Vacuum pump rotating speed monitoring device

Abstract

The utility model relates to a vacuum pump rotating speed monitoring device and relates to the technical field of vacuum pumps. The utility model provides a vacuum pump rotating speed monitoring device which comprises a vacuum pump unit, a driving unit and a sensor. A sensor and a first gear arranged on a first rotor shaft in a sleeving mode are arranged, the first gear synchronously rotates along with the first rotor shaft and an output shaft of a driving unit, and the sensor monitors the rotating speed of the first rotor shaft and the rotating speed of the driving unit by monitoring the first gear; through the arrangement, an operator can conveniently monitor the rotating speed of the driving unit, so that the working state of the vacuum pump unit is more accurately controlled, the pumping efficiency of the vacuum pump unit is improved, and energy consumption is reduced; meanwhile, the first gear and the sensor can be combined with an existing vacuum pump unit, the working environment of the fear-free semiconductor vacuum pump unit can be suitable for the working environment in the vacuum environment and the oil contamination environment, and economical efficiency is good.

Description

TECHNICAL FIELD

[0001] The utility model relates to a vacuum pump technical field, specifically, a kind of vacuum pump rotating speed monitoring device. BACKGROUND

[0002] In the process such as dry etching or CVD when manufacturing semiconductor, liquid crystal panel, since processing is carried out in the processing cavity of high vacuum, as the means for maintaining high vacuum by exhausting the gas in the processing cavity, for example, a vacuum pump such as turbo molecular pump can be used.

[0003] The inventor found that the water-cooled sealed motor in the semiconductor dry vacuum pump system is difficult to detect the motor speed because the motor cavity is connected with the vacuum pump cavity, and the vacuum degree of the motor cavity synchronously rises and falls with the vacuum pump cavity. SUMMARY

[0004] The utility model discloses a kind of vacuum pump rotating speed monitoring devices, which can monitor the real-time rotating speed of first rotor shaft and driving unit during the working process of vacuum pump unit.

[0005] The embodiment of the utility model can be realized as follows:

[0006] The utility model provides a kind of vacuum pump rotating speed monitoring device, comprising:

[0007] Vacuum pump unit, the vacuum pump unit includes first rotor shaft, first gear is sleeved on the first rotor shaft;

[0008] Driving unit, the driving unit is used to drive the vacuum pump unit to work, the output shaft of the driving unit is drivingly connected with the first rotor shaft;

[0009] Sensor, the sensor is arranged on the vacuum pump unit and is relative to the first gear, so that the sensor monitors the rotating speed of the first rotor shaft by monitoring the first gear.

[0010] Optionally, the vacuum pump rotating speed monitoring device further includes a control unit, the control unit is electrically connected with the driving unit and the sensor;

[0011] The sensor transmits rotating speed signal to the control unit, and the control unit transmits control signal to the driving unit.

[0012] Optionally, the sensor calculates the rotating speed of the first gear and the first rotor shaft by monitoring the number of teeth of the first gear rotating per minute, and the calculation formula is: R=60 / z (rpm).

[0013] Wherein, R is the rotating speed of the first rotor shaft, and z is the number of teeth of the first gear.

[0014] Optionally, the sensor monitors the rotation speed range of the first rotor shaft, R min ~ R max ;

[0015] wherein R min = 60 / z (rpm);

[0016] wherein R max = 1.2x10 6 / z (rpm);

[0017] wherein R min is the minimum rotation speed of the first rotor shaft, R max is the maximum rotation speed of the first rotor shaft, and z is the number of teeth of the first gear.

[0018] Optionally, the modulus of the first gear is 1.5-2.5.

[0019] Optionally, the distance between the sensing surface of the sensor and the addendum circle of the first gear is less than 6 mm.

[0020] Optionally, the vacuum pump unit comprises a body, a front mounting portion and a rear mounting portion, the front mounting portion is arranged at the front end of the body, the rear mounting portion is arranged at the rear end of the body, and the driving unit is arranged on the front mounting portion or the rear mounting portion.

[0021] At least part of the first rotor shaft is arranged to rotate in the body, and the front end or the rear end of the first rotor shaft is in transmission connection with the output shaft of the driving unit.

[0022] Optionally, the body comprises a pump body, a front end plate and a rear end plate, the front end plate is sealingly connected to the front end of the pump body, the rear end plate is sealingly connected to the rear end of the pump body, and the first rotor shaft is in rotational connection with the front end plate and the rear end plate.

