Wafer UV film attaching device

Abstract

The wafer UV film attaching device comprises a first rubber roller, a second rubber roller, a third rubber roller, a fourth rubber roller, a steel belt, a separating and pressing assembly, a vacuum chamber and a pressing air cylinder, one end of the steel belt is fixed to the first rubber roller, and the other end of the steel belt is fixedly connected with the second rubber roller after passing through the outer sides of the fourth rubber roller and the third rubber roller; the second rubber roller is used for tensioning and loosening the steel belt; the height of the fourth rubber roller is smaller than that of the third rubber roller, and the third rubber roller reciprocates to press the steel belt so that the UV film can be tightly attached to the wafer; the fourth rubber roller is provided with a bonding layer, the separation pressing assembly presses the steel belt, the steel belt inclines and is bonded with the fourth rubber roller, and the fourth rubber roller drives the steel belt to be separated from the UV film. The steel belt is arranged on the outer side of the third rubber roller and the outer side of the fourth rubber roller, the steel belt cannot be separated immediately after being pressed, the third rubber roller presses the steel belt in a reciprocating mode, and the attaching effect is effectively improved; according to the utility model, the vacuum chamber provides a vacuum environment, and the pressing cylinder applies downward pressure to the UV film, so that the attaching effect is further improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer preparation technical field especially relates to a wafer UV film pasting device. BACKGROUND

[0002] With the rapid development of science and technology, the semiconductor industry occupies more and more important position in the global scope. In this industry, wafer is the key raw material of manufacturing integrated circuit, and wafer cutting is indispensable in the packaging process of wafer. Before cutting, a layer of adhesive film is pasted on the back of wafer, which can keep the integrity of wafer during cutting and reduce the problems such as collapse, displacement and falling during cutting.

[0003] The traditional film pasting device adopts auxiliary tape for film pasting. One end of the auxiliary tape is fixed with the device, and the other end is sequentially separated from the inner side of the separation rubber roller and the outer side of the pasting rubber roller, and then is fixedly connected with the other end of the device. The pasting rubber roller moves horizontally to paste the film on the wafer surface. At the same time, the separation rubber roller pulls the auxiliary tape to separate the adhesive film. The device can only separate the rubber roller behind the pasting rubber roller, and move to the set direction to realize one-time pressing film pasting. The device is prone to poor pasting effect. UTILITARY MODEL

[0004] The utility model provides a wafer UV film pasting device to more exactly solve the problem of poor pasting effect of UV film and wafer.

[0005] The utility model is realized by the following technical schemes:

[0006] The utility model provides a wafer UV film pasting device, which comprises a first rubber roller, a second rubber roller, a third rubber roller, a fourth rubber roller, a steel belt and a supporting plate. The third rubber roller is movably arranged between the first rubber roller and the second rubber roller. The fourth rubber roller is located between the first rubber roller and the third rubber roller. The first rubber roller is fixedly arranged on one side of the supporting plate and is parallel to the second rubber roller. One end of the steel belt is fixedly arranged on the first rubber roller, and the other end is sequentially arranged outside the fourth rubber roller and the third rubber roller and is fixedly arranged on the second rubber roller. The second rubber roller is movably arranged on the other side of the supporting plate and is used for tensioning or relaxing the steel belt. An adhesive layer is arranged outside the fourth rubber roller. The adhesive layer is used for bonding the steel belt to separate the steel belt from the UV film.

[0007] The utility model further comprises a separation and pressing assembly, which is fixedly arranged on the side of the third rubber roller and is used for assisting the separation of the steel belt from the UV film.

[0008] The third rubber roller has a pressing state and a separation state.

[0009] When in the pressing state, the second rubber roller is displaced away from the first rubber roller, the third rubber roller presses the steel belt, and reciprocally rolls in the horizontal direction, so that the UV film is closely attached to the wafer.

[0010] When in the separating state, the third rubber roller is away from the steel belt, the separating pressing assembly presses the steel belt, so that the fourth rubber roller is in contact with the steel belt, the separating pressing assembly is away from the steel belt, and the fourth rubber roller drives the steel belt away from the UV film.

[0011] Further, the first driving member, the first screw-nut assembly and the first mounting plate are further included, the first screw-nut assembly includes a first screw rod and a first nut, the first driving member and the first screw-nut assembly are respectively fixedly arranged below the support plate, the output end of the first driving member is connected with the input end of the first screw-nut assembly, and is used to drive the first nut to move horizontally along the first screw rod, and the first nut is connected with the first mounting plate, and is used to drive the first mounting plate to move horizontally.

