Overhaul device for exhaust duct

Abstract

The embodiment of the utility model provides a maintenance device for an exhaust duct, and relates to the technical field of pipeline maintenance. The overhauling device of the exhaust air pipe comprises the exhaust air pipe and an overhauling pipe. The overhauling pipe is connected with the exhaust pipe, the overhauling robot can enter the exhaust pipe through the overhauling pipe so as to be used for overhauling a first valve and a second valve which are arranged in the exhaust pipe and the overhauling pipe in the extending direction of the overhauling pipe in a spaced mode, and a buffering bin is formed between the first valve and the second valve; the first valve and the second valve are used for controlling communication and isolation between the surge bin and the outside. And through the arrangement of the first valve and the second valve in the overhaul pipe, it can be guaranteed that the dust exhaust system can overhaul the exhaust pipe in the normal process, and normal work of the exhaust system cannot be affected.

Description

TECHNICAL FIELD

[0001] The utility model relates to a pipeline overhauling technical field, specifically, relate to a kind of exhaust air pipe's overhauling device. BACKGROUND

[0002] The chemical and special gas used in the production process of semiconductor are continuously generating process waste gas with complex components.In the process waste gas CVD dust exhaust system, there are a large amount of dust (main component SiO2), and a large amount of dust will be accumulated in the air pipe during long-term operation. In order to ensure the stable operation of the system, the dust accumulated in the CVD dust exhaust system air pipe needs to be cleaned regularly.

[0003] The inventor found that the existing exhaust air pipe maintenance is mostly arranged on the exhaust air pipe. When cleaning, production needs to be stopped to open the cleaning port for cleaning the exhaust air pipe, which affects normal production activities. UTILITY MODEL CONTENT

[0004] The utility model aims to provide an exhaust air pipe overhauling device, which can clean the exhaust air pipe without stopping production.

[0005] The embodiment of the utility model can be realized as follows:

[0006] In the first aspect, the utility model provides an exhaust air pipe overhauling device, which comprises:

[0007] Exhaust pipe;

[0008] Overhauling pipe, the overhauling pipe is connected with the exhaust pipe, and the overhauling robot can enter the exhaust pipe through the overhauling pipe;

[0009] Among them, the first valve and the second valve are arranged in the overhauling pipe along the extension direction of the overhauling pipe, the buffer bin is formed between the first valve and the second valve, and the buffer bin is isolated from the remaining pipeline of the overhauling pipe when the first valve and the second valve are closed.

[0010] The exhaust air pipe overhauling device provided by the embodiment of the utility model comprises an exhaust pipe and an overhauling pipe. The overhauling pipe is connected with the exhaust pipe, and the overhauling robot can enter the exhaust pipe through the overhauling pipe, so as to clean the exhaust pipe and the overhauling pipe. The first valve and the second valve are arranged in the overhauling pipe along the extension direction of the overhauling pipe, the buffer bin is formed between the first valve and the second valve, and the buffer bin is isolated from the remaining pipeline of the overhauling pipe when the first valve and the second valve are closed. Through the arrangement of the first valve and the second valve in the overhauling pipe, the dust exhaust system can be overhauled during normal operation, and the normal operation of the exhaust system will not be affected. DRAWING EXPLANATION

[0011] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those skilled in the art, other related drawings can be obtained without creative labor on the premise of the drawings.

[0012] Figure 1 The structural schematic diagram of the exhaust air duct maintenance device provided by the embodiments of the present application is shown in the figure.

[0013] Figure 2 The structural schematic diagram of the exhaust air duct maintenance device provided by the optional embodiments of the present application is shown in the figure.

[0014] Icon: 1 - exhaust air duct maintenance device; 100 - exhaust pipe; 110 - connecting pipe; 120 - third matching flange; 200 - maintenance pipe; 210 - first valve; 211 - first connecting flange; 220 - second valve; 221 - second connecting flange; 222 - third connecting flange; 230 - body; 231 - first matching flange; 232 - second matching flange; 240 - auxiliary pipe; 241 - fourth connecting flange; 245 - fifth connecting flange; 250 - buffer bin; 2 - maintenance robot. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0016] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of the present application.

