Waste gas treatment device

Abstract

The utility model provides a waste gas treatment device and relates to the technical field of waste gas treatment. The waste gas treatment device comprises a reaction tower, a water tank and a washing tower which are sequentially communicated. A reaction cavity is formed in the reaction tower. A waste gas inlet and a waste gas outlet which are communicated with the reaction cavity are formed in the reaction tower. The waste gas outlet communicates with the water tank. And the reaction tower is also provided with introduction equipment for introducing plasma. And cooling equipment is also arranged on the reaction tower. The cooling equipment is used for cooling the waste gas in the reaction cavity. The washing tower is provided with an air inlet and an air outlet. The air inlet communicates with the water tank. A spraying assembly, a cooler, a demister and a reheater are sequentially arranged in the washing tower in the direction from the gas inlet to the gas outlet. The waste gas treatment device disclosed by the utility model can reduce the humidity of gas at the exhaust outlet, avoid the phenomenon of white smoke generated by flue gas discharge and improve the running stability of equipment.

Description

TECHNICAL FIELD

[0001] The utility model relates to waste gas treatment technical field, specifically, waste gas treatment device. BACKGROUND

[0002] In the manufacturing field of semiconductor, panel display, LED, solar energy and MEMS micro-electro-mechanical system, waste gas will be produced in the production process, and must be treated before being discharged into the surrounding environment. At present, the commonly used waste gas treatment methods include "thermal decomposition + liquid shower type", "gas combustion + liquid shower type" and "high temperature plasma + liquid shower type", etc., which are to treat the waste gas into stable by-products first, and then liquid shower flushing in the liquid shower area.

[0003] The inventor found that the demisting device of the existing liquid shower flushing process can only remove part of the water droplets, and cannot remove the water droplets with small volume, and the flue gas is still saturated with humidity. When the flue gas is discharged into the subsequent equipment or directly discharged into the chimney, white smoke phenomenon will occur, which has a negative impact on the system production. UTILITARIAN CONTENT

[0004] The purpose of the utility model includes providing a waste gas treatment device, which can reduce the gas humidity of the exhaust outlet, avoid white smoke phenomenon when flue gas is discharged, and improve the running stability of the equipment.

[0005] The embodiment of the utility model can be implemented as follows:

[0006] The waste gas treatment device of the utility model comprises a reaction tower, a water tank and a washing tower which are sequentially communicated. The reaction tower is provided with a reaction cavity. The reaction tower is provided with a waste gas inlet and a waste gas outlet which are communicated with the reaction cavity. The waste gas outlet is communicated with the water tank. The reaction tower is further provided with an introduction device for introducing plasma. The reaction tower is further provided with a cooling device. The cooling device is used for cooling the waste gas in the reaction cavity. The washing tower is provided with an air inlet and an air outlet. The air inlet is communicated with the water tank. From the air inlet to the air outlet, the washing tower is sequentially provided with a spraying assembly, a cooler, a demister and a reheater.

[0007] The beneficial effects of the waste gas treatment device provided by the embodiment of the utility model include:

[0008] The waste gas treatment device of the utility model discloses a reaction tower, a water tank and a washing tower are communicated in sequence. The reaction tower can pass the waste gas and make it high-temperature decomposition. The flue gas after reaction enters the washing tower after the water tank. The spray assembly, the cooler, the demister and the reheater are arranged in the washing tower in sequence. The spray assembly can remove the acidic gas and the particulate matter in the waste gas. The cooler is additionally arranged before the demister, so that the water vapor in the flue gas condenses into water droplets, and then enters the demister, improving the dehumidification effect of the demister. The waste gas treatment device of the utility model can reduce the gas humidity of the exhaust outlet, avoid the white smoke phenomenon generated by the flue gas discharge, and improve the equipment operation stability. BRIEF DESCRIPTION OF DRAWINGS

[0009] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments, it should be understood that the following drawings only show some embodiments of the utility model, therefore should not be regarded as the limitation to the scope, for the ordinary skilled person in the art, under the premise of not paying the creative labor, still can obtain other related drawings according to these drawings.

[0010] Figure 1 The structural schematic diagram of the waste gas treatment device provided for the embodiment is shown in the figure.

[0011] Figure 2 The structural schematic diagram of the reaction tower provided for the embodiment is shown in the figure.

[0012] Figure 3 The partial structural schematic diagram of the reaction tower provided for the embodiment is shown in the figure.

[0013] Figure 4 The structural schematic diagram of the washing tower provided for the embodiment is shown in the figure.

