Vacuum processing mechanism

Abstract

The utility model belongs to the technical field of vacuum treatment, and discloses a vacuum treatment mechanism. The vacuum processing mechanism is arranged in the vacuum processing chamber, the vacuum processing mechanism comprises a support and a workpiece loading assembly, the workpiece loading assembly is arranged on the support and comprises a workpiece loading main body, the workpiece loading main body comprises a workpiece loading disc, and the workpiece loading disc is used for bearing workpieces; the multiple workpiece loading discs are arranged in the direction of the rotation axis of the support and in the radial direction of a circle with the projection point of the rotation axis on the support as the circle center, and the positions of the workpiece loading discs can be changed relative to the support. The multiple workpiece loading discs are arranged, the number of the workpiece loading discs loaded on the support is increased, and therefore the number of workpieces loaded at a time is increased; the position of the workpiece loading disc can be changed relative to the support, and part of vacuum treatment ineffective areas can be overlapped, so that the vacuum treatment effective areas in the vacuum treatment cavity are increased, more workpieces can be treated in a vacuum mode at a time, and the productivity of the vacuum treatment mechanism is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum processing technical field especially relates to a vacuum processing mechanism. BACKGROUND

[0002] The vacuum processing process such as evaporation coating can carry out surface treatment to the substrate, so that the substrate has specific function. For example, evaporation coating is a commonly used surface coating technology, and various functional thin films such as optical thin films can be formed by evaporating coating materials in a vacuum environment and condensing them on the substrate. In order to realize the vacuum processing effect such as coating uniformity, a planetary mechanism is usually used to load substrates of various shapes and perform evaporation coating and other vacuum processing on the surface of the substrate.

[0003] In the prior art, the planet plates of the planetary mechanism are usually arranged on the same horizontal plane, the workpieces to be vacuum processed are fixed in the planet plates, and the planet plates are usually arranged at an angle with the horizontal direction and have a certain thickness. This configuration will generate a large vacuum processing invalid area in the vacuum processing chamber, the aforementioned vacuum processing invalid area refers to the non-substrate surface area in the action area of the vacuum processing source, which further leads to a small number of substrates that can be vacuum processed at a time under the condition of a certain diameter of the vacuum processing chamber, and cannot meet the demand of the application terminal for production capacity. SUMMARY

[0004] The utility model aims at providing a vacuum processing mechanism to solve the problem that the planet plates of the planetary mechanism in the prior art are arranged on the same horizontal plane, which generates a large vacuum processing invalid area in the vacuum processing chamber, thereby reducing the number of workpieces that can be vacuum processed at a time, and improves the production capacity of the vacuum processing mechanism.

[0005] To achieve this purpose, the utility model adopts the following technical scheme:

[0006] A vacuum processing mechanism is provided, which is arranged in a vacuum processing chamber and comprises:

[0007] A support;

[0008] A workpiece loading assembly is arranged on the support and comprises a workpiece loading body, which comprises a workpiece loading disc for bearing workpieces.

[0009] A plurality of workpiece loading discs are arranged along the direction of the rotation axis of the support and along the radial direction of the circle with the projection point of the rotation axis on the support as the center, and the workpiece loading discs can change position relative to the support.

[0010] As an optional technical scheme of the vacuum processing mechanism, a circle is made with any point on the rotation axis of the support as the center, the workpiece loading disc on the same circumference is located on the same horizontal plane, and the distance between the workpiece loading disc closer to the rotation axis of the support and the support is smaller.

[0011] As an optional technical scheme of the vacuum processing mechanism, the workpiece loading body further comprises a planet small arm and a planet large arm connected with each other, the workpiece is arranged at one end of the planet small arm away from the planet large arm, and the planet large arm is rotatably arranged on the support.

[0012] As an optional technical scheme of the vacuum processing mechanism, the workpiece loading assembly further comprises a rotation transmission assembly, the rotation transmission assembly comprises a fixed gear and a rotating gear, the fixed gear is arranged in the vacuum processing chamber, and the rotating gear is arranged at the end of the planet large arm away from the workpiece loading disc and is in mesh with the fixed gear.