[0023] Optionally, the first gear is arranged at the front end or the rear end of the first rotor shaft and located in the front mounting portion or the rear mounting portion.

[0024] An installation opening is arranged on the front mounting portion or the rear mounting portion relative to the first gear, and the sensor is installed at the installation opening and extends into the front mounting portion or the rear mounting portion.

[0025] Optionally, the vacuum pump unit further comprises a second rotor shaft, and a second gear is sleeved on the second rotor shaft.

[0026] The first gear and the second gear are in transmission connection, so that the first rotor shaft and the second rotor shaft rotate synchronously.

[0027] The beneficial effects of the vacuum pump rotating speed monitoring device provided by the embodiment of the utility model include:

[0028] By setting the sensor and the first gear sleeved on the first rotor shaft, the first gear rotates synchronously with the first rotor shaft and the output shaft of the driving unit, and the sensor monitors the rotating speed of the first rotor shaft and the rotating speed of the driving unit by monitoring the first gear; thus, the rotating speed of the driving unit is monitored by the operator, so that the working state of the vacuum pump unit is more accurately controlled, the pumping efficiency of the vacuum pump unit is improved, and the energy consumption is reduced; at the same time, the first gear and the sensor can be combined with the existing vacuum pump unit, are not afraid of the working environment of the semiconductor vacuum pump unit, can be applied to the working environment in the vacuum environment and the oil pollution environment, and are good in economy. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment, and it should be understood that the following drawings only show some embodiments of the utility model, and should not be regarded as the limitation to the scope, and for the ordinary skilled in the art, other related drawings can be obtained without the creative labor on the premise of the drawings.

[0030] Figure 1 The structure diagram of the vacuum pump rotating speed monitoring device provided by the embodiment is shown in the figure.

[0031] Figure 2 The first perspective view of the vacuum pump rotating speed monitoring device provided by the embodiment is shown in the figure.

[0032] Figure 3 The second perspective view of the vacuum pump rotating speed monitoring device provided by the embodiment is shown in the figure.

[0033] Figure 4 The schematic diagram of the vacuum pump rotating speed monitoring device and the control unit provided by the embodiment is shown in the figure.

[0034] Figure 5 The relationship diagram of the distance of the sensor sensing surface relative to the first gear tooth top circle and the first gear modulus provided by the embodiment is shown in the figure.

[0035] Figure: 010-vacuum pump rotating speed monitoring device; 100-vacuum pump unit; 110-first rotor shaft; 120-first gear; 130-second rotor shaft; 140-second gear; 150-body; 151-pump body; 152-front end plate; 153-rear end plate; 154-cavity; 160-front mounting part; 161-front mounting port; 170-rear mounting part; 200-driving unit; 210-output shaft; 300-sensor; 400-control unit. DETAILED DESCRIPTION

[0036] The inventor found that the water-cooled sealing motor in the semiconductor dry vacuum pump system is difficult to detect the motor speed because the motor cavity is connected with the vacuum pump cavity, and the vacuum degree of the motor cavity is synchronous with the connected cavity of the vacuum pump.

[0037] To solve the above problems, the utility model provides a kind of vacuum pump speed monitoring device 010, it can in the working process of vacuum pump unit 100, by monitoring the real-time speed of first gear 120 to monitor the real-time speed of first rotor shaft 110 and drive unit 200, so as to improve the above problems.

[0038] To make the purpose, technical scheme and advantage of the embodiments of the utility model more clear, the technical scheme in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all. The components of the embodiments of the utility model described and shown in the drawings can be arranged and designed in various configurations.

[0039] Therefore, the detailed description of the embodiments of the utility model provided in the drawings below is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the utility model.

[0040] It should be noted that: similar signs and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0041] In the description of the utility model, it should be noted that if the terms "up", "down", "in", "out" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship of the utility model product in use, only for the convenience of describing the utility model and simplifying the description, and not indicating or implying that the indicated device or element must have a particular orientation, configuration and operation, therefore, it cannot be understood as a limitation on the utility model.

[0042] In addition, if the terms "first", "second" and the like appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0043] It should be noted that the features in the embodiments of the utility model can be combined with each other without conflict.

[0044] The following describes in detail the overall structure, working principle, and technical effects of the vacuum pump speed monitoring device 010 provided by this utility model through embodiments and in conjunction with the accompanying drawings.

[0045] This utility model proposes a vacuum pump speed monitoring device 010, which is applied to a vacuum pump. During the operation of the vacuum pump unit 100, it can monitor the real-time speed of the first rotor shaft 110 and the drive unit 200 by monitoring the real-time speed of the first gear 120.

