Physical vapor deposition coating equipment
By using a combination of black silicon nitride ceramic layer and water-cooled roller in a physical vapor deposition coating equipment, the problem of film deformation due to heat in the equipment was solved, and a higher quality coating effect was achieved.
Patent Information
- Application Number
- CN202423070412.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-12
- Publication Date
- 2025-11-04
- Estimated Expiration
- 2034-12-12
AI Technical Summary
Existing physical vapor deposition equipment is prone to producing lines during the production process, which affects product quality.
A physical vapor deposition coating device was designed, which adopts an unwinding and rewinding device in a vacuum chamber and is equipped with guide rollers, water-cooled rollers and bending rollers. The surface of the bending rollers is coated with a black silicon nitride ceramic layer and the bending angle is 14°-17°. An evaporation component is set below the water-cooled rollers. By combining the thermal conductivity of the silicon nitride ceramic layer and the cooling effect of the water-cooled rollers, heat is quickly transferred to prevent film deformation.
It effectively prevents the film from deforming when heated on the roller, reduces the appearance of lines, and improves product quality.
Smart Images
Figure CN223509955U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of coating equipment, and in particular to a physical vapor deposition coating equipment. Background Technology
[0002] Physical vapor deposition (PVD) can be used to form a coating on the surface of a workpiece. PVD technology refers to a technique that uses physical methods under vacuum conditions to vaporize a material source (solid or liquid) into gaseous atoms or molecules, or partially ionize them, and then deposits a thin film with specific functions on the substrate surface through a low-pressure gas (or plasma) process. PVD is one of the main surface treatment technologies. PVD coating technology is mainly divided into three categories: vacuum evaporation coating, vacuum sputtering coating, and vacuum ion plating. The main methods of PVD include vacuum evaporation, sputtering coating, arc plasma coating, ion plating, and molecular beam epitaxy. Corresponding vacuum coating equipment includes vacuum evaporation coating machines, vacuum sputtering coating machines, and vacuum ion plating machines. This utility model mainly relates to vacuum coating equipment. Currently, products produced by PVD equipment often exhibit lines, affecting product quality. Utility Model Content
[0003] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a physical vapor deposition coating device.
[0004] To solve the above technical problems, the present invention adopts the following technical solution:
[0005] This invention provides a physical vapor deposition coating apparatus, including a vacuum chamber. An unwinding device and a rewinding device are arranged within the vacuum chamber. The unwinding device unwinds the film, and the rewinding device rewinds the film. A guide roller, a water-cooled roller, and a bending roller are arranged along the film path between the unwinding device and the rewinding device. The film unwound from the unwinding device sequentially passes over the guide roller, the water-cooled roller, and the bending roller, and is finally retracted by the rewinding device. The bending roller has a black silicon nitride ceramic layer, and the curvature of the bending roller is 14°-17°.
[0006] Furthermore, in the physical vapor deposition coating equipment, the thickness of the silicon nitride ceramic layer on the bending roller is 60um-150um.
[0007] Furthermore, in the physical vapor deposition coating equipment, an evaporation component for melting and evaporating metal materials is provided below the water-cooled roller.
[0008] Furthermore, in the physical vapor deposition coating equipment, a first roller group, a first bending roller, a first water-cooled roller, a second roller group, a second bending roller, a second water-cooled roller, a third roller group, a tension roller, a third bending roller, and a fourth roller group are arranged along the film-carrying path between the unwinding device and the winding device. The first roller group includes multiple guide rollers, the second roller group includes multiple guide rollers, the third roller group includes at least two guide rollers, and the fourth roller group includes multiple guide rollers.
[0009] Furthermore, in the physical vapor deposition coating equipment, an eddy current thickness detector is installed between the third bending roller and the fourth roller group on the film path.
[0010] Furthermore, in the physical vapor deposition coating equipment, a visual inspection device is installed on the film-carrying path of the third roller group.
[0011] Furthermore, in the physical vapor deposition coating equipment, the evaporation component includes an evaporation tank, in which multiple evaporation crucibles are arranged alternately. Each evaporation crucible is circular or rectangular and has a crucible lid with an evaporation opening.
[0012] Furthermore, in the physical vapor deposition coating equipment, the evaporation crucible is a rectangular crucible with an internal partition plate that divides the evaporation crucible into a lower solid-liquid zone and an upper evaporation zone, the solid-liquid zone being connected to the evaporation zone.
[0013] Furthermore, in the physical vapor deposition coating equipment, there are two water-cooled rollers, each with an evaporation tank below it, and a cooling baffle is provided between the two evaporation tanks.
[0014] Furthermore, in the physical vapor deposition coating equipment, the evaporation crucible is surrounded by insulating cotton.
