Chemical soaking device, chemical soaking material taking device and material sheet loading mechanism
By using a softening clip to securely hold the material sheet in the chemical soaking device, the problem of the material sheet being difficult to remove after soaking is solved, enabling easy removal of the material sheet and improving safety.
Patent Information
- Application Number
- CN202422729544.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-10
- Publication Date
- 2025-11-04
- Estimated Expiration
- 2034-11-10
AI Technical Summary
Existing sheet loading devices are difficult to remove after soaking, which can easily lead to sheet deformation and scratches on the plastic seal.
Design a chemical soaking device that uses softening clips installed parallel to the upper surface of a liner. The two ends of the material are inserted into the slots of adjacent softening clips to ensure a secure clamping. The material is then easily slid out of the soaking tank by pushing the liner.
This allows for easy removal of the sheet material, avoiding deformation and scratches on the plastic seal, thus improving the convenience and safety of operation.
Smart Images
Figure CN223510000U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of semiconductor device processing technology, specifically relating to a chemical immersion device, a chemical immersion material handling device, and a material loading mechanism. Background Technology
[0002] In the semiconductor packaging industry, chemical immersion is widely used in the pre-plating process of semiconductor devices. This involves using fixtures and other devices to load wafers, then immersing the fixtures and wafers together in a chemical solution. However, a major drawback of existing wafer loading devices is that, due to the thinness of the wafers and the large number of wafers being loaded, the height of the wafers is generally less than the height of the loading device. Therefore, after immersion, it is difficult to remove the wafers from the device; directly pouring them out can cause deformation and scratches on the encapsulation.
[0003] Therefore, a material loading mechanism, a chemical soaking device, and a chemical soaking material removal device are designed to solve the technical problem that the material is not easy to remove after soaking in the prior art.
[0004] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content
[0005] This disclosure provides at least one chemical soaking apparatus, a chemical soaking material handling device, and a material loading mechanism.
[0006] In a first aspect, embodiments of this disclosure provide a chemical immersion apparatus, comprising:
[0007] Immersion tank; and
[0008] A sheet loading mechanism, disposed within an immersion tank, comprises:
[0009] Liner and at least two softened magazines;
[0010] The softened cartridge clips are arranged in parallel on the upper surface of the liner; and
[0011] Each of the softened cartridges is provided with several locking parts to make each piece of material lock together vertically and in parallel.
[0012] In one optional embodiment, a cover plate is connected to the upper end face of the soaking tank via a bearing; wherein
[0013] Both the cover plate and the soaking tank are provided with several liquid inlet holes.
[0014] In one optional embodiment, a locking mechanism is provided on the outer wall of the soaking tank, comprising:
[0015] The rotating locking element connects to the outer wall of the soaking tank; and
[0016] The fastener is disposed on the outer wall of the cover plate; wherein
[0017] When the cover plate rotates around its bearing connection with the soaking tank until it is in contact with the upper surface of the soaking tank, the fixing member is located directly above the rotating locking member.
[0018] In one alternative embodiment, a lifting handle is provided on the outer wall of the soaking tank.
[0019] Secondly, embodiments of this disclosure also provide a chemical immersion material collection device, comprising:
[0020] The material receiving tray has a limit barrier on its upper surface;
[0021] The inner wall contour of the limiting fence is consistent with the outer wall contour of the soaking tank; and
[0022] The chemical soaking apparatus as described above.
[0023] In one optional embodiment, a plurality of pusher components are provided at the center of the upper end face of the material receiving tray;
[0024] The diameter of each of the aforementioned pusher components is smaller than the diameter of the liquid inlet hole; wherein
[0025] After the soaking tank is fully soaked, it slides along the inner wall of the limiting fence toward the bottom of the material taking plate until each pusher passes through the liquid inlet hole and pushes the lower end face of the liner, thereby causing the liner and the material to move out of the soaking tank.