[0012] Further, the first connecting plate is further included, one side of the first mounting plate is fixedly connected with the fourth rubber roller, the other side of the first mounting plate is slidingly connected with the first connecting plate, the lower end of the first connecting plate is fixedly connected with the third rubber roller, and the first nut drives the third rubber roller and the fourth rubber roller to synchronously move reciprocally horizontally along the first screw rod.

[0013] Further, the second driving member is further included, the second driving member is fixedly connected with the first mounting plate, and the output end of the second driving member is connected with the third rubber roller, and is used to drive the third rubber roller to move up and down.

[0014] Further, the height of the fourth rubber roller is lower than the height of the third rubber roller.

[0015] Further, the separating pressing assembly includes a pressing cylinder and a pressing block, the pressing cylinder is fixedly arranged at the side of the third rubber roller, the output end of the pressing cylinder is fixedly connected with the pressing block, and is used to drive the pressing block to move up and down, and the pressing block is used to tension and tilt the steel belt, so that the fourth rubber roller is in contact with the steel belt.

[0016] Further, the second mounting plate and the second connecting plate are further included, the second mounting plate is vertically arranged at the side of the support plate, and is slidingly connected with the support plate, the second connecting plate is parallelly arranged at the side of the second mounting plate, and is slidingly connected with the second mounting plate, and the second rubber roller is fixedly arranged at the side of the second connecting plate.

[0017] Further, the third driving member, the second screw nut assembly and the rubber roller telescopic cylinder are further included, the second screw nut assembly includes a second screw rod and a second nut, the third driving member is fixedly connected with the support plate, an output end of the third driving member is connected with an input end of the second screw nut assembly and is used for driving the second nut to move up and down along the second screw rod, the second nut is fixedly connected with the second connecting plate and is used for driving the second rubber roller to move up and down, and the rubber roller telescopic cylinder is fixedly arranged on the support plate, an output end of the rubber roller telescopic cylinder is fixedly connected with the second mounting plate and is used for driving the second mounting plate to move horizontally, so that the second rubber roller moves horizontally.

[0018] Further, the third driving member, the second screw nut assembly and the rubber roller telescopic cylinder are further included, the second screw nut assembly includes a second screw rod and a second nut, the third driving member is fixedly connected with the support plate, an output end of the third driving member is connected with an input end of the second screw nut assembly and is used for driving the second nut to move up and down along the second screw rod, the second nut is fixedly connected with the second connecting plate and is used for driving the second rubber roller to move up and down, and the rubber roller telescopic cylinder is fixedly arranged on the support plate, an output end of the rubber roller telescopic cylinder is fixedly connected with the second mounting plate and is used for driving the second mounting plate to move horizontally, so that the second rubber roller moves horizontally.

[0019] Further, the third driving member, the second screw nut assembly and the rubber roller telescopic cylinder are further included, the second screw nut assembly includes a second screw rod and a second nut, the third driving member is fixedly connected with the support plate, an output end of the third driving member is connected with an input end of the second screw nut assembly and is used for driving the second nut to move up and down along the second screw rod, the second nut is fixedly connected with the second connecting plate and is used for driving the second rubber roller to move up and down, and the rubber roller telescopic cylinder is fixedly arranged on the support plate, an output end of the rubber roller telescopic cylinder is fixedly connected with the second mounting plate and is used for driving the second mounting plate to move horizontally, so that the second rubber roller moves horizontally.

[0020] The beneficial effects of the present application are as follows:

[0021] The present application proposes that the steel belt is arranged outside the third rubber roller and the fourth rubber roller, and the steel belt will not be separated immediately after being pressed, the third rubber roller reciprocatingly moves horizontally to press the steel belt, which is beneficial to reduce the generation of bubbles, make the UV film and the wafer adhere more closely, and effectively improve the adhesion effect of the UV film and the wafer; the present application proposes that the film is attached in the vacuum chamber, which is beneficial to reduce the bubbles and further improve the adhesion effect of the UV film and the wafer; the present application proposes that the pressing cylinder is used to apply downward pressure to the UV film, which is beneficial to reduce the bubbles and further improve the adhesion effect of the UV film and the wafer. DRAWINGS

