Light acquisition mechanism for etching machine end point detection system

Abstract

The utility model provides a light acquisition mechanism for an etching machine end point detection system, which relates to the field of etching machines and comprises a supporting seat, a convex lens assembly and an optical filter assembly. The supporting seat comprises a containing cylinder; the convex lens assembly and the optical filter assembly are detachably fixed in the accommodating cylinder; the optical filter assembly comprises a shell with a cylindrical through hole, an optical filter and a clamp spring; an annular baffle is arranged at the opening part of the cylindrical through hole; an annular groove is formed in the inner wall of the cylindrical through hole; the inner diameter of the ring of the snap spring is smaller than the diameter of the cylindrical through hole of the shell; the clamp spring is detachably fixed in the groove; the optical filter is arranged between the clamp spring and the circular ring baffle plate; and the two cylindrical bottom surfaces of the optical filter respectively abut against the snap springs and are fixed with the circular ring baffle plate. The light acquisition mechanism for the etching machine end point detection system provided by the utility model solves the problem that an optical filter is inconvenient to replace in the prior art, and the optical filter can be conveniently and stably replaced.

Description

Technical Field

[0001] This utility model relates to the field of etching machines, specifically to a light acquisition mechanism for an etching machine endpoint detection system. Background Technology

[0002] Etching machines are key pieces of equipment widely used in microelectronics manufacturing and the semiconductor industry. Their main function is to etch fine patterns onto the surface of thin film materials using chemical or physical methods to form the desired patterns or structures.

[0003] During laser etching, it is necessary to monitor key parameters such as etching depth and uniformity in real time. At this time, filters can be combined with the detection system to filter out interfering light signals and improve the signal-to-noise ratio and accuracy of the detection system.

[0004] In the prior art, such as the method for laser etching of organic films on the surface of metal thin films disclosed in Chinese Patent Application No. 202410168538.7, it is mentioned that the optical power detector collects the reflected light beam through a filter, that is, the filter is used to filter out the interfering light signal, thereby improving the signal-to-noise ratio and accuracy of the detection system.

[0005] Filters are subject to wear and tear during use. In order to ensure the stability of the filter optical system, the filters in the endpoint detection system need to be replaced after a period of use.

[0006] Existing filters are typically fixed by a housing structure, and the fixing methods of existing filters are as follows: Figure 1 and Figure 2 As shown, a cylindrical filter 02 is fixed inside a housing 01 with a cylindrical through-hole. An annular abutment plate 03 is disposed within the cylindrical through-hole of the housing 01. The filter 02 is adhered to this abutment plate 03 with adhesive, ensuring that the cylindrical base of the filter 02 is tightly fixed to the surface of the abutment plate 03. However, this fixing method has the drawback of inconvenience in replacing the filter: firstly, after replacement, the adhesive may change its properties, causing the filter 02 to detach from the abutment plate 03, affecting the normal operation of the detection system; secondly, during replacement, the adhesive... When the adhesive is applied to the abutment plate 03, the volume of the adhesive itself may cause the cylindrical bottom surface of the filter 02 to be non-parallel to the surface of the abutment plate 03 due to the adhesive layer. This results in a deviation angle of the filter 02 (the angle between the cylindrical axis of the filter 02 and the light passing through the filter 02). This may lead to angular dispersion (the filter will exhibit different performance at different angles, and changes in the filter angle may also affect the transmittance of the filter, affecting the reception of light through the filter by the endpoint detection system), thus affecting the accuracy of the detection system. Utility Model Content

[0007] To address the aforementioned technical problems, the light acquisition mechanism of the etching machine endpoint detection system provided by this utility model allows for convenient and stable replacement of the filter.