[0014] Figure: 100-waste gas treatment device;10-reaction tower;11-reaction cavity;12-waste gas inlet;13-waste gas outlet;14-condensation cavity;141-first inlet;142-first outlet;15-lead-in equipment;16-air pipe;161-blowing hole;20-water tank;21-third spray pipe;22-circulation pipeline;23-water pump;30-washing tower;31-spray assembly;311-first spray pipe;312-second spray pipe;313-first filler layer;314-second filler layer;32-cooler;321-second inlet;322-second outlet;33-demister;34-reheater;341-third inlet;342-third outlet;35-gas inlet;36-gas outlet;37-exhaust fan;40-cooling liquid system;41-cooling liquid inlet;42-cooling liquid outlet;43-waste liquid outlet;44-water supply pipe. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0016] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.

[0017] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0018] In the description of the present application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the present application is used, only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0019] In addition, if the terms "first", "second" and the like appear, they are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.

[0020] It should be noted that the features in the embodiments of the present application can be combined with each other without conflict.

[0021] Please refer to Figure 1 The waste gas treatment device 100 provided by the present application is applied to process waste gas generated in the semiconductor industry. The process waste gas includes greenhouse gases represented by fluorine, chlorine, silicon, nitrogen, hydrogen and other elements, and harmful gases with high toxicity and flammability. At present, the above-mentioned gases are mainly treated by using combustion and water washing treatment process.

[0022] The waste gas treatment device 100 includes a reaction tower 10, a water tank 20 and a washing tower 30 connected in sequence. The reaction tower 10 is used for introducing waste gas and making it burn and decompose. The water tank 20 is used for cooling the waste gas after reaction. The washing tower 30 is used for water washing and dehumidifying the waste gas.

[0023] Specifically, the reaction tower 10 is provided with a reaction cavity 11. The reaction tower 10 is provided with a waste gas inlet 12 and a waste gas outlet 13 which communicate with the reaction cavity 11. The waste gas inlet 12 is arranged at the top of the reaction tower 10, and the waste gas outlet 13 is arranged at the bottom of the reaction tower 10. The waste gas outlet 13 communicates with the water tank 20. It can be understood that the waste gas enters the reaction cavity 11 through the waste gas inlet 12 and is combusted and decomposed. The reacted waste gas enters the water tank 20 through the waste gas outlet 13 to be cooled and cleaned.

[0024] Specifically, the reaction tower 10 is further provided with an introduction device 15 for introducing plasma. In the embodiment, the introduction device 15 is a plasma torch head for introducing a high-temperature plasma nitrogen gas stream into the reaction cavity 11. It can be understood that the waste gas and the plasma nitrogen gas stream are mixed and combusted and decomposed at high temperature in the reaction cavity 11. The flue gas generated after combustion enters the water tank 20 through the waste gas outlet 13 to be cooled and cleaned, so as to remove the acidic gas and particulate matter in the flue gas.

[0025] In order to preliminarily cool the flue gas in the reaction cavity 11, in the embodiment, the reaction tower 10 is further provided with a cooling device. The cooling device is used to cool the waste gas in the reaction cavity 11, that is, to cool the flue gas after the waste gas and plasma are combusted and decomposed. It can be understood that the cooling device in the embodiment is used to cool the reaction cavity 11 after the waste gas and plasma combustion reaction. Specifically, the cooling device can be started to cool the reacted flue gas after the reaction cavity 11 is reacted for a certain time.

[0026] Further, the washing tower 30 is provided with an air inlet 35 and an air outlet 36. The air inlet 35 communicates with the water tank 20. From the air inlet 35 to the air outlet 36, the washing tower 30 is sequentially provided with a spray assembly 31, a cooler 32, a demister 33 and a reheater 34.

[0027] It can be easily understood that the flue gas generated after the combustion of the reaction tower 10 is cooled and cleaned by the water tank 20 and enters the washing tower 30 for further treatment. The spray assembly 31 is used to further clean the flue gas and deeply remove the acidic gas and particulate matter in the flue gas. The cooler 32 is used to cool the humid flue gas, so that the water vapor in the flue gas condenses into water droplets, facilitating the subsequent demisting of the demister 33. Specifically, in the embodiment, the demister 33 can only remove water droplets of 30 μm or more, and cannot remove water droplets of less than 30 μm. By additionally arranging the cooler 32 before the demister 33, the water droplets of less than 30 μm are condensed into water droplets of 30 μm or more, so that the demister 33 can greatly reduce the humidity of the flue gas.

