Flexible centering device for guaranteeing center positioning precision in vacuum environment

Abstract

The utility model relates to the technical field of centering devices, and discloses a flexible centering device capable of guaranteeing center positioning accuracy in a vacuum environment, which comprises a mounting bottom plate, a position adjusting plate is mounted at the top of the mounting bottom plate, a spring limiting seat is mounted at the top of the mounting bottom plate, a miniature slide rail is mounted on the mounting bottom plate, and a spring is mounted on the spring limiting seat. A centering block is installed on the micro sliding rail, and a spring mechanism is installed at one end of the spring limiting seat. According to the flexible centering device capable of guaranteeing the center positioning precision in the vacuum environment, when a wafer exists in the center of the mounting bottom plate, the edge of the centering block makes contact with the wafer, the centering block is stressed, the spring mechanism is compressed, counter-acting force is provided for the centering block, the centering block achieves two-force balance, the wafer is located in the center of the centering mechanism, and centering of the wafer is achieved; after the centering action is executed, the positioning precision is high, the repeated positioning is good, flexible clamping is achieved, centering is achieved, the wafer is not prone to being damaged, centering is achieved without installation adjustment, adjustment is easy, and the installation difficulty is low.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of centering device, concretely to a flexible centering device for guaranteeing center positioning precision under vacuum environment. BACKGROUND

[0002] The existing similar structure centering mode of PECVD single cavity equipment is rigid hard contact, after executing the centering action, the position of wafer is unstable, meanwhile, there is the risk of causing fragments by extrusion, and the operation has certain requirements on the centering position adjustment, and the debugging difficulty is big.

[0003] The centering positioning precision of the existing similar structure needs to rely on the assembly ability of the operator, guarantees the center positioning precision of the mechanism, the debugging difficulty is big, the rigid hard contact exists the risk of wafer damage. UTILITY MODEL CONTENT

[0004] The utility model discloses a flexible centering device for guaranteeing center positioning precision under vacuum environment, to solve the problem in the background art.

[0005] In order to solve the above technical problem, the utility model provides the following technical scheme: a flexible centering device for guaranteeing center positioning precision under vacuum environment, including installation bottom plate, the top of installation bottom plate installs the position adjustment board, the top of installation bottom plate installs the spring limit seat, installs the micro -slip rail on installation bottom plate, installs the centering block on micro -slip rail, the spring mechanism is installed to one end of spring limit seat.

[0006] Preferably, the micro -slip rail is provided with two, two micro -slip rails are symmetrically arranged.

[0007] Preferably, the position adjustment board is provided with two, two position adjustment boards are symmetrically arranged.

[0008] Preferably, the spring limit seat is provided with two, two spring limit seats are symmetrically arranged.

[0009] Preferably, the centering block is provided with two, two centering blocks are fixedly installed on micro -slip rail respectively.

[0010] Preferably, the spring mechanism is provided with two, and one end of two spring mechanisms is fixedly connected with the centering block respectively, and the other end of two spring mechanisms is fixedly connected with the spring limit seat respectively.

[0011] Compared with the prior art, the utility model reaches the beneficial effects that:

[0012] First, the utility model discloses, when the center of installation bottom plate exists wafer, the edge of centering block is contacted with wafer, and the centering block is stressed, then spring mechanism is compressed, and the counterforce is provided for centering block, and the centering block realizes two force balance, and wafer is in the center of centering mechanism, realizes the centering of wafer, and positioning accuracy is high after the execution of centering action, and repeat positioning is good.

[0013] Second, the utility model discloses, and flexible clamping realizes the centering, and wafer is not easy to break, and flexible does not need to realize the centering by the adjustment of installation, and it is easy to adjust, and the difficulty of installation is low. ACCURACY

[0014] Figure 1 It is the front view structural schematic diagram of the utility model;

[0015] Figure 2 It is the top view structural schematic diagram of the utility model.

