Electrostatic chuck film cutting device

Abstract

The utility model relates to the technical field of semiconductor devices, in particular to an electrostatic chuck film cutting device which comprises a cutting machine body, a detachably connected cutting die is arranged on the cutting machine body, the cutting die comprises a mounting plate, a placing groove is formed in the bottom of the cutting die, a sliding groove and a die changing opening are formed in the side of the placing groove, and the die changing opening is arranged on the mounting plate. The mold changing opening is formed in one side of the mounting plate, the mold changing opening communicates with the containing groove, the double-face cutter is arranged in the containing groove, sliding rails are fixedly arranged on the sides of the double-face cutter, each sliding rail is arranged in the corresponding sliding groove in a sliding mode, the baffle is detachably connected to the mold changing opening, and the mold changing opening communicates with the baffle. One side of the baffle abuts against one side of the double-face cutter, so that the double-face cutter is stably arranged in the containing groove, shape cutting is carried out through the cutting die, the precision of an obtained film is higher, the effect is better, the cutting efficiency is higher, the cutting die is separated into the double-face cutter and the installation plate, cost is saved, the cutting precision is improved, and the cutting shape of the film is convenient to replace.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor devices especially relates to a static electricity sucking disc film cutting device. BACKGROUND

[0002] Static electricity sucking disc film cutting is an important processing technology of cutting film raw materials into specific shapes by a die cutting machine.

[0003] Conventional cutting can only cut simple shapes, and when cutting complex shapes of film, it takes a long time and the shape precision is not enough, which cannot meet the cutting of static electricity sucking disc film. The knife surface of the die will be uneven after long-term die cutting, which will cause die loss and increase cost. UTILITY MODEL CONTENT

[0004] Therefore, the utility model aims at providing a static electricity sucking disc film cutting device to solve the problems in the background art.

[0005] To achieve the above purpose, the utility model provides a static electricity sucking disc film cutting device, which comprises a cutting machine body, a detachable die is arranged on the cutting machine body, and the die comprises:

[0006] An installation plate is provided with a placing groove at the bottom, and a sliding groove is arranged on the side of the placing groove;

[0007] A die changing port is arranged on one side of the installation plate and is in communication with the placing groove;

[0008] A double-sided cutter is arranged in the placing groove, and a sliding rail is arranged on the side of the double-sided cutter, and the sliding rail is slidably arranged in the sliding groove;

[0009] A baffle is detachably connected to the die changing port, and one side of the baffle is in abutment with one side of the double-sided cutter to stabilize the double-sided cutter in the placing groove.

[0010] Preferably, the cutting machine body comprises:

[0011] An air compressor is fixedly arranged above a workbench;

[0012] A pressing plate is arranged at the bottom of the air compressor, the top of the pressing plate is detachably connected with the lifting end of the air compressor, and the bottom of the pressing plate is attached to the die.

[0013] Preferably, a control console is fixedly arranged on the side of the workbench, an operating switch is arranged on each control console, a footboard is arranged at the bottom of the workbench, the footboard synchronously controls the air compressor with the two operating switches, and a starting switch is arranged on one of the control consoles.

[0014] Preferably, a handle is fixed on one side of the pressure plate.

[0015] Preferably, the top of the mold changing port is provided with a slot communicating with the slide groove, and both ends of the baffle are detachably connected to the mold changing port through the slot.

[0016] Preferably, a pressing block is fixed on the side of the baffle near the double-sided cutter. The pressing block is made of elastic material and has an inclined surface at its bottom.

[0017] Preferably, both sides of the double-sided cutter are detachably connected to a plurality of spring positioning pins for determining the film cutting position.

[0018] The beneficial effects of this utility model are:

[0019] (1) Cutting the shape using a die results in a film with higher precision, better effect, and higher cutting efficiency.

