Scanning electron microscope sample stage and scanning electron microscope device
By designing a scanning electron microscope (SEM) sample stage with adjustable height limiting components and clamping components, the problems of poor fixation and low versatility were solved, resulting in a highly stable and safe SEM sample stage that can adapt to the scanning needs of samples of different sizes.
Patent Information
- Application Number
- CN202422940124.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-29
- Publication Date
- 2025-11-04
- Estimated Expiration
- 2034-11-29
AI Technical Summary
Existing scanning electron microscope (SEM) sample stages have poor fixation performance, failing to keep samples vertical and affecting observation results. They also have low versatility, only able to fix samples of one size, and pose a risk of equipment damage due to magnetic fields.
A scanning electron microscope sample stage was designed, comprising a sample stage base, a limiting component, and a clamping component. The limiting component is height-adjustable and has a limiting insertion hole. The clamping component can vertically clamp the sample. The combination of the limiting component and the clamping component achieves dual fixation, adapting to samples of different sizes, and the magnetic attraction force is offset by its own weight.
It improves the stability and versatility of the sample stage, ensures the safety and fixation effect of scanning observation, adapts to the scanning needs of samples of different sizes, and reduces the risk of equipment damage.
Smart Images
Figure CN223513903U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of scanning electron microscopy (SEM) technology, and in particular to a SEM sample stage and SEM apparatus. Background Technology
[0002] Scanning electron microscopy (SEM) is an observational technique that falls between transmission electron microscopy and optical microscopy. It uses a narrow, focused beam of high-energy electrons to scan a sample. Through the interaction between the beam and the material, various physical information is excited, collected, magnified, and re-imaged to characterize the microscopic morphology of the material. With advancements in micro-drill and tool manufacturing technology, an increasing number of different types and specifications of micro-drills and tools, as well as related samples such as alloy bars and steel shanks, require SEM research.
[0003] When scanning samples with a scanning electron microscope (SEM), the sample needs to be placed on the SEM stage. However, existing SEM stages have several drawbacks. First, they do not provide adequate sample fixation, causing the sample to not remain upright and affecting the observation results. Second, they can only fix samples of one size, resulting in low versatility. Furthermore, some areas of existing SEM stages contain magnetic fields that can magnetize ferromagnetic materials and attract them to the SEM pole pieces, posing a risk of equipment damage.
[0004] Therefore, there is an urgent need to propose a scanning electron microscope (SEM) sample stage and SEM apparatus to solve the above problems. Utility Model Content
[0005] The first objective of this invention is to provide a scanning electron microscope (SEM) sample stage that has good fixation effect, high versatility, and high safety for scanning observation operations.
[0006] To achieve this objective, the present invention adopts the following technical solution:
[0007] Scanning electron microscope sample stage, including:
[0008] A sample stage base, wherein the sample stage base is vertically arranged and a receiving cavity is provided at the top of the sample stage base;
[0009] A limiting component is located in the receiving cavity and its height within the receiving cavity can be adjusted vertically. The top of the limiting component is provided with several limiting holes.
[0010] The clamp assembly and the first sample are both vertically inserted and fixed in the limiting hole. The top of the clamp assembly can vertically clamp the second sample. The size of the fixing part of the first sample is larger than the size of the clamping and fixing part of the second sample.
[0011] As an optional technical solution for the scanning electron microscope sample stage, the inner diameter of the limiting socket is 6mm.
[0012] As an optional technical solution for a scanning electron microscope sample stage, the inner wall of the receiving cavity is provided with a first internal thread, the outer wall of the limiting component is provided with a first external thread, and the sample stage base and the limiting component are connected through the first internal thread and the first external thread.
[0013] As an optional technical solution for a scanning electron microscope sample stage, the clamping assembly includes a connecting column and multiple elastic clamps. One end of the connecting column is inserted into the limiting hole, and the other end of the connecting column has a groove at the top center. The second sample can be inserted into the groove. The multiple elastic clamps are spaced apart along the outer circumference of the connecting column and surround and clamp the second sample.
[0014] As an optional technical solution for a scanning electron microscope sample stage, the outer wall of the connecting column is provided with a second external thread, the limiting hole is provided with a second internal thread, and the connecting column and the limiting component are connected through the second external thread and the second internal thread.
[0015] As an optional technical solution for a scanning electron microscope sample stage, the plurality of elastic clamps are radially outward along the connecting post, the vertical depth of the limiting insertion hole is greater than the vertical height of the connecting post, and the second external thread is provided on the end of the connecting post away from the elastic clamp, so that at least a portion of the elastic clamp can be inserted into the limiting insertion hole, and the limiting insertion hole presses the plurality of elastic clamps closer to each other to clamp the second sample.
