal boat.

[0033] The outstanding effect of this utility model is:

[0034] Compared with existing technologies, the cutting drive mechanism can reduce the space occupied behind the cutting blade, and can be matched with various cutting blades of different sizes and specifications, thereby completing the grooving work of silicon boats of different sizes and improving the practicality of the grooving machine;

[0035] By adjusting the cutting angle, the bearing groove and the guide cone at the opening of the bearing groove can be formed on the silicon boat in one step, which can facilitate the processing of the bearing groove and improve processing efficiency and processing accuracy.

[0036] By setting up a marble base and a portal support, the stability of the grooving machine during grooving can be improved, thereby further improving the processing accuracy.

[0037] By installing a shielding plate under the worktable, the power mechanism of the worktable can be effectively protected. Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0039] Figure 2 for Figure 1 A magnified view of a specific area (A);

[0040] Figure 3 for Figure 2 A magnified view of a portion of D;

[0041] Figure 4 This is a partial sectional view of the cutter adjustment mechanism;

[0042] Figure 5 for Figure 1 A sectional view of BB;

[0043] Figure 6 For Figure 5 A magnified view of a portion of C;

[0044] Figure 7 for Figure 1 A magnified view of a portion of E.

[0045] Attached label: 10, base;

[0046] 20. Portal support;

[0047] 30. Workbench; 31. Sheathing plate; 32. Power mechanism; 33. End support plate; 34. Downward flange;

[0048] 301. Grinding head base; 302. Hollow spindle; 303. Hollow tool holder; 304. Water inlet; 305. Water receiving tray; 306. Sealing gasket; 307. Third pulley; 308. Belt; 310. Fourth pulley; 311. Second motor; 312. Sealing ring;

[0049] 321. Longitudinal guide rail; 322. Third screw; 323. Drive block; 324. Third support block; 325. Support block; 326. Fifth servo motor;

[0050] 40. Cutting blade adjustment mechanism;

[0051] 401. Drive base; 402. Connecting shaft; 403. Base; 404. Worm gear; 405. Worm; 406. First servo motor; 407. Lifting slider; 408. Vertical guide rail; 409. Translation slider; 410. First screw; 411. First support block; 412. Second servo motor; 413. Horizontal guide rail; 414. Base plate; 415. Second screw; 416. Second support block; 417. Third servo motor;

[0052] 50. Cutting drive mechanism;

[0053] 501. Drive shaft; 502. Drive housing; 503. Large pulley; 504. Small pulley; 505. Belt; 506. Fourth motor; 507. Support sleeve; 508. Connecting block;

[0054] 5011, Shoulder; 5012, Stud; 5013, Lock nut;

[0055] 60. Cutting knife;

[0056] 90. Silicon Boat. Detailed Implementation

[0057] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0058] The following is for reference Figures 1 to 7 The embodiments of this utility model are described below:

[0059] A semiconductor silicon boat trenching machine, such as Figure 1 As shown, it includes a base 10 and a portal-shaped support 20 fixed on the base 10, and a worktable 30 is provided on the base 10;

[0060] The portal support 20 is provided with a cutter adjustment mechanism 40; the cutter adjustment mechanism 40 includes a drive seat 401 that can be raised, lowered, translated and rotated;

[0061] A cutter drive mechanism 50 is fixed on the drive base 401. The cutter drive mechanism 50 includes a drive shaft 501, and one end of the drive shaft 501 is connected to a cutter 60.

[0062] The grooved silicon boat 90 is placed at an appropriate position on the worktable. The drive mechanism rotates the cutter, while the adjustment mechanism moves the cutter downwards simultaneously, bringing it closer to the silicon boat for grooving. After one groove is cut, the cutter moves upwards away from the boat. The adjustment mechanism then moves the boat a certain distance before the cutter moves downwards again to cut the second groove. When a beveled cut is needed at the groove opening, the adjustment mechanism rotates the drive seat by a certain angle, tilting the cutter at that angle before it proceeds to cut the beveled cut at the groove opening. This adjustable cutter angle allows for complete grooving on the silicon boat in a single pass, improving processing efficiency and accuracy.

[0063] like Figure 3 As shown, in this embodiment, the end of the drive shaft 501 connected to the cutter 60 is formed with a shoulder 5011 and a stud 5012; the cutter 60 is inserted into the stud 5012, and a locking nut 5013 is screwed onto the stud 5012; the cutter 60 is clamped between the locking nut 5013 and the shoulder 5011.

[0064] The cutter 60 comes in various sizes.

[0065] With the above technical solution, the cutter can be replaced by removing the locking nut, which facilitates the installation and disassembly of the cutter; at the same time, the cutter is available in various specifications and can cut silicon boats of different sizes.

[0066] like Figure 4As shown, the cutter adjustment mechanism 40 of this embodiment also includes a connecting shaft 402 fixedly connected to the drive seat 401. The connecting shaft 402 is rotatably connected to the base 403. The base 403 is provided with a worm gear 404 and a worm 405. The worm gear 404 is fixedly connected to the connecting shaft 402, and the worm 405 meshes with the worm gear 404. The worm 404 is rotatably connected to the base 403. The worm 405 is connected to a first servo motor 406 that drives it to rotate. The first servo motor 406 is fixed to the base 403 and is electrically connected to a controller.

