Substrate supporting assembly

Abstract

The utility model provides a substrate supporting assembly, and belongs to the technical field of semiconductor production equipment, and the substrate supporting assembly comprises a plurality of stacked supporting plates, and the upper ends of the supporting plates are provided with first supporting parts used for supporting a substrate; the second supporting part is arranged at the upper end of the supporting plate, and the upper end of the second supporting part is higher than the first supporting part; and the connecting part is at least detachably connected to the lowermost supporting plate and the uppermost supporting plate. The uppermost supporting plate and the lowermost supporting plate are connected through the connecting part, so that all the supporting plates are fixed together, when disassembly is needed, all the supporting plates can be separated only by disassembling the connecting relation between the upper end and the lower end of the connecting part, and disassembly is convenient.

Description

Technical Field

[0001] This application belongs to the field of semiconductor manufacturing equipment technology, and specifically relates to a substrate support component. Background Technology

[0002] When vacuum coating equipment processes substrates in batches, it is necessary to support and fix multiple substrates that are simultaneously fed into the chamber. Furthermore, since the vacuum coating equipment integrates multiple process chambers, the substrates also need to be transferred to different process chambers during processing.

[0003] In the relevant existing technology, trays are used to support and position the substrates, and multiple substrates are supported and fixed by stacking the trays. Adjacent trays are fixed by screwing together the support pillars, which is inconvenient to disassemble, especially when it is necessary to remove the substrates. This structure is not convenient for disassembly and maintenance. Utility Model Content

[0004] This application aims to at least solve one of the aforementioned technical problems existing in the prior art. To this end, this application provides a substrate support assembly that can solve the problem of inconvenient disassembly.

[0005] According to an embodiment of this application, the substrate support assembly includes:

[0006] Multiple stacked support plates, wherein the upper end of each support plate is provided with a first support portion for supporting a substrate;

[0007] The second support portion is disposed at the upper end of the support plate, and the upper end of the second support portion is higher than the first support portion;

[0008] A connecting part, which is detachably connected to at least the lowermost and uppermost support plates.

[0009] The substrate support assembly according to the embodiments of this application has at least the following beneficial effects:

[0010] The substrate support assembly in this application allows the substrate to be placed on the support plate via the first support portion, and the upper support plate to be supported by the second support portion, thus achieving the stacking of the support plates. The uppermost and lowermost support plates are connected by the connecting portion, thereby fixing all the support plates together. When disassembly is required, only the connection between the upper and lower ends of the connecting portion needs to be disconnected to complete the separation of all the support plates, making disassembly convenient.

[0011] According to some embodiments of this application, the support plate is vertically provided with a first clearance hole, and the connecting part passes through the first clearance hole.

[0012] According to some embodiments of this application, the second support portion is vertically provided with a second clearance hole, the second clearance hole is coaxially provided with the first clearance hole, and the connecting portion passes through the second clearance hole.

[0013] According to some embodiments of this application, the upper and lower ends of the second support portion respectively abut against two adjacent support plates.

[0014] According to some embodiments of this application, the first support portion includes a plurality of pins.

[0015] According to some embodiments of this application, the upper end of the support plate is further provided with a plurality of limiting portions, which are located at the peripheral edge of the support plate. The upper end of the limiting portion is higher than the first support portion and lower than the second support portion, and is used to limit the peripheral side of the substrate.

[0016] According to some embodiments of this application, the substrate support assembly further includes a connecting plate, which is disposed on the second support portion of the uppermost support plate, and the upper end of the connecting portion is connected to the connecting plate.

[0017] According to some embodiments of this application, a clearance opening is provided in the central region of the connecting plate, and the size of the clearance opening is greater than or equal to the size of the substrate.

