Inflation mechanism of high-vacuum exhaust table

Abstract

The utility model discloses an inflating mechanism of a high-vacuum exhaust table, which relates to the technical field of high-vacuum exhaust and comprises an operating table and a manual button table mounted on the front side of the operating table. The pressure sensor is mounted on one side of the operation table; the inflation assembly is installed on the same side of the pressure sensors, the inflation assembly is connected with one pressure sensor, and the pressure sensors are used for controlling the air inlet rate of the inflation assembly; and the inflation and exhaust system is connected with the high-vacuum system through a connecting pipeline. Through the arrangement mode that the pressure sensor, the inflation assembly, the inflation and exhaust system and the high-vacuum system are matched, pressure change of gas in the high-vacuum exhaust table can be conveniently monitored in real time, stability and accuracy of the pressure in the inflation process are guaranteed, accurate control over the inflation rate is conveniently achieved, damage in the inflation process is reduced, and the safety of the high-vacuum exhaust table is improved. And the reliability of the high-vacuum exhaust table in the actual operation process is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to high vacuum exhaust technology field especially relates to a kind of high vacuum exhaust platform's inflation mechanism. BACKGROUND

[0002] Ultra-high vacuum exhaust platform is a kind of scientific instrument for physics field, with the development of modern science and technology, the requirement of vacuum technology is higher and higher, and the vacuum technology requirement of high vacuum exhaust platform is also higher and higher.

[0003] Application No.201920238822.1 discloses a kind of with inflation function's ultra-high vacuum automatic exhaust platform, including rack, the rack inner side is equipped with detection component, inflation and exhaust component and vacuum component respectively, the inflation component and vacuum component are communicated with detection component by connecting pipeline, the detection component includes detection table, the detection table side is equipped with several station stop valve, the inflation and exhaust component includes inflation stainless steel connector pipe, inflation pneumatic stop valve and exhaust pneumatic stop valve, the inflation pneumatic stop valve is communicated with inflation stainless steel connector pipe by micropore pipeline, the exhaust pneumatic stop valve is communicated with inflation stainless steel connector pipe by large hole exhaust pipe, the inflation pneumatic stop valve and exhaust pneumatic stop valve are communicated with detection table by connecting pipeline, the vacuum component includes dry pump, turbo molecular pump and ion pump. Ultra-high vacuum automatic exhaust platform can obtain ultra-high vacuum, and automatic inflation of accurate control to each station can be realized simultaneously.

[0004] But automatic inflation, pneumatic stop valve can control inflation, but when inflation, due to the flow of gas in pipeline, the pressure of gas exists fluctuation, inflation rate is different, in the process of inflation, pressure is too high or too low, it can cause damage to ultra-high vacuum exhaust platform and its internal components, affect the reliability of high vacuum exhaust platform in actual operation process. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a kind of high vacuum exhaust platform's inflation mechanism to solve the problems raised in the above background technology.

[0006] To achieve the above object, the utility model provides the following technical scheme: a kind of high vacuum exhaust platform's inflation mechanism, comprising:

[0007] Operation platform;

[0008] Manual button platform, the manual button platform is installed in the front of operation platform;

[0009] Further comprising:

[0010] Pressure sensor, the pressure sensor is installed in one side of operation platform;

[0011] An inflation assembly is installed on the same side of the pressure sensor, the inflation assembly is connected with one of the pressure sensors, and the pressure sensor is used for controlling the air inlet rate of the inflation assembly.

[0012] The charging and exhausting system is connected with the high vacuum system through a connecting pipeline, and the charging and exhausting system is used for adjusting the high vacuum degree gas of the high vacuum system.

[0013] Preferably, the charging and exhausting system is connected with another plurality of pressure sensors, and the pressure sensors are used for capturing the pressure fluctuation of the gas flow in the charging and exhausting system.

[0014] Preferably, the inflation assembly comprises:

[0015] A stainless steel pipe is fixedly inserted into one side of the operation table.

[0016] A on-off electromagnetic valve is installed on the stainless steel pipe.

[0017] A hydrogen concentration meter is installed on the side of the operation table, and the hydrogen concentration meter is used for monitoring and measuring the hydrogen gas at the charging end of the high vacuum system.

[0018] A flow regulating valve is fixedly installed on the side of the operation table.

[0019] A backfire prevention valve is installed at the charging end of the high vacuum system.

[0020] Preferably, the backfire prevention valve is fixedly installed on one side of the flow regulating valve, and the backfire prevention valve, the flow regulating valve and the hydrogen concentration meter are connected in a common cavity through a connecting gas pipe.

