Wafer basket capable of preventing wafer displacement
By designing a sloping surface at the entrance of the wafer basket partition and combining it with a knob, stop bar, locking bar, and latch structure, the problem of wobbling and insertion difficulties caused by gaps in the wafer basket was solved, achieving stable wafer loading and preventing wobbling.
Patent Information
- Application Number
- CN202423270612.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-30
AI Technical Summary
Existing wafer baskets cause wafers to wobble when the gaps in the partitions are too large, and make it difficult to insert wafers when the gaps are too small, resulting in operational difficulties.
The entrance to the partition is designed with a slope, combined with a knob, stop bar, locking bar, and latch structure. The combination of the slope design and spring-loaded pressing block ensures stable wafer insertion and prevents wobbling.
This technology facilitates easy wafer insertion during loading, prevents shaking during movement, reduces the risk of wafer damage, and ensures wafer stability during processing.
Smart Images
Figure CN223527151U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a wafer basket, especially to a wafer basket capable of preventing wafer displacement. BACKGROUND
[0002] In the semiconductor manufacturing process, the wafer basket is used to carry and transport wafers, ensuring their stability and safety in various process steps.
[0003] If the gap between the partitions of the existing wafer basket is large, the wafers may shake during processing due to the excessive space. If the gap between the partitions is small, the wafers are not easy to insert when loading, and the operation is difficult. SUMMARY
[0004] In order to overcome the shortcomings of the existing wafer basket, if the gap between the partitions is too large, the wafers may shake, and if the gap is too small, the wafers are not easy to insert when loading, and the operation is difficult, the utility model can provide a wafer basket capable of preventing wafer displacement.
[0005] A wafer basket capable of preventing wafer displacement includes a wafer box, a handle, and partitions. The wafer box has a handle on the top. The inside of the wafer box has several equally spaced partitions on both sides. The upper and lower sides of the entrance end of each partition are designed as inclined surfaces, forming a gap wider than the middle part at the entrance of the upper and lower partitions.
[0006] Further description, it also includes a turntable, a lead screw, a support frame, a ball bearing, a connecting rod, a moving plate, a protrusion, a pressing block, a mounting frame, and a spring. The rear side of the wafer box is equipped with a mounting frame. The top of the mounting frame is equipped with a support frame. The support frame has a threaded hole. The lead screw is connected to the support frame through the threaded hole. The top of the lead screw is equipped with a turntable. The bottom of the lead screw has a groove. The outer ring of the ball bearing is embedded and fixed in the groove. The top of the mounting frame has a through hole. The through hole is located directly below the lead screw. The connecting rod is connected to the mounting frame through the through hole. The top end of the connecting rod is connected to the inner ring of the ball bearing. The front side of the connecting rod is equipped with a moving plate. The front side of the moving plate has several equally spaced protrusions. One end of the spring is connected to the bottom of the protrusion. The other end of the spring is connected to the pressing block.
[0007] Further description, the wafer box and the partitions are integrally formed and made of high-temperature-resistant and corrosion-resistant materials.
[0008] Further description, it also includes a knob, a stop rod, a lock rod, and a lock. The top and bottom of the wafer box are equipped with knobs on both sides. The knobs on each side are equipped with a stop rod. The knob on the top is equipped with a lock rod. The side of the wafer box near the knob is connected to a lock that matches the lock rod.
[0009] Further, the locking buckle is provided with a clamping hole extending from the center to the edge, and the end close to the center of the locking buckle matches the outer diameter of the locking rod, and the end far from the center is slightly smaller than the diameter of the locking rod.
[0010] Further, the wafer box is provided with an identification number at the front end.
[0011] The utility model discloses the beneficial effect is: 1, the utility model discloses the design of the inclined surface at the entrance of the partition, makes the gap of the entrance of the upper and lower two partitions more wide than the middle part, and the wafer is more easily inserted when loading, and in the wafer basket movement or processing process, because the middle part is narrow, can prevent the wafer from shaking, thereby reducing the risk of wafer damage.
[0012] 2, the utility model discloses the design of the blocking rod can ensure that the wafer is placed correctly in the wafer box, prevents the wafer from moving horizontally in the processing process, and the wafer can be prevented from falling out when the wafer box is inclined.
[0013] 3, the utility model discloses the spring and pressing block can compress the wafer, prevent the wafer from moving up and down between the two partitions, avoid the wafer surface damage caused by movement. DRAWINGS
[0014] Figure 1 It is the three-dimensional structure schematic diagram of the utility model.
[0015] Figure 2 It is the three-dimensional structure schematic diagram of the knob, the blocking rod, the locking buckle and the locking rod of the utility model.