[0022] Figure 1 It is a whole structure diagram of a wafer UV film adhesion device in an embodiment of the present application;

[0023] Figure 2 It is a front view of internal parts of a vacuum chamber in an embodiment of the present application;

[0024] Figure 3 It is a perspective view of internal parts of a vacuum chamber in an embodiment of the present application;

[0025] Figure 4 It is a perspective view of a third rubber roller and a fourth rubber roller in an embodiment of the present application;

[0026] Figure 5 It is another perspective view of the third rubber roller and the fourth rubber roller in an embodiment of the utility model;

[0027] Figure 6 It is another perspective view of the internal part of the vacuum chamber in an embodiment of the utility model.

[0028] Label explanation: 1, first rubber roller;2, second rubber roller;3, third rubber roller;4, fourth rubber roller;5, steel belt;6, separate pressing assembly;7, support plate;8, down pressure cylinder;9, vacuum chamber;31, first drive;32, first screw nut assembly;321, first screw;322, first nut;33, first mounting plate;34, first connecting plate;35, second drive;21, second mounting plate;22, second connecting plate;23, third drive;24, second screw nut assembly;241, second screw;242, second nut;25, rubber roller telescopic cylinder;41, adhesive layer;61, pressing cylinder;62, pressing block;81, pressure gauge. Specific implementation

[0029] In order to more clearly and completely illustrate the technical scheme of the utility model, the utility model is further explained below in combination with the drawings.

[0030] Please refer to Figures 1-6 The utility model provides a wafer UV film pasting device, including first rubber roller 1, second rubber roller 2, third rubber roller 3, fourth rubber roller 4, steel belt 5, separate pressing assembly 6 and support plate 7;Third rubber roller 3 is movably arranged between first rubber roller 1 and second rubber roller 2, and fourth rubber roller 4 is located between first rubber roller 1 and third rubber roller 3;First rubber roller 1 is fixed on one side of support plate 7 and is parallel with second rubber roller 2;One end of steel belt 5 is fixed on first rubber roller 1, and the other end passes through fourth rubber roller 4 and third rubber roller 3 outside in proper order and is fixed on second rubber roller 2;Second rubber roller 2 is movably arranged on the other side of support plate 7 and is used for tensioning or relaxing steel belt 5;Separate pressing assembly 6 is fixed on the side of third rubber roller 3 and is used for assisting steel belt 5 and UV film to separate;Third rubber roller 3 has compression state and separation state;When being in compression state, second rubber roller 2 displaces to the direction away from first rubber roller 1, third rubber roller 3 compresses steel belt 5, and reciprocally rolls along the horizontal direction to make UV film and wafer closely adhere;When being in separation state, third rubber roller 3 is away from steel belt 5, separate pressing assembly 6 presses steel belt 5 to make fourth rubber roller 4 contact with steel belt 5, separate pressing assembly 6 is away from steel belt 5, and fourth rubber roller 4 drives steel belt 5 and is away from UV film.

[0031] In the embodiment, the first rubber roller 1 is fixed on one side of the support plate 7, the second rubber roller 2 is parallel to the first rubber roller 1 and located on the other side of the support plate 7, the third rubber roller 3 is movably arranged between the first rubber roller 1 and the second rubber roller 2, the fourth rubber roller 4 is located between the first rubber roller 1 and the third rubber roller 3, one end of the steel belt 5 is fixed on the first rubber roller 1, the other end of the steel belt 5 is fixedly connected with the second rubber roller 2 after sequentially passing through the outside of the fourth rubber roller 4 and the third rubber roller 3, the second rubber roller 2 can move horizontally and vertically, and is used for tensioning or relaxing the steel belt 5, the fourth rubber roller 4 is provided with an adhesive layer 41, the height of the fourth rubber roller 4 is less than the height of the third rubber roller 3, the fourth rubber roller 4 moves synchronously with the third rubber roller 3 along the horizontal direction, the third rubber roller 3 can move vertically, the separation pressing assembly 6 is fixed on the side of the third rubber roller 3 and is used for assisting the separation of the steel belt 5 and the UV film, the third rubber roller 3 has a pressing state and a separation state, when in the pressing state, the second rubber roller 2 moves away from the first rubber roller 1 to tension the steel belt 5, the third rubber roller 3 presses the steel belt 5 and rolls back and forth along the horizontal direction to make the UV film closely adhere to the wafer, when in the separation state, the third rubber roller 3 moves away from the steel belt 5, the separation pressing assembly 6 presses the steel belt 5, the steel belt 5 close to the fourth rubber roller 4 is inclined, the adhesive layer 41 of the fourth rubber roller 4 adheres to the steel belt 5, the separation pressing assembly 6 moves away from the steel belt 5, and the fourth rubber roller 4 adheres to the steel belt 5 away from the UV film.