[0020] (2) Separating the die-cutting mold into a double-sided die and a mounting plate saves costs, improves cutting accuracy, and facilitates changing the film cutting shape. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model;

[0023] Figure 2 This is a schematic diagram of the bottom structure of the die-cutting mold according to an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the top surface structure of the die-cutting mold according to an embodiment of the present invention;

[0025] Figure 4 For the embodiments of this utility model in Figure 3 Schematic diagram of the cross-sectional structure at point AA;

[0026] Figure 5 For the embodiments of this utility model in Figure 4 A magnified structural diagram at point B.

[0027] The diagram is marked as follows:

[0028] 1, cutting machine body; 11, workbench; 12, air compressor; 13, pressing plate; 14, control console; 15, operating switch; 16, pedal; 17, start switch; 18, handle;

[0029] 2, cutter die; 21, mounting plate; 22, placing groove; 23, sliding groove; 24, die changing port; 25, double-sided cutter; 26, sliding rail; 27, baffle; 28, insertion slot; 29, extrusion block; 210, spring positioning pin. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the utility model more clearly and clearly, the following will be further detailed in combination with specific embodiments.

[0031] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the utility model should be understood as the usual meaning understood by those skilled in the art to which the utility model belongs. The "first", "second" and similar words used in the utility model do not represent any order, quantity or importance, but are only used to distinguish different components. "Include" or "contain" and similar words mean that the elements or objects before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connection" or "connection" and similar words are not limited to physical or mechanical connection, but can include electrical connection, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to represent the relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0032] As shown in Figures 1 to 5 An electrostatic chuck film cutting device, comprising a cutting machine body 1, a detachable cutter die 2 is installed on the cutting machine body 1, the cutter die 2 comprises:

[0033] A mounting plate 21 is provided with a placing groove 22 at the bottom, and a sliding groove 23 is provided on the side of the placing groove 22;

[0034] A die changing port 24 is provided on one side of the mounting plate 21, and the die changing port 24 is in communication with the placing groove 22;

[0035] A double-sided cutter 25 is provided in the placing groove 22, and a sliding rail 26 is provided on the side of the double-sided cutter 25, and each sliding rail 26 is slidingly provided in the sliding groove 23;

[0036] A baffle 27 is detachably connected to the die changing port 24, and one side of the baffle 27 abuts against one side of the double-sided cutter 25 to stabilize the double-sided cutter 25 in the placing groove 22.

[0037] For example, by designing the double-sided cutter 25, the efficiency of the film cutting shape switching is improved, the corresponding cutter is conveniently and quickly extracted and fed from the die changing port 24, the double-sided cutter 25 is tightly pressed against the baffle 27 to make the double-sided cutter 25 stable in the placing groove 22, and the shaking of the double-sided cutter 25 in the use process is avoided to affect the film cutting.

[0038] As an optional embodiment, the cutting machine body 1 comprises:

[0039] A workbench 11, an air compressor 12 is fixedly arranged above the workbench 11;

[0040] A pressing plate 13 is arranged at the bottom of the air compressor 12, the top of the pressing plate 13 is detachably connected with the lifting end of the air compressor 12, and the bottom of the pressing plate 13 is adhesively arranged with the cutter die 2.

[0041] As an optional embodiment, the control consoles 14 are fixedly arranged on the sides of the workbench 11, the operation switches 15 are arranged on each control console 14, the footboard 16 is arranged at the bottom of the workbench 11, the air compressor 12 is synchronously controlled by the two operation switches 15, and the start switch 17 is arranged on one of the control consoles 14.

[0042] As an optional embodiment, the pressing plate 13 is fixedly provided with a handle 18.

[0043] For example, by connecting the power supply and the air compressor 12, the normal operation of the cutting machine body 1 is ensured, the back of the cutter die 2 is adhered with glue and is attached to the pressing plate 13, the film to be cut is placed on the workbench 11, the start switch 17 is pressed, the two operation switches 15 are clicked at the same time, the footboard 16 is stepped, the film is taken out after one process is completed. After the die cutting is completed, the pressing plate 13 is pulled out by the handle 18, the cutter die 2 is removed, a new cutter die 2 is replaced, and the pressing plate 13 is pushed back. The film shape can be quickly obtained by the die cutting machine.

