Gas suspension device in vapor deposition furnace

Abstract

The utility model relates to the technical field of vapor deposition furnaces, in particular to a gas suspension device in a vapor deposition furnace. The device comprises a gas-phase furnace, a fixed block arranged on the outer side of the gas-phase furnace, a sealing door rotationally arranged on the inner side of the fixed block, a connecting frame arranged on the inner side of the gas-phase furnace, a sliding ring arranged on the inner side of the connecting frame in a sliding mode, a suspension mechanism and a protection mechanism, wherein the base is located in the gas-phase furnace; the graphite plate is positioned above the base; the flow dividing chamber is arranged on the inner side of the base; the suspension mechanism is arranged on the inner side of the gas phase furnace; the protection mechanism is arranged on the suspension mechanism. Through the arrangement of the suspension mechanism, the air injection device is started to uniformly inject air flow through the vertical air holes and the inclined air holes, the vertical air holes control the suspension of the graphite plate, and the inclined air holes control the rotation of the graphite plate, so that the graphite plate can more stably rotate in a suspension manner, and the graphite plate can stably suspend in the vapor deposition furnace.

Description

TECHNICAL FIELD

[0001] The utility model relates to a gas phase deposition furnace technical field especially relates to a gas phase deposition furnace internal gas suspension device. BACKGROUND

[0002] The basic principle of gas phase deposition involves reaction chemistry, thermodynamics, kinetics, transfer mechanism, film growth phenomenon and reaction engineering. Mainly taking metal vapor, volatile metal halide, hydride or metal organic compound vapor as raw material, carrying out gas phase thermal decomposition reaction, and the reaction of two or more than two elements or compounds, and then condensing to generate various forms of materials.

[0003] The Chinese patent with the publication number CN219117550U discloses a gas phase deposition furnace internal gas suspension device, which comprises a base and a graphite disc, the base is provided with a main air inlet hole, a first air distribution hole, a second air distribution hole, a first inclined air outlet hole and a second inclined air outlet hole, a stepped mounting hole is formed in the middle of the upper surface of the base, the main air inlet hole is in communication with one side of the lower part of the stepped mounting hole, the first air distribution hole and the second air distribution hole are respectively arranged on the two sides of the middle part of the stepped mounting hole, a blocking block is arranged in the stepped mounting hole for blocking the gas from directly entering the middle cavity from the lower cavity of the stepped mounting hole, a push rod for pushing the graphite disc to suspend is connected to the upper end of the blocking block, and a limiting guide sleeve fixedly connected with the base is sleeved on the outer side of the upper end of the push rod. The utility model can avoid the graphite disc from being unable to suspend due to the deviation of the exhaust capacity of the first and second inclined air outlet holes, and improve the practicability of the device.

[0004] However, the above-mentioned disclosed scheme has the following disadvantages: the existing gas phase deposition furnace internal gas suspension device sprays the gas into two inclined air holes through the main flow groove and then sprays it out, but the distance from the two inclined air holes to the main flow groove is different, so the strength of the sprayed gas is also different, which may cause the graphite disc to tilt and affect the work. UTILITY MODEL CONTENTS

[0005] The utility model aims at the problem that the gas cannot be uniformly sprayed from the air hole in the background art, and provides a gas phase deposition furnace internal gas suspension device.

[0006] The technical scheme of the utility model: a gas phase deposition furnace internal gas suspension device, which comprises a gas phase furnace, a fixed block arranged on the outer side of the gas phase furnace, a sealing door rotatably arranged on the inner side of the fixed block, a connecting frame arranged on the inner side of the gas phase furnace, and a sliding ring slidingly arranged on the inner side of the connecting frame; further comprising:

[0007] A base is located in the interior of the gas phase furnace.

[0008] A graphite disc is located above the base, and the center of the graphite disc is hollow for connecting and limiting the base.

[0009] The shunt chamber is arranged on the inner side of the base and is in a cylindrical shape. Four flow guide grooves are arranged on the outer side of the shunt chamber. The shunt chamber makes the received airflow flow uniformly into the four flow guide grooves.