[0028] The above-mentioned mist eliminator 33 can reduce the absolute humidity of the flue gas. In order to reduce the relative humidity of the flue gas, a reheater 34 is arranged in the scrubbing tower 30 in the embodiment. It can be understood that the absolute humidity refers to the water vapor mass contained in a unit volume of air, i.e. the water vapor density in the air, which is expressed in g / m 3 . The relative humidity refers to the ratio of the actual water vapor content in the air to the saturated water vapor content at a certain temperature, which is expressed in percentage. The relative humidity is related to the temperature. At a higher temperature, the air can contain more water vapor, and thus the relative humidity is lower. In the embodiment, the reheater 34 is used to heat the flue gas, so as to reduce the relative humidity.

[0029] For example, after being sprayed by the spraying assembly 31, the temperature of the flue gas is maintained at about 36.8°C. At this time, the relative humidity of the flue gas is 100%, and the absolute humidity is 40.62 g / kg. After being cooled by the cooler 32, the temperature of the flue gas is reduced to about 30°C. The flue gas is then subjected to demisting by the mist eliminator 33, so as to remove the new droplets generated due to the cooling. At this time, the relative humidity of the flue gas is 100%, and the absolute humidity is 27.2 g / kg. After the demisting, the flue gas is heated to 40°C by the reheater 34. The absolute humidity of the flue gas after the heating is still 27.2 g / kg, but the relative humidity is reduced to 57.5%.

[0030] It should be noted that the above-mentioned is only one embodiment of the present application for facilitating the explanation of the scrubbing tower 30 for reducing the relative humidity and the absolute humidity. The specific temperature value and humidity of the flue gas can be set according to the requirements, and the present application does not limit the same.

[0031] Please refer to Figure 2 . Specifically, the cooling device comprises a condensation cavity 14, a first inlet 141 and a first outlet 142 which are in communication with the condensation cavity 14. It can be understood that the condensation cavity 14 is used to introduce cooling liquid, and exchanges heat with the gas in the reaction cavity 11. The first inlet 141 is used to introduce the cooling liquid. The first outlet 142 is used to discharge the cooling liquid. In the embodiment, the condensation cavity 14 is arranged in the side wall of the reaction tower 10. The first inlet 141 and the first outlet 142 are arranged on the outer side wall of the reaction tower 10.

[0032] By arranging the condensation cavity 14 in the side wall of the reaction tower 10, when the reaction in the reaction cavity 11 is completed, the cooling liquid can be introduced into the condensation cavity 14, so as to cool the flue gas in the reaction cavity 11. The temperature of the cooling liquid passing through the condensation cavity 14 is increased.

[0033] Please refer to Figure 1 and Figure 2In the embodiment, the waste gas treatment device 100 further comprises a cooling liquid system 40. The cooling liquid system 40 comprises a cooling liquid inlet 41 and a cooling liquid outlet 42, which are used to provide cooling liquid to the reaction tower 10 and the washing tower 30. Specifically, in the embodiment, the cooling liquid inlet 41 is communicated with the first inlet 141, which is used to provide cooling liquid to the condensing cavity 14.

[0034] Optionally, in the embodiment, the cooling liquid inlet 41 is used to provide 20℃ cooling liquid to the first inlet 141. The temperature of the cooling liquid rises to 48.3℃ after the cooling liquid flows through the condensing cavity 14 and exchanges heat with the high-temperature flue gas. In other embodiments, the cooling liquid inlet 41 can provide cooling liquid with other temperatures to the first inlet 141. The specific temperature can be set according to the needs, and the utility model does not make any limitation on this.

[0035] In the embodiment, the cooling liquid system 40 is also used to provide cooling liquid to the cooler 32. Specifically, the cooling liquid inlet 41 is communicated with the inlet of the cooler 32. The outlet of the cooler 32 is communicated with the cooling liquid outlet 42.

[0036] Further, the first outlet 142 is communicated with the inlet of the reheater 34. It can be understood that the temperature of the cooling liquid rises after the cooling liquid exchanges heat in the cooling cavity, and then the cooling liquid enters the reheater 34 to heat the flue gas.

