Heater and single crystal furnace

Abstract

The utility model provides a heater and a single crystal furnace thermal field. The heater comprises two first heating pieces which are oppositely arranged and two heating assemblies which are arranged between the two first heating pieces in parallel, the first heating piece is connected with an electrode; the heating assembly comprises at least two second heating pieces which are connected in series; the second heating piece comprises at least two stepped bent bodies which are connected in series; wherein the step-shaped bent body, closest to the first heating piece, in the second heating piece is a first bent body, and the step-shaped bent body, farthest from the first heating piece, in the second heating piece is a second bent body; and the mass of the first bending body is greater than that of the second bending body. The cracking and fracture probability of the heater caused by gravity torque can be reduced, so that the service life of the heater is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to photovoltaic technology field especially, is involved in a kind of heater and single crystal furnace. BACKGROUND

[0002] In current photovoltaic industry, single crystal silicon is generally grown by Czochralski method, and in the thermal field system of single crystal furnace, the bottom heater is one of the important components for providing stable thermal field gradient and maintaining single crystal growth.

[0003] At present, with the increase of the size of thermal field, in order to ensure the stable temperature gradient in the thermal field, the size and mass of the bottom heater increase, however, with the increase of the mass and size of the bottom heater, the risk of the bottom heater breaking due to gravity increases, and the service life is lower. SUMMARY

[0004] In view of the above problems, the utility model embodiment is provided, which provides a kind of heater and single crystal furnace overcoming the above problems or at least partially solving the above problems.

[0005] In order to solve the above problems, in the first aspect, the utility model embodiment discloses a kind of heaters, comprising: two first heating pieces and two heating components in parallel arranged between two first heating pieces are oppositely arranged;The first heating piece is used to connect electrode;

[0006] The heating component includes at least two second heating pieces connected in series;The second heating piece includes at least two curved bodies connected in series;

[0007] Among them, the curved body of the second heating piece closest to the first heating piece is the first curved body, and the curved body farthest from the first heating piece is the second curved body;The mass of the first curved body is greater than the mass of the second curved body.

[0008] In the second aspect, the utility model embodiment discloses a single crystal furnace, comprising the above heater.

[0009] The utility model embodiment at least includes the following advantages:

[0010] In the embodiment of the utility model, two first heating pieces are oppositely arranged, two heating assemblies are arranged in parallel between the two first heating pieces, the first bending body is arranged close to the first heating piece in the second heating piece of the heating assembly, and the second bending body is arranged away from the first heating piece. Since the first heating piece is used for connecting the electrode, and the mass of the first bending body is greater than the mass of the second bending body, the overall mass center of the second heating piece can be close to the electrode connecting area, compared with the heater in the prior art, the gravity of the heater in the embodiment of the utility model reduces the moment generated in the electrode connecting area, the probability of cracking and breaking of the heater caused by the gravity moment can be reduced, and the service life of the heater is improved. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 It is a structure diagram of a heater of the utility model Figure One ;

[0012] Figure 2 It is a structure diagram of a heater of the utility model Figure Two ;

[0013] Figure 3 It is a sectional view of a long strip hole.

[0014] BRIEF DESCRIPTION OF DRAWINGS:

[0015] 1, first heating piece;11, hole;2, heating assembly;21, second heating piece;211, first bending body;2111, first heating section;2112, second heating section;212, second bending body;2121, third heating section;2122, fourth heating section;213, third bending body;2131, fifth heating section;2132, sixth heating section;22, connecting part;221, first connecting section;222, second connecting section;31, first avoiding space;32, second avoiding space;41, first symmetry axis;42, second symmetry axis. DETAILED DESCRIPTION

[0016] In order to make the above-mentioned purpose, features and advantages of the utility model more obvious and easy to understand, the utility model is further explained in detail in the following with the drawings and specific embodiments.

[0017] The terms "first", "second" in the specification and claims of the present application can explicitly or implicitly include one or more features. In the description of the utility model, unless otherwise specified, the meaning of "multiple" is two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / ", generally means that the front and rear associated objects are in an "or" relationship.

[0018] In the description of the utility model, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as a limitation on the utility model.

[0019] In the description of the utility model, it needs to be understood that the terms "mounting", "connection", "connecting" should be understood in a broad sense unless otherwise explicitly specified and limited, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or the communication between two elements. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0020] One of the core ideas of the embodiments of the utility model is to disclose a heater, and in the embodiments of the utility model, only the application of the heater in the hot field of the single crystal furnace is taken as an example to provide a hot field environment, and the heater can also be used in other environments to provide heating function.