[0010] The suspension mechanism is arranged on the inner side of the gas phase furnace and is used for uniformly separating and spraying the airflow to drive the graphite disc to suspend and rotate.

[0011] The protection mechanism is arranged on the suspension mechanism and is used for plugging and protecting when the gas phase furnace is not used.

[0012] Preferably, the suspension mechanism comprises a jet component and a suspension component.

[0013] The jet component is arranged on the inner side of the gas phase furnace and is located at the bottom, and is used for providing a strong airflow for the suspension component.

[0014] The suspension component is arranged on the top of the jet component and is used for generating a vertical airflow and an inclined airflow to drive the graphite disc to suspend and rotate.

[0015] Preferably, the jet component comprises a jet device, a jet pipe and a connecting pipe.

[0016] The jet device is arranged on the inner side of the gas phase furnace and is located at the bottom of the gas phase furnace. The jet pipe is arranged at the output end of the jet device. The connecting pipe is arranged at the top of the jet pipe.

[0017] Preferably, the suspension component comprises a vertical air hole, a separation ring, an inclined air hole and a flow guide block.

[0018] The vertical air hole is arranged at the top of the flow guide groove. The inclined air hole is located at the side of the vertical air hole and at the end of the flow guide groove. The separation ring is arranged at the top of the base and is located between the inclined air hole and the vertical air hole, so as to separate the two air holes to avoid mutual interference after the airflow is sprayed. The end of the separation ring close to the base is provided with a notch. The top of the base is provided with a connecting shaft located at the center of the base. The connecting shaft can limit the graphite disc. The flow guide block is arranged at the bottom of the graphite disc. The end of the flow guide block away from the graphite disc is provided with a baffle.

[0019] Preferably, the protection mechanism comprises a protection plate, a limiting strip, a limiting frame and a positioning component.

[0020] The limiting frame is arranged at the top of the base. The protection plate is slidingly arranged on the inner side of the limiting frame. The limiting strip is arranged at the top of the base.

[0021] The positioning component is arranged at the top of the base and is used for fixing the position of the protection plate to switch the protection state and the working state.

[0022] Preferably, the positioning component comprises a fixing rod, a connecting plate, a plug rod and a spring.

[0023] The fixing rod is located at the top of the base, the connecting plate is located at the top of the fixing rod, the insertion rod is slidably located at the end of the connecting plate away from the fixing rod, the spring is located on the outside of the insertion rod, the pull rod is located at the top of the insertion rod, and the protective plate is provided with positioning holes.

[0024] Compared with the prior art, the present invention has the following beneficial technical effects:

[0025] 1. By setting up a suspension mechanism, the jet device is activated to spray air evenly through vertical and inclined air holes. The vertical air holes control the suspension of the graphite disk, while the inclined air holes control the rotation of the graphite disk. This allows the graphite disk to be suspended and rotated more stably, enabling it to remain stably suspended within the vapor deposition furnace. The guide blocks and baffles can receive more inclined airflow, allowing the graphite disk to achieve the same rotation effect with a smaller airflow intensity, and making the rotation of the graphite disk smoother. The inclined air holes are located near the edge of the graphite disk, which increases the torque, thereby further reducing airflow consumption.

[0026] 2. By setting up the protective mechanism, the protective plate can be moved to different positions and positioned by the insertion rod. This allows for quick switching between working and protective states, avoiding any impact on work efficiency. In protective state, the protective plate can completely block the inclined and vertical vents, effectively preventing gas leakage inside the furnace when the device is not working, avoiding disruption of the gas atmosphere and affecting deposition quality, and maintaining a clean environment inside the furnace to ensure the stability and reliability of the deposition process. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of one embodiment of the present utility model;

[0028] Figure 2 for Figure 1 Internal structure diagram;

[0029] Figure 3 This is a schematic diagram of the suspension mechanism;

[0030] Figure 4 This is a schematic diagram of the internal structure of the suspension mechanism from the front.

[0031] Figure 5 This is a schematic diagram of the internal structure of the suspension mechanism from the side.