[0015] Compared to existing technologies, this invention provides a physical vapor deposition (PVD) coating apparatus, including a vacuum chamber. The vacuum chamber is equipped with an unwinding device and a winding device. The unwinding device unwinds the film, and the winding device winds it up. A guide roller, a water-cooled roller, and a curved roller are arranged along the film path between the unwinding and winding devices. The film unwound from the unwinding device sequentially passes over the guide roller, the water-cooled roller, and the curved roller, and is finally retrieved by the winding device. The curved roller has a black silicon nitride ceramic layer, and its curvature is 14°-17°. The silicon nitride ceramic layer of this invention is a thermally conductive material and is black, which provides better heat absorption and better static electricity absorption. Since the water-cooled roller is cold and the curved roller surface is coated with a black thermally conductive material, heat is transferred away more effectively. When the film is heated on the roller, the heat is quickly dissipated, and the film is less likely to be deformed by baking, resulting in lines. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.
[0017] Figure 1 A schematic diagram of the physical vapor deposition coating equipment provided by this utility model.
[0018] Figure 2 A schematic diagram of the evaporation tank of the physical vapor deposition coating equipment provided by this utility model.
[0019] Figure 3 A schematic diagram of the evaporation crucible of the physical vapor deposition coating equipment provided by this utility model.
[0020] Figure 4 A schematic diagram of the crucible lid of the physical vapor deposition coating equipment provided by this utility model.
[0021] Explanation of icon numbers
[0022] Vacuum chamber 100
[0023] Unwinding device 110
[0024] Guide roller 120
[0025] First roller group 131
[0026] First bending roller 141
[0027] First water-cooled roller 151
[0028] Second roller group 132
[0029] Second bending roller 142
[0030] Second water-cooled roller 152
[0031] Third roller group 133
[0032] Tension roller 160
[0033] Third bending roller 143
[0034] Eddy current thickness gauge 170
[0035] Visual inspection device 180
[0036] Fourth roller group 134
[0037] winding device 190
[0038] Evaporation tank 200
[0039] Cooling baffle 210
[0040] Evaporation crucible 220
[0041] 221 isolation plate
[0042] Evaporation opening 230 Detailed Implementation
[0043] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0044] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.
[0045] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.
[0046] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the present invention provides a physical vapor deposition coating apparatus, including a vacuum chamber, wherein an unwinding device 110 and a winding device 190 are provided in the vacuum chamber. The unwinding device 110 unwinds the film, and the winding device 190 winds the film. A guide roller 120, a water-cooled roller, and a bending roller are arranged between the unwinding device 110 and the winding device 190 along the film-carrying path. The film unwinding from the unwinding device 110 passes sequentially around the guide roller 120, the water-cooled roller, and the bending roller, and is finally retracted by the winding device 190. A black silicon nitride ceramic layer is provided on the bending roller, and the curvature of the bending roller is 14°-17°. The silicon nitride ceramic layer of this invention is a thermally conductive material and is black. This provides better heat absorption and, more importantly, better static electricity absorption. Since the water-cooled roller is cold and the curved roller surface is coated with a black thermally conductive material, heat is transferred away more effectively. When the film is heated on the roller, the heat dissipates quickly, making the film less prone to deformation and lines caused by baking. Furthermore, in the physical vapor deposition coating equipment provided by this invention, the thickness of the silicon nitride ceramic layer on the curved roller is 60µm-150µm.
[0047] Furthermore, in the physical vapor deposition coating equipment provided by this utility model, the unwinding device 110 and the winding device 190 are provided with a first roller group 131, a first bending roller 141, a first water-cooled roller 151, a second roller group 132, a second bending roller 142, a second water-cooled roller 152, a third roller group 133, a tension roller 160, a third bending roller 143, and a fourth roller group 134 along the film-carrying path. The first roller group 131 includes a plurality of guide rollers 120, the second roller group 132 includes a plurality of guide rollers 120, the third roller group 133 includes at least two guide rollers 120, and the fourth roller group 134 includes a plurality of guide rollers 120.
[0048] Furthermore, in the physical vapor deposition coating equipment provided by this invention, an evaporation component for melting and evaporating metal materials is provided below the water-cooled roller. Further, in the physical vapor deposition coating equipment provided by this invention, the evaporation component includes an evaporation tank 200, within which multiple evaporation crucibles 220 are disposed. The evaporation crucibles 220 are staggered within the evaporation tank 200. Each evaporation crucible 220 is circular or rectangular, and a crucible lid is provided on it. The crucible lid has an evaporation opening 230. Insulation material can also be provided on the crucible lid to reduce heat radiation. This saves energy, improves metal evaporation efficiency, and reduces heat radiation to the film, preventing wrinkles caused by heat. In this invention, metal materials are present in the crucible. When the metal materials melt and evaporate, they exit through the opening and form on the film passing over the upper part of the crucible or on other products to be coated. The evaporation opening 230 improves the evaporation efficiency of the metal materials inside the crucible, which is beneficial for improving the adhesion between the metal materials and the film.