[0008] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0009] The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model includes a support base, a convex lens assembly, and a filter assembly. The support base includes a receiving cylinder with a through hole. The convex lens assembly and the filter assembly are detachably fixed within the through hole of the receiving cylinder. When light passes through the receiving cylinder along the extension direction of the through hole, it passes through the convex lens assembly and the filter assembly in sequence. The filter assembly includes a housing with a cylindrical through hole, a cylindrical filter, and a notched annular retaining ring. A circular baffle is provided on one side of the cylindrical through hole of the housing. The surface of the circular baffle is perpendicular to the axis of the cylindrical through hole of the housing. The inner diameter of the circular baffle is smaller than... The cylindrical through-hole diameter of the housing; an annular groove is formed on the inner wall of the cylindrical through-hole of the housing; the annular axis of the groove is coaxial with the axis of the cylindrical through-hole of the housing; the outer diameter of the snap ring is equal to the outer diameter of the annular groove; the inner diameter of the snap ring is less than the diameter of the cylindrical through-hole of the housing; the snap ring is detachably fixed in the groove; when the snap ring is fixed in the groove; the distance between the annular baffle and the groove is equal to the length of the cylindrical height of the filter; the cylindrical diameter of the filter is equal to the diameter of the cylindrical through-hole of the housing; the cylindrical axis of the filter coincides with the bore axis of the cylindrical through-hole of the housing; the filter is disposed between the snap ring and the annular baffle.

[0010] The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model preferably has the inner diameter of the retaining ring being equal to the inner diameter of the ring baffle.

[0011] The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model preferably includes a support base further comprising a fixed plate and a sensor connection end; the sensor connection end and the receiving cylinder are respectively fixed to the two side surfaces of the fixed plate; a light-transmitting hole is provided on the surface of the fixed plate; the light-transmitting hole connects the sensor connection end and the receiving cylinder; the hole axis of the light-transmitting hole is consistent with the extension direction of the through hole of the receiving cylinder.

[0012] The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model preferably has a plurality of vertical fixing holes that penetrate the surface of the fixing plate.

[0013] The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model preferably includes a second retaining spring in the support base; the through hole of the receiving cylinder is a round hole; a second groove is provided on the inner wall of the through hole of the receiving cylinder; the second retaining spring is detachably fixed in the second groove; when the convex lens assembly is fixed in the receiving cylinder, the opposite ends of the convex lens assembly are respectively attached to the fixing plate and the second retaining spring.

[0014] The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model preferably includes a convex lens assembly comprising a cylindrical convex lens bracket and a convex lens; the convex lens is detachably fixed in the cylindrical inner hole of the convex lens bracket; the principal optical axis of the convex lens coincides with the inner hole axis of the cylindrical inner hole of the convex lens bracket.

[0015] The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model preferably further includes a sealing ring; the receiving cylinder includes a first end face and a second end face; the first end face is fixed against the fixing plate; an annular sealing groove is formed on the second end face of the receiving cylinder; the sealing ring is detachably fixed in the sealing groove; when the sealing ring is fixed in the sealing groove, the sealing ring extends out of the opening of the sealing groove; the housing is a cylindrical housing; a sealing plate extends from the cylindrical outer wall of the housing; the housing can be inserted into the receiving cylinder; when the housing is inserted into the receiving cylinder, the sealing plate can be pressed against the second end face.

[0016] The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model preferably includes a sensor connection end comprising a fixing part and a housing cover; the fixing part includes an insertion hole communicating with the light-transmitting hole; the housing cover is detachably fixed to the fixing part; when the housing cover is fixed to the fixing part, it can block the insertion hole.

[0017] The above technical solution has the following advantages or beneficial effects:

[0018] This utility model provides a light acquisition mechanism for an etching machine endpoint detection system, relating to the field of etching machines. It includes a support base, a convex lens assembly, and a filter assembly. The support base includes a receiving cylinder with a through hole. The convex lens assembly and the filter assembly are detachably fixed within the through hole of the receiving cylinder. When light passes through the receiving cylinder along the extension direction of the through hole, it sequentially passes through the convex lens assembly and the filter assembly. The filter assembly includes a housing with a cylindrical through hole, a cylindrical filter, and a notched annular retaining ring. A circular baffle is provided on one side of the cylindrical through hole of the housing. The surface of the circular baffle is perpendicular to the axis of the cylindrical through hole of the housing. The inner diameter of the ring is smaller than the diameter of the cylindrical through hole of the housing; an annular groove is formed on the inner wall of the cylindrical through hole of the housing; the annular axis of the groove is coaxial with the axis of the cylindrical through hole of the housing; the outer diameter of the ring of the retaining spring is equal to the outer diameter of the ring of the groove; the inner diameter of the ring of the retaining spring is smaller than the diameter of the cylindrical through hole of the housing; the retaining spring is detachably fixed in the groove; when the retaining spring is fixed in the groove; the distance between the annular baffle and the groove is equal to the length of the cylindrical height of the filter; the cylindrical diameter of the filter is equal to the diameter of the cylindrical through hole of the housing; the cylindrical axis of the filter coincides with the hole axis of the cylindrical through hole of the housing; the filter is disposed between the retaining spring and the annular baffle. The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model solves the problem of inconvenient filter replacement in the prior art, and allows the filter to be replaced conveniently and stably. Attached Figure Description

[0019] The present invention, its features, shape, and advantages will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings. Like reference numerals denote like parts throughout the drawings. The drawings are not intentionally drawn to scale; the focus is on illustrating the gist of the invention.