[0021] For example, in the single crystal furnace, the crucible, the crucible support, the main heater and the heater described in the utility model are arranged in the furnace body of the single crystal furnace, and the heater described in the utility model is used as a bottom heater. The crucible is placed in the crucible support, so that the crucible support supports the crucible; the supporting rod can be connected to the bottom of the crucible support through the crucible support, and is used for supporting the crucible support and the crucible. The main heater can be arranged around the side wall of the crucible support to radiate heat to the crucible support from the circumferential side; the bottom heater can be arranged below the crucible support to radiate heat to the crucible support from the lower side. Specifically, the surface of the bottom heater can be opposite to the crucible support.

[0022] Reference Figure 1 And Figure 2 As shown in the drawings, the heater described in the embodiments of the utility model can include: two first heating pieces 1 arranged oppositely and two heating assemblies 2 arranged in parallel between the two first heating pieces 1. The first heating piece 1 is used for connecting the electrode, so that the first heating piece 1 realizes the function of electric heating. The heater in the embodiment can be a bottom heater.

[0023] Specifically, the heater includes two first heating elements 1, one of which can be connected to a positive electrode and the other to a negative electrode. The two first heating elements 1 can be arranged opposite each other along a first direction, and the two heating components 2 can be arranged opposite each other along a second direction. The first heating elements 1 and the heating components 2 are arranged alternately along the circumference of the heater, and the first and second directions intersect.

[0024] Here, the first direction refers to the direction from one first heating element 1 to another first heating element 1; the second direction refers to the direction from one heating component 2 to another heating component 2. In this embodiment, only the example of the first direction and the second direction being perpendicular is used for explanation; other situations can be set with reference to this.

[0025] As one embodiment of the present utility model, the heating component 2 includes at least two second heating elements 21 connected in series; the second heating element 21 includes at least two curved bodies connected in series; wherein, the curved body closest to the first heating element is the first curved body 211, and the curved body furthest from the first heating element is the second curved body 212; the mass of the first curved body 211 is greater than the mass of the second curved body 212.

[0026] In this embodiment, two first heating elements 1 are arranged opposite to each other, and two heating components 2 are arranged in parallel. The heating components 2 are respectively connected to the two first heating elements 1. In the second heating element 21 of the heating component 2, the first curved body 211 is arranged close to the first heating element 1, and the second curved body 212 is arranged away from the first heating element 1. Since the first heating element 1 is used to connect the electrode, and the mass of the first curved body 211 is greater than the mass of the second curved body 212, the overall center of mass of the second heating element 21 can be close to the electrode connection area. With the total mass of the heater remaining unchanged, compared with heaters in other technologies, the torque generated by the gravity of the heater in the electrode connection area is reduced in this embodiment, which can reduce the probability of cracking or breaking of the heater due to the gravitational torque, thereby improving the service life of the heater.

[0027] In addition, such as Figure 1 As shown, two first heating elements 1 are disposed on the left and right edges of the heater, and a second curved body is located near the center of the heater. The first curved body 211 is located near the left and right edges of the heater. Because the mass of the first curved body 211 is greater than the mass of the second curved body, the heating element area in the central region of the heater is smaller than the heating element area in the edge region. During the heating process, the heater forms a temperature distribution with a lower temperature in the center and a higher temperature at the edges. During crystal growth, the silicon solution flows from the higher temperature area to the lower temperature area, which effectively counteracts the velocity of the silicon solution flowing from the center to the edge due to centrifugal force, reducing the impact of the silicon solution on the surface of the quartz crucible, and thus reducing the reaction between the silicon solution and the quartz crucible.

[0028] Optionally, the material of the heater can be carbon-carbon or graphite, etc. The heater can be an equal-thickness structure to ensure the structural stability and heating stability of the heater.

[0029] Optionally, the heating assembly 2 can include two second heating members 21, and each heating assembly 2 can include at least two second heating members 21 connected in series, wherein the first heating member 1 can have the same thickness as the second heating member 21. The two heating components in a single heating assembly 2 can be directly connected or indirectly connected.

[0030] Optionally, the heater can be an integrally formed structure, or the heater can also be spliced by the first heating member 1 and the second heating member 21. In this embodiment, no specific limitation is made.