[0032] Figure 6 This is a schematic diagram of the protective mechanism.

[0033] : 1, gas phase furnace; 2, fixed block; 3, sealing door; 4, pull ring; 501, base; 502, graphite disc; 503, jet device; 504, jet pipe; 505, connecting pipe; 506, connecting shaft; 507, shunt chamber; 508, flow guide groove; 509, vertical air hole; 510, separation ring; 511, inclined air hole; 512, flow guide block; 513, baffle; 601, guard plate; 602, limiting strip; 603, limiting frame; 604, fixed rod; 605, connecting plate; 606, plug rod; 607, spring; 608, pull rod; 609, positioning hole; 7, connecting frame; 8, sliding ring. DETAILED DESCRIPTION

[0034] Example one

[0035] As Figures 1-5 shown, the utility model provides a kind of gas phase deposition furnace gas suspension device, including gas phase furnace 1, the fixed block 2 being set to the outer side of gas phase furnace 1, the sealing door 3 being rotationally set to the inner side of fixed block 2, the connecting frame 7 being set to the inner side of gas phase furnace 1, the sliding ring 8 being slidingly set to the inner side of connecting frame 7, suspension mechanism and protection mechanism:

[0036] Base 501 is located inside gas phase furnace 1, and base 501 can be slid on connecting frame 7 by sliding ring 8, to adjust position and control different protection mechanisms;

[0037] Graphite disc 502 is located above base 501, and the axis of graphite disc 502 is hollow to connect and limit base 501;

[0038] Shunt chamber 507 is set to the inner side of base 501, and shunt chamber 507 is set to cylindrical shape, and four flow guide grooves 508 are annularly arranged on the outer side of shunt chamber 507;Shunt chamber 507 makes the received airflow flow uniformly into four flow guide grooves 508, and the length of four flow guide grooves 508 is same, so that airflow can be uniformly sprayed from inclined air hole 511 and vertical air hole 509, to avoid that airflow spraying intensity is uneven, causing graphite disc 502 to tilt;

[0039] Suspension mechanism is set to the inner side of gas phase furnace 1, to uniformly separate airflow and spray, then drive graphite disc 502 to suspend and rotate;

[0040] Protection mechanism is set on suspension mechanism, to block and protect when gas phase furnace 1 is not used.

[0041] Suspension mechanism includes jet assembly and suspension assembly;

[0042] Jet assembly is set to the inner side of gas phase furnace 1 and located at bottom, to provide powerful airflow for suspension assembly;

[0043] The suspension assembly is arranged on the top of the air jet assembly and is used for generating the vertical air flow and the inclined air flow to drive the graphite disc 502 to suspend and rotate.

[0044] The air jet assembly comprises an air jet device 503, an air jet pipe 504 and a connecting pipe 505.

[0045] The air jet device 503 is arranged on the inner side of the gas phase furnace 1 and is located at the bottom of the gas phase furnace 1. The end portions of the connecting pipe 505 and the air jet pipe 504 are provided with sealing rings, and the two sealing rings are arranged oppositely and can be connected together through screws. The air jet device 503 is started, and the air jet device 503 generates a powerful air flow and flows to the connecting pipe 505 through the air jet pipe 504.

[0046] The suspension assembly comprises a vertical air hole 509, a separation ring 510, an inclined air hole 511 and a flow guide block 512.

[0047] The vertical air hole 509 is arranged on the top of the flow guide groove 508, the inclined air hole 511 is arranged on the side of the vertical air hole 509 and at the end of the flow guide groove 508, the separation ring 510 is arranged on the top of the base 501 and is located between the inclined air hole 511 and the vertical air hole 509, so that the two air holes can be separated to avoid mutual interference after the air flow is sprayed out, the end of the separation ring 510 close to the base 501 is provided with a notch, the top of the base 501 is provided with a connecting shaft 506 and is located at the shaft center of the base 501, the connecting shaft 506 can limit the graphite disc 502, the flow guide block 512 is arranged on the bottom of the graphite disc 502, the end of the flow guide block 512 away from the graphite disc 502 is provided with a baffle 513, the air flow generated by the air jet device 503 flows into the flow distribution chamber 507 through the connecting pipe 505, then uniformly flows to the four flow guide grooves 508 from the flow distribution chamber 507, and then flows to the vertical air hole 509 and the inclined air hole 511 from the flow guide grooves 508 and is sprayed out, the vertical air hole 509 ensures the suspension of the graphite disc 502, the air flow sprayed out by the inclined air hole 511 impacts on the baffle 513, so that the graphite disc 502 rotates, and the flow guide block 512 can guide the air flow to the inside of the graphite disc 502, so that the air flow impacts on the inside of the graphite disc 502 and strengthens the rotating effect.

