Vacuum coating process box and vacuum coating system

Abstract

The utility model belongs to the technical field of vacuum coating equipment, and discloses a vacuum coating process box and a vacuum coating system.The vacuum coating process box comprises a box body, and a box door is hinged to the box body; the box body is provided with an air channel, and the air channel communicates with a first connector and a second connector; the external pipe is mounted on the box body; the first end of the external pipe is provided with an external connector used for being connected with an external pipeline, and the second end of the external pipe is connected with the first connector. The gas distribution plate is mounted on one side, facing the box body, of the box door; the gas distribution plate is provided with a plurality of gas distribution holes; the air delivery pipe group is mounted on the box door; the first end of the gas conveying pipe set is aligned with the second connector, and the second end of the gas conveying pipe set is connected with the gas distribution plate. When the box door is in a closed state, the first end of the air conveying pipe set is communicated with the second connector. According to the vacuum coating process box disclosed by the utility model, process gas can smoothly enter the process box when the box door is closed, and meanwhile, the influence of a pipeline on the opening and closing of the box door is avoided.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a vacuum coating process box and a vacuum coating system. Background Technology

[0002] Vacuum coating systems for semiconductors, photovoltaics, etc., contain multiple vacuum coating process chambers. Depending on the process requirements, process gases need to be introduced into the vacuum coating process chambers. Due to the processing requirements that the target material to be coated should be on the same side as the gas supply direction and the actual situation of the chamber, the process gases are usually introduced from the side of the chamber door. However, the gas supply pipeline will cause inconvenience to the opening and closing of the chamber door. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a vacuum coating process chamber that ensures the smooth introduction of process gas into the chamber when the chamber door is closed, while avoiding the influence of pipelines on the opening and closing of the chamber door.

[0004] This utility model also proposes a vacuum coating system having the above-mentioned vacuum coating process box.

[0005] According to a first aspect embodiment of the present invention, a vacuum coating process box includes:

[0006] The enclosure is hinged with a door; the enclosure is provided with an air duct, which is connected to a first interface and a second interface.

[0007] An external connector is installed in the housing; the first end of the external connector is provided with an external connector for connecting to an external pipeline, and the second end of the external connector is connected to the first interface.

[0008] An air distribution plate is installed on the side of the box door facing the box body; the air distribution plate is provided with multiple air distribution holes;

[0009] An air supply pipe assembly is installed on the door of the enclosure; the first end of the air supply pipe assembly is aligned with the second interface, and the second end of the air supply pipe assembly is connected to the air distribution plate.

[0010] When the box door is closed, the first end of the gas supply pipe assembly is connected to the second interface.

[0011] The vacuum coating process box according to the embodiments of this utility model has at least the following beneficial effects:

[0012] By setting an external pipe on the housing to connect to the first interface of the gas duct, and setting a gas supply pipe assembly on the housing door to connect to the second interface of the gas duct, the external pipe can be connected to the gas supply pipe assembly through the gas duct when the housing door is closed, thereby delivering the process gas into the process housing; at the same time, when the housing door is open, since the gas duct and the gas supply pipe assembly are not fixedly connected, they will not obstruct the opening and closing of the housing door.

[0013] According to some embodiments of the present invention, the cabinet door is provided with a first through hole penetrating the cabinet door, and the first through hole is aligned with the second interface; a sealing ring is installed on the outer periphery of the end of the first through hole facing the cabinet body.

[0014] The first end of the gas pipeline group passes through the first through hole.

[0015] According to some embodiments of the present utility model, an intermediate plate is provided between the air distribution plate and the box door, an air distribution cavity is formed between the intermediate plate and the air distribution plate, and the air distribution hole communicates with the air distribution cavity;

[0016] The second end of the gas supply pipe assembly is connected to the gas distribution chamber.