[0020] Figure 1 This is a schematic diagram of the overall structure of the prior art filter fixing method provided in the background art.

[0021] Figure 2 This is an exploded structural diagram of the existing technology filter fixing method provided in the background art.

[0022] Figure 3 This is a schematic diagram of the overall structure of the light acquisition mechanism for the etching machine endpoint detection system provided in Embodiment 1 of this utility model.

[0023] Figure 4 This is a view 1 of the exploded structure schematic diagram of the light acquisition mechanism of the etching machine endpoint detection system provided in Embodiment 1 of this utility model.

[0024] Figure 5 This is a view 2 of the exploded structure schematic diagram of the light acquisition mechanism of the etching machine endpoint detection system provided in Embodiment 1 of this utility model.

[0025] Figure 6 This is a schematic diagram of the housing of the light acquisition mechanism for the etching machine endpoint detection system provided in Embodiment 1 of this utility model.

[0026] Figure 7 This is a schematic diagram of the filter assembly structure of the light acquisition mechanism for the etching machine endpoint detection system provided in Embodiment 1 of this utility model.

[0027] Figure 8 This is a schematic diagram of the support structure of the light acquisition mechanism for the etching machine endpoint detection system provided in Embodiment 1 of this utility model. Detailed Implementation

[0028] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. It should also be noted that the terminology used in this utility model is for describing specific implementations only and is not intended to limit the exemplary implementations according to this application.

[0029] The technical solutions of the present utility model will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, and not all of them. Therefore, the detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to illustrate selected embodiments of the present utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without inventive effort are within the protection scope of the present utility model.

[0030] Example 1:

[0031] The light acquisition mechanism for the etching machine endpoint detection system provided in Embodiment 1 of this utility model, such as... Figures 1 to 5As shown, the device includes a support base 1, a convex lens assembly 2, and a filter assembly 3. The support base 1 includes a receiving cylinder 11 with a through hole. The convex lens assembly 2 and the filter assembly 3 are detachably fixed within the through hole of the receiving cylinder 11. When light passes through the receiving cylinder 11 along the extension direction of the through hole, it will pass through the convex lens assembly 2 and the filter assembly 3 in sequence. The filter assembly 3 includes a housing 31 with a cylindrical through hole, a cylindrical filter 32, and a notched annular retaining ring 33. An annular baffle 311 is provided on one side of the cylindrical through hole of the housing 31. The surface of the annular baffle 311 is perpendicular to the axis of the cylindrical through hole of the housing 31. The inner diameter of the annular baffle 311 is smaller than the diameter of the cylindrical through hole of the housing 31. The inner wall of the cylindrical through hole of the housing 31 is provided with an annular groove 312; the annular axis of the groove 312 is coaxial with the axis of the cylindrical through hole of the housing 31; the outer diameter of the ring 33 is equal to the outer diameter of the ring 312; the inner diameter of the ring 33 is less than the diameter of the cylindrical through hole of the housing 31; the ring 33 is detachably fixed in the groove 312; when the ring 33 is fixed in the groove 312; the distance between the annular baffle 311 and the groove 312 is equal to the length of the cylindrical height of the filter 32; the cylindrical diameter of the filter 32 is equal to the diameter of the cylindrical through hole of the housing 31; the cylindrical axis of the filter 32 coincides with the axis of the cylindrical through hole of the housing 31; the filter 32 is disposed between the ring 33 and the annular baffle 311.