[0046] Please refer to Figure 1 The present invention proposes a vacuum pump speed monitoring device 010, comprising: a vacuum pump unit 100, a drive unit 200, and a sensor 300; the vacuum pump unit 100 includes a first rotor shaft 110, on which a first gear 120 is sleeved; the drive unit 200 is used to drive the vacuum pump unit 100 to work, and the output shaft 210 of the drive unit 200 is connected to the first rotor shaft 110 for transmission; the sensor 300 is disposed on the vacuum pump unit 100 and disposed relative to the first gear 120, so that the sensor 300 monitors the speed of the first rotor shaft 110 by monitoring the first gear 120.

[0047] It is understood that the output shaft 210 of the drive unit 200 is connected to the first rotor shaft 110, so the drive unit 200 drives the vacuum pump unit 100 to work through the first rotor shaft 110. By setting the sensor 300 and the first gear 120 sleeved on the first rotor shaft 110, the first gear 120 rotates synchronously with the first rotor shaft 110 and the output shaft 210 of the drive unit 200. The sensor 300 monitors the rotational speed of the first rotor shaft 110 and the rotational speed of the drive unit 200 by monitoring the rotational speed of the first gear 120. This setting makes it convenient for operators to monitor the rotational speed of the drive unit 200, thereby more accurately controlling the working state of the vacuum pump unit 100, improving the pumping efficiency of the vacuum pump unit 100, and reducing energy consumption. At the same time, the first gear 120 and the sensor 300 can be combined with existing vacuum pump units, are not afraid of the working environment of the semiconductor vacuum pump unit 100, and can be used in vacuum environments and oily environments, and are economical.

[0048] In this embodiment, the vacuum pump speed monitoring device 010 includes a drive unit 200.

[0049] Please refer to Figure 1 and Figure 2 The output shaft 210 of the drive unit 200 is connected to the first rotor shaft 110 and is used to drive the vacuum pump unit 100 to work.

[0050] Optionally, the drive unit 200 can be a motor structure with an output shaft 210, such as a water-cooled sealed motor.

[0051] Optionally, the output shaft 210 of the drive unit 200 and the first rotor shaft 110 can be connected by a coupling.

[0052] In this embodiment, please refer to Figure 1 The vacuum pump speed monitoring device 010 includes a vacuum pump unit 100.

[0053] The vacuum pump unit 100 is used to discharge gas out of the pump by creating a volume change through rotation of an eccentric rotor within the pump chamber.

[0054] Optionally, the vacuum pump unit 100 can be a dry vacuum pump, a dry semiconductor vacuum pump, a screw vacuum pump, etc.

[0055] In this embodiment, please refer to Figure 2 and Figure 3 The vacuum pump unit 100 includes a first rotor shaft 110 and a second rotor shaft 130. A first gear 120 is fixedly mounted on the first rotor shaft 110, and a second gear 140 is fixedly mounted on the second rotor shaft 130. The first rotor shaft 110 is driveably connected to the output shaft 210 of the drive unit 200, so that the drive unit 200 drives the vacuum pump unit 100 to operate via the first rotor shaft 110. The first gear 120 and the second gear 140 are driveably connected, so that the first rotor shaft 110 and the second rotor shaft 130 rotate synchronously.

[0056] Correspondingly, the first rotor shaft 110 and the second rotor shaft 130 are provided with multi-stage eccentric rotors, and the eccentric rotors of the first rotor shaft 110 and the second rotor shaft 130 are meshed and located in the multi-stage chambers 154 of the body 150.

[0057] In this embodiment, please refer to Figure 2 The vacuum pump unit 100 includes a body 150, a front mounting portion 160, and a rear mounting portion 170. The front mounting portion 160 is located at the front end of the body 150, and the rear mounting portion 170 is located at the rear end of the body 150. The body 150 is sealed to the front mounting portion 160 and the rear mounting portion 170. At least a portion of the first rotor shaft 110 is rotatably disposed within the body 150, and both ends of the first rotor shaft 110 extend out of the body 150 and are rotatably connected to the body 150.

[0058] In this embodiment, please refer to Figure 1 and Figure 2 The drive unit 200 is mounted on the front mounting portion 160. The front end of the first rotor shaft 110 is connected to the output shaft 210 of the drive unit 200. The front mounting portion 160 is provided with a front mounting port 161 relative to the first rotor shaft 110, and the drive unit 200 is mounted on the front mounting port 161.

