Anti-leakage raw material storage tank for preparing semiconductor viscosity-reducing film

Abstract

The utility model relates to the technical field of semiconductor anti-adhesion film preparation, and discloses a leakproof semiconductor anti-adhesion film preparation raw material storage tank which comprises a supporting base, a square bin, a mounting plate, a fixing bolt, a round tank, a first discharging port and a second discharging port. The mounting plate is arranged at the top of the supporting base, the fixing bolt penetrates through the mounting plate and is connected with the square bin through screws, the round tank is arranged in the square bin, the first discharging port is formed in one side of the square bin, and the second discharging port is formed in the other side of the square bin; the square bin comprises a bin body, a mounting frame, a circular groove, an inclined plate and a reinforcing frame. According to the anti-leakage raw material storage tank for preparing the semiconductor viscosity-reducing film, the bin body is arranged at the bottom of the round tank, so that liquid leaked from the round tank can flow into the bin body, the secondary anti-leakage effect is achieved, and leakage of chemical raw materials is avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor anti-adhesion film preparation technology, specifically to a leak-proof semiconductor anti-adhesion film preparation raw material storage tank. Background Technology

[0002] The raw materials for preparing semiconductor anti-adhesion films typically include polymer matrix materials, binder materials, and additive materials. Some of these raw materials may have potential toxicity under certain conditions, so it is necessary to prevent leakage of liquid chemical raw materials.

[0003] According to the authorization announcement number CN207209033U, a leak-proof chemical raw material storage tank is disclosed. The storage tank includes a tank body, a buffer layer, a reinforcing layer, and a handle. The tank body includes an inner tank and an outer tank, with the outer tank located outside the inner tank. A vacuum layer is provided between the inner and outer tanks. The inner wall of the inner tank is coated with a corrosion-resistant layer, and a sealing sleeve is fitted on the outer side of the inner tank. The buffer layer and the reinforcing layer are both located inside the outer tank wall, with the buffer layer located inside the reinforcing layer. The handle is located on the left and right sides of the tank body, and a raw material inlet is provided on the top of the tank body. A cover is connected to the raw material inlet, and a sealing ring is provided on the inner side of the cover. The aforementioned leak-proof chemical raw material storage tank has two parts: an outer tank and an inner tank. The inner wall of the inner tank is coated with a corrosion-resistant layer to prevent the chemical raw material from corroding the inner tank, and a sealing sleeve is fitted on the outer side of the inner tank to enhance the sealing performance. At the same time, the vacuum layer between the outer and inner tanks can prevent the leakage of chemical raw materials.

[0004] However, the above-mentioned device still has shortcomings. Although the design of inner and outer tanks prevents liquid leakage, the chemical liquid is still stored in the tank. The chemical raw materials that enter the vacuum layer are difficult to process, making it very inconvenient to use. Utility Model Content

[0005] The purpose of this invention is to provide a leak-proof storage tank for raw materials used in the preparation of semiconductor anti-adhesion films, in order to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a leak-proof semiconductor anti-adhesion film preparation raw material storage tank, comprising a support base, a square chamber, a mounting plate, a fixing bolt, a round tank, a first discharge port, and a second discharge port. The square chamber is disposed on the top of the support base, the mounting plate is disposed on the top of the support base, the fixing bolt passes through the mounting plate and is screwed to the square chamber, the round tank is disposed inside the square chamber, the first discharge port is installed on one side of the square chamber, and the second discharge port is installed on the other side of the square chamber.

[0007] The square silo includes a silo body, a mounting frame, a circular groove, an inclined plate, and a reinforcing frame. The silo body is fixedly connected to the top of the support base, the mounting frame is fixedly connected to the top of the silo body, the circular groove is located at the bottom of the silo body, the inclined plate is located above the circular groove, and the reinforcing frame is located in the middle of the silo body. By setting the silo body at the bottom of the round tank, any leaking liquid from the round tank will flow into the interior of the silo body, thus achieving a secondary leak prevention effect and avoiding leakage of chemical raw materials.

[0008] Preferably, the reinforcing frame includes a horizontal plate, a connecting block, a side plate, and a mounting groove. The horizontal plate is fixedly connected to the inside of the silo body, the connecting block is fixedly connected to one side of the horizontal plate, and the other end of the connecting block is fixedly connected to the inner wall of the silo body. The side plate is fixedly connected to the inner side of the horizontal plate, and the mounting groove is opened inside the horizontal plate. The connecting block, in conjunction with the horizontal plate, is used to install the reinforcing frame, thereby supporting and reinforcing the silo body and protecting the cylindrical tank.