[0017] According to some embodiments of this utility model, the intermediate plate is provided with a third through hole penetrating the intermediate plate, and the third through hole communicates with the air distribution chamber; the box door is provided with a second through hole penetrating the box door, the second through hole is aligned with the third through hole, and a sealing ring is installed at the connection between the second through hole and the third through hole;

[0018] The second end of the gas pipeline group passes through the second through hole.

[0019] According to some embodiments of the present invention, the second through hole is disposed in the middle of the box door.

[0020] According to some embodiments of the present utility model, a backing plate is provided on the side of the box body facing the box door, and when the box door is in the closed state, the box door is in contact with the backing plate;

[0021] The airway is located on the abutment.

[0022] According to some embodiments of the present invention, the gas transmission pipe assembly includes a first short pipe, a central pipe, and a second short pipe, wherein the central pipe connects the first short pipe and the second short pipe; the first short pipe is disposed at a first end of the gas transmission pipe assembly, and the second short pipe is disposed at a second end of the gas transmission pipe assembly.

[0023] According to some embodiments of the present invention, multiple air passages are provided, and the multiple air passages are not interconnected; multiple external pipes and multiple air supply pipe groups are provided corresponding to the air passages.

[0024] According to some embodiments of the present invention, the first end of the outer tube is detachably connected to the first interface, and / or the outer connector is detachably connected to the outer tube.

[0025] The vacuum coating system according to a second aspect embodiment of the present invention includes the aforementioned vacuum coating process chamber. Since the vacuum coating system includes the aforementioned vacuum coating process chamber, it possesses at least all the beneficial effects of the vacuum coating process chamber, which will not be elaborated upon here.

[0026] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0027] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0028] Figure 1 This is a schematic diagram of the structure of the vacuum coating process box according to the first aspect of this utility model;

[0029] Figure 2 This is a partial cross-sectional view of the vacuum coating process box according to the first aspect of this utility model;

[0030] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0031] Figure 4 for Figure 2 Enlarged view of point B in the middle.

[0032] Icon labels:

[0033] Box body 100, box door 110, first through hole 111, second through hole 112, air duct 120, first interface 121, second interface 122, back plate 130;

[0034] External pipe 200, external connector 210;

[0035] Air distribution plate 300, air distribution hole 310, air distribution cavity 320, intermediate plate 330, third through hole 331;

[0036] Gas pipeline assembly 400, first short pipe 410, central pipe 420, second short pipe 430. Detailed Implementation

[0037] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0038] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, etc., indicating the directional or positional relationship, are based on the directional or positional relationship shown in the drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0039] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features or their sequential relationship.

[0040] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0041] Reference Figures 1 to 4 The vacuum coating process chamber of the first aspect of this utility model includes a chamber body 100, a chamber door 110, an external pipe 200, a gas supply pipe assembly 400, and a gas distribution plate 300. The chamber door 110 is hinged to the chamber body 100. The chamber body 100 has an internal chamber for target material coating, with an opening on one side of the chamber. The chamber door 110 is installed on the opening side of the chamber. An air duct 120 is provided on the side of the chamber body 100 facing the chamber door 110. (Refer to...) Figure 2 , Figure 3As shown, the air duct 120 is arranged vertically, and its two ends along its length are respectively connected to a first interface 121 and a second interface 122; the external pipe 200 is installed on the housing 100, and its first end is provided with an external connector 210 for connecting to an external pipeline, and its second end is connected to the first interface 121; the air distribution plate 300 is installed on the side of the housing door 110 facing the housing 100, and the air distribution plate 300 is provided with multiple air distribution holes 310; the air supply pipe assembly 400 is installed on the housing door 110; the first end of the air supply pipe assembly 400 is connected to the second interface 121. With the ports 122 aligned, the second end of the gas supply pipe assembly 400 is connected to the gas distribution plate 300. When the box door 110 is closed, the first end of the gas supply pipe assembly 400 is connected to the second port 122. That is, when the box door 110 is closed, the external process gas enters the external pipe 200 from the external connector 210, then enters the gas passage 120 through the first port 121, then enters the gas supply pipe assembly 400 through the second port 122, and finally enters the gas distribution plate 300 through the gas supply pipe assembly 400, and enters the chamber of the box 100 through the gas distribution hole 310 of the gas distribution plate 300.