[0037] Specifically, in the embodiment, 20℃ cooling liquid flows into the cooling liquid inlet 41, part of the cooling liquid flows through the cooling cavity, the temperature rises to 48.3℃, and then the cooling liquid flows through the reheater 34 to heat the flue gas. At this time, the temperature of the cooling liquid decreases from 48.3℃ to 45.9℃, and finally the cooling liquid flows out through the cooling liquid outlet 42; the other part of the cooling liquid flows through the cooler 32 to cool the flue gas, the temperature of the cooling liquid rises from 20℃ to 23.2℃, and then the cooling liquid mixes with the 45.9℃ cooling liquid flowing out from the reheater 34, and finally forms 28.2℃ cooling liquid, which flows out through the cooling liquid outlet 42.

[0038] It should be noted that the above is only one of the embodiments of the cooling liquid system 40 for facilitating the description of the flow path of the cooling liquid system 40. The specific temperature value of the cooling liquid can be set according to the needs, and the utility model does not make any limitation on this.

[0039] Please refer to Figure 3Further, the reaction cavity 11 is provided with an air pipe 16. The air pipe 16 is arranged close to the waste gas outlet 13. A plurality of air blowing holes 161 are formed on the air pipe 16, for forming an air curtain between the reaction cavity 11 and the water tank 20. Specifically, the air pipe 16 is fixed on the side wall of the reaction tower 10. One end of the air pipe 16 extends out of the reaction tower 10, for facilitating the air to be introduced into the air pipe 16. It can be understood that, in the embodiment, the reaction tower 10 is in a cylindrical shape. The air pipe 16 is a straight pipe. The air pipe 16 is coincident with the diameter direction of the reaction tower 10. The air blowing holes 161 are formed on both sides of the air pipe 16. In the embodiment, the air pipe 16 is arranged in the reaction cavity 11, for forming an air curtain, to prevent the liquid in the water tank 20 from splashing into the reaction cavity 11.

[0040] Optionally, in other embodiments, the shape of the air pipe 16 can be arranged as required. For example, the air pipe 16 is arranged in a circular ring shape, and is fixed on the inner side wall of the reaction tower 10. The air blowing holes 161 are arranged on the air pipe 16 at intervals. As long as the air curtain can be formed to separate the reaction cavity 11 and the water tank 20, the shape of the air pipe 16 is not limited in the utility model.

[0041] Please refer to Figure 1 and Figure 4 The spray assembly 31 comprises a first spray pipe 311 and a second spray pipe 312. The first spray pipe 311 and the second spray pipe 312 are arranged in sequence and at intervals in the direction from the air inlet 35 to the air outlet 36. It can be understood that the flue gas passes through the first spray pipe 311 and the second spray pipe 312 in sequence. The secondary spraying can effectively remove the acid gas and particulate matters in the flue gas, and clean the flue gas.

[0042] Specifically, the first spray pipe 311 is in communication with the water tank 20. The water tank 20 is provided with a water pump 23. The water pump 23 is used to drive the liquid to move from the water tank 20 to the first spray pipe 311. It can be understood that the water source of the first spray pipe 311 comes from the water tank 20. The water flows from the water tank 20 to the first spray pipe 311 and is sprayed out. The sprayed water falls back into the water tank 20 due to gravity, to form a circulating spray.

[0043] Further, the second spray pipe 312 is connected with the water supplement pipe 44. It can be understood that the water source of the second spray pipe 312 comes from the outside. The second spray pipe 312 is arranged to not only cooperate with the first spray pipe 311 to spray the flue gas, but also to supplement the water consumption of the waste gas treatment device 100, to maintain the water balance. The water consumption is specifically due to the natural evaporation of the water in the water tank 20 and the flue gas taken out, etc.

[0044] In the embodiment, the first packing layer 313 and the second packing layer 314 are arranged in the washing tower 30. The first packing layer 313 is arranged between the first spray pipe 311 and the gas inlet 35. The second packing layer 314 is arranged between the second spray pipe 312 and the first spray pipe 311. It can be understood that various packing materials, such as multi-faceted hollow spheres and Raschig rings, can be arranged in the first packing layer 313 and the second packing layer 314. The main function of arranging the first packing layer 313 and the second packing layer 314 is to increase the gas-liquid contact area and promote the full contact and mass transfer between the gas and liquid phases.

[0045] Further, the cooler 32 comprises a liquid cooling pipe arranged in the washing tower 30, and a second inlet 321 and a second outlet 322 arranged at two ends of the liquid cooling pipe. The second inlet 321 and the second outlet 322 penetrate the side wall of the washing tower 30. Specifically, the liquid cooling pipe is arranged as a serpentine pipe in the washing tower 30, and is bent multiple times in the washing tower 30 to increase the contact area between the liquid cooling pipe and the flue gas and improve the cooling effect of the cooler 32.