[0032] In the light acquisition mechanism of the etching machine endpoint detection system provided in Embodiment 1 of this utility model, the convex lens assembly 2 and the filter assembly 3 are assembled together by the support base 1. Then, the support base 1 and the other structures of the endpoint detection system are used to limit the convex lens assembly 2 and the filter assembly 3. The filter assembly 3 is detachably fixed in the receiving cylinder 11 of the support base 1. The filter 32 of the filter assembly 3 is limited by the cylindrical through hole of the housing 31. Therefore, the filter 32 can only move along the axis of the cylindrical through hole of the housing 31, and the cylindrical side of the filter 32 slides against the inner wall of the cylindrical through hole of the housing 31. When the bottom surface of the filter 32 is close to the bottom surface of the annular baffle 311 (the annular baffle 311...), the filter 32 can only move along the axis of the cylindrical through hole of the housing 31, and the cylindrical side surface of the filter 32 slides against the inner wall of the cylindrical through hole of the housing 31. When the bottom surface of the filter 32 (facing the cylindrical through hole side of the housing 31) contacts the filter 33, the movement stops. At this time, the retaining spring 33 (a retaining spring is existing technology, which can elastically deform within a certain range by compression, and will not be described in detail here) is compressed and deformed, and the retaining spring 33 is fixed in the annular groove 312. After the retaining spring 33 is in the groove 312, the force applied to the retaining spring 33 to deform it is stopped, and the retaining spring 33 returns to its original state and is fixed in the groove 312. Since the inner diameter of the annular structure of the returned retaining spring 33 is smaller than the diameter of the cylindrical through hole of the housing 31, the inner diameter of the annular structure of the retaining spring 33 is smaller than the diameter of the filter 32. Therefore, after the retaining spring 33 is in the groove 312, the structure of the retaining spring 33 will block the filter 32 from moving along the housing. The axis of the cylindrical through hole of body 31 moves; since the distance between the retaining ring 33 and the annular baffle 311 is exactly equal to the height of the filter 32, when one bottom surface of the filter 32 is against the bottom surface of the annular baffle 311, the retaining ring 33 in the groove 312 can just hold the filter 32 in place, so that the filter 32 is between the annular baffle 311 and the retaining ring 33 (in the direction of the axis of the cylindrical through hole of the housing 31); compared with the prior art, the filter 02 is fixed to the abutment plate 03 in the housing 01 by adhesive, which may cause the filter 02 to fall off the abutment plate 03 due to the instability of the adhesive properties, and the presence of adhesive as a substance may cause The angle of the filter 02 changes (the glue on the surface of the abutment plate 03 is uneven, causing the surface of the abutment plate 03 to tilt, which in turn causes the cylindrical bottom surface of the filter 02 fixed on the abutment plate to tilt). In this embodiment, the filter 32 is pressed and fixed towards the circular baffle 311 by the mechanical structure of the snap ring 33. Therefore, there will be no situation where the glue adhesive comes off, and there will be no situation where the angle of the filter changes due to unevenness of the abutment plate caused by the glue. After fixing the filter 32, the filter assembly 3 (through the cooperation between the housing 31 and the receiving cylinder 1) is fixed on the support base 1. Therefore, the structure provided by this utility model can replace the filter more conveniently, and the replaced filter can be more stable.

[0033] When the light-collecting mechanism of the etching machine endpoint detection system provided in Embodiment 1 of this utility model is in use, the light received from the outside enters the receiving cylinder 11 and first passes through the convex lens assembly 2. After the light changes direction through the convex lens assembly 2, it enters the cylindrical through hole of the housing 31 and is filtered by the filter 32 from the inner circle of the ring 33. The filtered light passes through the inner circle hole of the ring baffle 311 and enters the subsequent processing structure of the etching machine endpoint detection system.

[0034] When replacing the filter in the etching machine endpoint detection system provided in Embodiment 1 of this utility model, the support base 1 is separated from the endpoint detection system, and then the filter assembly 3 fixed in the receiving cylinder 11 is taken out. The retaining spring 33 is taken out from the groove 312 in the housing 31, and the filter 32 is pushed out of the housing 31 by pushing it from the direction of the annular baffle 311. Then, a new filter 32 is replaced until its cylindrical bottom surface is close to the annular baffle 311. The retaining spring 33 is then fixed in the groove 312 to complete the replacement of the filter in the filter assembly 3. After fixing the filter assembly 3 in the receiving cylinder 11 of the support base 1, the support base 1 is fixed to the endpoint detection system, thereby completing the replacement of the filter 31.