[0042] It should be noted that, for ease of understanding, the side of the enclosure 100 where the door 110 is installed is defined as the front side; refer to Figure 1 As shown, the left and right sides of the housing 100 are provided with through holes penetrating the side walls of the housing 100. The target material enters the housing 100 through the through holes on the left and right sides. The housing door 110 usually only needs to be opened during routine maintenance or troubleshooting. Therefore, the air distribution plate 300 in this embodiment cannot be set on the left and right sides of the housing 100. Furthermore, other components are also installed on the rear side of the internal chamber of the housing 100. Therefore, the air distribution plate 300 cannot be installed on the rear side of the housing 100. Considering the actual situation, the housing 100 is preferably installed on the housing door 110 on the front side of the housing 100. However, if the air distribution plate 300 is installed on the housing door 110, the pipeline supplying air to the air distribution plate 300 may obstruct the opening and closing of the housing door 110. To solve the above-mentioned technical problems, the vacuum coating process box of this utility model provides an external pipe 200 on the box body 100 that connects to the first interface 121 of the gas duct 120, and a gas supply pipe assembly 400 on the box door 110 that connects to the second interface 122 of the gas duct 120. When the box door 110 is closed, the external pipe 200 can connect to the gas supply pipe assembly 400 through the gas duct 120, thereby delivering process gas into the process box. At the same time, when the box door 110 is open, since the gas duct 120 and the gas supply pipe assembly 400 are not fixedly connected, the opening and closing of the box door 110 will not be obstructed.

[0043] In an embodiment of this utility model, the door 110 is provided with a first through hole 111 penetrating the door 110, and the first through hole 111 is aligned with the second interface 122; a sealing ring is installed on the outer periphery of the end of the first through hole 111 facing the housing 100; the first end of the gas supply pipe assembly 400 passes through the first through hole 111. Specifically, when the door 110 is in the closed state, the first through hole 111 is aligned with the second interface 122. However, due to processing errors and installation errors, it is difficult for the first through hole 111 and the second interface 122 to be completely aligned when the door 110 is closed. Therefore, a sealing ring is required to prevent process gas leakage. (Refer to...) Figure 3 As shown, the outer periphery of the end of the first through hole 111 facing the housing 100 is provided with an annular groove for the sealing ring to be embedded. The sealing ring can be an O-ring or other structure.

[0044] In an embodiment of this utility model, an intermediate plate 330 is provided between the air distribution plate 300 and the door 110, forming an air distribution cavity 320 between the intermediate plate 330 and the air distribution plate 300, and the air distribution hole 310 communicates with the air distribution cavity 320; the second end of the air supply pipe assembly 400 communicates with the air distribution cavity 320. Specifically, refer to... Figure 2 , Figure 4 As shown, the intermediate plate 330 has a third through hole 331 penetrating through the intermediate plate 330, and the third through hole 331 communicates with the gas distribution chamber 320; the box door 110 has a second through hole 112 penetrating through the box door 110, the second through hole 112 is aligned with the third through hole 331, and a sealing ring is installed at the connection between the second through hole 112 and the third through hole 331; the second end of the gas supply pipe assembly 400 passes through the second through hole 112. The purpose of setting the intermediate plate 330 is to reduce the probability of process gas leakage; the box body 100 has a large volume, so the box door 110 is also relatively large. It is difficult to ensure the flatness of the surface of the box door 110 by processing alone. If the gas distribution chamber 320 of the gas distribution plate 300 is directly connected to the second through hole 112, the processing cost is high and it is difficult to avoid the leakage of process gas; by setting the intermediate plate 330 as an intermediary between the gas distribution plate 300 and the box door 110, the processing cost and the probability of process gas leakage can be effectively reduced. The third through hole 331 is aligned with the second through hole 112, and a sealing ring is provided on the outer periphery of the connection between the third through hole 331 and the second through hole 112. This effectively prevents process gas leakage even if the door 110 is not flat. At the same time, even if the intermediate plate 330 undergoes partial deformation, it will not affect the entry of process gas into the gas distribution chamber 320. The sealing ring can be selected according to the actual situation.