[0018] According to some embodiments of this application, the substrate support assembly further includes a fixture. The height of the fixture is greater than the distance between two adjacent support plates. The fixture has a first positioning surface at the upper end, a second positioning surface at the lower end, and a boss at the middle position on the same side. The end of the boss has a third positioning surface. The fixture can abut against the sides of two adjacent support plates through the first positioning surface and the second positioning surface, so that the third positioning surface positions the substrate.

[0019] According to some embodiments of this application, the upper end and lower end of the fixture are respectively provided with a first step and a second step, the first positioning surface is provided on the vertical side wall of the first step, the second step is provided on the vertical side wall of the second step, and the distance between the first step and the second step is less than or equal to the height of the second support portion.

[0020] Additional aspects and advantages of this application will be set forth in part in the description which follows, and some of these additional aspects and advantages will become apparent from the description or may be learned by practice of this application. Attached Figure Description

[0021] The present application will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0022] Figure 1This is a schematic diagram of an overall structure of this application;

[0023] Figure 2 This is a schematic diagram of an axonal structure according to this application;

[0024] Figure 3 This is a schematic diagram of one installation of the connecting part in this application;

[0025] Figure 4 This is a schematic diagram of the working mechanism of the fixture in this application;

[0026] Figure 5 This is a schematic diagram of one structure of the fixture in this application;

[0027] Figure 6 This is a schematic diagram of one state in which the substrate is positioned by the fixture in this application. Detailed Implementation

[0028] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0029] In the description of this application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0030] In the description of this application, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0031] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0032] In the description of this application, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0033] Reference Figures 1 to 3 This application provides a substrate support assembly, including a support plate 100, a second support portion 200, and a connecting portion 600. A first support portion 101 for supporting a substrate 500 is provided at the upper end of the support plate 100, thereby supporting the substrate 500 and fixing it above the support plate 100. The second support portion 200 is disposed at the upper end of the support plate 100, and its upper end is higher than the first support portion 101. Multiple support plates 100 are stacked together via the second support portions 200, meaning that two adjacent support plates 100 abut against each other via the second support portions 200. Since the upper end of the second support portion 200 is higher than the first support portion 101, it does not obstruct the placement of the substrate 500, thus defining a placement space for the substrate 500 between two support plates 100. The number of second support portions 200 can be flexibly set according to the stability of the support plate 100 and the available installation space. The connecting part 600 is detachably connected to at least the bottommost and topmost support plates 100. Since the support plates 100 are stacked, connecting the bottommost and topmost support plates 100 ensures that all the support plates 100 remain relatively fixed.

[0034] In summary, in the substrate support assembly of this application, the support plate 100 can place the substrate 500 through the first support part 101, and use the second support part 200 to support the upper support plate 100, thereby realizing the stacking of the support plates 100. The uppermost and lowermost support plates 100 are connected by the connecting part 600, thereby fixing all the support plates 100 together. When disassembly is required, it is only necessary to disconnect the connection relationship between the upper and lower ends of the connecting part 600 to complete the separation of all the support plates 100, which is convenient for disassembly.

[0035] Reference Figure 3In some embodiments of this application, the support plate 100 is vertically provided with a first clearance hole, and the connecting portion 600 passes through the first clearance hole. This allows the connecting portion 600 to pass through all the support plates 100, and by connecting the uppermost and lowermost support plates 100, all the support plates 100 can be fixed. It is understood that the connecting portion 600 needs to be located at the edge of the support plate 100 to avoid interference with the substrate 500.

[0036] Reference Figure 3 In some embodiments of this application, the second support portion 200 is vertically provided with a second clearance hole, which is coaxially arranged with the first clearance hole, and the connecting portion 600 passes through the second clearance hole. In this embodiment, the connecting portion 600 passes through both the support plate 100 and the second support portion 200, which can both fix the support plate 100 and avoid excessive shading in the peripheral area of ​​the substrate 500.