[0031] Optionally, the two second heating members 21 in a single heating assembly 2 can be connected in series. In the heating assembly 2, one of the second heating members 21 can be connected to the positive electrode through a first heating member 1, and the other second heating member 21 can be connected to the negative electrode through another first heating member 1, so that the heating assembly 2 can realize electric heating. Among them, the two heating assemblies 2 can be connected in parallel.

[0032] Optionally, the first curved body 211 and the second curved body 212 of the second heating member 21 can be a stepped curved body, which is a U-shaped structure of asymmetric structure, and the stepped curved body can include two opposite branches, one branch having a length greater than the other branch.

[0033] Specifically, the first curved body 211 can be arranged closest to the first heating member 1, and the second curved body 212 can be arranged farthest from the first heating member 1. As shown in Figure 1 In the second heating member 21 on the left side, the first curved body 211 is arranged close to the first heating member 1 on the left side; in the second heating member 21 on the right side, the first curved body 211 is arranged close to the first heating member 1 on the right side, that is, the two second heating members 21 can be arranged in a first direction mirror image.

[0034] Specifically, the first heating member 1 has one second heating member 21 arranged on each side. Since the first curved body 211 of the second heating member 21 is arranged close to the first heating member 1, and the mass of the first curved body 211 is greater than that of the second curved body 212, the mass of the second heating member 21 is concentrated close to the two sides of the first heating member 1, rather than the central position of the heater.

[0035] In the embodiment, the first heating element 1 is used to connect the electrode, so that the overall mass center of the second heating element 21 can be close to the electrode connection area, thereby facilitating reduction of the moment generated by the gravity of the heater in the electrode connection area, and thus reducing the cracking and breaking probability of the heater caused by the gravity moment, and improving the service life of the heater.

[0036] Optionally, the first bending body 211 and the second bending body 212 are both in U-shaped structures, and the first bending body 211 and the second bending body 212 are both arranged away from the first heating element 1, so that the second heating element 21 as a whole can be in a bending body structure, which is conducive to lengthening the extension length of the second heating element 21, and thus increasing the resistance of the heater, and thus ensuring the heating power of the heater.

[0037] Further, the first bending body 211 comprises a first heating section 2111 and a second heating section 2112 connected with each other, and the second bending body 212 comprises a third heating section 2121 and a fourth heating section 2122 connected with each other; in the same second heating element 21, the first heating section 2111, the second heating section 2112, the third heating section 2121 and the fourth heating section 2122 are sequentially and spacedly arranged along a first direction, the first heating section 2111, the second heating section 2112, the third heating section 2121 and the fourth heating section 2122 are sequentially connected in tail-to-head mode, and an end of the first heating section 2111 away from the second heating section 2112 is connected with the first heating element 1.

[0038] In the embodiment, in the same second heating element 21, the first heating section 2111, the second heating section 2112, the third heating section 2121 and the fourth heating section 2122 are sequentially connected in tail-to-head mode, so that the second heating element 21 can be in a snake-shaped structure. In the embodiment of the utility model, the snake-shaped heating body can effectively reduce the obstruction to the airflow and quickly discharge the generated oxides and other volatile substances.

[0039] Specifically, the head end of the first heating section 2111 can be connected with the first heating element 1 adjacent thereto, and the tail end of the first heating section 2111 can be transitionally connected with the head end of the second heating section 2112, so that the first heating section 2111, the second heating section 2112 and the arc-shaped transition section therebetween can be connected to form a U-shaped structure. The tail end of the second heating section 2112 and the head end of the third heating section 2121 are transitionally connected, so that the second heating section 2112, the third heating section 2121 and the arc-shaped transition section therebetween can be connected to form a U-shaped structure. The tail end of the third heating section 2121 and the head end of the fourth heating section 2122 are transitionally connected, so that the third heating section 2121, the fourth heating section 2122 and the arc-shaped transition section therebetween can be connected to form a U-shaped structure.

[0040] In the above embodiment or other optional embodiments, the first curved body 211 has a U-shaped structure and comprises a first heating section 2111 and a second heating section 2112 connected to each other, and the second curved body 212 has a U-shaped structure and comprises a third heating section 2121 and a fourth heating section 2122 connected to each other. The width of the first heating section 2111 and / or the second heating section 2112 is greater than the width of the third heating section 2121 and the fourth heating section 2122, respectively. And / or, the sum of the lengths of the first heating section 2111 and the second heating section 2112 is greater than the sum of the lengths of the third heating section 2121 and the fourth heating section 2122.