[0045] In an embodiment of this utility model, the second through hole 112 is disposed in the middle of the door 110. Specifically, refer to... Figure 1 , Figure 2As shown, in order to better supply process gas to the target material inside the housing 100, the gas distribution plate 300 is preferably located in the middle of the housing door 110, and therefore the second through hole 112 is also preferably located in the middle of the housing door 110.

[0046] In an embodiment of this utility model, a backing plate 130 is provided on the side of the housing 100 facing the door 110. When the door 110 is closed, the door 110 is in contact with the backing plate 130; the air duct 120 is disposed on the backing plate 130. Specifically, refer to... Figure 2 , Figure 3 As shown, the abutment 130 extends toward the center of the housing 100. The abutment 130 increases the contact area between the door 110 and the housing 100 when the door 110 is closed. By setting a sealing ring on the abutment 130 or the door 110, the process gas inside the housing 100 can be effectively prevented from escaping through the connection between the door 110 and the housing 100.

[0047] Furthermore, the abutment 130 can be detachably connected to the housing 100 via fasteners, such as bolts; by detachably connecting the abutment 130 to the housing 100, low-cost maintenance can be achieved by replacing the abutment 130 in the event of blockage or damage to the air passage 120.

[0048] In an embodiment of this utility model, the gas transmission pipe assembly 400 includes a first short pipe 410, a central connecting pipe 420, and a second short pipe 430, with the central connecting pipe 420 connecting the first short pipe 410 and the second short pipe 430; the first short pipe 410 is disposed at the first end of the gas transmission pipe assembly 400, and the second short pipe 430 is disposed at the second end of the gas transmission pipe assembly 400. Specifically, refer to... Figure 3 , Figure 4 As shown, the first short pipe 410 is partially inserted into the first through hole 111, and a sealing structure is provided between the first short pipe 410 and the inner wall of the first through hole 111; the second short pipe 430 is partially inserted into the second through hole 112, and a sealing structure is provided between the second short pipe 430 and the inner wall of the second through hole 112. The first end of the central pipe 420 is connected to the first short pipe 410 through a connector, and the second end of the central pipe 420 is connected to the second short pipe 430 through a connector. The first short pipe 410, the central pipe 420, and the second short pipe 430 can be flexible pipes or rigid pipes, preferably rigid pipes, as rigid pipes can withstand better gas pressure and have a longer service life. By dividing the gas pipeline assembly 400 into three parts—the first short pipe 410, the central pipe 420, and the second short pipe 430—any component can be replaced individually if damaged, thereby reducing maintenance costs.

[0049] It is conceivable that the first short pipe 410 can be detachably connected to the door 110 or fixedly connected to the door 110; similarly, the second short pipe 430 can also be detachably connected to the door 110 or fixedly connected to the door 110. In actual production, the appropriate connection method can be selected according to actual needs.

[0050] In embodiments of this utility model, the first end of the outer tube 200 is detachably connected to the first interface 121, and / or the outer connector 210 is detachably connected to the outer tube 200. Specifically, refer to... Figure 3 As shown, preferably, the first end of the outer tube 200 is detachably connected to the first interface 121, while the outer connector 210 is detachably connected to the outer tube 200. This allows for the individual replacement of the outer tube 200 and the outer connector 210, reducing maintenance costs. However, depending on the actual situation, it is also possible to choose a configuration where the first end of the outer tube 200 is detachably connected to the first interface 121, and the outer connector 210 is fixedly connected to the outer tube 200; or the first end of the outer tube 200 is fixedly connected to the first interface 121, and the outer connector 210 is detachably connected to the outer tube 200; or the first end of the outer tube 200 is fixedly connected to the first interface 121, and the outer connector 210 is fixedly connected to the outer tube 200.