[0013] As an optional technical scheme of the vacuum processing mechanism, the number of the fixed gears corresponds to the number of the workpiece loading discs arranged in the radial direction of the circle with the projection point of the support on the rotation axis as the center.

[0014] As an optional technical scheme of the vacuum processing mechanism, the workpiece loading assembly further comprises a shaft sleeve assembly, the shaft sleeve assembly comprises a first shaft sleeve and a second shaft sleeve, the first shaft sleeve is sleeved on the outside of the planet large arm and is rotatably connected with the planet large arm, the second shaft sleeve is sleeved on the outside of the planet small arm and is rotatably connected with the planet small arm, the first shaft sleeve and the second shaft sleeve are rotatably connected, and the workpiece loading disc is arranged at one end of the second shaft sleeve away from the first shaft sleeve.

[0015] As an optional technical scheme of the vacuum processing mechanism, the workpiece loading assembly further comprises a rotation assembly, the rotation assembly comprises a rotation shaft, the shaft sleeve assembly further comprises a first connecting part and a second connecting part, the first connecting part and the second connecting part are arranged at the ends of the first shaft sleeve and the second shaft sleeve close to each other, and the rotation shaft passes through the first connecting part and the second connecting part.

[0016] As an optional technical scheme of the vacuum processing mechanism, the rotation assembly further comprises a worm wheel and a worm gear, the worm wheel is arranged on the first connecting part or the second connecting part and is connected with the rotation shaft, the worm gear is arranged on the circumferential side of the worm wheel and is in mesh with the worm wheel, and the linear movement of the worm gear drives the rotation of the worm wheel, so as to drive the rotation of the rotation shaft.

[0017] As an optional technical scheme of the vacuum processing mechanism, the rotation transmission assembly further comprises a universal joint, and the planet small arm and the planet large arm are connected through the universal joint.

[0018] As an optional technical solution of the vacuum processing mechanism, the vacuum processing mechanism further comprises a rotating assembly and a rotating shaft, and the rotating assembly is connected with the rotating shaft to drive the support to rotate.

[0019] The utility model discloses beneficial effect:

[0020] The application discloses a vacuum processing mechanism, which is arranged in a vacuum processing chamber and comprises a support and a workpiece loading assembly. The workpiece loading assembly is arranged on the support and comprises a workpiece loading main body. The workpiece loading main body comprises a workpiece loading disc, and the workpiece loading disc is used for bearing workpieces. A plurality of workpiece loading discs are arranged along the direction of the rotating axis of the support and in the radial direction of a circle with the projection point of the rotating axis on the support as the center. The workpiece loading disc can change position relative to the support. A plurality of workpiece loading discs are arranged along the direction of the rotating axis of the support and in the radial direction of a circle with the projection point of the rotating axis on the support as the center, thereby increasing the number of workpiece loading discs loaded on the support and the number of workpieces loaded at a time. The workpiece loading disc can change position relative to the support, so that part of the invalid area of vacuum processing overlaps, thereby increasing the effective area of vacuum processing in the vacuum processing chamber, more workpieces can be vacuum processed at a time, and the productivity of the vacuum processing mechanism is improved. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the description of the embodiments of the utility model. Obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to the contents of the embodiments of the utility model and these drawings without creative labor.

[0022] Figure 1 It is the first schematic view of the overall structure of the vacuum processing mechanism provided by the embodiments of the utility model.

[0023] Figure 2 It is the axonometric view of the vacuum processing mechanism provided by the embodiments of the utility model.

[0024] Figure 3 It is the second schematic view of the overall structure of the vacuum processing mechanism provided by the embodiments of the utility model.

[0025] Figure 4 It is the third schematic view of the overall structure of the vacuum processing mechanism provided by the embodiments of the utility model.

[0026] Figure 5 It is the first schematic view of the partial structure of the vacuum processing mechanism provided by the embodiments of the utility model.

[0027] Figure 6is a second schematic view of part structure of the vacuum processing mechanism provided by the embodiment of the utility model;

[0028] Figure 7 is a third schematic view of part structure of the vacuum processing mechanism provided by the embodiment of the utility model.