[0041] In the above embodiment or other optional embodiments, the first curved body 211 has a U-shaped structure and comprises a first heating section 2111 and a second heating section 2112 connected to each other, and the second curved body 212 has a U-shaped structure and comprises a third heating section 2121 and a fourth heating section 2122 connected to each other. The width of the first heating section 2111 and / or the second heating section 2112 is greater than the width of the third heating section 2121 and the fourth heating section 2122, respectively. And / or, the sum of the lengths of the first heating section 2111 and the second heating section 2112 is greater than the sum of the lengths of the third heating section 2121 and the fourth heating section 2122.

[0042] In the above embodiment or other optional embodiments, the first curved body 211 has a U-shaped structure and comprises a first heating section 2111 and a second heating section 2112 connected to each other, and the second curved body 212 has a U-shaped structure and comprises a third heating section 2121 and a fourth heating section 2122 connected to each other. The width of the first heating section 2111 and / or the second heating section 2112 is greater than the width of the third heating section 2121 and the fourth heating section 2122, respectively. And / or, the sum of the lengths of the first heating section 2111 and the second heating section 2112 is greater than the sum of the lengths of the third heating section 2121 and the fourth heating section 2122.

[0043] In the above embodiment or other optional embodiments, the first curved body 211 has a U-shaped structure and comprises a first heating section 2111 and a second heating section 2112 connected to each other, and the second curved body 212 has a U-shaped structure and comprises a third heating section 2121 and a fourth heating section 2122 connected to each other. The width of the first heating section 2111 and / or the second heating section 2112 is greater than the width of the third heating section 2121 and the fourth heating section 2122, respectively. And / or, the sum of the lengths of the first heating section 2111 and the second heating section 2112 is greater than the sum of the lengths of the third heating section 2121 and the fourth heating section 2122.

[0044] Specifically, the thicknesses of the first heating section 2111, the second heating section 2112, the third heating section 2121, and the fourth heating section 2122 are the same, and the width of the first heating section 2111 and / or the second heating section 2112 is designed to be larger, so as to increase the mass of the first curved body 211 and make the mass center of the heater deviate to the electrode connection area.

[0045] Further, the design manners of the first curved body 211 and the second curved body 212 include but are not limited to the following manners:

[0046] In some embodiments, the width of the first heating section 2111 can be greater than the width of the second heating section 2112, and the widths of the second heating section 2112, the third heating section 2121, and the fourth heating section 2122 are the same.

[0047] In some embodiments, the width of the second heating section 2112 can be greater than the width of the first heating section 2111, and the widths of the first heating section 2111, the third heating section 2121, and the fourth heating section 2122 are the same.

[0048] In some embodiments, the width of the first heating section 2111 can be greater than the width of the second heating section 2112, the width of the second heating section 2112 can be greater than the width of the third heating section 2121, and the widths of the third heating section 2121 and the fourth heating section 2122 are the same.

[0049] Optionally, the sum of the lengths of the first heating section 2111 and the second heating section 2112 is greater than the sum of the lengths of the third heating section 2121 and the fourth heating section 2122, so as to realize that the mass of the first curved body 211 is greater than the mass of the second curved body 212.

[0050] Specifically, the thicknesses of the first heating section 2111, the second heating section 2112, the third heating section 2121, and the fourth heating section 2122 are the same, and the sum of the lengths of the first heating section 2111 and the second heating section 2112 is designed to be larger, so as to increase the mass of the first curved body 211 and make the mass center of the heater deviate to the electrode connection area.

[0051] Further, to realize that the mass of the first curved body 211 is greater than the mass of the second curved body 212, the design manners of the first curved body 211 and the second curved body 212 include but are not limited to the following design manners:

[0052] In some embodiments, the sum of the lengths of the first heating section 2111 and the second heating section 2112 is greater than the sum of the lengths of the third heating section 2121 and the fourth heating section 2122.

[0053] In some embodiments, the width of the first heating section 2111 is greater than the width of the third heating section 2121 and the fourth heating section 2122 respectively, and the sum of the lengths of the first heating section 2111 and the second heating section 2112 is greater than the sum of the lengths of the third heating section 2121 and the fourth heating section 2122.