[0032] The utility model discloses a third rubber roller 3 and fourth rubber roller 4 outside, third rubber roller 3 reciprocating horizontal movement press the steel belt 5, third rubber roller 3 press the steel belt 5 after fourth rubber roller 4 will not synchronize the steel belt 5 and UV film separation, be favorable to avoid UV film and wafer between produce bubble, UV film and wafer adhere more closely, effectively improved UV film and wafer's adhering effect.

[0033] Please refer to Figures 2-5 Further comprising a first driving member 31, a first screw nut assembly 32 and a first mounting plate 33 and a first connecting plate 34, the first screw nut assembly 32 includes a first screw rod 321 and a first nut 322, the first driving member 31 and the first screw nut assembly 32 are respectively fixed below the support plate 7, the output end of the first driving member 31 is connected with the input end of the first screw nut assembly 32, and is used to drive the first nut 322 to move horizontally along the first screw rod 321, the first nut 322 is connected with the first mounting plate 33, and is used to drive the first mounting plate 33 to move horizontally, one side of the first mounting plate 33 is fixedly connected with the fourth rubber roller 4, the other side of the first mounting plate 33 is slidingly connected with the first connecting plate 34, the lower end of the first connecting plate 34 is fixedly connected with the third rubber roller 3, and the first nut 322 drives the third rubber roller 3 and the fourth rubber roller 4 to move reciprocatingly horizontally along the first screw rod 321.

[0034] In a specific implementation: the first screw nut assembly 32 includes a first screw rod 321 and a first nut 322, the first screw rod is parallel to the extension direction of the steel belt 5, the first driving member 31 and the first screw nut assembly 32 are respectively fixedly arranged below the support plate 7, the output end of the first driving member 31 is connected with the input end of the first screw nut assembly 32, and the first driving member 31 is configured to drive the first nut 322 to move horizontally along the first screw rod 321, the first nut 322 is connected with the first mounting plate 33, and the first nut 322 is configured to drive the first mounting plate 33 to move horizontally, and in a specific embodiment, the first driving member 31 is a servo motor; one side of the first mounting plate 33 is fixedly connected with the fourth rubber roller 4, and the other side of the first mounting plate 33 is slidingly connected with the first connecting plate 34, and the lower end of the first connecting plate 34 is fixedly connected with the third rubber roller 3, and the first nut 322 drives the third rubber roller 3 and the fourth rubber roller 4 to synchronously move reciprocatingly horizontally along the first screw rod 321.

[0035] Please refer to Figures 2-5 , and the second driving member 35 is fixedly connected with the first mounting plate 33, the output end of the second driving member 35 is connected with the third rubber roller 3, and the second driving member 35 is configured to drive the third rubber roller 3 to move up and down.

[0036] In a specific implementation: the second driving member 35 is fixedly connected with the first mounting plate 33, the output end of the second driving member 35 is connected with the first connecting plate 34, the first mounting plate 33 is provided with a sliding rail, the first connecting plate 34 is provided with a sliding block, the sliding rail and the sliding block are correspondingly arranged to form a sliding connection, the lower end of the first connecting plate 34 is fixedly connected with the third rubber roller 3, and the second driving member 35 drives the third rubber roller 3 to move up and down; in a specific embodiment, the second driving member 35 is a servo motor, the second driving member 35 drives the third rubber roller 3 to press down, so that the steel belt 5 abuts against the outermost end of the wafer, the first driving member 31 drives the third rubber roller 3 to move reciprocatingly horizontally, and the third rubber roller 3 makes the steel belt 5 press and combine the UV film from the outermost end of the wafer, so as to effectively improve the combination effect of the UV film and the wafer.