[0029] In the drawing:

[0030] 1, workpiece;

[0031] 100, support;

[0032] 110, rotating shaft;

[0033] 200, workpiece loading assembly;

[0034] 210, workpiece loading main body;211, workpiece loading disc;212, planet arm;213, planet arm;

[0035] 220, rotating transmission assembly;221, fixed gear;222, rotating gear;223, universal joint;224, bolt;

[0036] 230, rotating assembly;231, rotating shaft;232, worm wheel;233, worm;

[0037] 240, shaft sleeve assembly;241, first shaft sleeve;242, second shaft sleeve;243, first connecting portion;244, second connecting portion. DETAILED DESCRIPTION

[0038] The utility model will be further explained in detail below in combination with the drawings and embodiments.It can be understood that the specific embodiments described here are only used to explain the utility model, and not limit the utility model.In addition, it needs to be explained that in order to facilitate the description, only the part related to the utility model is shown in the drawing, not all structures.

[0039] In the description of the utility model, unless another explicit provision and limitation, the term "connect", "connection", "fixed" should be broad sense understanding, for example, can be fixed connection, or detachable connection, or integral;Can be mechanical connection, or electrical connection;Can be directly connected, or indirectly connected through intermediate medium, can be two elements inside the communication or two elements of the interaction relationship.For the ordinary skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according of the specific circumstances.

[0040] In the utility model, unless another definite provision and limitation, first feature is in second feature "on" or "under" can include that first and second features are in direct contact, also can include that first and second features are not in direct contact but contact through other feature between them. Moreover, first feature is in second feature "on", "above" and "upper surface" include that first feature is in second feature directly above and obliquely above, or only indicate that first feature horizontal height is higher than second feature. First feature is in second feature "under", "below" and "under" include that first feature is in second feature directly below and obliquely below, or only indicate that first feature horizontal height is less than second feature.

[0041] In the description of the present embodiment, the terms "upper", "lower", "right", "left", "horizontal", "vertical", and the like are described based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0042] In the prior art, the planet discs of the planetary mechanism are usually arranged on the same horizontal plane, the workpieces to be vacuum processed are fixed in the planet discs, and the planet discs are usually arranged at an angle with the horizontal direction and have a certain thickness, which will generate a large vacuum processing invalid area in the vacuum processing chamber, the aforementioned vacuum processing invalid area refers to the non-substrate surface area in the action area of the vacuum processing source, thereby causing the number of substrates for single vacuum processing to be small under the condition that the diameter of the vacuum processing chamber is certain, and the demand of the application terminal for production capacity cannot be met.

[0043] To solve the above problems, the present embodiment provides a vacuum processing mechanism, which is arranged in a vacuum processing chamber Figures 1-4, including a support 100 and a workpiece loading assembly 200 arranged on the support 100, the workpiece loading assembly 200 including a workpiece loading body 210, the workpiece loading body 210 including a plurality of workpiece loading discs 211, the workpiece loading discs 211 being configured to carry workpieces 1, the workpiece loading discs 211 being arranged in a direction along an axis of rotation of the support 100 (an axial direction of the support 100) and in a radial direction of a circle with a center at a projection point of the axis of rotation of the support 100 on the support 100, and the workpiece loading discs 211 being capable of changing positions relative to the support 100. It should be noted that the workpiece loading discs 211 being capable of changing positions relative to the support 100 means that the workpiece loading discs 211 are capable of translating or swinging relative to the support 100. It should be noted that the workpiece loading discs 211 being arranged in the direction along the axis of rotation of the support 100 in as many numbers as possible means that the workpiece loading discs 211 are arranged in a staggered manner in the direction along the axis of rotation of the support 100 and are not limited to being arranged on the axis of rotation of the support 100, and the workpiece loading discs 211 being arranged in the radial direction of the circle with the center at the projection point of the axis of rotation of the support 100 on the support 100 can be arranged in random numbers, for example, one or two workpiece loading discs 211 can be arranged in a radial direction of one of the circles with the center at the projection point of the axis of rotation of the support 100 on the support 100. It can be understood that the workpiece loading discs 211 being arranged in the radial direction of the circle with the center at the projection point of the axis of rotation of the support 100 on the support 100 means that the workpiece loading discs 211 are arranged in the radial direction of all the circles.