[0037] Reference Figure 3 In some embodiments of this application, the upper and lower ends of the second support portion 200 respectively abut against two adjacent support plates 100. In production applications, it is only necessary to place the second support portion 200 on the support plate 100, keeping it aligned with the first clearance hole; no connection or fixation is required. The second support portion 200 can be fixed by the connecting portion 600 passing through it, which simplifies the structural design and improves assembly and disassembly efficiency. Figure 2 The second support part 200 is configured as a support column, and the connecting part 600 is configured as a connecting shaft. Furthermore, the second support part 200 and the connecting shaft are only provided on the opposite left and right sides of the support plate 100, with two on each side.

[0038] Reference Figure 1 In some embodiments of this application, the first support portion 101 includes a plurality of ejector pins. The ejector pins are used to hold the substrate 500, which facilitates processing.

[0039] It is understandable that the ejector pins are distributed in the middle area of ​​the support plate 100, while the second support portion 200 and the connecting portion 600 are distributed on the outer side of the area where the ejector pins are distributed, so as to avoid interference with the substrate 500.

[0040] Reference Figure 2 and Figure 6Considering that the substrate 500 needs to be transported between different process chambers, in some embodiments of this application, a plurality of limiting portions 300 are also provided on the upper end of the support plate 100. The limiting portions 300 are located at the peripheral edge of the support plate 100, and the upper end of the limiting portions 300 is higher than the first support portion 101 and lower than the second support portion 200, for limiting the peripheral side of the substrate 500. In this embodiment, since the substrate 500 is placed on the first support portion 101, and the limiting portions 300 are higher than the first limiting portions 300, when the substrate 500 is placed on the first support portion 101, the limiting portions 300 can limit the substrate 500, preventing the substrate 500 from slipping or undergoing large displacement during transportation.

[0041] Reference Figure 1 and Figure 2 In some embodiments of this application, the substrate support assembly further includes a connecting plate 400, which is disposed on the second support portion 200 of the uppermost support plate 100, and the upper end of the connecting portion 600 is connected to the connecting plate 400. Since the second support portion 200 in the aforementioned embodiments is placed on the support plate 100 and not connected or fixed to it, the structure of this embodiment allows the connecting plate 400 to cooperate with the support plate 100 to clamp the second support portion 200, preventing it from coming loose. Compared to fixing each second support portion 200 of the uppermost support plate 100 with the connecting portion 600, this simplifies the structural design and reduces the number of connecting portions 600.

[0042] Reference Figure 2 In some embodiments of this application, a clearance opening is provided in the central region of the connecting plate 400, and the size of the clearance opening is greater than or equal to the size of the substrate 500. In this way, when the connecting plate 400 is fed into the process chamber, it will not cause excessive obstruction to the substrate 500, and at the same time, it can also reduce the weight of the substrate support assembly.

[0043] Reference Figures 4 to 6Furthermore, considering that in the relevant prior art, after the substrate 500 is placed on the support plate 100, there is a slight offset between the actual position and the theoretical center, which requires observation, measurement and manual adjustment using a right-angle ruler, and requires sequential measurement and adjustment from all four sides of the substrate 500, making centering difficult and inefficient. Therefore, in some embodiments of this application, the substrate support assembly also includes a fixture 700. The height of the fixture 700 is greater than the distance between two adjacent support plates 100. The fixture 700 has a first positioning surface 7021 at the upper end, a second positioning surface 7031 at the lower end, and a boss 701 at the middle position on the same side. A third positioning surface 7011 is provided at the end of the boss 701. The fixture 700 can abut against the sides of the two adjacent support plates 100 through the first positioning surface 7021 and the second positioning surface 7031, so that the third positioning surface 7011 positions the substrate 500.

[0044] Using the structural setup of this embodiment, it is only necessary to set the distances from the third positioning surface 7011 to the first positioning surface 7021 and the second positioning surface 7031 based on the theoretical center of the substrate 500. Then, the jig 700 can be used to quickly position the sides of the substrate 500. By placing multiple jigs 700 around the substrate 500, automatic centering can be achieved, allowing the substrate 500 to be quickly moved to the theoretical center. This greatly improves the efficiency of centering while reducing the difficulty of centering and thus the operational complexity.