[0016] As an optional technical solution for a scanning electron microscope sample stage, the inner diameter of the groove is 3.5 mm.
[0017] As an optional technical solution for a scanning electron microscope sample stage, the elastic clamp has an inclination angle of 78 degrees.
[0018] As an optional technical solution for a scanning electron microscope sample stage, the number of limiting holes is multiple, and the multiple limiting holes are evenly distributed on the top surface of the limiting component.
[0019] The second objective of this invention is to provide a scanning electron microscope device that is highly versatile and safe for scanning observation operations.
[0020] To achieve this objective, the present invention adopts the following technical solution:
[0021] The scanning electron microscope (SEM) apparatus includes the SEM body and the aforementioned SEM sample stage.
[0022] The beneficial effects of this utility model are:
[0023] The scanning electron microscope (SEM) sample stage provided by this utility model includes a sample stage base, a limiting component, and a clamping component. The sample stage base is vertically oriented, with a receiving cavity at its top. The limiting component is located within this cavity, and the sample stage base provides vertical support for the limiting component, improving the stability of the SEM sample stage. Furthermore, because the height of the limiting component within the receiving cavity can be adjusted vertically, the vertical height of the limiting component relative to the sample stage base can be adjusted as needed, thereby improving the versatility of the SEM sample stage. The limiting component has several limiting holes at its top, allowing the clamping component and the first sample to be vertically inserted and fixed within these holes. The clamping component can vertically clamp a second sample, with the size of the fixing portion of the first sample being larger than the size of the clamping portion of the second sample. The limiting component provides support for both the first sample and the clamping component, while the clamping component only provides vertical fixation for the second sample. During actual scanning observation, if scanning the first sample (the larger sample), it can be directly fixed using the limiting component, which provides good fixation and is convenient to operate. For scanning the second sample (also a larger sample), the clamping component is first fixed to the limiting component, and then the second sample is fixed using the clamping component, providing double fixation and good fixation. In other words, this scanning electron microscope sample stage can scan both the larger first sample and the smaller second sample, demonstrating strong versatility. Furthermore, the large size of the first sample allows its own weight to counteract the attraction after magnetization; although the second sample is small and lightweight, its combined weight with the clamping component is significant enough to counteract the attraction after magnetization, ensuring high safety during the scanning observation operation. Attached Figure Description
[0024] Figure 1 This is a schematic diagram of the structure of the sample stage base of the scanning electron microscope sample stage provided in this embodiment of the present invention;
[0025] Figure 2 This is a schematic diagram of the structure of the limiting component of the scanning electron microscope sample stage provided in this embodiment of the present invention;
[0026] Figure 3 This is a schematic diagram of the fixture assembly of the scanning electron microscope sample stage provided in this embodiment of the present invention.
[0027] In the picture:
[0028] 100, Sample stage base; 110, Receiving cavity; 120, First internal thread; 200, Limiting assembly; 210, First external thread; 220, Limiting insertion hole; 300, Clamping assembly; 310, Connecting post; 311, Second external thread; 320, Elastic chuck. Detailed Implementation
[0029] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0030] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0031] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0032] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0033] The scanning electron microscope sample stage provided in this embodiment has good fixation effect, high versatility, and high safety of scanning observation operation.
[0034] Specifically, such as Figures 1 to 3As shown, the scanning electron microscope (SEM) sample stage includes a sample stage base 100, a limiting component 200, and a clamping assembly 300. The sample stage base 100 is vertically arranged, and a receiving cavity 110 is provided at the top of the sample stage base 100. The limiting component 200 is located in the receiving cavity 110 and its height within the receiving cavity 110 can be adjusted vertically. The top of the limiting component 200 has several limiting insertion holes 220. Both the clamping assembly 300 and the first sample can be vertically inserted and fixed in the limiting insertion holes 220. The top of the clamping assembly 300 can vertically clamp a second sample, and the size of the insertion and fixing portion of the first sample is larger than the size of the clamping and fixing portion of the second sample.