[0059] Of course, in other embodiments, the rear end of the first rotor shaft 110 is in driving connection with the output shaft 210 of the driving unit 200, and the driving unit 200 is arranged at the rear mounting port, and the rear mounting port is arranged on the rear mounting portion 170.

[0060] It can be understood that the cavity of the driving unit 200 is connected with the pump cavity of the driving pump unit, and the vacuum degree of the cavity of the driving unit 200 is synchronously raised and lowered with the vacuum degree of the pump cavity of the driving pump unit, so that it is difficult to detect the motor speed. By arranging the sensor 300 relative to the first gear 120 on the first driving member, the sensor 300 monitors the first gear 120, and the rotation speeds of the synchronously rotating first gear 120, first rotor shaft 110 and output shaft 210 of the driving unit 200 are obtained through a corresponding calculation formula, so as to realize monitoring and control of the rotation speed of the driving unit 200. On the one hand, such arrangement can be perfectly combined with the existing vacuum pump control system, and is economical. On the other hand, it is not afraid of the working environment of the semiconductor vacuum pump, and is suitable for vacuum environment and oil pollution environment.

[0061] In the embodiment, please refer to Figure 2 The body 150 includes a pump body 151, a front end plate 152 and a rear end plate 153, the front end plate 152 is sealingly connected to the front end of the pump body 151, the rear end plate 153 is sealingly connected to the rear end of the pump body 151, and the first rotor shaft 110 and the second rotor shaft 130 are in rotary connection with the front end plate 152 and the rear end plate 153. It can be understood that the front end plate 152, the pump body 151 and the rear end plate 153 are sealingly connected to form a sealed cavity 154, and the body 150 is further provided with an air inlet and an air outlet connected with the cavity 154.

[0062] Among them, the front end plate 152 and the rear end plate 153 are both provided with two connecting ports, and the two connecting ports are both provided with bearings, and the first rotor shaft 110 and the second rotor shaft 130 pass through the two bearings respectively, thereby realizing rotary connection.

[0063] Optionally, the body 150 is provided with several stages of cavities 154.

[0064] Optionally, the first gear 120 can be arranged at the front end of the first rotor shaft 110 or the rear end of the first rotor shaft 110, and the sensor 300 can be arranged on the front mounting portion 160 or the rear mounting portion 170.

[0065] It can be understood that the output shaft 210 of the driving unit 200 drives the first rotor shaft 110 to rotate, the first rotor shaft 110 drives the first gear 120 to rotate synchronously, the first gear 120 drives the second gear 140 to rotate synchronously, and the second gear 140 drives the second rotor shaft 130 to rotate synchronously. Further, the first rotor shaft 110 and the second rotor shaft 130 rotate synchronously to drive the plurality of eccentric rotors arranged thereon to mesh with the gas in the plurality of chambers 154 of the compression body 150.

[0066] In the embodiment, the modulus of the first gear 120 is 1.5-2.5, for example, 1.5, 2, 2.5, etc.

[0067] In the embodiment, please refer to Figure 1 , the vacuum pump rotating speed monitoring device 010 comprises a sensor 300.

[0068] The sensor 300 can stably obtain the rotating speed data of the first gear 120 in real time. Optionally, the sensor 300 can be a Hall effect rotating speed sensor 300.

[0069] In the embodiment, please refer to Figure 3 , the front mounting portion 160 or the rear mounting portion 170 is provided with a mounting opening opposite the first gear 120, and the sensor 300 is mounted at the mounting opening and extends into the front mounting portion 160. The sensing surface of the sensor 300 is opposite the addendum circle of the first gear 120, that is, the bottom sensing surface of the sensor 300 is opposite the top addendum circle of the first gear 120.

[0070] In the embodiment, please refer to Figure 3 , the distance between the sensing surface of the sensor 300 and the addendum circle of the first gear 120 is less than 6 mm. This can ensure that the data of the first gear 120 can be accurately obtained.

[0071] Please refer to Figure 5 , Figure 5 is a corresponding relationship diagram of the distance between the sensing surface of the sensor 300 and the addendum circle of the first gear 120 and the modulus of the first gear 120. The smaller the modulus of the first gear 120 is, the closer the distance between the sensing surface of the sensor 300 and the addendum circle of the first gear 120 is; on the contrary, the larger the modulus of the first gear 120 is, the farther the distance between the sensing surface of the sensor 300 and the addendum circle of the first gear 120 can be set. It can be understood that selecting a corresponding distance and the modulus of the first gear 120 can ensure that the data of the first gear 120 can be accurately obtained.