[0067] Through the above technical solution, the first servo motor drives the worm to rotate, the worm drives the worm wheel to rotate, the worm wheel drives the drive seat to rotate through the connecting shaft, and the drive seat drives the cutter to rotate through a certain angle through the cutter drive mechanism to tilt the cutter, thereby facilitating oblique processing by the cutter. The angle through which the drive seat rotates can be precisely controlled by the first servo motor.

[0068] like Figure 1 As shown, the cutter adjustment mechanism 40 of this embodiment also includes a lifting slider 407 fixedly connected to the base 403. The lifting slider 407 is slidably connected to the vertical guide rail 408, and the vertical guide rail 408 is fixed to the translation slider 409.

[0069] The lifting slider 407 is screwed onto the vertically arranged first screw 410. The two ends of the first screw 410 are rotatably connected to the first support block 411. A second servo motor 412 that drives the first screw 410 to rotate is fixed on one of the first support blocks 411. The first support block 411 is fixed onto the translation slider 409.

[0070] The translation slider 409 is slidably connected to the transverse guide rail 413, the transverse guide rail 413 is fixed to the base plate 414, and the base plate 414 is fixed to the portal support 20.

[0071] The translation slider 409 is screwed onto the horizontally arranged second screw 415. The two ends of the second screw 415 are rotatably connected to the second support block 416. A third servo motor 417 that drives the second screw 415 to rotate is connected to one of the second support blocks 416. The second support block 416 is fixed on the base plate 414. Both the second servo motor and the third servo motor are electrically connected to the controller.

[0072] Through the above technical solution, the third servo motor drives the second screw to rotate, and the second screw can drive the translation slider to move left or right. The translation slider drives the lifting slider to move horizontally through the vertical guide rail. The second servo motor drives the first screw to rotate, and the first screw drives the lifting slider to move up or down. The lifting slider drives the drive seat to move. Through the cooperation of the second servo motor and the third servo motor, the translation and lifting of the drive seat are realized.

[0073] like Figure 2 As shown, the cutter drive mechanism 50 of this embodiment also includes a drive housing 502 arranged in a "7" shape and fixed on the drive base 401. The drive housing 502 has a large pulley 503 and a small pulley 504 arranged vertically inside, and the large pulley 503 and the small pulley 504 are connected by a belt 505. The large pulley 503 is fixed on the motor shaft of the fourth motor 506, and the fourth motor 506 is fixed inside the drive housing 502. The small pulley 504 is fixed at the other end of the drive shaft 501, and the fourth motor is electrically connected to the controller.

[0074] Through the above technical solution, the fourth motor drives the large pulley to rotate, the large pulley drives the small pulley to rotate via a belt, and the small pulley drives the cutter to rotate via a drive shaft. The transmission ratio between the large pulley and the small pulley can increase the speed of the cutter.

[0075] The middle part of the drive shaft 501 is rotatably connected inside the support sleeve 507, and the support sleeve 507 is fixed to the drive housing 502 through the connecting block 508.

[0076] The support sleeve can improve the stability of the drive shaft rotation, reduce the drive shaft wobble, and thus improve machining accuracy.

[0077] Meanwhile, the cutter is connected to one end of the drive shaft and the rear part of the cutter is small in size, which can avoid interference between the rear part of the cutter and the crystal boat when cutting smaller grooves, thereby improving the practicality of the entire groove cutting machine and enabling it to cut more sizes of crystal boat grooves.

[0078] The base 10 and the portal support 20 in this embodiment are made of marble.

[0079] By installing a marble base and a marble gate-shaped support, the vibration of the entire equipment can be reduced during cutting, thereby further improving the cutting accuracy.

[0080] like Figure 5 As shown, a shielding plate 31 is provided below the workbench 30 in this embodiment. A power mechanism 32 for driving the workbench 30 to move back and forth is provided below the shielding plate 31. The front and rear ends of the shielding plate 31 are fixed to the base 10 by end support plates 33.

[0081] By placing the power mechanism below the shielding platform, it is possible to effectively prevent silicon sludge cut from the crystal boat from entering the power mechanism, thereby reducing wear and contamination of the various components of the power mechanism.

[0082] like Figure 7 As shown, the shielding plate 31 in this embodiment has a downward-curved edge 34 formed at both its left and right ends. By providing the downward-curved edge, the cutting fluid carrying silica sludge can be prevented from flowing onto the bottom surface of the shielding plate.

[0083] like Figure 5 , Figure 6 , Figure 7 As shown, the power mechanism 32 in this embodiment includes a longitudinal guide rail 321 disposed below the shielding platform 31, a longitudinally arranged third screw 322, and a drive block 323. The drive block 323 is slidably connected to the longitudinal guide rail 321 and screwed to the third screw 322. One end of the third screw 322 is connected to a fifth servo motor 326 that drives it to rotate. Both ends of the third screw 322 are rotatably connected to a third support block 324. The fifth servo motor is fixed on one of the third support blocks. The third support block 324 and the longitudinal guide rail 321 are fixed on the base 10. The fifth servo motor is electrically connected to the controller.