[0054] In some embodiments, the width of the second heating section 2112 is greater than the width of the third heating section 2121 and the fourth heating section 2122 respectively, and the sum of the lengths of the first heating section 2111 and the second heating section 2112 is greater than the sum of the lengths of the third heating section 2121 and the fourth heating section 2122.

[0055] In some embodiments, the width of the first heating section 2111 and the second heating section 2112 is greater than the width of the third heating section 2121 and the fourth heating section 2122 respectively, and the sum of the lengths of the first heating section 2111 and the second heating section 2112 is greater than the sum of the lengths of the third heating section 2121 and the fourth heating section 2122.

[0056] In the above embodiments or other optional embodiments, the stepped curved body connected between the first curved body 211 and the second curved body 212 is the third curved body 213, and the mass of the third curved body 213 is greater than the mass of the second curved body 212.

[0057] In the present embodiment, the third curved body 213 is connected between the first curved body 211 and the second curved body 212, and the mass of the third curved body 213 is greater than the mass of the second curved body 212, so that the position of the second heating element 21 close to the first heating element 1 has a heavier mass, and the overall mass center of the heater can be close to the electrode connection area.

[0058] Specifically, the first curved body 211, the third curved body 213 and the second curved body 212 are sequentially electrically connected with the first heating element 1 to realize the function of electric heating.

[0059] In some embodiments, the mass of the first curved body 211 can be less than or equal to the mass of the third curved body 213. In other embodiments, the mass of the first curved body 211 can be greater than the mass of the third curved body 213, so that the closer the second heating element 21 is to the area of the first heating element 1, the heavier the mass, so that the overall mass center of the heater can be closer to the electrode connection area.

[0060] Alternatively, the first curved body 211, the third curved body 213 and the second curved body 212 are sequentially connected to form the second heating element 21; the second heating element 21 has a curved and serpentine structure, which is conducive to lengthening the extension length of the second heating element 21, and in turn increasing the resistance of the heater, and in turn ensuring the heating power of the heater.

[0061] Optionally, the third bending body 213 is a U-shaped structure, and the opening of the third bending body 213 is arranged away from the first heating element 1, so that the structure of the third bending body 213 is similar to the structure of the first bending body 211 and the second bending body 212, and the opening directions are the same, so that the second heating element 21 can form more bending to further lengthen the extension length of the second heating element 21, thereby increasing the resistance of the heater.

[0062] Specifically, the third bending body 213 can include a fifth heating section 2131 and a sixth heating section 2132 arranged at intervals along the first direction, and the fifth heating section 2131 and the sixth heating section 2132 both extend along the second direction, and the second heating section 2112, the fifth heating section 2131, the sixth heating section 2132 and the third heating section 2121 can be sequentially connected in tail-to-head.

[0063] Optionally, the first heating section 2111, the second heating section 2112, the fifth heating section 2131, the sixth heating section 2132, the third heating section 2121 and the fourth heating section 2122 are arranged at intervals along the first direction, that is, the intervals between adjacent two heating sections are consistent.

[0064] Optionally, the first heating section 2111, the second heating section 2112, the fifth heating section 2131, the sixth heating section 2132, the third heating section 2121 and the fourth heating section 2122 have the same thickness.

[0065] Optionally, the sum of the lengths of the fifth heating section 2131 and the sixth heating section 2132 can be greater than the sum of the lengths of the third heating section and the fourth heating section; and / or, the width of the fifth heating section 2131 and / or the sixth heating section 2132 can be greater than the width of the third heating section and the fourth heating section in the first direction, respectively, to realize that the mass of the third bending body 213 is greater than the mass of the second bending body 212.

[0066] Wherein, the length of the fifth heating section 2131 and the sixth heating section 2132 refers to the extension size of the heating section along the extension direction of the bending body; the width of the fifth heating section 2131 and the sixth heating section 2132 refers to the extension size of the heating section perpendicular to the extension direction of the bending body.

[0067] As another embodiment of the utility model embodiment, the first bending body 211 and the second bending body 212 are continuous bending serpentine structures, and the serpentine structure includes a plurality of heating sections extending along the second direction, and intervals are arranged between the heating sections; wherein, at least two intervals are arranged between the serpentine structures.

[0068] Optionally, the first curved body and the second curved body have the same thickness, and the interval between the first curved body 211 and the second curved body 212 is different, so that by adjusting the distance of the interval, the center of gravity of the first curved body 211 is made closer to the heating element 1.