[0017] It should be noted that: similar numbers and letters represent similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0018] In the description of the utility model, it needs to be explained that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the utility model product is used, it is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation on the utility model.

[0019] In addition, if the terms "first", "second" and the like are used only to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0020] It should be noted that the features in the embodiments of the utility model can be combined with each other without conflict.

[0021] The specific structure of the maintenance device 1 of the exhaust air duct provided by the utility model embodiment and the corresponding technical effects brought by it will be described in detail below with reference to the patent drawings.

[0022] Please refer to Figure 1 The maintenance device 1 of the exhaust air duct provided by the utility model embodiment comprises an exhaust duct 100 and a maintenance pipe 200. The maintenance pipe 200 is connected with the exhaust duct 100, and the maintenance robot 2 can enter the exhaust duct 100 through the maintenance pipe 200, so as to be used for the inside of the exhaust duct 100. The maintenance pipe 200 is provided with a first valve 210 and a second valve 220 which are spaced apart along the extension direction of the maintenance pipe 200, a buffer bin 250 is formed between the first valve 210 and the second valve 220, and the first valve 210 and the second valve 220 are used for controlling the communication and isolation of the buffer bin 250 and the outside, that is, when the first valve 210 and the second valve 220 are both closed, the buffer bin 250 is isolated from the remaining pipeline of the maintenance pipe 200.

[0023] It should be noted that the above-mentioned exhaust duct 100 is mainly applied to the dust exhaust system, and the maintenance robot is used for maintaining the inside of the exhaust duct. For example, the dust accumulation condition in the exhaust duct can be detected by the maintenance robot, and the accumulated dust in the exhaust duct can be removed, so as to solve the problem that the detection window is blocked by dust in the prior art and cannot be checked. It can also not need to stop for maintenance, improving the maintenance efficiency. Among them, the first valve 210 is farther away from the exhaust duct 100 than the second valve 220.

[0024] In the embodiment, by the arrangement of the first valve 210 and the second valve 220, in the exhaust system use state, in order to ensure that the pressure in the exhaust pipe 100 does not fluctuate sharply, ensure the normal use of the exhaust system, in the maintenance process, the first valve 210 can be opened, and the second valve 220 is in a closed state, so that the maintenance robot 2 enters the buffer bin 250 through the first valve 210, thereby ensuring the normal work of the exhaust pipe, and preventing harmful gas in the exhaust pipe from flowing out; then the first valve 210 is closed and the second valve 220 is opened, at this time the maintenance robot 2 can enter the exhaust pipe 100 through the second valve 220 to maintain the exhaust pipe 100, after the maintenance robot 2 enters the exhaust pipe 100, the second valve 220 can be closed. Further prevent harmful gas or dust in the exhaust pipe from entering the buffer bin, wherein the maintenance of the exhaust pipe 100 by the maintenance robot 2 can include but is not limited to cleaning the dust in the exhaust pipe 100.

[0025] After cleaning, the second valve 220 can be opened to facilitate the maintenance robot 2 to return from the exhaust pipe 100 to the buffer bin 250 of the maintenance pipe 200, and then the second valve 220 is closed and the first valve 210 is opened to facilitate the operator to take out the maintenance robot 2, therefore, by the exhaust pipe maintenance device 1 provided in the embodiment, the dust exhaust system can be maintained in the normal process, and the normal work of the exhaust system is not affected.

[0026] In the embodiment, the maintenance pipe 200 and the exhaust pipe 100 are detachably connected, and it can be understood that, since the maintenance pipe 200 and the exhaust pipe 100 are detachably connected, the operator can conveniently disassemble and assemble the maintenance pipe 200 and the exhaust pipe 100.