[0037] Please refer to Figures 2-5 , the separation pressing assembly 6 includes a pressing cylinder 61 and a pressing block 62, the pressing cylinder 61 is fixedly arranged at the side of the third rubber roller 3, the output end of the pressing cylinder 61 is fixedly connected with the pressing block 62, and the pressing cylinder 61 is configured to drive the pressing block 62 to move up and down, and the pressing block 62 is configured to tension the steel belt 5 and form a certain angle with the horizontal plane, so that the fourth rubber roller 4 contacts the steel belt 5, the height of the fourth rubber roller 4 is lower than that of the third rubber roller 3, the outer side of the fourth rubber roller 4 is provided with an adhesive layer 41, and the adhesive layer 41 is configured to bond the steel belt 5, so that the steel belt 5 is separated from the UV film.

[0038] In a specific implementation, the separating and pressing assembly 6 comprises a pressing cylinder 61 and a pressing block 62, the pressing cylinder 61 is fixedly arranged at the side of the third rubber roller 3, the output end of the pressing cylinder 61 is fixedly connected with the pressing block 62, and the pressing cylinder 61 is used to drive the pressing block 62 to move up and down, the pressing block 62 is used to tension the steel belt 5 and form a certain angle with the horizontal plane, so that the fourth rubber roller 4 contacts with the steel belt 5, the height of the fourth rubber roller 4 is lower than that of the third rubber roller 3, and the outer side of the fourth rubber roller 4 is provided with an adhesive layer 41, which is used to bond the steel belt 5, so that the steel belt 5 is separated from the UV film; in a specific embodiment, when the third rubber roller 3 rises and separates from the steel belt 5, the pressing cylinder 61 drives the pressing block 62 to descend, the pressing block 62 presses the steel belt 5, the inclination angle of the steel belt 5 between the first rubber roller 1 and the pressing block 62 increases, the steel belt 5 near the fourth rubber roller 4 rises relative to the horizontal plane, the adhesive layer 41 of the fourth rubber roller 4 contacts with the steel belt 5, the pressing cylinder 61 drives the pressing block 62 to rise and move away from the steel belt 5, the adhesive layer 41 of the fourth rubber roller 4 drives the steel belt 5 to move away from the UV film, and the separation of the steel belt 5 and the UV film is realized.

[0039] Please refer to Figure 6 Further comprising a second mounting plate 21 and a second connecting plate 22, the second mounting plate 21 is vertically arranged at the side of the supporting plate 7 and is slidably connected with the supporting plate 7, and the second connecting plate 22 is parallelly arranged at the side of the second mounting plate 21 and is slidably connected with the second mounting plate 21, and the second rubber roller 2 is fixedly arranged at the side of the second connecting plate 22.

[0040] In a specific implementation, the second mounting plate 21 is vertically arranged at the side of the supporting plate 7 and is slidably connected with the supporting plate 7; in a specific embodiment, a slide rail is arranged below the supporting plate 7, the second mounting plate 21 is provided with a sliding block which is vertically and fixedly connected with the second mounting plate 21, and the sliding block and the slide rail form a sliding connection; the second connecting plate 22 is parallelly arranged at the side of the second mounting plate 21 and is slidably connected with the second mounting plate 21, in a specific embodiment, a slide rail is arranged at the side of the second mounting plate 21, the second connecting plate 22 is provided with a sliding block, and the slide rail and the slide rail form a sliding connection through cooperation; and the second rubber roller 2 is fixedly arranged at the side of the second connecting plate 22.

[0041] Please refer to Figure 6Further comprising a third driving member 23, a second screw-nut assembly 24, and a rubber roller telescopic cylinder 25, the second screw-nut assembly 24 comprises a second screw rod 241 and a second nut 242, the third driving member 23 is fixedly connected with the support plate 7, the output end of the third driving member 23 is connected with the input end of the second screw-nut assembly 24, and is configured to drive the second nut 242 to move up and down along the direction of the second screw rod, the second nut 242 is fixedly connected with the second connecting plate 22, and is configured to drive the second rubber roller 2 to move up and down; the rubber roller telescopic cylinder 25 is fixedly arranged on the support plate 7, the output end of the roller telescopic cylinder is fixedly connected with the second mounting plate 21, and is configured to drive the second mounting plate 21 to move horizontally, so that the second rubber roller 2 moves horizontally.