[0069] As another embodiment of the utility model, the first curved body 211 and the second curved body 212 both include at least two heating sections extending in the second direction, and the heating sections are arranged with intervals. The width of the heating section of the first curved body 211 and the width of the heating section of the second curved body 212 are the same. By adjusting the thickness of the heating section of the first curved body 211 and the thickness of the heating section of the second curved body 212, the mass of the first curved body 211 is made greater than the mass of the second curved body 212. Specifically, the thickness of at least part of the heating section of the first curved body 211 can be greater than the thickness of at least part of the heating section of the second curved body 212.

[0070] Optionally, the stepped curved body connected between the first curved body 211 and the second curved body 212 is a third curved body 213. The third curved body 213 can include a fifth heating section 2131 and a sixth heating section 2132 arranged with intervals in the first direction. The width of the fifth heating section 2131, the sixth heating section 2132, the third heating section 2121 and the fourth heating section 2122 are the same. By adjusting the thickness of the heating section of the third curved body 213 and the thickness of the heating section of the second curved body 212, the mass of the third curved body 213 is made greater than the mass of the second curved body 212. Specifically, the thickness of at least part of the heating section of the third curved body 213 can be greater than the thickness of at least part of the heating section of the second curved body 212. On the basis of the above-mentioned embodiments or other optional embodiments, the heating assembly 2 further includes at least one connecting component 22 connected between two second heating elements 21; the side of the connecting component 22 away from the center of the heater and the two second curved bodies 212 adjacent thereto limit a first avoiding space 31; the side of the connecting component 22 towards the center of the heater, the inner edge of the first curved body 211 and the inner edge of the second curved body 212 limit a second avoiding space 32.

[0071] In the embodiment, the side of the connecting component 22 away from the center of the heater and the two second bending bodies 212 adjacent to the side form a first avoiding space 31, which is convenient for avoiding other hot field components in the hot field of the single crystal furnace. The side of the connecting component 22 towards the center of the heater, the inner edge of the first bending body 211 and the inner edge of the second bending body 212 form a second avoiding space 32, which is convenient for avoiding other hot field components in the hot field of the single crystal furnace, and can improve the reliability and convenience of installing the heater in the hot field of the single crystal furnace. In the hot field of the single crystal furnace, the first avoiding space 31 can be used to avoid the heating electrode of the main heater, and the second avoiding space 32 can be used to avoid the crucible support connected to the bottom of the crucible.

[0072] In the embodiment, the second bending body 212 is connected in series with the first bending body 211 and the connecting component 22, and the connecting component 22 can also be used for electric heating.

[0073] Optionally, the connecting component 22 is in a U-shaped structure, and the opening of the connecting component 22 is away from the center of the heater, which is convenient for the connecting component 22 to enclose and form the first avoiding space 31.

[0074] Optionally, when the connecting component 22 is in a U-shaped structure, the U-shaped structure includes two first connecting segments 221 arranged at intervals and a second connecting segment 222 connected between the two first connecting segments 221; the width of the second connecting segment 222 is greater than the width of the first connecting segment 221, the first heating segment 2111, the second heating segment 2112, the third heating segment 2121 and the fourth heating segment 2122, respectively, wherein the width of the second connecting segment 222 refers to the extension dimension of the second connecting segment 222 in the direction parallel to the opening direction of the U-shaped structure, that is, the width of the second connecting segment 222 refers to the dimension of the second connecting segment 222 in the second direction.

[0075] In the embodiment, the end of the first connecting segment 221 away from the second connecting segment 222 is connected to the end of the fourth heating segment 2122 away from the third heating segment 2121. The width of the second connecting segment 222 is greater than the width of the first connecting segment 221, the first heating segment 2111, the second heating segment 2112, the third heating segment 2121 and the fourth heating segment 2122, respectively, so that the structural strength of the second connecting segment 222 is higher, and the structural strength of the connecting component 22 can be improved, the probability of cracking or breaking of the connecting component 22 is reduced, and the service life of the heater is improved.

[0076] Optionally, the width of the second connecting segment 222 can be greater than the width of the second heating component 21 at any position, so that the structural strength of the second connecting segment 222 is higher.

[0077] In the above embodiment or other optional embodiments, the minimum width of the first heating member 1 in the first direction is greater than the width of the second connecting section 222 in the second direction, so that the width of the first heating member 1 in the first direction is wider, thereby facilitating to ensure the structural strength of the first heating member 1 and enhancing the ability of the heater to resist deformation and cracking of the electrode connecting area due to thermal expansion.