[0044] As an optional embodiment, the top of the die changing port 24 is provided with an insertion slot 28 in communication with the sliding slot 23, and the two ends of the baffle 27 are detachably connected with the die changing port 24 through the insertion slot 28.

[0045] As an optional embodiment, the side of the baffle 27 close to the double-sided cutter 25 is fixedly provided with an extrusion block 29, the extrusion block 29 is made of elastic material, and the bottom of the extrusion block 29 is provided with an inclined surface.

[0046] For example, by arranging the elastic extrusion block 29 on the baffle 27, and designing the bottom of the extrusion block 29 into an inclined surface, the extrusion block 29 is conveniently and tightly pressed against the double-sided cutter 25.

[0047] As an optional embodiment, the two surfaces of the double-sided cutter 25 are detachably connected with a plurality of spring positioning pins 210 for determining the film cutting position.

[0048] It should be understood by those of ordinary skill in the art that the above discussion of any embodiment is only exemplary and is not intended to imply that the scope of the utility model is limited to these examples; under the idea of the utility model, the above embodiments or technical features in different embodiments can also be combined, the steps can be implemented in any order, and there are many other changes of different aspects of the utility model as described above, which are not provided in details for the sake of simplicity. Any omission, modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. An electrostatic chuck film cutting device, comprising a cutting machine body (1), a detachably connected cutter die (2) is arranged on the cutting machine body (1), characterized in that, The cutter die (2) comprises: The installation plate (21) is provided with a placing groove (22) at the bottom, and the placing groove (22) is provided with a sliding groove (23) on the side; The die changing port (24) is arranged on one side of the installation plate (21), and the die changing port (24) is arranged in communication with the placing groove (22); The double-sided cutter (25) is arranged in the placing groove (22), and the double-sided cutter (25) is fixedly provided with a sliding rail (26) on the side, and each sliding rail (26) is slidably arranged in the sliding groove (23); The baffle (27) is detachably connected to the die changing port (24), and one side of the baffle (27) abuts against one side of the double-sided cutter (25) to stabilize the double-sided cutter (25) in the placing groove (22).

2. The electrostatic chuck film cutting apparatus according to claim 1, wherein The cutting machine body (1) comprises: The workbench (11) is provided with an air compressor (12) above; The pressing plate (13) is arranged at the bottom of the air compressor (12), the top of the pressing plate (13) is detachably connected with the lifting end of the air compressor (12), and the bottom of the pressing plate (13) is adhesively arranged with the cutter die (2).

3. The electrostatic chuck film cutting apparatus of claim 2, wherein The control console (14) is fixedly arranged on the side of the workbench (11), the operation switch (15) is arranged on each control console (14), the pedal (16) is arranged at the bottom of the workbench (11), the pedal (16) synchronously controls the air compressor (12) with the two operation switches (15), and the start switch (17) is arranged on one of the control consoles (14).

4. The electrostatic chuck film cutting apparatus of claim 2, wherein The handle (18) is fixedly arranged on one side of the pressing plate (13).

5. The electrostatic chucking film cutting device according to claim 1, wherein The top of the die changing port (24) is provided with an insertion groove (28) in communication with the sliding groove (23), and the baffle (27) is detachably connected with the die changing port (24) through the insertion groove (28).

6. The electrostatic chucking film cutting device according to claim 1, wherein The extrusion block (29) is fixedly arranged on the side of the baffle (27) close to the double-sided cutter (25), the extrusion block (29) is made of elastic material, and the bottom of the extrusion block (29) is provided with an inclined surface.

7. The electrostatic chucking film cutting device according to claim 1, wherein A plurality of spring positioning pins (210) for determining the film cutting position are detachably connected to the two sides of the double-sided cutter (25).

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