[0026] Thirdly, embodiments of this disclosure also provide a sheet loading mechanism, comprising:
[0027] Liner and at least two softened magazines;
[0028] Each of the softened magazines is arranged parallel to the upper surface of the liner; and
[0029] Each of the softened magazines is provided with several locking parts; wherein
[0030] The two ends of the sheet are adapted to be inserted into the snap-fit parts set on the left and right sides;
[0031] Both ends of the sheet are adapted to be inserted into the snap-fit portions on the same horizontal line of the two liner plates so that the sheet is fully soaked when immersed in the chemical solution.
[0032] The beneficial effect of this utility model is that this device installs the softening clips parallel to the upper surface of the liner plate and ensures that the slots on each clip are on the same horizontal line. The two ends of the material sheet are inserted into the slots on two adjacent softening clips until the material sheet is firmly clamped. Then, the entire material sheet loading mechanism is immersed in the chemical solution tank to fully soak the material sheet. After soaking, by pushing the liner plate, several material sheets can be easily slid out of the soaking tank for easy material removal without causing deformation or scratches to the plastic seal.
[0033] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description, claims, and drawings.
[0034] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0035] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0036] Figure 1 A perspective view of the immersion tank provided in an embodiment of this disclosure;
[0037] Figure 2 This is a schematic diagram of the soaking tank and the material handling tray used in accordance with the embodiments of this disclosure.
[0038] Figure 3 This is a three-dimensional structural diagram of the material handling tray provided in an embodiment of this disclosure.
[0039] In the picture:
[0040] 1. Cover plate; 2. Soaking tank; 3. Liner plate; 30. Softening clip; 31. Slot; 4. Liquid inlet; 5. Rotary locking component; 6. Fixing component; 7. Lifting handle; 8. Material handling tray; 80. Limiting rail; 81. Pushing component; F1. Direction of movement of the liner plate during material handling; F2. Direction of movement of the soaking tank during material handling. Detailed Implementation
[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0042] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.
[0043] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.
[0044] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.
[0045] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.
[0046] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.
[0047] Research has revealed that in the semiconductor packaging industry, chemical immersion processes are widely used in the pre-plating treatment of semiconductor devices. This involves loading wafers using fixtures and other devices, then immersing the fixtures and wafers together in a chemical solution. However, a major drawback of existing wafer loading devices is that, due to the thinness of the wafers and the large number of wafers being loaded, the height of the wafers is generally less than the height of the loading device. Therefore, after immersion, removing the wafers from the device is difficult and requires handling. Directly pouring out the wafers can cause deformation and scratches on the encapsulation.
[0048] Based on the above research, this disclosure provides a sheet loading mechanism, a chemical soaking device, and a chemical soaking material removal device. By installing softening clips parallel to the upper surface of the liner plate and ensuring that the slots on each clip are on the same horizontal line, the two ends of the sheet are respectively inserted into the slots on two adjacent softening clips until the sheet is firmly clamped. Then, the entire sheet loading mechanism is immersed in a chemical solution tank to fully soak the sheet. After soaking, by pushing the liner plate, several sheets can be easily slid out of the soaking tank for easy material removal without causing deformation or scratches to the plastic seal.
[0049] The shortcomings of the above solutions are the result of the utility model inventor's practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as contributions made by the utility model inventor to this disclosure.
[0050] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0051] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0052] In some embodiments, such as Figure 1 As shown, before chemical soaking begins, several pieces of material (not shown in the figure) are inserted into the slots 31 of the softening clip 30. The number and position of the slots 31 on the two softening clips 30 are one-to-one. The two corresponding slots 31 are used to insert the two ends of the material pieces, ensuring that the material pieces can maintain a stable position during the soaking process and be fully soaked. The softening clips 30 are set parallel to the upper surface of the liner plate, using the slots 31 to clamp and hold the two ends of the material pieces. The design of the softening clips allows the material pieces to have a certain degree of elasticity during loading and unloading. The process involves flushing to reduce deformation and damage to the flakes. After the flakes are loaded, the liner 3 slides down along the inner wall of the soaking tank 2 until all the flakes are inside. Then, the cover plate 1 is rotated to close the soaking tank and prevent the flakes from falling out. Both the cover plate 1 and the soaking tank 2 have liquid inlet holes 4 to facilitate the entry of chemical solution into the soaking tank 2. When the cover plate 1 and the soaking tank 2 are closed, the rotating locking part 5 is manually rotated so that one end hooks onto the fixing part 6, forming a locking mechanism to ensure the stability and safety of the soaking process.