[0072] In the embodiment, the sensor 300 calculates the rotating speed of the first gear 120 and the first rotor shaft 110 by monitoring the number of teeth of the first gear 120 rotating per minute, and the calculation formula is R=60 / z (rpm).

[0073] Wherein, R is the rotating speed of the first rotor shaft 110, and z is the number of teeth of the first gear 120.

[0074] It can be understood that the sensor 300 monitors the number of teeth rotated per minute of the first gear 120, and calculates the rotating speed of the first rotor shaft 110 through the above calculation formula.

[0075] In the embodiment, the rotating speed range of the sensor 300 monitoring the first rotor shaft 110 is Rmin~Rmax;

[0076] Wherein, Rmin=60 / z (rpm);

[0077] Wherein, Rmax=1.2x106 / z (rpm);

[0078] Wherein, Rmin is the minimum rotating speed of the first rotor shaft 110, Rmax is the maximum rotating speed of the first rotor shaft 110, and z is the number of teeth of the first gear 120.

[0079] It can be understood that the monitoring range of the sensor 300 can completely cover the range from static to the limit rotating speed of the semiconductor vacuum pump unit 100 in use, and has strong applicability.

[0080] In the embodiment, please refer to Figure 4 , the vacuum pump rotating speed monitoring device 010 comprises a control unit 400.

[0081] In the embodiment, the control unit 400 is electrically connected with the driving unit 200 and the sensor 300; the sensor 300 transmits the rotating speed signal to the control unit 400, and the control unit 400 transmits the control signal to the driving unit 200.

[0082] Wherein, the four lead wires of the sensor 300 are correctly connected with the corresponding wire harness in the control unit 400, so that the sensor 300 is electrically connected with the control unit 400 and realizes the communication function.

[0083] In the embodiment, the control unit 400 is provided with a control program, which can compare the real-time rotating speed S of the first gear 120 with the set parameters in the control program in real time, and regulate and control the rotor shaft of the vacuum pump unit 100 according to the combination of various parameters such as the category of the protection mechanism and the classification of the protection degree in the control unit 400, so as to reduce the input power frequency of the driving unit 200, thereby reducing the rotating speed of the vacuum pump unit 100, reducing the power consumption, preventing the vacuum pump unit 100 from overheating and crashing, improving the input power frequency of the driving unit 200, thereby improving the rotating speed of the vacuum pump unit 100, improving the pumping efficiency of the vacuum pump unit 100, shortening the production rhythm of the user, and improving the use efficiency of the vacuum pump unit 100.

[0084] It can be understood that the sensor 300 transmits the monitored rotation speed signal information to the control unit 400, the control unit 400 calculates the rotation speed of the first rotor shaft 110 after decoding and provides the rotation speed to the operator; at the same time, the control unit 400 can control the driving unit 200 through corresponding control parameters and control logic. Of course, the operator can also control the driving unit 200 by calculating the rotation speed through the control unit 400. In this way, the working rotation speed of the vacuum pump unit 100 and the driving unit 200 can be measured and monitored in real time, the ideal rotation speed of the driving unit 200 is controlled and adjusted in combination with the vacuum degree of the corresponding rotation speed point of the vacuum pump unit 100 and the temperature of the pump body 151 of the vacuum pump, the working efficiency of the vacuum pump unit 100 is improved, the production rhythm is compressed, the energy consumption is reduced, the maintenance time and service life of the vacuum pump unit 100 are prolonged; at the same time, the real-time protection function is also possessed.

[0085] The working principle and process of the vacuum pump rotation speed monitoring device 010 provided by the embodiment of the utility model are as follows: the sensor 300 monitors the number of teeth rotated per minute of the first gear 120, and transmits the corresponding rotation speed signal to the control unit 400, the control unit 400 decodes and calculates the rotation speed of the first rotor shaft 110 through the above calculation formula. The control unit 400 controls the driving unit 200 through corresponding control parameters and control logic; or the operator calculates the rotation speed through the control unit 400 to control the working rotation speed of the driving unit 200.