[0016] Figure 3 It is the three-dimensional structure schematic diagram of the utility model turntable, mounting frame and convex block.
[0017] Figure 4 It is the explosion drawing of the utility model turntable, screw rod, support frame and bearing.
[0018] Figure 5 It is the three-dimensional structure schematic diagram of the spring and pressing block of the utility model.
[0019] The marks in the drawings: 1: wafer box, 2: handle, 3: partition, 4: knob, 41: blocking rod, 5: locking rod, 6: locking buckle, 7: identification number, 8: turntable, 81: screw rod, 9: support frame, 10: ball bearing, 11: connecting rod, 12: moving plate, 13: convex block, 14: pressing block, 15: mounting frame, 16: spring. DETAILED DESCRIPTION
[0020] The utility model will be further described in conjunction with specific embodiment, the illustrative embodiment of the utility model and the explanation used in the description to explain the utility model, but not as the limitation of the utility model.
[0021] A wafer basket for preventing wafer displacement, as shown in Figure 1 and Figure 2 It comprises a wafer box 1, a handle 2 and a partition 3, the top of the wafer box 1 is provided with the handle 2, and the inside of the wafer box 1 is provided with a plurality of equally spaced partitions 3 on the left and right sides, the upper and lower sides of the entrance end of each partition 3 are designed as inclined surfaces, so that the entrance of the upper and lower partitions 3 forms a gap wider than the middle part, and the wafer box 1 and the partition 3 are integrally formed and are made of high-temperature-resistant and corrosion-resistant materials.
[0022] As shown in Figures 3-5 It further comprises a turntable 8, a lead screw 81, a support frame 9, a ball bearing 10, a connecting rod 11, a moving plate 12, a protrusion 13, a pressing block 14, a mounting frame 15 and a spring 16, the rear side of the wafer box 1 is provided with the mounting frame 15, the mounting frame 15 has two, respectively distributed on the left and right sides of the rear of the wafer box 1, the top of the mounting frame 15 is provided with the support frame 9, the support frame 9 is provided with a threaded hole, the lead screw 81 is threadedly connected to the support frame 9 through the threaded hole, the top of the lead screw 81 is provided with the turntable 8, the bottom of the lead screw 81 is provided with a groove, the outer ring of the ball bearing 10 is embedded and fixed in the groove, the top of the mounting frame 15 is provided with a through hole, which is located directly below the lead screw 81, the connecting rod 11 is slidingly connected in the mounting frame 15 through the through hole, the top end of the connecting rod 11 is connected with the inner ring of the ball bearing 10, the front side of the connecting rod 11 is provided with the moving plate 12, the front side of the moving plate 12 is provided with a plurality of equally spaced protrusions 13, one end of the spring 16 is connected to the bottom of the protrusion 13, the other end of the spring 16 is connected with the pressing block 14, and when the lead screw 81 is not rotated, the top of each protrusion 13 is parallel to the top of the partition 3.
[0023] As shown in Figure 2 It further comprises a knob 4, a blocking rod 41, a locking rod 5 and a lock catch 6, the left and right sides of the top and bottom of the wafer box 1 are rotatably provided with the knob 4, the blocking rod 41 is arranged between the knob 4 on each side, the locking rod 5 is arranged on the knob 4 located at the top, and the side close to the knob 4 on the top of the wafer box 1 is connected with the lock catch 6 matched with the locking rod 5, the lock catch 6 is provided with a bayonet extending from the center thereof to the edge direction, one end of the bayonet close to the center of the lock catch 6 matches the outer diameter of the locking rod 5, and the other end of the bayonet away from the center of the lock catch 6 is slightly smaller than the diameter of the locking rod 5, and the lock catch 6 is elastic.
[0024] As shown in Figure 1 It further comprises an identification number 7, the front end of the wafer box 1 is provided with the identification number 7, which can help the staff to determine the position of the wafer in the wafer box 1 and confirm the wafer to be taken out.