[0035] The light acquisition mechanism for the etching machine endpoint detection system provided in this embodiment of the utility model provides a filter assembly 3 and uses a mechanical structure to fix the filter 32, which solves the problem in the prior art that the filter is prone to angular displacement or even falling off due to the properties of the glue when fixing the filter, and makes the filter easy and stable to replace.

[0036] As a preferred embodiment, in this embodiment, the inner diameter of the ring of the snap ring 33 is equal to the inner diameter of the ring of the ring baffle 311. On the projection perpendicular to the axis of the cylindrical through hole of the housing 31, the projection of the inner circular hole of the snap ring 33 coincides with the projection of the inner circular hole of the ring baffle 311. This ensures that when external light passes directly through the filter 32 between the snap ring 33 and the ring baffle 311, the portion blocked by the snap ring 33 and the ring baffle 311 coincides, preventing either the snap ring 33 or the ring baffle 311 from blocking part of the light and affecting light collection. (The smaller the diameter of the inner circular hole of the snap ring 33, the larger the contact surface between the snap ring 33 and the filter 32, thus applying pressure to the filter 32 more stably. When the diameter of the inner circular hole of the snap ring 33 is the same as the diameter of the inner circular hole of the ring baffle 311, the snap ring 33 can provide maximum structural support for the filter 32 while additionally blocking light.)

[0037] To allow externally received light to pass through the light-collecting mechanism provided in this embodiment, the support base 1 further includes a fixing plate 12 and a sensor connection end 14. The sensor connection end 14 and the receiving cylinder 11 are respectively fixed to the two side surfaces of the fixing plate 12. A light-transmitting hole 121 is provided on the surface of the fixing plate 12. The light-transmitting hole 121 connects the sensor connection end 14 and the receiving cylinder 11. The axis of the light-transmitting hole 121 extends in the same direction as the through hole of the receiving cylinder 11. When using the light-collecting mechanism for the etching machine endpoint detection system provided in this embodiment, the output end of the sensor is fixed to the sensor connection end 14, and the collected light enters the receiving cylinder 11 through the light-transmitting hole 121. After being collected by the convex lens assembly 2 and filtered by the filter assembly 3, the light enters the subsequent analysis structure.

[0038] To facilitate the assembly and cooperation between the support base 1 and the remaining structures of the etching machine endpoint detection system, in this embodiment, the fixing plate 12 is provided with several vertical fixing holes 122 that penetrate the surface of the fixing plate 12. The etching machine endpoint detection system includes a flat plate with through holes for the receiving cylinder 11 and several threaded holes of the same size as the fixing holes 122. After the receiving cylinder 11 is inserted into the through hole, screws are then passed through the fixing holes 122 and tightened into the threaded holes to achieve a tight fit between the fixing plate 12 and the flat plate.

[0039] The convex lens also needs to be replaced after a period of use. In this embodiment, the support base 1 also includes a second retaining spring 13; the through hole of the receiving cylinder 11 is a round hole; the inner wall of the through hole of the receiving cylinder is provided with a second groove 111; the second retaining spring 13 is detachably fixed in the second groove 111; when the convex lens assembly 2 is fixed in the receiving cylinder 11, the opposite ends of the convex lens assembly 2 are respectively attached to the fixing plate 12 and the second retaining spring 13. In this embodiment, the method for replacing the convex lens is to directly replace the convex lens assembly 2. The convex lens assembly 2 is clamped between the fixing plate 12 and the second retaining spring 13 by the second retaining spring 13. When the convex lens assembly 2 needs to be replaced, the second retaining spring 13 is removed from the second groove 111, so that the convex lens assembly 2 can be taken out from the receiving cylinder (facing away from the fixing plate 12).

[0040] The convex lens assembly 2, which can fix the convex lens 22, is existing technology. As a preferred embodiment, in this embodiment, the convex lens assembly 2 includes a cylindrical convex lens holder 21 and a convex lens 22. The convex lens 22 is detachably fixed in the cylindrical inner hole of the convex lens holder 21. The principal optical axis of the convex lens 22 coincides with the axis of the inner hole of the cylindrical convex lens holder 21. Since the through hole of the receiving cylinder 11 is a circular hole, this embodiment uses a cylindrical convex lens holder 21 to fix the convex lens 22. The principal optical axis of the convex lens 22 is limited by the contact between the convex lens holder 21 and the inner wall of the circular hole of the receiving cylinder 11.