[0086] In summary, the vacuum pump rotation speed monitoring device 010 provided by the embodiment of the utility model sets the sensor 300 and the first gear 120 sleeved on the first rotor shaft 110, the first gear 120 rotates synchronously with the output shaft 210 of the driving unit 200 and the first rotor shaft 110, and the sensor 300 monitors the rotation speed of the first rotor shaft 110 and the rotation speed of the driving unit 200 by monitoring the first gear 120; in this way, the operator can conveniently monitor the rotation speed of the driving unit 200, so that the working state of the vacuum pump unit 100 is more accurately controlled, the gas pumping efficiency of the vacuum pump unit 100 is improved, and the energy consumption is reduced; at the same time, the first gear 120 and the sensor 300 can be combined with the existing vacuum pump unit, are not afraid of the working environment of the semiconductor vacuum pump unit 100, can be applied to the working environment in the vacuum environment and the oil pollution environment, and are economical.

[0087] The above is only a specific implementation manner of the utility model, but the protection scope of the utility model is not limited to this, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. A vacuum pump rotational speed monitoring device, characterized by, The application relates to a vacuum pump rotating speed monitoring device (010), which comprises the following parts: a vacuum pump unit (100) comprising a first rotor shaft (110) with a first gear (120) sleeved thereon; a driving unit (200) for driving the vacuum pump unit (100) to work, wherein an output shaft (210) of the driving unit (200) is in transmission connection with the first rotor shaft (110); a sensor (300) arranged on the vacuum pump unit (100) and relative to the first gear (120), so that the sensor (300) monitors the rotating speed of the first rotor shaft (110) by monitoring the first gear (120).

2. The vacuum pump speed monitoring apparatus of claim 1, wherein The vacuum pump rotating speed monitoring device (010) further comprises a control unit (400) in electrical connection with the driving unit (200) and the sensor (300); The sensor (300) transmits a rotating speed signal to the control unit (400), and the control unit (400) transmits a control signal to the driving unit (200).

3. The vacuum pump speed monitoring apparatus of claim 1, wherein The sensor (300) calculates the rotating speed of the first gear (120) and the first rotor shaft (110) by monitoring the number of teeth of the first gear (120) rotating per minute, and the calculation formula is R=60 / z (rpm); wherein R is the rotating speed of the first rotor shaft (110), and z is the number of teeth of the first gear (120).

4. The vacuum pump speed monitoring apparatus of claim 1, wherein The sensor (300) monitors the rotational speed of the first rotor shaft (110) in a range R min ~ R max ; wherein R min = 60 / z (rpm); wherein R max = 1.2 x 10 6 / z (rpm); wherein R min is the minimum rotational speed of the first rotor shaft (110), R max is the maximum rotational speed of the first rotor shaft (110), and z is the number of teeth of the first gearwheel (120).

5. The vacuum pump speed monitoring apparatus of claim 1, wherein The modulus of the first gear (120) is 1.5-2.

5.

6. The vacuum pump speed monitoring apparatus of claim 1, wherein The distance between the sensing surface of the sensor (300) and the addendum circle of the first gear (120) is less than 6 mm.

7. The vacuum pump speed monitoring apparatus of claim 1, wherein The vacuum pump unit (100) comprises a body (150), a front mounting part (160) and a rear mounting part (170), the front mounting part (160) is arranged at the front end of the body (150), the rear mounting part (170) is arranged at the rear end of the body (150), and the driving unit (200) is arranged on the front mounting part (160) or the rear mounting part (170); At least part of the first rotor shaft (110) is arranged to rotate in the body (150), and the front end or the rear end of the first rotor shaft (110) is in transmission connection with the output shaft (210) of the driving unit (200).

8. A vacuum pump speed monitoring device according to claim 7, characterised in that, The body (150) comprises a pump body (151), a front end plate (152) and a rear end plate (153), the front end plate (152) is sealingly connected to the front end of the pump body (151), the rear end plate (153) is sealingly connected to the rear end of the pump body (151), and the first rotor shaft (110) is in rotary connection with the front end plate (152) and the rear end plate (153).

9. The vacuum pump speed monitoring apparatus of claim 7, wherein, The first gear (120) is arranged at the front end or the rear end of the first rotor shaft (110) and located in the front mounting part (160) or the rear mounting part (170). The front mounting portion (160) or the rear mounting portion (170) is provided with a mounting opening opposite the first gear (120), and the sensor (300) is mounted at the mounting opening and extends into the front mounting portion (160) or the rear mounting portion (170).

10. The vacuum pump speed monitoring apparatus of claim 1, wherein, The vacuum pump unit (100) further comprises a second rotor shaft (130), and a second gear (140) is sleeved on the second rotor shaft (130). The first gear (120) is in transmission connection with the second gear (140), so that the first rotor shaft (110) and the second rotor shaft (130) rotate synchronously.

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