[0021] Preferably, the hydrogen concentration meter is connected with the on-off electromagnetic valve through a connecting gas pipe, and the stainless steel pipe is connected with one of the pressure sensors.

[0022] Preferably, the high vacuum system comprises:

[0023] A molecular pump is installed directly below the operation table, and the molecular pump is used for extracting gas molecules from the high vacuum area.

[0024] A backing pump is installed at one end of the molecular pump, and the backing pump is used for primary gas extraction.

[0025] An auxiliary pump is installed at the other end of the molecular pump, and the auxiliary pump is used for extracting special gas.

[0026] The technical effects and advantages of the utility model are as follows:

[0027] The utility model discloses a pressure sensor, inflation assembly, charge and exhaust system and high vacuum system cooperate with the setting mode of the setting mode, utilize pressure sensor, and it is convenient for real -time monitoring high vacuum exhaust platform in gas pressure transformation, ensure the stability and precision of pressure in the inflation process, and it is convenient for realizing the precision control of inflation rate, reduces the damage in the inflation process, improves the reliability of high vacuum exhaust platform in actual operation process. BRIEF DESCRIPTION OF DRAWINGS

[0028] Fig. 1 It is whole structure schematic diagram of the utility model.

[0029] Fig. 2 It is whole structure schematic diagram of the utility model.

[0030] Fig. 3 It is whole structure schematic diagram of the utility model.

[0031] In the drawing: 1, operation platform;2, manual button platform;3, pressure sensor;4, inflation assembly;41, stainless steel pipe;42, on-off electromagnetic valve;43, hydrogen concentration meter;44, flow regulating valve;45, anti-backfire valve;5, charge and exhaust system;6, high vacuum system;61, molecular pump;62, forepump;63, auxiliary pump. DETAILED DESCRIPTION

[0032] The technical scheme in the embodiments of the utility model will be described clearly and completely below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0033] The utility model provides a kind of inflation mechanism of high vacuum exhaust platform as shown in Figs. 1-3 Including:

[0034] Operation platform 1 and manual button platform 2, manual button platform 2 is installed in the front of operation platform 1, the setting of manual button platform 2 makes it more convenient to manually control the control button of high vacuum exhaust platform;

[0035] The pressure sensor 3, the air charging assembly 4, the air charging and discharging system 5 and the high vacuum system 6 are arranged on one side of the operation platform 1, the air charging assembly 4 is connected with one of the pressure sensors 3, the pressure sensor 3 is used for controlling the air charging rate of the air charging assembly 4, the air charging and discharging system 5 is connected with the high vacuum system 6 through a connecting pipeline, the air charging and discharging system 5 is used for adjusting the high vacuum degree gas of the high vacuum system 6, and the air charging and discharging system 5 is connected with another plurality of pressure sensors 3, and the pressure sensor 3 is used for capturing the pressure fluctuation of the gas flow in the air charging and discharging system 5.

[0036] Specifically, the air charging assembly 4 comprises a stainless steel pipe 41, an on-off electromagnetic valve 42, a hydrogen concentration meter 43, a flow regulating valve 44 and an anti-backfire valve 45, the stainless steel pipe 41 is fixedly inserted into one side of the operation platform 1, the on-off electromagnetic valve 42 is arranged on the stainless steel pipe 41, the hydrogen concentration meter 43 is arranged on the side of the operation platform 1, the hydrogen concentration meter 43 is used for monitoring and measuring the hydrogen gas at the air charging end of the high vacuum system 6, and the hydrogen concentration meter 43 is mainly used for monitoring and measuring the hydrogen concentration at the air charging end of the ultra-high vacuum exhaust platform, in the air charging process, the hydrogen concentration meter 43 can transmit the real-time gas concentration data to the control system on the operation platform 1, thereby helping the operator to accurately control the gas type and concentration in the air charging process, the flow regulating valve 44 is fixedly arranged on the side of the operation platform 1, the flow regulating valve 44 is used for controlling the flow rate of the air charging at the air charging end of the ultra-high vacuum exhaust platform, thereby ensuring the stability and controllability of the air charging process, the anti-backfire valve 45 is arranged at the air charging end of the high vacuum system 6, the anti-backfire valve 45 is fixedly arranged on one side of the flow regulating valve 44, the anti-backfire valve 45, the flow regulating valve 44 and the hydrogen concentration meter 43 are connected through a connecting gas pipe, and the anti-backfire valve 45 is mainly used for preventing the backfire phenomenon of the gas in the pipeline, that is, preventing the gas from suddenly burning or exploding due to pressure change or temperature change in the pipeline. At the air charging end of the high vacuum exhaust platform, the anti-backfire valve 45 can ensure the safety of the air charging process and prevent fire or explosion accidents caused by gas leakage or improper operation.