[0046] Further, the reheater 34 comprises a heating pipe arranged in the washing tower 30, and a third inlet 341 and a third outlet 342 arranged at two ends of the heating pipe. The third inlet 341 and the third outlet 342 penetrate the side wall of the washing tower 30. Specifically, the heating pipe is arranged as a serpentine pipe in the washing tower 30, and is bent multiple times in the washing tower 30 to increase the contact area between the heating pipe and the flue gas and improve the heating effect of the reheater 34.

[0047] In the embodiment, the demister 33 mainly adopts the technology of absorbing moisture in the air by using packing. Specifically, the material filled in the demister 33 can include honeycomb ceramic packing, organic polymer packing, inorganic porous packing, etc.

[0048] Alternatively, in other embodiments, the demister 33 can adopt other structures, such as streamline or broken line bent plate structures, as needed. As long as the humidity of the flue gas can be reduced, the specific structure of the demister 33 is not limited in the utility model.

[0049] Please refer to Figure 1 The water tank 20 further comprises a third spray pipe 21. The third spray pipe 21 is used for preliminarily cooling and cleaning the flue gas flowing into the water tank 20. Specifically, the water tank 20 is in communication with the reaction tower 10 and the washing tower 30. The flue gas after combustion in the reaction tower 10 flows into the water tank 20, flows in the water tank 20, and is sprayed by the third spray pipe 21 when flowing through the third spray pipe 21. It can be understood that the water tank 20 is internally provided with water at the lower part and a cavity at the upper part. The flue gas after combustion flows in the cavity at the upper part of the water tank 20. The third spray pipe 21 is also arranged in the cavity.

[0050] Specifically, in the embodiment, the spraying direction of the third spraying pipe 21 is upward. Alternatively, in other embodiments, the spraying direction of the third spraying pipe 21 can be set according to the specific position of the third spraying pipe 21, for example, the spraying direction of the third spraying pipe 21 can be downward. As long as the flue gas can be sprayed and cleaned, the present application does not make any limitation.

[0051] The third spraying pipe 21 is connected with a circulating pipeline 22. The other end of the circulating pipeline 22 is arranged at the bottom of the water tank 20, and a water pump 23 is connected thereto. It can be understood that the water source of the third spraying pipe 21 comes from the water tank 20. The third spraying pipe 21 sprays water from the water tank 20, and the sprayed water flows back to the water tank 20, forming a circulating spray.

[0052] Further, the water tank 20 is also connected with a waste liquid outlet 43 through a pipeline. The waste liquid outlet 43 is used for discharging water in the water tank 20.

[0053] In order to provide power for the flue gas, in the embodiment, the gas outlet 36 is provided with an exhaust fan 37. It can be understood that the exhaust fan 37 can make the flue gas flow in the direction from the gas inlet 35 to the gas outlet 36, preventing the flue gas from flowing back into the water tank 20.

[0054] The working principle and process of the waste gas treatment device 100 of the present application are as follows:

[0055] Gas flow direction: the waste gas enters the reaction cavity 11 through the waste gas inlet 12. In the reaction cavity 11, the waste gas is mixed with the high-temperature plasma nitrogen gas flow introduced by the introduction device 15 and is decomposed and combusted at high temperature. The flue gas generated by combustion is preliminarily cooled by the condensing cavity 14 and enters the water tank 20. The third spraying pipe 21 in the water tank 20 preliminarily cleans the flue gas to remove acidic gas and particulate matter in the flue gas. The flue gas enters the scrubbing tower 30 from the water tank 20 for further treatment. The flue gas is subjected to secondary cleaning by the first spraying pipe 311 and the second spraying pipe 312 to deeply remove acidic gas and particulate matter in the flue gas. After the flue gas is cooled by the cooler 32, the condensed water droplets in the flue gas increase, which facilitates the subsequent mist eliminator 33 to remove more water droplets in the flue gas. After passing through the mist eliminator 33, the flue gas is heated by the reheater 34, which reduces the relative humidity of the flue gas while keeping the absolute humidity of the flue gas unchanged. Finally, the clean flue gas is discharged from the gas outlet 36 of the scrubbing tower 30 and can be introduced into subsequent equipment or directly discharged through a chimney.