[0044] The vacuum processing mechanism disclosed in the embodiment is provided with a plurality of workpiece loading discs 211 in the direction along the axis of rotation of the support 100 and in the radial direction of the circle with the center at the projection point of the axis of rotation of the support 100 on the support 100, the number of the workpiece loading discs 211 loaded on the support 100 is increased, and thus the number of the workpieces 1 loaded at a time is increased; the workpiece loading discs 211 are capable of changing positions relative to the support 100, and thus the overlapping of the invalid areas of the vacuum processing is achieved, the effective area of the vacuum processing in the vacuum processing chamber is increased, more workpieces 1 can be vacuum processed at a time, and the productivity of the vacuum processing mechanism is improved.

[0045] Further, taking any point on the rotation axis of the support 100 as the center of a circle, the workpiece loading plates 211 on the same circumference are located on the same horizontal plane, and the distance between the workpiece loading plates 211 closer to the rotation axis of the support 100 is closer to the support 100. When the workpiece loading plates 211 on the support 100 are arranged in as many numbers as possible along the direction of the rotation axis of the support 100 and along the radial direction of the circle with the projection point of the rotation axis on the support 100 as the center, the workpiece loading plates 211 can simulate the shape of a conventional coating umbrella through position movement (translation + swing) to facilitate the distribution of the film material of the coating source and other vacuum processing work substances, so as to not only obtain the expected coating and other vacuum processing effects, but also facilitate the adjustment of the vacuum processing process and reduce the manufacturing cost. In addition, when some convex workpieces are subjected to vacuum coating and other vacuum processing, in order to reduce the shielding of the convex workpieces themselves or between the convex workpieces, the plurality of workpiece loading plates 211 can also simulate the shape of an inverted coating umbrella to obtain the best vacuum processing effect.

[0046] Further, the vacuum processing mechanism comprises a rotating assembly and a rotating shaft 110, and the rotating assembly is connected with the rotating shaft 110 to drive the support 100 to rotate. In the embodiment, the support 100 is provided in a circular plate or a circular ring shape, the geometric center of the support 100 is provided with the rotating shaft 110, the top wall in the vacuum processing chamber is provided with a flange, the rotating shaft 110 is connected to the vacuum processing chamber through the flange, and the rotating assembly can be provided as a rotating motor, and the output end of the rotating motor acts on the rotating shaft 110. In order to increase the fluency of the rotation of the support 100, a bearing or a ball bearing is further arranged between the flange and the rotating shaft 110. In order to avoid gas leakage during the rotation of the rotating shaft 110, a magnetic fluid is arranged between the rotating shaft 110 and the flange to increase the sealing property between the flange and the rotating shaft 110. In the embodiment, the magnetic fluid is arranged between the bearing and the top wall of the vacuum processing chamber.

[0047] Further, the workpiece loading body 210 further comprises a planet small arm 212 and a planet large arm 213 connected with each other, the workpiece 1 is arranged at one end of the planet small arm 212 away from the planet large arm 213, and the planet large arm 213 is rotatably arranged on the support 100. In some embodiments, the distance between the workpiece loading plate 211 and the support 100 is determined by the length of the planet large arm 213, and by changing the length of the planet large arm 213, the plurality of workpiece loading plates 211 can be located at different horizontal planes, thereby increasing the effective area of the vacuum processing and effectively avoiding the interference between the workpiece loading plates 211. It can be understood that by changing the length of the planet large arm 213, the working distance between the plurality of workpiece loading plates 211 and the vacuum processing source can also be adjusted to obtain the best vacuum processing effect.