[0084] The drive block 323 extends to the left and right ends of the shielding plate 31, and each end is fixed with a support block 325. The worktable 30 is fixed on the support block 325.

[0085] Through the above technical solution, the fifth servo motor drives the third screw to rotate, the third screw drives the drive block to move forward or backward, the drive block drives the worktable to move through the support block, and the worktable drives the crystal boat to move, thereby further facilitating the processing of the crystal boat.

[0086] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model. These improvements and modifications assumed above should also be considered within the protection scope of the present utility model.

Claims

1. A semiconductor silicon boat trenching machine, comprising a base (10) and a portal frame support (20) fixed on the base (10), characterized in that: The base (10) is provided with a worktable (30); The portal support (20) is provided with a cutter adjustment mechanism (40); the cutter adjustment mechanism (40) includes a drive seat (401) that can be raised, lowered, translated and rotated. A cutter drive mechanism (50) is fixed on the drive base (401). The cutter drive mechanism (50) includes a drive shaft (501), and a cutter (60) is connected to one end of the drive shaft (501).

2. The semiconductor silicon boat trenching machine according to claim 1, characterized in that: The drive shaft (501) is connected to the cutter (60) at one end with a shoulder (5011) and a stud (5012); the cutter (60) is inserted into the stud (5012), and a locking nut (5013) is screwed onto the stud (5012); the cutter (60) is clamped between the locking nut (5013) and the shoulder (5011). The cutter (60) is available in various sizes.

3. The semiconductor silicon boat trenching machine according to claim 1, characterized in that: The cutter adjustment mechanism (40) further includes a connecting shaft (402) fixedly connected to the drive seat (401). The connecting shaft (402) is rotatably connected to the base (403). The base (403) is provided with a worm gear (404) and a worm (405). The worm gear (404) is fixedly connected to the connecting shaft (402), and the worm (405) is connected to a first servo motor (406) that drives it to rotate.

4. A semiconductor silicon boat trenching machine according to claim 3, characterized in that: The cutter adjustment mechanism (40) also includes a lifting slider (407) fixedly connected to the base (403), the lifting slider (407) being slidably connected to the vertical guide rail (408), and the vertical guide rail (408) being fixed to the translation slider (409); The lifting slider (407) is screwed onto the vertically arranged first screw (410), and the two ends of the first screw (410) are rotatably connected to the first support block (411). A second servo motor (412) that drives the first screw (410) to rotate is fixed on one of the first support blocks (411); the first support block (411) is fixed on the translation slider (409); The translation slider (409) is slidably connected to the transverse guide rail (413), the transverse guide rail (413) is fixed to the base plate (414), and the base plate (414) is fixed to the portal support (20); The translation slider (409) is screwed onto the second screw (415) arranged horizontally. The two ends of the second screw (415) are rotatably connected to the second support block (416). A third servo motor (417) that drives the second screw (415) to rotate is connected to one of the second support blocks (416). The second support block (416) is fixed on the base plate (414).

5. A semiconductor silicon boat trenching machine according to claim 1, characterized in that: The cutter drive mechanism (50) also includes a drive housing (502) fixed on the drive base (401) in a "7" shape. The drive housing (502) has a large pulley (503) and a small pulley (504) arranged vertically inside. The large pulley (503) and the small pulley (504) are connected by a belt (505). The large pulley (503) is fixed on the motor shaft of the fourth motor (506), and the fourth motor (506) is fixed inside the drive housing (502). The small pulley (504) is fixed at the other end of the drive shaft (501).

6. A semiconductor silicon boat trenching machine according to claim 5, characterized in that: The middle part of the drive shaft (501) is rotatably connected inside the support sleeve (507), and the support sleeve (507) is fixed to the drive housing (502) through the connecting block (508).

7. A semiconductor silicon boat trenching machine according to claim 1, characterized in that: The base (10) and the portal support (20) are made of marble.

8. A semiconductor silicon boat trenching machine according to claim 1, characterized in that: The workbench (30) is provided with a shielding plate (31) below it. The shielding plate (31) is provided with a power mechanism (32) that drives the workbench (30) to move back and forth. The front and rear ends of the shielding plate (31) are fixed to the base (10) by end support plates (33).

9. A semiconductor silicon boat trenching machine according to claim 8, characterized in that: The left and right ends of the shielding plate (31) are each formed with a downward flange (34).

10. A semiconductor silicon boat trenching machine according to claim 8, characterized in that: The power mechanism (32) includes a longitudinal guide rail (321) disposed below the shielding plate (31), a longitudinally arranged third screw (322) and a drive block (323). The drive block (323) is slidably connected to the longitudinal guide rail (321) and screwed to the third screw (322). One end of the third screw (322) is connected to a fifth servo motor (326) that drives it to rotate. The drive block (323) extends to the left and right protruding ends of the shielding plate (31) and is fixed with a support block (325). The worktable (30) is fixed on the support block (325).

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