[0056] Cooling liquid flow direction: the cooling liquid flows in from the cooling liquid inlet 41, part of which flows through the cooling cavity, is heated, and then flows through the reheater 34 to heat the flue gas, and finally flows out through the cooling liquid outlet 42; the other part flows through the cooler 32 to cool the flue gas, and then mixes with the cooling liquid flowing out from the reheater 34, and finally flows out through the cooling liquid outlet 42.

[0057] Fresh water flow direction: fresh water enters the second spray pipe 312 through the water supplement pipe 44, and is washed to remove acid and dust, and meanwhile, water consumption of the device is supplemented to maintain water balance.

[0058] The waste gas treatment device 100 has the following beneficial effects:

[0059] The waste gas treatment device 100 of the utility model passes through the reaction tower 10, the water tank 20 and the washing tower 30 that are communicated in turn. The reaction tower 10 can pass the waste gas into and make it high-temperature decomposition. The flue gas after reaction enters the washing tower 30 after passing through the water tank 20. The spray assembly 31, the cooler 32, the mist eliminator 33 and the reheater 34 are sequentially arranged in the washing tower 30. The spray assembly 31 can remove the acidic gas and particulate matter in the waste gas. The cooler 32 is additionally arranged before the mist eliminator 33, so that the water vapor in the flue gas is condensed into water droplets, and then is passed into the mist eliminator 33, thereby improving the dehumidification effect of the mist eliminator 33. The waste gas treatment device 100 can reduce the gas humidity of the exhaust outlet, avoid the white smoke phenomenon generated by the flue gas discharge, and improve the equipment operation stability.

[0060] The above is only a specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. An exhaust gas treatment device (100), characterized in that The reaction tower (10), the water tank (20) and the washing tower (30) are sequentially connected; The reaction tower (10) is provided with a reaction cavity (11), and the reaction tower (10) is provided with a waste gas inlet (12) and a waste gas outlet (13) communicated with the reaction cavity (11), the waste gas outlet (13) is communicated with the water tank (20), and the reaction tower (10) is further provided with an introduction device (15) for introducing plasma, and the reaction tower (10) is further provided with a cooling device for cooling the waste gas in the reaction cavity (11). The washing tower (30) is provided with an air inlet (35) and an air outlet (36), the air inlet (35) is communicated with the water tank (20), and from the air inlet (35) to the air outlet (36), the washing tower is sequentially provided with a spraying assembly (31), a cooler (32), a demister (33) and a reheater (34).

2. The exhaust treatment device (100) of claim 1, wherein, The cooling device comprises a condensation cavity (14), a first inlet (141) and a first outlet (142) communicated with the condensation cavity (14), the condensation cavity (14) is arranged in the side wall of the reaction tower (10), and the first inlet (141) and the first outlet (142) are arranged on the outer side wall of the reaction tower (10).

3. The exhaust treatment device (100) of claim 2, wherein, The first outlet (142) is communicated with the inlet of the reheater (34).

4. The exhaust treatment device (100) of claim 1, wherein, The reaction cavity (11) is provided with an air pipe (16) arranged close to the waste gas outlet (13), and a plurality of air blowing holes (161) are formed in the air pipe (16) to form an air curtain between the reaction cavity (11) and the water tank (20).

5. The exhaust treatment device (100) of claim 1, wherein, The spraying assembly (31) comprises a first spraying pipe (311) and a second spraying pipe (312), and the first spraying pipe (311) and the second spraying pipe (312) are sequentially and spacedly arranged from the air inlet (35) to the air outlet (36).

6. The exhaust treatment device (100) of claim 5, characterized in that The first spraying pipe (311) is communicated with the water tank (20), and a water pump (23) is arranged in the water tank (20), and the water pump (23) is used for driving liquid to move from the water tank (20) to the first spraying pipe (311).

7. The exhaust treatment device (100) of claim 5, wherein, The second spraying pipe (312) is connected with a water supplement pipe (44).

8. The exhaust treatment device (100) of claim 1, wherein, A third spraying pipe (21) is further arranged in the water tank (20), the third spraying pipe (21) is connected with a circulating pipeline (22), one end of the circulating pipeline (22) is arranged at the bottom of the water tank (20), and a water pump (23) is connected.

9. The exhaust treatment device (100) of claim 1, wherein, The cooler (32) comprises a liquid cooling pipe arranged in the washing tower (30), a second inlet (321) and a second outlet (322) arranged at two ends of the liquid cooling pipe, and the second inlet (321) and the second outlet (322) penetrate the side wall of the washing tower (30).

10. The exhaust treatment device (100) of claim 1, wherein, The air outlet (36) is provided with an exhaust fan (37).

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