[0045] Reference Figure 4 and Figure 5 In some embodiments of this application, the upper and lower ends of the fixture 700 are respectively provided with a first step 702 and a second step 703. A first positioning surface 7021 is provided on the vertical sidewall of the first step 702, and a second step 703 is provided on the vertical sidewall of the second step 703. The distance between the first step 702 and the second step 703 is less than or equal to the height of the second support portion 200. Using the structural configuration of this embodiment, the fixture 700 can be secured to the upper and lower support plates 100 via the first step 702 and the second step 703, achieving relative fixation and preventing the fixture 700 from slipping and falling. Simultaneously, the first step 702 and the second step 703 can also be used to position the fixture 700, aligning the boss 701 with the horizontal height of the base plate 500, thereby reducing the vertical height dimension of the third positioning surface 7011.

[0046] In practical setup, the distances from the four sides of the support plate 100 to the theoretical positions of the substrate 500 can be set to be equal. This way, only one fixture 700 is needed for adjusting the positions of the four sides of the substrate 500, which helps reduce production costs. In application, simply placing the fixture 700 layer by layer between adjacent support plates 100 completes the alignment of the substrate 500. The operation is simple and reliable, improving production efficiency.

[0047] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application. Furthermore, unless otherwise specified, the embodiments and features described in the embodiments of this application can be combined with each other.

Claims

1. A substrate support assembly, characterized in that, include: Multiple stacked support plates, wherein the upper end of each support plate is provided with a first support portion for supporting a substrate; The second support portion is disposed at the upper end of the support plate, and the upper end of the second support portion is higher than the first support portion; A connecting part, which is detachably connected to at least the lowermost and uppermost support plates.

2. The substrate support assembly according to claim 1, characterized in that, The support plate is vertically provided with a first clearance hole, and the connecting part passes through the first clearance hole.

3. The substrate support assembly according to claim 2, characterized in that, The second support portion is vertically provided with a second clearance hole, which is coaxially arranged with the first clearance hole, and the connecting portion passes through the second clearance hole.

4. The substrate support assembly according to claim 3, characterized in that, The upper and lower ends of the second support part respectively abut against the two adjacent support plates.

5. The substrate support assembly according to claim 1, characterized in that, The first support portion includes multiple ejector pins.

6. The substrate support assembly according to claim 1, characterized in that, The upper end of the support plate is also provided with a plurality of limiting parts, which are located at the peripheral edge of the support plate. The upper end of the limiting part is higher than the first support part and lower than the second support part, and is used to limit the peripheral side of the substrate.

7. The substrate support assembly according to claim 1, characterized in that, The substrate support assembly further includes a connecting plate, which is disposed on the second support portion of the uppermost support plate, and the upper end of the connecting portion is connected to the connecting plate.

8. The substrate support assembly according to claim 7, characterized in that, The connecting plate has a clearance opening in its central area, and the size of the clearance opening is greater than or equal to the size of the substrate.

9. The substrate support assembly according to claim 1, characterized in that, The substrate support assembly also includes a fixture. The height of the fixture is greater than the distance between two adjacent support plates. The fixture has a first positioning surface at the upper end, a second positioning surface at the lower end, and a boss at the middle position on the same side. The end of the boss has a third positioning surface. The fixture can abut against the sides of two adjacent support plates through the first positioning surface and the second positioning surface, so that the third positioning surface positions the substrate.

10. The substrate support assembly according to claim 9, characterized in that, The fixture has a first step and a second step at its upper and lower ends, respectively. The first positioning surface is located on the vertical side wall of the first step, and the second step is located on the vertical side wall of the second step. The distance between the first step and the second step is less than or equal to the height of the second support.

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