[0027] In detail, the maintenance pipe 200 includes a body 230, the two ends of the body 230 are respectively connected with the first valve 210 and the second valve 220, the body 230 has a pipe cavity for forming the buffer bin 250, and the end of the second valve 220 away from the body 230 is connected with the exhaust pipe 100, and it can be understood that, since the first valve 210 and the second valve 220 are respectively installed at the two ends of the body 230, the operator can conveniently maintain the first valve 210 or the second valve 220, which is helpful to close and open the buffer bin and facilitate the isolation and communication between the buffer bin and the outside.

[0028] It should be noted that in the embodiment, the second valve 220 can be detachably connected with the exhaust pipe 100, and it should be noted that the second valve 220 can be directly connected with the exhaust pipe 100 or indirectly connected with the exhaust pipe 100 through other structures.

[0029] Optionally, the maintenance pipe 200 is connected with the end of the exhaust pipe 100, that is, the maintenance pipe 200 can be installed at the end of the exhaust pipe 100, for example, the maintenance pipe 200 is installed at the end of the exhaust pipe 100, so as to facilitate the robot 2 to enter the end of the exhaust pipe 100 for maintenance.

[0030] Please refer to Figure 2 Optionally, in some other embodiments, the circumferential wall of the exhaust pipe 100 is provided with a connecting hole, and the maintenance pipe 200 is connected with the exhaust pipe 100 through the connecting hole. It can be understood that some exhaust pipes 100 are relatively long, and therefore, when the maintenance of the preset position in the exhaust pipe 100 is required and the preset position is far away from the end of the exhaust pipe 100, the efficiency of the robot 2 entering from the end of the exhaust pipe 100 to the preset position for maintenance is relatively low. Therefore, the connecting hole capable of being connected with the maintenance pipe 200 can be arranged on the circumferential wall of the exhaust pipe 100, so as to improve the maintenance efficiency of the maintenance pipe 200 for the exhaust pipe 100.

[0031] Of course, a plurality of connecting holes can be arranged on the outer circumferential wall of the exhaust pipe 100, and the plurality of connecting holes are uniformly arranged along the length direction of the exhaust pipe 100. It should be noted that the connecting holes not connected with the maintenance pipe 200 are in a closed state to avoid air leakage of the exhaust pipe 100.

[0032] It should be noted that, in order to ensure the air tightness and convenience of the exhaust pipe 100, the connecting hole can be sealingly connected with a connecting pipe 110, that is, the exhaust pipe 100 can be connected with the maintenance pipe 200 through the connecting pipe 110. The connecting pipe 110 can be sealingly welded with the exhaust pipe 100 to ensure the air tightness of the connecting pipe 110 and the exhaust pipe 100.

[0033] In order to facilitate the disassembly and assembly of the maintenance pipe 200 by the workers, the body 230 is detachably connected with the first valve 210, and the body 230 is detachably connected with the second valve 220. It can be understood that, by means of detachable connection, when one of the first valve 210, the body 230 or the second valve 220 is damaged, only the damaged part needs to be replaced, and the entire maintenance pipe 200 does not need to be replaced, so that the cost of maintenance of the maintenance pipe 200 can be reduced.

[0034] In the embodiment, the two ends of the body 230 are respectively provided with a first matching flange 231 and a second matching flange 232, the first valve 210 is provided with a first connecting flange 211 for detachable connection with the first matching flange 231, and the second valve 220 is provided with a second connecting flange 221 for detachable connection with the second matching flange 232.

[0035] The first connecting flange 211 and the first matching flange 231 can be connected through threaded fasteners to ensure the connection strength between the body 230 and the first valve 210 and to ensure the sealing between the body 230 and the first valve 210. The second connecting flange 221 and the second matching flange 232 can also be connected through threaded fasteners to ensure the connection strength between the body 230 and the second valve 220 and to also ensure the sealing between the body 230 and the second valve 220.