[0041] As a preferred embodiment, this embodiment also includes a sealing ring 4; the receiving cylinder 11 includes a first end face and a second end face; the first end face is fixed against the fixing plate 12; an annular sealing groove 112 is provided on the second end face of the receiving cylinder 11; the sealing ring 4 is detachably fixed in the sealing groove 112; when the sealing ring 4 is fixed in the sealing groove 112, the sealing ring 4 extends out of the opening of the sealing groove 112; the housing 31 is a cylindrical housing; a sealing plate 313 extends from the cylindrical outer wall of the housing 31; the housing 31 can be inserted into the receiving cylinder 11; when the housing 31 is inserted into the receiving cylinder 11, the sealing plate 313 can be tightly attached to the second end face. In this embodiment, when the fixing plate 12 of the support base 1 is abutted against the flat plate of the endpoint detection system, the fixing plate 12 applies pressure to the filter assembly 3 (the pressure direction is the direction of the cylindrical through hole axis of the housing 31), pressing the filter assembly 3 toward another structural component of the endpoint detection system. The sealing ring 4 is elastic. The function of the sealing ring 4 is, on the one hand, to block light between the receiving cylinder 11 and the filter assembly 3 (to prevent light from entering the housing 31 of the filter assembly 3 from the connection between the filter assembly and the receiving cylinder and affecting subsequent detection). On the other hand, the elastic sealing ring 4 can deform when the fixing plate 12 applies pressure to the filter assembly 3, so that the filter assembly 3 can be better fixed (without the sealing ring, the housing 31 is squeezed by two rigid structural components, that is, by the rigid receiving cylinder 11 and the rigid structural component supporting the filter assembly 3 in the endpoint detection system, and is easily deformed. After deformation, after replacing the filter 32 of the filter assembly 3, the filter assembly 3 may become loose and unable to be limited).

[0042] When the etching machine is not in use, it is necessary to prevent dust from entering the housing 11 and contaminating the convex lens and filter 32 inside. As a preferred solution, in this embodiment, the sensor connection end 14 includes a fixing part 141 and a cover 142. The fixing part 141 includes an insertion hole 1411 communicating with a light-transmitting hole 121. The cover 142 is detachably fixed to the fixing part 141. When the cover 142 is fixed to the fixing part 141, it can block the insertion hole 1411. When the etching machine is not in use, the cover 142 is closed on the fixing part 141 to prevent dust from entering the housing 11 through the light-transmitting hole 121 from the insertion hole 1411.

[0043] In summary, this utility model provides a light acquisition mechanism for an etching machine endpoint detection system, relating to the field of etching machines. It includes a support base, a convex lens assembly, and a filter assembly. The support base includes a receiving cylinder with a through hole. The convex lens assembly and the filter assembly are detachably fixed within the through hole of the receiving cylinder. When light passes through the receiving cylinder along the extension direction of the through hole, it sequentially passes through the convex lens assembly and the filter assembly. The filter assembly includes a housing with a cylindrical through hole, a cylindrical filter, and a notched annular retaining ring. A circular baffle is provided on one side of the cylindrical through hole of the housing. The surface of the circular baffle is perpendicular to the axis of the cylindrical through hole of the housing. The inner diameter of the ring is smaller than the diameter of the cylindrical through hole of the housing; an annular groove is formed on the inner wall of the cylindrical through hole of the housing; the annular axis of the groove is coaxial with the axis of the cylindrical through hole of the housing; the outer diameter of the ring of the snap ring is equal to the outer diameter of the ring of the groove; the inner diameter of the ring of the snap ring is smaller than the diameter of the cylindrical through hole of the housing; the snap ring is detachably fixed in the groove; when the snap ring is fixed in the groove; the distance between the annular baffle and the groove is equal to the length of the cylindrical height of the filter; the cylindrical diameter of the filter is equal to the diameter of the cylindrical through hole of the housing; the cylindrical axis of the filter coincides with the hole axis of the cylindrical through hole of the housing; the filter is disposed between the snap ring and the annular baffle. The light acquisition mechanism for the etching machine endpoint detection system provided by this utility model solves the problem of inconvenient filter replacement in the prior art, and allows the filter to be replaced conveniently and stably.