[0049] Furthermore, in the physical vapor deposition (PVD) coating equipment provided by this invention, the evaporation crucible 220 can be a rectangular crucible with an internal partition plate 221. The partition plate 221 divides the evaporation crucible 220 into a lower solid-liquid zone and an upper evaporation zone, which are connected. One side of the partition plate 221 is connected to the crucible wall, and the other end has a 2-3 cm channel gap with the crucible wall. Specifically, in the solid-liquid zone, a groove of 1 mm-10 mm can be provided on the inner surface of the crucible where it contacts the vapor deposition material. This design prevents unmelted metal material from flowing downwards into the evaporation zone. The inner surface of the crucible wall in the evaporation zone is smooth and without scratches, allowing the molten metal material to quickly enter the evaporation zone for vapor deposition.
[0050] Furthermore, in the physical vapor deposition coating equipment provided by this utility model, there are two water-cooled rollers, each with an evaporation tank 200 below it. Specifically, an evaporation tank 200 is located below the first water-cooled roller 151 and directly below the second water-cooled roller 152. A cooling baffle 210 is provided between the two evaporation tanks 200. Cooling devices can be provided on both sides of the baffle to cool the corresponding evaporation tank 200 and achieve a suitable vacuum level in the corresponding part. Furthermore, in the physical vapor deposition coating equipment provided by this utility model, the evaporation crucible 220 is surrounded by heat-insulating cotton, which can be used to keep the crucible warm.
[0051] Furthermore, in the physical vapor deposition coating equipment provided by this utility model, an eddy current thickness gauge 170 is provided between the third curved roller 143 and the fourth roller group 134 on the film path. Furthermore, in the physical vapor deposition coating equipment provided by this utility model, a visual inspection device 180 is provided on the film path of the third roller group 133. The film passes through the crucible, then through two guide rollers 120, with a defect detection device provided between the two guide rollers 120. This device primarily detects whether there are defects on the film; it can be a CCD visual inspection system or other defect detection device. After reaching the curved roller behind the tension roller 160, an eddy current thickness gauge 170 is provided to detect the thickness of the metal layer formed on the film.
[0052] In summary, the silicon nitride ceramic layer of this invention is a thermally conductive material and is black. This provides better heat absorption and, more importantly, better static electricity absorption. Since the water-cooled roller is cold and the curved roller surface is coated with a black thermally conductive material, heat can be transferred away more effectively. When the film is heated on the roller, the heat can be quickly dissipated, making the film less prone to deformation and lines caused by baking. Furthermore, in the physical vapor deposition coating equipment provided by this invention, the thickness of the silicon nitride ceramic layer on the curved roller is 60µm-150µm.
[0053] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.
Claims
1. A physical vapor deposition coating apparatus, comprising a vacuum chamber, characterized in that, The vacuum chamber is equipped with an unwinding device and a winding device. The unwinding device unwinds the film, and the winding device winds the film. A guide roller, a water-cooled roller, and a bending roller are arranged between the unwinding device and the winding device along the film path. The film unwound from the unwinding device passes through the guide roller, the water-cooled roller, and the bending roller in sequence, and is finally retrieved by the winding device. The bending roller is provided with a black silicon nitride ceramic layer, and the curvature of the bending roller is 14°-17°.
2. The physical vapor deposition coating equipment according to claim 1, characterized in that, The thickness of the silicon nitride ceramic layer on the bending roller is 60um-150um.
3. The physical vapor deposition coating equipment according to claim 2, characterized in that, An evaporation component for melting and evaporating metal materials is provided below the water-cooled roller.
4. The physical vapor deposition coating equipment according to claim 3, characterized in that, The unwinding device and the winding device are provided with a first roller group, a first bending roller, a first water-cooled roller, a second roller group, a second bending roller, a second water-cooled roller, a third roller group, a tension roller, a third bending roller, and a fourth roller group along the film-carrying path. The first roller group includes multiple guide rollers, the second roller group includes multiple guide rollers, the third roller group includes at least two guide rollers, and the fourth roller group includes multiple guide rollers.
5. The physical vapor deposition coating equipment according to claim 4, characterized in that, An eddy current thickness detector is installed between the third bending roller and the fourth roller group on the film feeding path.
6. The physical vapor deposition coating equipment according to claim 4, characterized in that, A visual inspection device is installed on the film feeding path of the third roller group.
7. The physical vapor deposition coating equipment according to claim 3, characterized in that, The evaporation component includes an evaporation tank, in which multiple evaporation crucibles are arranged alternately. Each evaporation crucible is round or rectangular and has a crucible lid with an evaporation opening.
8. The physical vapor deposition coating apparatus according to claim 7, characterized in that, The evaporation crucible is a rectangular crucible with an internal partition plate that divides it into a lower solid-liquid zone and an upper evaporation zone. The solid-liquid zone and the evaporation zone are connected.
9. The physical vapor deposition coating apparatus according to claim 7, characterized in that, There are two water-cooled rollers, and each water-cooled roller has an evaporation tank below it. A cooling baffle is provided between the two evaporation tanks.
10. The physical vapor deposition coating apparatus according to claim 9, characterized in that, The evaporation crucible is surrounded by insulating cotton.