[0036] It should be noted that in some embodiments, a third connecting flange 222 can also be arranged at the end of the second valve 220 away from the body 230. The exhaust pipe 100 is provided with a third matching flange 120 connected to the third connecting flange 222. The second valve 220 can be directly connected to the exhaust pipe 100 through the third connecting flange 222. For example, when the maintenance pipe 200 is installed at the end of the exhaust pipe 100, the exhaust pipe 100 can be directly connected to the exhaust pipe 100. Of course, the third matching flange 120 can also be installed on the connecting pipe 110 to facilitate connection with the third connecting flange 222 on the second valve 220. The maintenance pipe 200 can also be directly connected to the exhaust pipe 100 through the connecting pipe 110.

[0037] Optionally, the maintenance pipe 200 further comprises an auxiliary pipe 240 connected to the end of the second valve 220 away from the body 230. The auxiliary pipe 240 is used to connect with the exhaust pipe 100, that is, after the auxiliary pipe 240 is connected with the exhaust pipe 100, the auxiliary pipe 240 is connected between the second valve 220 and the exhaust pipe 100.

[0038] It should be noted that when the maintenance pipe 200 comprises the auxiliary pipe 240, the two ends of the auxiliary pipe 240 are respectively provided with a fourth connecting flange 241 and a fifth connecting flange 245. The auxiliary pipe 240 is connected to the third connecting flange 222 of the second valve 220 through the fourth connecting flange 241. The auxiliary pipe 240 can be connected to the third matching flange 120 on the exhaust pipe 100 through the fifth connecting flange 245.

[0039] Optionally, the auxiliary pipe 240 can be a reducing pipe. For example, when the pipe diameter of the connecting pipe 110 or the exhaust pipe 100 is different from that of the maintenance pipe 200, the maintenance pipe 200 can be connected to the connecting pipe 110 or the exhaust pipe 100 through the auxiliary pipe 240. For example, the pipe diameter of one end of the reducing pipe is the same as that of the body 230, and the pipe diameter of the other end of the reducing pipe is the same as that of the connecting pipe 110 or the exhaust pipe 100. It can be understood that in order to facilitate the movement of the maintenance robot 2 from the maintenance pipe 200 into the exhaust pipe 100, the bottom of the first valve 210, the bottom of the body 230, the bottom of the second valve 220, etc. are high, and the height of the bottom of the reducing pipe is less than or equal to the height of the bottom of the second valve 220, thereby facilitating the movement of the maintenance robot.

[0040] Of course, the auxiliary pipe 240 can also be a constant diameter pipe, that is, the first valve 210, the body 230, the second valve 220 and the auxiliary pipe 240 are coaxially arranged to ensure that the bottom of the first valve 210, the bottom of the body 230, the bottom of the second valve 220 and the bottom of the auxiliary pipe 240 are at the same height, so that the maintenance robot 2 can smoothly pass through the maintenance pipe 200 into the exhaust pipe 100.

[0041] Optionally, in the embodiment, the first valve 210 is a plug valve, and the second valve 220 can also be a plug valve. It can be understood that when the plug valve is in a fully open state, the gate plate is completely removed from the flow passage, providing an unobstructed straight-through path, which hardly affects the movement of the maintenance robot 2 in the maintenance pipe 200, and the plug valve has good sealing performance, which can effectively prevent medium leakage and maintain good sealing effect in the closed state. The plug valve is usually equipped with a hand wheel, a pull ring, an electric or pneumatic actuator, which can realize rapid opening and closing, and is convenient for the operator to open or close the plug valve.

[0042] Of course, in some other embodiments, the first valve 210 and the second valve 220 are not limited to plug valves, but can also be other types of valves, such as butterfly valves.

[0043] Optionally, the maintenance pipe 200 is also detachably provided with a sealing plate, which is located at the end of the first valve 210 away from the second valve 220. It can be understood that in a non-maintenance state, in order to prevent the valve plate of the plug valve from being bent due to long-term pressure, which may cause the risk of air leakage of the plug valve, the sealing plate is installed at the end of the first valve 210 away from the second valve 220. When normal operation is required and maintenance is not required, the operator can open the first valve 210 and the second valve 220, at which time the sealing plate mainly blocks the maintenance pipe 200, that is, the sealing plate bears the pressure, so as to avoid long-term pressure on the valve plate of the first valve 210 and the valve plate of the second valve 220. When maintenance is required, the operator can remove the sealing plate.