[0051] In this embodiment of the invention, multiple air passages 120 are provided, and these multiple air passages 120 are not interconnected; multiple external pipes 200 and gas supply pipe groups 400 are provided corresponding to the air passages 120. Specifically, the target material in this embodiment may use multiple process gases during coating. If the multiple process gases have been mixed before entering the housing 100, only one external pipe 200, one air passage 120, and one gas supply pipe group 400 are required; if the multiple process gases have not been mixed before entering the housing 100, multiple external pipes 200, multiple air passages 120, and multiple gas supply pipe groups 400 may be required to connect to the multiple different process gases respectively.

[0052] The vacuum coating system according to a second aspect of this utility model includes the aforementioned vacuum coating process chamber. Since the vacuum coating system includes the aforementioned vacuum coating process chamber, it possesses at least all the beneficial effects of the vacuum coating process chamber, which will not be elaborated upon here.

[0053] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0054] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A vacuum coating process box, characterized in that, include: The enclosure is hinged with a door; the enclosure is provided with an air duct, which is connected to a first interface and a second interface. An external connector is installed in the housing; the first end of the external connector is provided with an external connector for connecting to an external pipeline, and the second end of the external connector is connected to the first interface. An air distribution plate is installed on the side of the box door facing the box body; the air distribution plate is provided with multiple air distribution holes; An air supply pipe assembly is installed on the door of the enclosure; the first end of the air supply pipe assembly is aligned with the second interface, and the second end of the air supply pipe assembly is connected to the air distribution plate. When the box door is closed, the first end of the gas supply pipe assembly is connected to the second interface.

2. The vacuum coating process box according to claim 1, characterized in that: The cabinet door is provided with a first through hole that penetrates the cabinet door and is aligned with the second interface; a sealing ring is installed on the outer periphery of the end of the first through hole facing the cabinet body. The first end of the gas pipeline group passes through the first through hole.

3. The vacuum coating process box according to claim 1, characterized in that: An intermediate plate is provided between the air distribution plate and the box door, and an air distribution cavity is formed between the intermediate plate and the air distribution plate. The air distribution hole communicates with the air distribution cavity. The second end of the gas supply pipe assembly is connected to the gas distribution chamber.

4. The vacuum coating process box according to claim 3, characterized in that: The intermediate plate is provided with a third through hole that penetrates the intermediate plate and communicates with the air distribution chamber; the box door is provided with a second through hole that penetrates the box door and is aligned with the third through hole, and a sealing ring is installed at the connection between the second through hole and the third through hole; The second end of the gas pipeline group passes through the second through hole.

5. The vacuum coating process box according to claim 4, characterized in that: The second through hole is located in the middle of the door.

6. The vacuum coating process box according to claim 1, characterized in that: The box body is provided with a backing plate on the side facing the box door. When the box door is closed, the box door is in contact with the backing plate. The airway is located on the abutment.

7. The vacuum coating process box according to claim 1, characterized in that: The gas transmission pipeline assembly includes a first short pipe, a central pipe, and a second short pipe, with the central pipe connecting the first short pipe and the second short pipe; the first short pipe is located at the first end of the gas transmission pipeline assembly, and the second short pipe is located at the second end of the gas transmission pipeline assembly.

8. The vacuum coating process box according to claim 1, characterized in that: The airway is provided in multiple ways, and the multiple airways are not interconnected; the external pipe and the air supply pipe group are provided in multiple ways corresponding to the airway.

9. The vacuum coating process box according to claim 1, characterized in that: The first end of the outer tube is detachably connected to the first interface, and / or the outer connector is detachably connected to the outer tube.

10. A vacuum coating system, characterized in that: Includes the vacuum coating process box as described in any one of claims 1 to 9.

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