[0035] Based on the above design, the sample stage base 100 is vertically positioned, with a receiving cavity 110 at its top. The limiting component 200 is located within the receiving cavity 110. The sample stage base 100 serves to vertically fix and support the limiting component 200, improving the stability of the scanning electron microscope (SEM) sample stage. Simultaneously, since the height of the limiting component 200 within the receiving cavity 110 can be adjusted vertically, the vertical height of the limiting component 200 relative to the sample stage base 100 can be adjusted as needed, thereby improving the versatility of the SEM sample stage. The limiting component 200 has several limiting insertion holes 220 at its top. Both the clamping assembly 300 and the first sample can be vertically inserted and fixed into the limiting insertion holes 220. The top of the clamping assembly 300 can vertically clamp the second sample. The size of the fixing portion of the first sample is larger than the size of the clamping portion of the second sample. The limiting component 200 provides fixed support for both the first sample and the clamping assembly 300, while the clamping assembly 300 only provides vertical fixation for the second sample. During actual scanning observation, if scanning the first sample (the larger sample), it can be directly fixed using the limiting component 200, which provides good fixation and is convenient to operate. For scanning the second sample (also a larger sample), the clamping component 300 is first fixed to the limiting component 200, and then the second sample is fixed using the clamping component 300, providing double fixation and good fixation. In other words, this scanning electron microscope sample stage can scan both the larger first sample and the smaller second sample, demonstrating strong versatility. Furthermore, the large size of the first sample allows its own weight to counteract the attraction after magnetization; although the second sample is small and has a low weight, its combined weight with the clamping component 300 is significant enough to counteract the attraction after magnetization, ensuring high safety during the scanning observation operation.
[0036] The limiting sockets 220 are multiple and evenly distributed on the top surface of the limiting component 200, improving the scanning observation efficiency of the first sample, or enabling simultaneous scanning observation of the first and second samples. Exemplarily, there can be two, three, four, or five limiting sockets 220, which can be set as needed; this comparison does not impose a specific limitation. The limiting sockets 220 can be through holes or non-through holes.
[0037] Optionally, the inner diameter of the limiting socket 220 is 6mm, meaning the limiting component 200 can be used alone to vertically fix a first sample with an outer diameter of 6mm, such as a ball cutter with a handle diameter of 6mm. Of course, in this case, the outer diameter of the clamping component 300 is also 6mm.
[0038] In this embodiment, the inner wall of the receiving cavity 110 is provided with a first internal thread 120, and the outer wall of the limiting component 200 is provided with a first external thread 210. The sample stage base 100 and the limiting component 200 are connected through the first internal thread 120 and the first external thread 210. On the one hand, the limiting component 200 can be installed by simply screwing it on, which is simple and convenient. On the other hand, the relative height between the limiting component 200 and the sample stage base 100 can be adjusted by screwing the limiting component 200 up or down, which is convenient and simple. Furthermore, the scanning observation angle can be adjusted by screwing the limiting component 200, making the scanning observation effect more comprehensive.
[0039] Continue as Figure 1 As shown, the outer wall of the sample stage base 100 is provided with at least a pair of parallel planes to better clamp and fix the sample stage base 100.
[0040] Continue as Figure 2 and Figure 3 As shown, the clamp assembly 300 includes a connecting post 310 and multiple elastic clamps 320. One end of the connecting post 310 is inserted into the limiting insertion hole 220, and the other end of the connecting post 310 has a groove at its top center, into which the second sample can be inserted. The multiple elastic clamps 320 are spaced apart along the outer periphery of the connecting post 310 and surround and clamp the second sample. The second sample is double-fixed by the groove and the elastic clamps 320, resulting in a good fixing effect. Exemplarily, the number of elastic clamps 320 is two, three, or four. In this embodiment, the number of elastic clamps 320 is three, which clamp the second sample from three directions, providing strong fixing force and low cost.
[0041] Furthermore, the outer wall of the connecting post 310 is provided with a second external thread 311, and the limiting hole 220 is provided with a second internal thread. The connecting post 310 and the limiting component 200 are connected through the second external thread 311 and the second internal thread. The threaded connection has high strength and is simple to connect.
[0042] Specifically, first screw the limiting component 200 into the receiving cavity 110 of the sample stage base 100; then screw the clamp component 300 into the limiting insertion hole 220; pry the elastic clamp 320 outward to insert the second sample into the groove of the connecting post 310, then loosen the elastic clamp 320, which will then clamp the second sample. At this point, the vertical depth to which the clamp component 300 is screwed into the limiting insertion hole 220 can be selected to adjust the scanning observation height of the second sample.
[0043] Furthermore, multiple elastic clamps 320 are radially outward along the connecting post 310, the vertical depth of the limiting insertion hole 220 is greater than the vertical height of the connecting post 310, and the second external thread 311 is provided at the end of the connecting post 310 away from the elastic clamp 320, so that at least a portion of the elastic clamp 320 can be inserted into the limiting insertion hole 220. The limiting insertion hole 220 compresses the multiple elastic clamps 320 closer to each other to clamp the second sample. That is, as more of the elastic clamp 320 is inserted into the limiting insertion hole 220, the clamping force of the elastic clamp 320 on the second sample is greater. In other words, the clamping assembly 300 can also clamp the second sample with a smaller fixed portion.