[0053] In some embodiments, such as Figure 2 and Figure 3 As shown, after soaking is completed, the soaking tank is moved out of the chemical soaking tank by grabbing the lifting handle 7, the cover plate 1 is opened, and the soaking tank 2 is slid down along the inner wall of the limiting fence 80 in the F2 direction to get close to the upper end face of the material taking plate 8. During this process, the pusher 81 passes through the liquid inlet hole 4 opened on the lower end face of the soaking tank 2 until it contacts the lower end face of the liner 3 and pushes the liner 3 to slide in the soaking tank 2 and move up along the F1 direction, so that the upper half of each material piece protrudes from the soaking tank 2, so that the operator can take out the material piece.
[0054] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0055] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.
[0056] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.
[0057] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.
[0058] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A chemical soaking apparatus, characterized in that, include: Immersion tank (2); and A sheet loading mechanism, disposed within the soaking tank (2), comprises: Liner (3) and at least two softened magazines (30); The softened cartridge clips (30) are arranged in parallel on the upper surface of the liner (3); and Each of the softened cartridges (30) is provided with several snap-fit parts (31) so that each piece of material is snapped together vertically and in parallel.
2. The chemical soaking apparatus as described in claim 1, characterized in that, The upper end face of the soaking tank (2) is connected to a cover plate (1) via a bearing; wherein Both the cover plate (1) and the soaking tank (2) are provided with several liquid inlet holes (4).
3. The chemical soaking apparatus as described in claim 2, characterized in that, The outer wall of the soaking tank (2) is provided with a locking mechanism, which includes: The rotating locking element (5) is connected to the outer wall of the soaking tank (2); and The fastener (6) is disposed on the outer wall of the cover plate (1); wherein When the cover plate (1) rotates around its bearing connection with the soaking tank (2) until it is in contact with the upper surface of the soaking tank (2), the fixing member (6) is located directly above the rotating locking member (5).
4. The chemical soaking apparatus as described in claim 3, characterized in that, The outer wall of the soaking tank (2) is provided with a lifting handle (7).
5. A chemical soaking and material handling device, characterized in that, include: The material receiving tray (8) has a limit fence (80) on its upper surface; wherein The inner wall contour of the limiting fence (80) is consistent with the outer wall contour of the soaking tank (2); and The chemical soaking apparatus as described in any one of claims 1-4.
6. The chemical soaking and material handling device as described in claim 5, characterized in that, Several pusher components (81) are provided at the center of the upper end face of the material receiving tray (8). The diameter of each of the pusher components (81) is smaller than the diameter of the liquid inlet (4); wherein After soaking is completed, the soaking tank (2) slides along the inner wall of the limiting fence (80) toward the bottom of the material taking plate (8) until each pusher (81) passes through the liquid inlet (4) and pushes the lower end face of the liner (3), thereby causing the liner (3) and the material to move out of the soaking tank (2).
7. A sheet loading mechanism, characterized in that, include: Liner (3) and at least two softened magazines (30); Each of the softened magazines (30) is arranged in parallel on the upper end face of the liner (3); as well as Each of the softened magazines (30) is provided with several locking parts (31); wherein The two ends of the sheet are adapted to be inserted into the snap-fit parts (31) provided on the left and right opposite sides; The two ends of the sheet are adapted to be inserted into the snap-fit parts (31) on the same horizontal line on the two liner plates (3) so that the sheet is fully soaked when immersed in the chemical solution.