[0042] In a specific implementation, further comprising a third driving member 23, a second screw-nut assembly 24, the second screw-nut assembly 24 comprises a second screw rod 241 and a second nut 242, the third driving member 23 is fixedly arranged on the side of the support plate 7, the second screw-nut assembly 24 is fixedly arranged on the side of the second mounting plate 21, the output end of the third driving member 23 is connected with the input end of the second screw-nut assembly 24, and is configured to drive the second nut 242 to move up and down along the direction of the second screw rod; in a specific embodiment, the third driving member 23 is a servo motor, the output end of the third driving member 23 is connected with the input end of the second screw-nut assembly 24 through a transmission belt; the second mounting plate 21 is provided with a through hole, the second connecting plate 22 passes through the through hole and is connected with the second nut 242, the second nut 242 drives the second rubber roller 2 to move up and down; the rubber roller telescopic cylinder 25 is fixedly arranged on the support plate 7, the output end of the roller telescopic cylinder is fixedly connected with the second mounting plate 21, and is configured to drive the second mounting plate 21 to move horizontally, so that the second rubber roller 2 moves horizontally, in a specific embodiment, the third driving member 23 and the rubber roller telescopic cylinder 25 cooperate to drive the second rubber roller 2 to move horizontally and up and down, and the second rubber roller 2 is configured to tension and relax the steel belt 5.

[0043] Please refer to Figure 1 and Figure 2 Further comprising a vacuum chamber 9, the first rubber roller 1, the second rubber roller 2, the third rubber roller 3, the fourth rubber roller 4, the steel belt 5, and the support plate 7 are arranged in the vacuum chamber 9.

[0044] In a specific implementation, the support plate 7 is fixedly connected with the vacuum chamber 9, the first rubber roller 1, the second rubber roller 2, the third rubber roller 3, the fourth rubber roller 4, the steel belt 5, and the support plate 7 are arranged in the vacuum chamber 9, and the vacuum chamber 9 is configured to provide a vacuum environment; in a specific embodiment, the vacuum chamber 9 is connected with a vacuum extraction member, the vacuum extraction member is configured to perform vacuum treatment on the vacuum chamber 9, the vacuum environment effectively avoids pollution of the equipment, and the vacuum environment is conducive to reducing air bubbles and further improving the attachment effect of the UV film and the wafer.

[0045] Please refer to Figure 1 and Figure 2Further comprising a pressure gauge 81 and a plurality of down-pressing cylinders 8, the down-pressing cylinders 8 are located above the vacuum chamber 9, the output ends of the down-pressing cylinders 8 are connected with the vacuum chamber 9, and the down-pressing cylinders 8 are used for applying downward pressure to the vacuum chamber 9, and the pressure gauge 81 is used for detecting the pressure.

[0046] In a specific implementation, the down-pressing cylinders 8 are located above the vacuum chamber 9, the output ends of the down-pressing cylinders 8 are connected with the vacuum chamber 9, and the down-pressing cylinders 8 are used for applying downward pressure to the vacuum chamber 9; the first rubber roller 1, the second rubber roller 2, the third rubber roller 3, the fourth rubber roller 4, the steel belt 5 and the support plate 7 move synchronously with the vacuum chamber 9; the pressure gauge 81 is arranged on the vacuum chamber 9 and is used for detecting the pressure; in a specific embodiment, the down-pressing cylinders 8 drive the steel belt 5 to press the UV film downward, which is conducive to the attachment of the UV film and the wafer, and further improves the attachment effect of the UV film and the wafer.

[0047] The above description is only the preferred embodiments of the present application, and does not limit the patent scope of the present application, and any equivalent structure or equivalent process transformation, or direct or indirect application in other related technical fields, which is based on the content of the specification and drawings, is also included in the patent protection scope of the present application.