[0044] Specifically, first screw the limiting component 200 into the receiving cavity 110 of the sample stage base 100; then screw the clamp component 300 into the limiting socket 220; insert the second sample into the groove of the connecting post 310, and continue to screw the clamp component 300 downwards until the elastic chuck 320 enters the limiting socket 220 and clamps the second sample.
[0045] Optionally, the inner diameter of the groove is 3.5 mm, meaning the maximum size of the fixing portion of the second sample that the clamping assembly 300 can clamp is 3.5 mm.
[0046] Furthermore, the tilt angle of the elastic chuck 320 is 78 degrees, that is, the angle between the elastic chuck 320 and the vertical direction is 78 degrees, so that the size range of the second sample that the clamp assembly 300 can clamp and fix is 1mm-3.5mm.
[0047] For example, the size of the fixed part of the second sample can be 1mm, 2.5mm, 3mm or 3.5mm, etc.
[0048] It should be noted that in this embodiment, the vertical thickness of the limiting component 200 is 10mm, the vertical height of the second internal thread in the limiting insertion hole 220 is 5mm, and the vertical height of the entire clamping assembly 300 is 18mm.
[0049] The scanning electron microscope device provided in this embodiment has high versatility and high safety in scanning observation operations.
[0050] Specifically, the scanning electron microscope (SEM) apparatus includes a scanning electron microscope body and the aforementioned scanning electron microscope sample stage. Due to the aforementioned scanning electron microscope sample stage, the SEM apparatus has high versatility and high safety in scanning observation operations.
[0051] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A scanning electron microscope sample stage, characterized in that, include: A sample stage base (100) is provided, which is vertically arranged, and a receiving cavity (110) is provided on the top of the sample stage base (100); A limiting component (200) is located in the receiving cavity (110) and its height in the receiving cavity (110) can be adjusted vertically. The top of the limiting component (200) is provided with a plurality of limiting holes (220). The clamp assembly (300) and the first sample can be vertically inserted and fixed in the limiting hole (220). The top of the clamp assembly (300) can vertically clamp the second sample. The size of the fixing part of the first sample is larger than the size of the clamping and fixing part of the second sample.
2. The scanning electron microscope sample stage according to claim 1, characterized in that, The inner diameter of the limiting socket (220) is 6mm.
3. The scanning electron microscope sample stage according to claim 1, characterized in that, The inner wall of the receiving cavity (110) is provided with a first internal thread (120), and the outer wall of the limiting component (200) is provided with a first external thread (210). The sample stage base (100) and the limiting component (200) are connected through the first internal thread (120) and the first external thread (210).
4. The scanning electron microscope sample stage according to claim 1, characterized in that, The clamp assembly (300) includes a connecting post (310) and a plurality of elastic clamps (320). One end of the connecting post (310) is inserted into the limiting hole (220), and the other end of the connecting post (310) has a groove at the top center. The second sample can be inserted into the groove. The plurality of elastic clamps (320) are spaced apart along the outer periphery of the connecting post (310) and surround and clamp the second sample.
5. The scanning electron microscope sample stage according to claim 4, characterized in that, The outer wall of the connecting post (310) is provided with a second external thread (311), and the limiting hole (220) is provided with a second internal thread. The connecting post (310) and the limiting component (200) are connected through the second external thread (311) and the second internal thread.
6. The scanning electron microscope sample stage according to claim 5, characterized in that, The plurality of elastic clamps (320) are radially outward along the connecting post (310), the vertical depth of the limiting hole (220) is greater than the vertical height of the connecting post (310), and the second external thread (311) is provided at the end of the connecting post (310) away from the elastic clamp (320), so that at least a portion of the elastic clamp (320) can be inserted into the limiting hole (220), and the limiting hole (220) squeezes the plurality of elastic clamps (320) closer to each other to clamp the second sample.
7. The scanning electron microscope sample stage according to claim 6, characterized in that, The inner diameter of the groove is 3.5 mm.
8. The scanning electron microscope sample stage according to claim 7, characterized in that, The tilt angle of the elastic clamp (320) is 78 degrees.
9. The scanning electron microscope sample stage according to claim 1, characterized in that, The number of the limiting holes (220) is multiple, and the multiple limiting holes (220) are evenly distributed on the top surface of the limiting component (200).
10. A scanning electron microscope apparatus, comprising a scanning electron microscope body, characterized in that, The scanning electron microscope apparatus further includes the scanning electron microscope sample stage as described in any one of claims 1-9.