[0025] The two stop levers 41 are pulled apart, the lock lever 5 is moved out of the lock catch 6, and then the wafer is inserted between the two partitions 3; the upper and lower sides of the entrance end of each partition 3 are designed as inclined surfaces, so that the entrance of the upper and lower partitions 3 is wider and the middle part is narrower, so that the wafer can be easily inserted without being too narrow between the partitions 3, and the wafer can be prevented from being damaged due to shaking during the movement of the wafer box 1; after the wafer is inserted into the wafer box 1, the two stop levers 41 are closed; since the diameter of the lock catch 6 is slightly smaller than the diameter of the lock lever 5, when the lock lever 5 enters the lock catch 6, the lock lever 5 is first blocked by the lock catch 6, and by applying pressure to the lock lever 5, the lock catch 6 can be expanded, so that the lock lever 5 can smoothly enter the inside of the lock catch 6; once the lock lever 5 is completely inserted, the lock catch 6 restores to its original shape by its own elasticity, so that the lock lever 5 is firmly fixed in the lock catch 6; the lock lever 5 and the lock catch 6 can prevent the stop lever 41 from moving after being closed, and the stop lever 41 can ensure that the wafer is correctly placed in the wafer box 1, preventing the wafer from moving horizontally in the wafer box 1 during processing; in order to further fix the wafer, the worker can rotate the turntable 8 to drive the screw rod 81 to rotate, when the screw rod 81 rotates, it moves downward along the support frame 9, so that the screw rod 81 drives the connecting rod 11 to move, the connecting rod 11 drives the pressing block 14 on the moving plate 12 to move, so that the pressing block 14 moves downward and presses the wafer, and then the rotation of the turntable 8 is stopped; when the wafer needs to be taken out of the wafer box 1, the turntable 8 is rotated in the opposite direction, so that the pressing block 14 moves away from the wafer, and then pressure is applied to the lock lever 5 to expand the lock catch 6, so that the lock lever 5 can smoothly leave the inside of the lock catch 6, then the stop lever 41 is pulled apart, and the position of the wafer in the wafer box 1 is observed through the identification number 7, the wafer to be taken out is confirmed, the wafer is lightly clamped at the edge by using the wafer clamp, the hand is kept stable during operation, and the wafer is slowly taken out of the wafer box 1.
[0026] It should be understood that the above description is only for exemplary purposes and does not mean to limit the present application. Those skilled in the art will understand that the variations of the present application will be included in the scope of the claims herein.
Claims
1. A wafer basket for preventing wafer displacement, characterized by: The wafer box, handle and partition plate are included, the top of the wafer box is provided with the handle, the inside of the wafer box is provided with a plurality of equidistant partition plates on the left and right sides, the upper and lower sides of the entrance end of each partition plate are designed as inclined surfaces, and a gap wider than the middle part is formed at the entrance of the upper and lower partition plates.
2. The wafer basket for preventing wafer displacement according to claim 1, wherein: The wafer box also includes a rotating disc, a screw rod, a support frame, a ball bearing, a connecting rod, a moving plate, a protruding block, a pressing block, a mounting frame and a spring, the rear side of the wafer box is provided with the mounting frame, the top of the mounting frame is provided with the support frame, the support frame is provided with a threaded hole, the screw rod is threadedly connected to the support frame through the threaded hole, the top of the screw rod is provided with the rotating disc, the bottom of the screw rod is provided with a groove, the outer ring of the ball bearing is embedded in and fixed in the groove, the top of the mounting frame is provided with a through hole, the through hole is located directly below the screw rod, the connecting rod is slidingly connected to the mounting frame through the through hole, the top end of the connecting rod is connected to the inner ring of the ball bearing, the front side of the connecting rod is provided with the moving plate, the front side of the moving plate is provided with a plurality of equidistant protruding blocks, one end of the spring is connected to the bottom of the protruding block, and the other end of the spring is connected to the pressing block.
3. The wafer basket of claim 2, wherein: the first and second wafer support members are each formed of a plurality of wafer support segments; and the wafer support segments are each formed of a plurality of wafer support segments. The wafer box and the partition plate are integrally formed and are made of high-temperature-resistant and corrosion-resistant materials.
4. The wafer basket of claim 3, wherein: the first and second wafer support members are formed of a material having a coefficient of thermal expansion that is less than that of the wafer. The wafer box also includes a knob, a blocking rod, a locking rod and a lock catch, the top and the bottom of the wafer box are rotatably provided with the knobs on the left and right sides, the blocking rod is arranged between the knobs on each side, the locking rod is arranged on the knob at the top, and the side, close to the knob, of the top of the wafer box is connected to the lock catch matched with the locking rod.
5. The wafer basket of claim 4, wherein: the first and second wafer support members are each formed of a plurality of wafer support segments; and the wafer support segments are each formed of a plurality of wafer support segments. The lock catch is provided with a bayonet extending from the center thereof to the edge direction, one end, close to the center of the lock catch, of the bayonet is matched with the outer diameter of the locking rod, and the other end, away from the center of the lock catch, is slightly smaller than the diameter of the locking rod.
6. The wafer basket of claim 5, wherein: the first and second wafer support members are each formed of a plurality of wafer support segments; and the wafer support segments are each formed of a plurality of wafer support segments. The wafer box also includes an identification number, and the front end of the wafer box is provided with the identification number.