[0009] Preferably, the cylindrical tank includes an inner tank, an outer tank, a cavity, and a drain outlet. The inner tank is installed inside the storage tank, and the outer tank is located outside the inner tank. A cavity is provided between the inner tank and the outer tank. The cavity allows chemical liquid to enter the cavity in the event of damage to the inner tank, and then be discharged into the storage tank through the drain outlet.

[0010] Preferably, the end of the inclined plate near the second discharge port is lower, and the other end of the inclined plate is higher. Through the inclined surface of the inclined plate, the leaked chemical liquid is brought closer to the second discharge port by gravity, which facilitates the discharge of the second discharge port.

[0011] Preferably, one end of the first discharge port passes through the silo body and is connected to the cylindrical tank, through which the chemical raw materials in the cylindrical tank are discharged.

[0012] Preferably, sealing strips are provided on the outside of the first and second discharge ports to ensure the sealing effect of the silo and prevent leakage of raw materials.

[0013] Preferably, the mounting grooves are located on both sides of the round can, and buffer pads are installed inside the mounting grooves to ensure the protection of the round can.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] 1. The leak-proof semiconductor anti-viscosity film preparation raw material storage tank has a compartment at the bottom of the round tank, so that the liquid that leaks from the round tank will flow into the interior of the compartment, which can play a secondary leak-proof role and avoid leakage of chemical raw materials.

[0016] 2. The leak-proof semiconductor anti-adhesion film preparation raw material storage tank uses connecting blocks and horizontal plates to install a reinforcing frame, which supports and reinforces the tank body and protects the round tank. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the square bin structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the round can of this utility model;

[0020] Figure 4 This is a structural schematic diagram of the reinforcement frame of this utility model.

[0021] In the diagram: 1. Support base; 2. Square silo; 3. Mounting plate; 4. Fixing bolt; 5. Round tank; 6. First discharge port; 7. Second discharge port; 201. Silo body; 202. Mounting frame; 203. Circular groove; 204. Inclined plate; 205. Reinforcing frame; 210. Horizontal plate; 211. Connecting block; 212. Side plate; 213. Mounting groove; 501. Inner tank; 502. Outer tank; 503. Cavity; 504. Drain port. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-4 This utility model provides a technical solution: a leak-proof storage tank for raw materials used in the preparation of semiconductor anti-adhesion films, comprising a support base 1, a square chamber 2, a mounting plate 3, a fixing bolt 4, a round tank 5, a first discharge port 6, and a second discharge port 7. The square chamber 2 is located on the top of the support base 1, and the mounting plate 3 is also located on the top of the support base 1. The fixing bolt 4 passes through the mounting plate 3 and is screwed to the square chamber 2. The round tank 5 is located inside the square chamber 2. The first discharge port 6 is installed on one side of the square chamber 2, and the second discharge port 7 is installed on the other side of the square chamber 2. One end of the first discharge port 6 passes through the chamber body 201 and connects to the round tank 5. The chemical raw materials inside the round tank 5 are discharged through the first discharge port 6. Sealing strips are provided on the outside of the first discharge port 6 and the second discharge port 7 to ensure the sealing effect of the chamber body 201 and prevent leakage of the raw materials.

[0024] The square silo 2 includes a silo body 201, a mounting frame 202, a circular trough 203, an inclined plate 204, and a reinforcing frame 205. The silo body 201 is fixedly connected to the top of the support base 1, the mounting frame 202 is fixedly connected to the top inside the silo body 201, the circular trough 203 is opened at the bottom of the silo body 201, the inclined plate 204 is set above the circular trough 203, and the reinforcing frame 205 is set in the middle inside the silo body 201. By setting the silo body 201 at the bottom of the round tank 5, the liquid leaking from the round tank 5 will flow into the interior of the silo body 201, which can play a secondary leak prevention role and avoid leakage of chemical raw materials. The inclined plate 204 is lower at one end near the second discharge port 7 and higher at the other end. Through the inclined surface of the inclined plate 204, the leaked chemical liquid is brought closer to the second discharge port 7 by gravity, which facilitates the discharge of the second discharge port 7.