[0044] In conclusion, the utility model discloses a kind of overhaul device 1 of exhaust air duct, including exhaust pipe 100 and overhaul pipe 200.Overhaul pipe 200 is connected with exhaust pipe 100, and overhaul robot 2 can enter exhaust pipe 100 by overhaul pipe 200, to be used to in exhaust pipe 100, first valve 210 and second valve 220 are arranged in overhaul pipe 200 and are spaced along the extension direction of overhaul pipe 200, buffer bin 250 is formed between first valve 210 and second valve 220, when first valve 210 and second valve 220 are all closed, buffer bin 250 is isolated with the rest pipeline of overhaul pipe 200. Through the setting of first valve 210 and second valve 220 in overhaul pipe 200, it can be guaranteed that dust exhaust system can also overhaul exhaust pipe 100 in normal process, and the normal work of exhaust system will not be affected.

[0045] The above is only the specific implementation of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered within the protection scope of the utility model.

Claims

1. An exhaust air duct inspection device, characterized by, The exhaust pipe (100) comprises: An inspection pipe (200) connected with the exhaust pipe (100), through which an inspection robot (2) can enter the exhaust pipe (100); Wherein, the inspection pipe (200) is provided with a first valve (210) and a second valve (220) arranged at intervals along the extension direction of the inspection pipe (200), and a buffer bin (250) is formed between the first valve (210) and the second valve (220), and the first valve (210) and the second valve (220) are used to control the communication and isolation of the buffer bin (250) and the outside.

2. The exhaust pipe inspection device according to claim 1, wherein: The inspection pipe (200) comprises a body (230), and the two ends of the body (230) are respectively connected with the first valve (210) and the second valve (220), the body (230) has a lumen for forming the buffer bin (250), and the second valve (220) is connected with the exhaust pipe (100) at the end away from the body (230).

3. The exhaust pipe inspection device according to claim 2, wherein: The body (230) and the first valve (210) are detachably connected, and / or the body (230) and the second valve (220) are detachably connected.

4. The exhaust pipe inspection device according to claim 2, wherein: The two ends of the body (230) are respectively provided with a first matching flange (231) and a second matching flange (232), the first valve (210) is provided with a first connecting flange (211) for detachable connection with the first matching flange (231), and the second valve (220) is provided with a second connecting flange (221) for detachable connection with the second matching flange (232).

5. The exhaust pipe inspection device according to claim 1, wherein: The inspection pipe (200) is connected with the end of the exhaust pipe (100); Or a connecting hole is formed in the periphery of the exhaust pipe (100), and the inspection pipe (200) is connected with the exhaust pipe (100) through the connecting hole; Or the inspection pipe (200) is detachably connected with the exhaust pipe (100).

6. The exhaust pipe inspection device according to claim 2, wherein: The inspection pipe (200) further comprises an auxiliary pipe (240) connected between the second valve (220) and the exhaust pipe (100).

7. The exhaust pipe inspection device according to claim 6, wherein: The auxiliary pipe (240) is a variable diameter pipe, the bottom of the first valve (210), the bottom of the body (230), and the bottom of the second valve (220) are at the same height, and the height of the bottom of the variable diameter pipe is less than or equal to the height of the bottom of the second valve (220).

8. The exhaust pipe inspection device according to claim 6, wherein: ​ The auxiliary pipe (240) is a constant diameter pipe, the first valve (210), the body (230), the second valve (220) and the auxiliary pipe (240) are coaxial.

9. The exhaust duct access device of claim 1, wherein: The first valve (210) is a flapper valve, and / or the second valve (220) is a flapper valve.

10. The exhaust duct access device of claim 1, wherein: The first valve (210) and the second valve (220) are both flapper valves, and the access pipe (200) is further detachably provided with a cover plate, the first valve (210) is away from the second valve (220) relative to the exhaust pipe (100), and the cover plate is located at the end of the first valve (210) away from the second valve (220).

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