[0044] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the contents of the present utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present utility model.

Claims

1. A light-collecting mechanism for an etching machine endpoint detection system, characterized in that, Includes a support base, a convex lens assembly, and a filter assembly; The support base includes a receiving cylinder; the receiving cylinder has a through hole; the convex lens assembly and the filter assembly are detachably fixed in the through hole of the receiving cylinder; When light passes through the receiving cylinder along the through-hole extension direction, it will pass through the convex lens assembly and the filter assembly in sequence; The filter assembly includes a housing with a cylindrical through-hole, a cylindrical filter, and a notched annular retaining ring. A circular baffle is provided on one side of the cylindrical through hole of the housing; the surface of the circular baffle is perpendicular to the axis of the cylindrical through hole of the housing; the inner diameter of the circular baffle is smaller than the diameter of the cylindrical through hole of the housing. The inner wall of the cylindrical through hole of the housing is provided with an annular groove; the annular axis of the groove is coaxial with the axis of the cylindrical through hole of the housing; the outer diameter of the ring of the snap ring is equal to the outer diameter of the ring of the groove; the inner diameter of the ring of the snap ring is less than the diameter of the cylindrical through hole of the housing; the snap ring is detachably fixed in the groove. When the retaining ring is fixed in the groove, the distance between the annular baffle and the groove is equal to the length of the cylindrical height of the filter. The cylindrical diameter of the filter is equal to the diameter of the cylindrical through hole of the housing; the cylindrical axis of the filter coincides with the axis of the cylindrical through hole of the housing; the filter is disposed between the retaining ring and the annular baffle.

2. The light acquisition mechanism for the etching machine endpoint detection system as described in claim 1, characterized in that, The inner diameter of the snap ring is equal to the inner diameter of the ring baffle.

3. The light acquisition mechanism for the etching machine endpoint detection system as described in claim 1, characterized in that, The support base also includes a fixing plate and a sensor connection end; the sensor connection end and the receiving cylinder are respectively fixed to the two side plates of the fixing plate; The fixed plate has a light-transmitting hole on its surface; the light-transmitting hole connects the sensor connection end and the receiving cylinder; the axis of the light-transmitting hole extends in the same direction as the through hole of the receiving cylinder.

4. The light acquisition mechanism for the etching machine endpoint detection system as described in claim 3, characterized in that, The fixing plate has several vertical fixing holes that penetrate the surface of the fixing plate.

5. The light acquisition mechanism for the etching machine endpoint detection system as described in claim 3, characterized in that, The support base also includes a second retaining ring; The through hole of the receiving cylinder is a round hole; a second groove is formed on the inner wall of the through hole of the receiving cylinder; the second retaining spring is detachably fixed in the second groove; When the convex lens assembly is fixed inside the receiving cylinder, the opposite ends of the convex lens assembly are respectively attached to the fixing plate and the second retaining spring.

6. The light acquisition mechanism for the etching machine endpoint detection system as described in claim 5, characterized in that, The convex lens assembly includes a cylindrical convex lens holder and a convex lens; the convex lens is detachably fixed inside the cylindrical inner hole of the convex lens holder; the principal optical axis of the convex lens coincides with the axis of the inner hole of the cylindrical convex lens holder.

7. The light acquisition mechanism for the etching machine endpoint detection system as described in claim 3, characterized in that, It also includes sealing rings; The receiving cylinder includes a first end face and a second end face; the first end face is fixed against the fixing plate; a circular sealing groove is formed on the second end face of the receiving cylinder; the sealing ring is detachably fixed in the sealing groove; when the sealing ring is fixed in the sealing groove, the sealing ring extends out of the opening of the sealing groove. The housing is cylindrical; a sealing plate extends from the cylindrical outer wall of the housing; the housing can be inserted into the receiving cylinder; when the housing is inserted into the receiving cylinder, the sealing plate can be pressed against the second end face.

8. The light acquisition mechanism for the etching machine endpoint detection system as described in claim 3, characterized in that, The sensor connection end includes a fixing part and a housing cover; the fixing part includes an insertion hole communicating with the light-transmitting hole; the housing cover is detachably fixed to the fixing part; when the housing cover is fixed to the fixing part, it can block the insertion hole.

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