[0048] Further, referring to Figures 1-3The workpiece loading assembly 200 further comprises a rotating transmission assembly 220, which comprises a fixed gear 221 and a rotating gear 222. The fixed gear 221 is arranged in the vacuum processing chamber, and the rotating gear 222 is arranged at the end of the planet arm 213 away from the workpiece loading disc 211 and is engaged with the fixed gear 221. Specifically, the number of the fixed gear 221 corresponds to the number of the workpiece loading disc 211 arranged in the radial direction of the circle with the projection point of the support 100 on the rotating axis as the center. The fixed gear 221 is arranged in a ring shape and only the outer side is provided with a gear block, and the rotating gear 222 is engaged with the outer side of the corresponding fixed gear 221. A plurality of fasteners are arranged on the fixed gear 221 in intervals, and the fixed gear 221 is hoisted to the top wall of the vacuum processing chamber through the fasteners. In order to avoid the position of the rotating gear 222, part or all of the fixed gear 221 is arranged in staggered layers, that is, the lengths of the fasteners on different fixed gears 221 can be different, and the fasteners comprise bolts 224. By means of the rotating assembly and the rotating transmission assembly 220, the vacuum processing piece 1 can rotate while rotating with the support 100, thereby improving the uniformity of the vacuum processing of the workpiece 1 and the quality of the vacuum processing. It can be understood that when the vacuum processing mechanism is used as a vacuum coating device, the uniformity of the vacuum processing refers to the uniformity of the vacuum coating.

[0049] Further, referring to Figures 5-7 The workpiece loading assembly 200 further comprises a shaft sleeve assembly 240, which comprises a first shaft sleeve 241 and a second shaft sleeve 242. The first shaft sleeve 241 is sleeved outside the planet arm 213 and is rotationally connected with the planet arm 213, and the second shaft sleeve 242 is sleeved outside the planet arm 212 and is rotationally connected with the planet arm 212. The first shaft sleeve 241 and the second shaft sleeve 242 are rotationally connected, and the workpiece loading disc 211 is arranged at the end of the second shaft sleeve 242 away from the first shaft sleeve 241. In this embodiment, the first shaft sleeve 241 and the second shaft sleeve 242 are both arranged in a cylindrical shape, and the planet arm 213 and the planet arm 212 are arranged in a cylindrical shape. Bearings are arranged between the first shaft sleeve 241 and the planet arm 213, and bearings are arranged between the second shaft sleeve 242 and the planet arm 212. The planet arm 213 and the planet arm 212 are rotationally arranged in the first shaft sleeve 241 and the second shaft sleeve 242 through the bearings, respectively.

[0050] Specifically, the first shaft sleeve 241 is fixed to the support 100 through fasteners, and the planet arm 213 can rotate relative to the first shaft sleeve 241 and the support 100. The workpiece loading disc 211 is connected with the second shaft sleeve 242 through fasteners.

[0051] Further, the workpiece loading assembly 200 further comprises a rotating assembly 230, the rotating assembly 230 comprises a rotating shaft 231, the shaft sleeve assembly 240 further comprises a first connecting portion 243 and a second connecting portion 244, the first connecting portion 243 and the second connecting portion 244 are respectively arranged at the end portions of the first shaft sleeve 241 and the second shaft sleeve 242 close to each other, and the rotating shaft 231 penetrates through the first connecting portion 243 and the second connecting portion 244. Specifically, the rotating assembly 230 further comprises a worm wheel 232 and a worm 233, the worm wheel 232 is arranged at the first connecting portion 243 or the second connecting portion 244 and is fixedly connected with the rotating shaft 231, the worm 233 is arranged at the circumferential side of the worm wheel 232 and is engaged with the worm wheel 232, and the linear movement of the worm 233 drives the rotating of the worm wheel 232, so as to drive the rotating of the rotating shaft 231. Specifically, the first connecting portion 243 and the first shaft sleeve 241 and the second connecting portion 244 and the second shaft sleeve 242 can be integrally formed, welded or connected through fasteners. In the embodiment, the first connecting portion 243 and the second connecting portion 244 are both arranged as "concave" shape, the planetary large arm 213 and the planetary small arm 212 penetrate through the inside of the "concave", the rotating shaft 231 is provided with two, which are respectively connected with the two petal portions of the first connecting portion 243 and the second connecting portion 244, so as to avoid affecting the rotating of the planetary large arm 213 and the planetary small arm 212, the first connecting portion 243 is arranged at the outer side of the second connecting portion 244, and the worm wheel 232 is arranged at the side wall of the first connecting portion 243. In other embodiments, the first connecting portion 243 can be arranged at the inner side of the second connecting portion 244 or the first connecting portion 243 and the second connecting portion 244 are cross arranged. In actual application, the linear motor can be arranged to drive the worm 233, or the worm 233 can be manually driven to move. It can be understood that, by arranging the rotating assembly 230, the included angle between the planetary large arm 213 and the planetary small arm 212 can be adjusted, so as to adjust the orientation of the workpiece loading disc 211, which not only can make the partial vacuum treatment invalid area overlap, so as to increase the vacuum treatment effective area in the vacuum treatment chamber, but also is beneficial to the process adjustment of the vacuum treatment. Moreover, when the vacuum treatment such as vacuum coating is performed on various workpieces such as concave surface or convex surface, the orientation of the workpiece loading disc 211 can be flexibly adjusted by the rotating assembly 230 without disassembling the components, so as to facilitate the on-site process adjustment of the vacuum treatment, shorten the process development and performance test time, and improve the production efficiency.