[0048] Embodiment two

[0049] As shown in Figure 6 The gas phase deposition furnace inner gas suspension device provided by the utility model has the advantages that compared with embodiment one, the structure of the protection mechanism is introduced in detail.

[0050] The protection mechanism comprises a protection plate 601, a limiting strip 602, a limiting frame 603 and a positioning assembly; the limiting frame 603 is arranged on the top of the base 501, the protection plate 601 is slidingly arranged on the inner side of the limiting frame 603, the limiting strip 602 is arranged on the top of the base 501 and located on the side of the vertical air hole 509; the positioning assembly is arranged on the top of the base 501 and used for fixing the position of the protection plate 601 so as to switch the protection state and the working state. The positioning assembly comprises a fixing rod 604, a connecting plate 605, a plug rod 606 and a spring 607; the fixing rod 604 is arranged on the top of the base 501, the connecting plate 605 is arranged on the top of the fixing rod 604, the plug rod 606 is slidingly arranged on the end of the connecting plate 605 away from the fixing rod 604, the spring 607 is arranged on the outer side of the plug rod 606, a pull rod 608 is arranged on the top of the plug rod 606, the protection plate 601 is provided with positioning holes 609, the positioning holes 609 are provided with two, the pull rod 608 is pulled up, the pull rod 608 drives the plug rod 606 to rise, at this time, the spring 607 is compressed, then the protection plate 601 is slid, when the positioning hole 609 on the inner side of the protection plate 601 moves to the bottom of the plug rod 606, the pull rod 608 is released, the plug rod 606 is clamped into the positioning hole 609 under the action of the spring 607, the device is in the working state, the protection plate 601 does not affect the operation of the device, the plug rod 606 is inserted into another positioning hole 609 to be in the protection state, and foreign matters in the outside cannot enter the inclined air hole 511 and the vertical air hole 509 to cause blockage.

[0051] In conclusion, when the device is used, the sealing door 3 is opened by the pull ring 4, then the pull rod 608 is pulled up, the pull rod 608 drives the plug rod 606 to rise, at this time, the spring 607 is compressed, then the protection plate 601 is slid, when the positioning hole 609 on the inner side of the protection plate 601 moves to the bottom of the plug rod 606, the pull rod 608 is released, the plug rod 606 is clamped into the positioning hole 609 under the action of the spring 607, the device is in the working state, then the air jet device 503 is started, the air jet device 503 generates a strong airflow and flows to the connecting pipe 505 through the air jet pipe 504, the connecting pipe 505 flows into the shunt chamber 507, then flows to the four flow guide grooves 508 from the shunt chamber 507, then flows to the vertical air hole 509 and the inclined air hole 511 from the flow guide grooves 508 respectively and is sprayed out, the vertical air hole 509 ensures the suspension of the graphite disc 502, the airflow sprayed out of the inclined air hole 511 impacts on the baffle 513 to rotate, after the work is completed, the air jet device 503 stops spraying, then the pull rod 608 is pulled up, the plug rod 606 is inserted into another positioning hole 609 to make the base 501 in the protection state, and foreign matters in the outside cannot enter the inclined air hole 511 and the vertical air hole 509 to cause blockage.

[0052] The embodiment of the utility model is described in detail above in combination with the drawings, but the utility model is not limited to this, and various changes can be made within the knowledge range possessed by the person skilled in the art without departing from the purpose of the utility model.