[0025] The reinforcement frame 205 includes a horizontal plate 210, a connecting block 211, a side plate 212, and a mounting groove 213. The horizontal plate 210 is fixedly connected to the inside of the hopper 201. The connecting block 211 is fixedly connected to one side of the horizontal plate 210, and the other end of the connecting block 211 is fixedly connected to the inner wall of the hopper 201. The side plate 212 is fixedly connected to the inner side of the horizontal plate 210. The mounting groove 213 is opened inside the horizontal plate 210. The connecting block 211 works with the horizontal plate 210 to install the reinforcement frame 205, which provides support and reinforcement for the hopper 201 and protects the round tank 5. The mounting groove 213 is located on both sides of the round tank 5. A buffer pad is installed inside the mounting groove 213 to ensure the protection of the round tank 5.

[0026] The round tank 5 includes an inner tank 501, an outer tank 502, a cavity 503, and a drain port 504. The inner tank 501 is installed inside the container 201, and the outer tank 502 is located outside the inner tank 501. A cavity 503 is provided between the inner tank 501 and the outer tank 502. Due to the cavity 503, if the inner tank 501 is damaged, the chemical liquid will enter the cavity 503 and then be discharged into the container 201 through the drain port 504.

[0027] When in use, the cylindrical tank 5 is installed inside the container 201, and the square container 2 is sealed using the mounting plate 3 and fixing bolts 4. Then, the raw material liquid is prepared by adding the semiconductor anti-viscosity membrane through the cylindrical tank 5, thus completing the storage of the liquid raw material. The cavity 503 inside the cylindrical tank 5 provides a layer of leak prevention. If a liquid leak occurs, the chemical liquid enters the cavity 503 and then enters the container 201 through the drain port 504. The container 201 provides secondary leak prevention and also protects the cylindrical tank 5.

[0028] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A leak-proof storage tank for raw materials used in the preparation of semiconductor anti-adhesion films, comprising a support base (1), a square hopper (2), a mounting plate (3), a fixing bolt (4), a round tank (5), a first discharge port (6), and a second discharge port (7), characterized in that: The square bin (2) is located on the top of the support base (1), the mounting plate (3) is located on the top of the support base (1), the fixing bolt (4) passes through the mounting plate (3) and is screwed to the square bin (2), the round tank (5) is located inside the square bin (2), the first discharge port (6) is installed on one side of the square bin (2), and the second discharge port (7) is installed on the other side of the square bin (2); The square container (2) includes a container body (201), a mounting frame (202), a circular groove (203), an inclined plate (204), and a reinforcing frame (205). The container body (201) is fixedly connected to the top of the support base (1). The mounting frame (202) is fixedly connected to the top inside the container body (201). The circular groove (203) is opened at the bottom of the container body (201). The inclined plate (204) is set above the circular groove (203). The reinforcing frame (205) is set in the middle inside the container body (201).

2. The leak-proof semiconductor anti-adhesion film preparation raw material storage tank according to claim 1, characterized in that: The reinforcement frame (205) includes a horizontal plate (210), a connecting block (211), a side plate (212), and a mounting groove (213). The horizontal plate (210) is fixedly connected to the inside of the silo body (201). The connecting block (211) is fixedly connected to one side of the horizontal plate (210). The other end of the connecting block (211) is fixedly connected to the inner wall of the silo body (201). The side plate (212) is fixedly connected to the inside of the horizontal plate (210). The mounting groove (213) is opened inside the horizontal plate (210).

3. The leak-proof semiconductor anti-adhesion film preparation raw material storage tank according to claim 1, characterized in that: The round tank (5) includes an inner tank (501), an outer tank (502), a cavity (503), and a drain port (504). The inner tank (501) is installed inside the silo (201), and the outer tank (502) is located outside the inner tank (501). A cavity (503) is provided between the inner tank (501) and the outer tank (502).

4. The leak-proof semiconductor anti-adhesion film preparation raw material storage tank according to claim 1, characterized in that: The inclined plate (204) is lower at one end near the second discharge port (7), and higher at the other end.

5. The leak-proof semiconductor anti-adhesion film preparation raw material storage tank according to claim 1, characterized in that: One end of the first discharge port (6) passes through the silo body (201) and is connected to the round tank (5).

6. The leak-proof semiconductor anti-adhesion film preparation raw material storage tank according to claim 1, characterized in that: Sealing strips are provided on the outside of the first discharge port (6) and the second discharge port (7).

7. The leak-proof semiconductor anti-adhesion film preparation raw material storage tank according to claim 2, characterized in that: The mounting groove (213) is located on both sides of the round can (5), and a buffer pad is installed inside the mounting groove (213).

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