[0052] Further, referring to Figure 7Since the first shaft sleeve 241 and the second shaft sleeve 242 can change the included angle between the planet big arm 213 and the planet small arm 212, in order to avoid the transmission between the planet small arm 212 and the planet big arm 213 not being smooth, the rotary transmission assembly 220 further comprises a universal joint 223, and the planet small arm 212 and the planet big arm 213 are connected through the universal joint 223. It can be understood that by arranging the universal joint 223, the rotation transmission between the planet small arm 212 and the planet big arm 213 can be realized, and the included angle between the planet small arm 212 and the planet big arm 213 can be flexibly adjusted. In some embodiments, the transmission between the planet small arm 212 and the planet big arm 213 can also be realized through a bevel gear set.

[0053] Obviously, the above embodiments of the utility model are only examples for clearly illustrating the utility model, and are not the limitation of the embodiments of the utility model. For ordinary skilled in the art, various obvious changes, re-adjustment and replacement can be made without departing from the protection scope of the utility model. Here, all the embodiments need not and cannot be exhausted. Any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model claim.

Claims

1. A vacuum processing mechanism disposed within a vacuum processing chamber, the vacuum processing mechanism comprising: The utility model relates to a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing. The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing. The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing. The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing.

2. The vacuum processing apparatus according to claim 1, wherein The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing.

3. The vacuum handling mechanism of claim 1, wherein, The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing.

4. The vacuum processing apparatus according to claim 3, wherein The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing.

5. The vacuum processing apparatus according to claim 4, wherein The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing.

6. The vacuum processing apparatus of claim 4, wherein, The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing. The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing. The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing. The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing. The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing. The utility model discloses a workpiece loading assembly and a vacuum processing chamber, and relates to the technical field of vacuum processing. 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The vacuum processing apparatus according to claim 6, wherein The workpiece loading assembly (200) further comprises a rotating assembly (230), the rotating assembly (230) comprising a rotating shaft (231), the shaft sleeve assembly (240) further comprising a first connecting portion (243) and a second connecting portion (244), the first connecting portion (243) and the second connecting portion (244) being respectively arranged at the end portions of the first shaft sleeve (241) and the second shaft sleeve (242) close to each other, and the rotating shaft (231) penetrating through the first connecting portion (243) and the second connecting portion (244).

8. The vacuum processing apparatus according to claim 7, wherein The rotating assembly (230) further comprises a worm wheel (232) and a worm (233), the worm wheel (232) being arranged at the first connecting portion (243) or the second connecting portion (244) and connected with the rotating shaft (231), and the worm (233) being arranged at the circumferential side of the worm wheel (232) and engaged with the worm wheel (232), the linear movement of the worm (233) driving the rotation of the worm wheel (232) and the rotating shaft (231).

9. The vacuum handling mechanism of claim 6, wherein, The rotary transmission assembly (220) further comprises a universal joint (223), the planetary small arm (212) and the planetary large arm (213) being connected through the universal joint (223).

10. The vacuum processing apparatus according to any of claims 1 to 9, wherein The vacuum processing mechanism further comprises a rotating assembly and a rotating shaft (110), the rotating assembly being connected with the rotating shaft (110) to drive the rotation of the support (100).

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