Claims

1. A gas-phase deposition furnace gas suspension device, comprising a gas-phase furnace (1), a fixed block (2) arranged outside the gas-phase furnace (1), a sealing door (3) rotatably arranged inside the fixed block (2), a connecting frame (7) arranged inside the gas-phase furnace (1), and a sliding ring (8) slidably arranged inside the connecting frame (7); characterized in that, Also include: Base (501) is located in the interior of the gas phase furnace (1); Graphite tray (502) is located above the base (501), the axis of the graphite tray (502) is hollow to connect and limit the base (501); The shunt chamber (507) is arranged on the inner side of the base (501), the shunt chamber (507) is arranged in a cylindrical shape, the outer side of the shunt chamber (507) is annularly provided with four guide grooves (508), the shunt chamber (507) makes the received airflow uniformly flow into the four guide grooves (508); The suspension mechanism is arranged on the inner side of the gas phase furnace (1), which is used to uniformly separate the airflow and then drive the graphite tray (502) to suspend and rotate; And the protection mechanism is arranged on the suspension mechanism, which is used to block and protect when the gas phase furnace (1) is not used.

2. A gas suspension apparatus for use in a vapour deposition furnace as claimed in claim 1, characterised in that, The suspension mechanism includes a jet component and a suspension component; The jet component is arranged on the inner side of the gas phase furnace (1) and located at the bottom, which is used to provide powerful airflow for the suspension component; The suspension component is arranged on the top of the jet component, which is used to generate vertical airflow and inclined airflow to drive the graphite tray (502) to suspend and rotate.

3. A gas suspension apparatus for use in a vapour deposition furnace as claimed in claim 2, characterised in that, The jet component includes a jet device (503), a jet pipe (504) and a connecting pipe (505); The jet device (503) is arranged on the inner side of the gas phase furnace (1) and located at the bottom of the gas phase furnace (1), the jet pipe (504) is arranged at the output end of the jet device (503), and the connecting pipe (505) is arranged at the top of the jet pipe (504).

4. The gas suspension apparatus in a vapor deposition furnace according to claim 2, wherein The suspension component includes a vertical air hole (509), a separation ring (510), an inclined air hole (511) and a guide block (512); The vertical air hole (509) is arranged at the top of the guide groove (508), the inclined air hole (511) is located at the side of the vertical air hole (509) and at the end of the guide groove (508), the separation ring (510) is arranged at the top of the base (501), the separation ring (510) is located between the inclined air hole (511) and the vertical air hole (509), so that the two air holes can be separated to avoid interference with each other after the airflow is sprayed out, the end of the separation ring (510) close to the base (501) is provided with a notch, the top of the base (501) is provided with a connecting shaft (506) located at the axis of the base (501), the connecting shaft (506) can limit the graphite tray (502), and the guide block (512) is arranged at the bottom of the graphite tray (502), the end of the guide block (512) away from the graphite tray (502) is provided with a baffle (513).

5. The gas suspension apparatus in a vapor deposition furnace according to claim 1, wherein The protection mechanism includes a protection plate (601), a limiting strip (602), a limiting frame (603) and a positioning assembly; The limiting frame (603) is arranged on the top of the base (501), the protection plate (601) is slidingly arranged on the inner side of the limiting frame (603), and the limiting strip (602) is arranged on the top of the base (501); The positioning assembly is arranged on the top of the base (501), which is used to fix the position of the protection plate (601) to switch between the protection state and the working state.

6. A gas suspension apparatus for use in a vapour deposition furnace as claimed in claim 5, wherein, The positioning assembly includes a fixed rod (604), a connecting plate (605), a plug rod (606) and a spring (607); The fixed rod (604) is arranged on the top of the base (501), the connecting plate (605) is arranged on the top of the fixed rod (604), the inserting rod (606) is slidingly arranged on the end of the connecting plate (605) away from the fixed rod (604), the spring (607) is arranged on the outer side of the inserting rod (606), the pull rod (608) is arranged on the top of the inserting rod (606), The protection plate (601) is provided with the positioning hole (609). ​

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