Claims

1. A wafer UV film attaching apparatus characterized by comprising: The application relates to a UV film and wafer separating device, which comprises a first rubber roller, a second rubber roller, a third rubber roller, a fourth rubber roller, a steel belt and a supporting plate; the third rubber roller is movably arranged between the first rubber roller and the second rubber roller, the fourth rubber roller is arranged between the first rubber roller and the third rubber roller; the first rubber roller is fixedly arranged on one side of the supporting plate and is parallel to the second rubber roller; one end of the steel belt is fixedly arranged on the first rubber roller, the other end of the steel belt sequentially passes through the outside of the fourth rubber roller and the third rubber roller and is fixedly arranged on the second rubber roller; the second rubber roller is movably arranged on the other side of the supporting plate and is used for tensioning or relaxing the steel belt; the outside of the fourth rubber roller is provided with an adhesive layer which is used for bonding the steel belt so that the steel belt is separated from the UV film. The device further comprises a separating pressing assembly which is fixedly arranged on the side of the third rubber roller and is used for assisting the separation of the steel belt from the UV film. The third rubber roller has a pressing state and a separating state. When the third rubber roller is in the pressing state, the second rubber roller is displaced away from the first rubber roller, the third rubber roller presses the steel belt and reciprocally rolls along the horizontal direction so that the UV film is closely attached to the wafer. When the third rubber roller is in the separating state, the third rubber roller is away from the steel belt, the separating pressing assembly presses the steel belt so that the fourth rubber roller is in contact with the steel belt, the separating pressing assembly is away from the steel belt, and the fourth rubber roller drives the steel belt away from the UV film.

2. The wafer UV film attaching apparatus according to claim 1, wherein The device further comprises a first driving member, a first screw nut assembly and a first mounting plate; the first screw nut assembly comprises a first screw rod and a first nut; the first driving member and the first screw nut assembly are fixedly arranged below the supporting plate; the output end of the first driving member is connected with the input end of the first screw nut assembly and is used for driving the first nut to move horizontally along the first screw rod; the first nut is connected with the first mounting plate and is used for driving the first mounting plate to move horizontally.

3. The wafer UV film attaching apparatus according to claim 2, wherein The device further comprises a first connecting plate; one side of the first mounting plate is fixedly connected with the fourth rubber roller; the other side of the first mounting plate is slidingly connected with the first connecting plate; the lower end of the first connecting plate is fixedly connected with the third rubber roller; the first nut drives the third rubber roller and the fourth rubber roller to synchronously move reciprocally horizontally along the first screw rod.

4. The wafer UV film attaching apparatus according to claim 3, wherein The device further comprises a second driving member; the second driving member is fixedly connected with the first mounting plate; the output end of the second driving member is connected with the third rubber roller and is used for driving the third rubber roller to move vertically.

5. The wafer UV film attaching apparatus according to claim 4, wherein The height of the fourth rubber roller is lower than the height of the third rubber roller.

6. The wafer UV film attaching apparatus according to claim 1, wherein The separating pressing assembly comprises a pressing cylinder and a pressing block; the pressing cylinder is fixedly arranged on the side of the third rubber roller; the output end of the pressing cylinder is fixedly connected with the pressing block and is used for driving the pressing block to move vertically; the pressing block is used for tensioning and tilting the steel belt so that the fourth rubber roller is in contact with the steel belt.

7. The wafer UV film attaching apparatus according to claim 1, wherein The second mounting plate is vertically arranged on the side of the support plate and is slidably connected with the support plate, and the second connecting plate is arranged in parallel on the side of the second mounting plate and is slidably connected with the second mounting plate, and the second rubber roller is fixedly arranged on the side of the second connecting plate.

8. The wafer UV film attaching apparatus according to claim 7, wherein The third driving member, the second screw nut assembly and the rubber roller telescopic cylinder are further included, the second screw nut assembly comprises a second screw rod and a second nut, the third driving member is fixedly connected with the support plate, the output end of the third driving member is connected with the input end of the second screw nut assembly and is used for driving the second nut to move up and down along the direction of the second screw rod, the second nut is fixedly connected with the second connecting plate and is used for driving the second rubber roller to move up and down, the rubber roller telescopic cylinder is fixedly arranged on the support plate, the output end of the rubber roller telescopic cylinder is fixedly connected with the second mounting plate and is used for driving the second mounting plate to move horizontally so that the second rubber roller moves horizontally.

9. The wafer UV film attaching apparatus according to claim 1, wherein The vacuum chamber is further included, the first rubber roller, the second rubber roller, the third rubber roller, the fourth rubber roller, the steel belt and the support plate are arranged in the vacuum chamber, and the vacuum chamber is used for providing a vacuum environment.

10. The wafer UV film attaching apparatus according to claim 9, wherein The pressure gauge and the plurality of downward pressing cylinders are further included, the downward pressing cylinders are arranged above the vacuum chamber, the output end of the downward pressing cylinder is connected with the vacuum chamber and is used for applying downward pressure to the vacuum chamber, and the pressure gauge is arranged on the vacuum chamber and is used for detecting the pressure.

Images