[0078] Optionally, the connecting component 22 comprises a bending body composed of a plurality of U-shaped structures connected in sequence, which can further lengthen the extension length of the second heating member 21.

[0079] In the above embodiment or other optional embodiments, the outer edges of the first heating member 1 and the second heating member 21 collectively circumscribe the same ellipse or circle, which can improve the utilization rate of the blank for manufacturing the heater. Specifically, referring to Figure 2 In the embodiment, the outer edges of the first heating member 1 and the second heating member 21 collectively circumscribe the same circle.

[0080] Optionally, the heating assembly 2 further comprises at least one connecting component 22 connected between two second heating members 21; the side of the connecting component 22 towards the center of the heater, the inner edges of the first bending body 211 and the second bending body 212 collectively circumscribe the same ellipse or circle, which can improve the utilization rate of the blank for manufacturing the heater. Specifically, referring to Figure 2 In the embodiment, the side of the connecting component 22 towards the center of the heater, the inner edges of the first bending body 211 and the second bending body 212 collectively circumscribe the same circle.

[0081] In the above embodiment or other optional embodiments, in combination with Figure 2 and Figure 3 The first heating member 1 is provided with a hole 11, which can be a long strip-shaped hole, for connecting the electrode.

[0082] In the embodiment, the long strip-shaped hole can be used to pass a bolt, so that the first heating member 1 is fastened and connected with the electrode through the bolt, which can reduce the mutual extrusion between the hole wall of the long strip-shaped hole and the bolt due to thermal expansion.

[0083] Specifically, the inner wall of the long strip-shaped hole can be provided with a threaded structure, so as to facilitate the fastening and connection of the first heating member 1 with the electrode through the bolt.

[0084] In the above embodiment or other optional embodiments, the first heating element 1 is provided with holes 11, and the distance between the holes 11 of the two first heating elements 1 is 500-800 mm; the holes 11 are specifically electrode holes for connecting electrodes and supporting the heater through the electrodes. In this embodiment, the holes 11 can be specifically long strip-shaped holes; by limiting the distance between the holes, the distance between the holes 11 and the overall gravity center of the heater is adjusted. Taking the heater as an example of an axisymmetric structure, the gravity center of the heater coincides with the center thereof; in this embodiment, compared with other technologies, by shortening the distance between the holes 11 to 500-800 mm, the distance between the holes and the gravity center of the heater is shortened to 250-400 mm, and then the electrodes are closer to the gravity center, which can better support the heater and prevent the heater from deforming. The distance between the holes 11 of the two first heating elements 1 is 500-800 mm, which can be specifically the distance between the centers of the holes or the distance between the two end points of the two holes 11 close to each other.

[0085] In the above embodiment or other optional embodiments, the two first heating elements 1 are symmetrically distributed relative to the first symmetry axis 41 of the heater, and the two heating assemblies 2 are symmetrically distributed relative to the second symmetry axis 42 of the heater; the first heating element 1 is an axisymmetric structure relative to the first symmetry axis 41, and the heating assembly 2 is an axisymmetric structure relative to the second symmetry axis 42.

[0086] In this embodiment, the heater can be an axisymmetric structure relative to the first symmetry axis 41 and an axisymmetric structure relative to the second symmetry axis 42.

[0087] Specifically, in this embodiment, the extension direction of the first symmetry axis 41 is the first direction, and the extension direction of the second symmetry axis 42 is the second direction.

[0088] Alternatively, the holes 11 are axisymmetric structures relative to the first symmetry axis 41 and the second symmetry axis 42, so that the opening sizes of the two ends of the holes 11 in the second direction are the same, which makes the heater can be used on both sides, and the service life of the heater can be improved. In this embodiment, after the provided heater is used for a long time, one side of the heater facing the crucible will crack due to thermal expansion, or peeling, slagging and other phenomena will occur due to the corrosion of silicon vapor. The upper and lower sides of the heater can be arranged, and the side originally facing the crucible is placed on the lower side to prolong the service life of the heater.

[0089] Specifically, as Figure 1 illustrated in a first use state of the heater; the heater can be switched to a second use state by turning the heater 180 degrees around the second symmetry axis 42, so that the heater can be used on both sides.