[0037] The hydrogen concentration meter 43 is connected with the on-off electromagnetic valve 42 through a connecting gas pipe, the stainless steel pipe 41 is connected with one of the pressure sensors 3, the pressure sensor 3 can capture the pressure fluctuation of the gas in the stainless steel pipe 41, and the pressure sensor 3 can be connected with the control system on the operation platform 1, so as to realize accurate control of the air charging rate and reduce the error damage caused by pressure fluctuation.

[0038] Further, the high vacuum system 6 comprises a molecular pump 61, a backing pump 62 and an auxiliary pump 63, the molecular pump 61 is installed right below the operation table 1, the molecular pump 61 is connected with the charging and discharging system 5 through a connecting pipe, the molecular pump 61 is used for extracting gas molecules from the high vacuum area, the backing pump 62 is installed at one end of the molecular pump 61, the stainless steel pipe 41 is connected with the gas inlet end of the backing pump 62, the backing pump 62 is used for primary gas extraction, the auxiliary pump 63 is installed at the other end of the molecular pump 61, the auxiliary pump 63 is used for extraction of special gas, in the working process, the backing pump 62 first carries out pre-extraction, so that the gas in the charging assembly 4 enters the inner cavity of the backing pump 62, the gas pressure is reduced to a certain degree, then the molecular pump 61 starts to work, further extracts the residual gas molecules, in this process, the auxiliary pump 63 can process some special gas or impurities according to the needs, so that the high vacuum exhaust table can stably reach and maintain the required ultra-high vacuum degree for charging and discharging.

[0039] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and not for limiting the present application, although the foregoing detailed description of the present application is made with reference to the foregoing embodiments, for the skilled in the art, it still can be modified, or part of the technical features of the equivalent replacement, within the spirit and principles of the present application, any modification, equivalent replacement, improvement, etc., should be included in the scope of the present application.

Claims

1. A high vacuum exhaust station's inflation mechanism, comprising: an operation table (1); a manual button table (2) installed on the front of the operation table (1); characterized in that it further comprises: a pressure sensor (3) installed on one side of the operation table (1); an inflation assembly (4) installed on the same side of the pressure sensor (3), connected to one of the pressure sensors (3) for controlling the air inflow rate of the inflation assembly (4); a charge-exhaust system (5) and a high vacuum system (6) connected through a connecting pipeline, the charge-exhaust system (5) being used for adjusting the high vacuum degree of the high vacuum system (6).

2. The gas filling mechanism of the high vacuum exhaust station according to claim 1, wherein, The charge-exhaust system (5) is connected to another plurality of pressure sensors (3) for capturing the pressure fluctuations of the gas flow in the charge-exhaust system (5).

3. The gas filling mechanism of the high vacuum exhaust station according to claim 1, wherein, The inflation assembly (4) comprises: a stainless steel pipe (41) fixedly inserted into one side of the operation table (1); an on-off electromagnetic valve (42) installed on the stainless steel pipe (41); a hydrogen concentration meter (43) installed on the side of the operation table (1), used for monitoring and measuring the hydrogen gas at the inflation end of the high vacuum system (6); a flow regulating valve (44) fixed on the side of the operation table (1); a backfire prevention valve (45) installed at the inflation end of the high vacuum system (6).

4. The gas filling mechanism of the high vacuum exhaust station according to claim 3, wherein, The backfire prevention valve (45) is fixed on one side of the flow regulating valve (44), and the backfire prevention valve (45), the flow regulating valve (44), and the hydrogen concentration meter (43) are connected in a common cavity through a connecting gas pipe.

5. The gas filling mechanism of the high vacuum exhaust station according to claim 3, wherein, The hydrogen concentration meter (43) is connected to the on-off electromagnetic valve (42) through a connecting gas pipe, and the stainless steel pipe (41) is connected to one of the pressure sensors (3).

6. The gas filling mechanism of a high vacuum exhaust station according to claim 1, wherein, The high vacuum system (6) comprises: a molecular pump (61) installed directly below the operation table (1), used for extracting gas molecules from the high vacuum area; a backing pump (62) installed at one end of the molecular pump (61), used for primary gas extraction; an auxiliary pump (63) installed at the other end of the molecular pump (61), used for extracting special gases.

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