[0090] The heater at least has the following advantages:

[0091] In the embodiment of the utility model, two first heating pieces are oppositely arranged, two heating assemblies are arranged in parallel between the two first heating pieces, the first curved body is arranged close to the first heating piece in the second heating piece of the heating assembly, the second curved body is arranged away from the first heating piece, since the first heating piece is used for connecting the electrode, and the mass of the first curved body is greater than the mass of the second curved body, so that the overall mass center of the heater can be close to the electrode connecting area, under the condition that the total mass of the heater is unchanged, compared with the heater in the prior art, the torque generated by the gravity of the heater in the embodiment of the utility model is reduced in the electrode connecting area, the probability of cracking and breaking of the second heating piece caused by the gravity torque can be reduced, and the service life of the heater is improved.

[0092] In the second aspect, the utility model discloses a single crystal furnace, and specifically can include the above-mentioned heater, and specifically can be a bottom heater.The single crystal furnace heat field in the embodiment of the utility model can achieve the same beneficial effects as the heater, and will not be repeated here.

[0093] Although the preferred embodiments of the utility model have been described, those skilled in the art can make additional changes and modifications to these embodiments once they know the basic creative concept. Therefore, the appended claims are intended to cover the preferred embodiments and all changes and modifications falling within the scope of the utility model.

[0094] Finally, it also needs to be explained that in this paper, relationship terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between the entities or operations. Moreover, the term "comprises", "includes" or any other variant thereof is intended to cover non-exclusive inclusion, so that the process, method, article or terminal device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or terminal device. Without more limitations, the element defined by the statement "comprises a" does not exclude the presence of another identical element in the process, method, article or terminal device including the element.

[0095] The above has carried out the detailed introduction to the heater and the single crystal furnace thermal field provided by the utility model, the principle and the implementation mode of the utility model have been described in this article by applying specific examples, the above embodiment is only used for helping understanding the method and the core thought of the utility model; simultaneously, for the general technical personnel in the field, according to the thought of the utility model, there will be changes in specific implementation mode and application range, and the above-mentioned, the content of the specification should not be understood as the limitation of the utility model.

Claims

1. A heater characterized by, The application relates to a heating device. The application relates to a heating device. The application relates to a heating device. The application relates to a heating device.

2. The heater of claim 1, wherein The application relates to a heating device. The application relates to a heating device. The application relates to a heating device. The application relates to a heating device. The application relates to a heating device.

3. The heater of claim 2, wherein, The application relates to a heating device. The application relates to a heating device. The application relates to a heating device. The application relates to a heating device.

4. The heater of claim 1, wherein The application relates to a heating device. The application relates to a heating device.

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6. The heater of claim 1, wherein The heating assembly (2) further comprises at least one connecting component (22) connected between two of the second heating members (21); The side of the connecting component (22) away from the center of the heater and the two second curved bodies (212) adjacent thereto limit a first avoiding space (31); The side of the connecting component (22) toward the center of the heater, the inner edge of the first curved body (211) and the inner edge of the second curved body (212) limit a second avoiding space (32).

7. The heater of claim 6, wherein, The connecting component (22) is in a U-shaped structure; or, the connecting component (22) comprises a curved body composed of a plurality of U-shaped structures connected in sequence.

8. The heater of claim 6, wherein, The outer edges of the first heating members (1) and the second heating members (21) collectively circumscribe an identical ellipse or circle; The side of the connecting component (22) toward the center of the heater, the inner edge of the first curved body (211) and the inner edge of the second curved body (212) collectively inscribe an identical ellipse or circle.

9. The heater of claim 1, wherein, The first heating members (1) are provided with holes (11) in a strip-shaped structure for connecting electrodes.

10. The heater of claim 1, wherein, The first heating members (1) are provided with holes (11), and the distance between the holes of two first heating members (1) is 500-800 mm.

11. The heater of claim 1, wherein, The first heating members (1) are integrally formed with the heating assembly (2). Or, the first heating members (1) are detachably connected with the heating assembly (2).

12. The heater of claim 1, wherein, The two first heating members (1) are symmetrically distributed relative to a first symmetry axis (41) of the heater, and the two heating assemblies (2) are symmetrically distributed relative to a second symmetry axis (42) of the heater. The first heating members (1) are axially symmetric relative to the first symmetry axis (41), and the heating assemblies (2) are axially symmetric relative to the second symmetry axis (42).

13. A single crystal furnace comprising the heater according to any one of claims 1-12.

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