[0016] Among them: 1, centering block;2, micro slide rail;3, spring limit seat;4, installation bottom plate;5, spring mechanism;6, position adjusting plate. SPECIFIC IMPLEMENTATION

[0017] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0018] The utility model provides the following technical scheme:

[0019] Embodiment one

[0020] Please refer to Figure 1 、 Figure 2 A flexible centering device for ensuring center positioning accuracy under vacuum environment, including installation bottom plate 4, the top of installation bottom plate 4 is installed with position adjusting plate 6, the top of installation bottom plate 4 is installed with spring limit seat 3, micro slide rail 2 is installed on installation bottom plate 4, and centering block 1 is installed on micro slide rail 2, and one end of spring limit seat 3 is installed with spring mechanism 5.

[0021] Micro slide rail 2 is provided with two, and two micro slide rails 2 are symmetrically arranged.

[0022] Position adjusting plate 6 is provided with two, and two position adjusting plates 6 are symmetrically arranged.

[0023] Spring limit seat 3 is provided with two, and two spring limit seats 3 are symmetrically arranged.

[0024] Two centering blocks 1 are arranged, and the two centering blocks 1 are fixedly installed on the micro slide rail 2 respectively.

[0025] Two spring mechanisms 5 are arranged, and one end of the two spring mechanisms 5 is fixedly connected with the centering block 1 respectively, and the other end of the two spring mechanisms 5 is fixedly connected with the spring limiting seat 3 respectively.

[0026] Through the above technical scheme, the position adjusting plate 6 is fixed on the installation bottom plate 4 and connected as a whole, but can be position adjusted, the spring limiting seat 3 is fixed on the installation bottom plate 4 and connected as a whole, but can be position adjusted, the micro slide rail 2 is fixed on the installation bottom plate 4 and located in the middle of the position adjusting plate 6 and the spring limiting seat 3 in space, the centering block 1 is fixed on the micro slide rail 2 and connected as a whole and cannot be position adjusted, one end of the spring mechanism 5 is connected with the centering block 1 and connected as a whole, the other end of the spring mechanism 5 is fixed on the spring limiting seat 3, the centering block 1 is fixed on the micro slide rail 2 and connected as a whole, the centering block 1 synchronously slides with the micro slide rail 2, and the position adjusting plate 6 and the spring limiting seat 3 jointly act to limit the action range and stroke size of the micro slide rail 2.

[0027] In actual operation, when the device is used, when a wafer exists in the center of the installation bottom plate 4, the edge of the centering block 1 is in contact with the wafer, the centering block 1 is stressed, the spring mechanism 5 is compressed, and a counterforce is provided for the centering block 1, the centering block 1 realizes two-force balance, the wafer is located in the center of the centering mechanism, and flexible centering of the wafer is realized, when the wafer in the center of the installation bottom plate 4 is taken away, the edge of the centering block 1 is suddenly not in contact with the wafer, the side of the centering block 1 is not stressed, the compressed spring mechanism 5 provides a force for the centering block 1, the side of the centering block 1 is stressed, the centering block 1 is reset, when there is no wafer in the center of the installation bottom plate 4, the centering block 1 is in a non-stressed state, and then the spring mechanism 5 is in a free state, the spring mechanism 5 does not provide force and counterforce, and the centering block 1 is static.

[0028] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principle and spirit, and the scope of the changes, modifications, replacements and variations is defined by the appended claims and their equivalents.

Claims

1. A flexible centering device for ensuring the accuracy of centering in a vacuum environment, comprising a mounting base plate (4), characterized in that: The top of the mounting base (4) is provided with a position adjusting plate (6), the top of the mounting base (4) is provided with a spring limiting seat (3), the mounting base (4) is provided with a micro slide rail (2), the micro slide rail (2) is provided with a centering block (1), and one end of the spring limiting seat (3) is provided with a spring mechanism (5).

2. The flexible centering device of claim 1, wherein: The micro slide rail (2) is provided with two, and the two micro slide rails (2) are symmetrically arranged.

3. The flexible centering device of claim 1, wherein: The position adjusting plate (6) is provided with two, and the two position adjusting plates (6) are symmetrically arranged.

4. The flexible centering device of claim 1, wherein: The spring limiting seat (3) is provided with two, and the two spring limiting seats (3) are symmetrically arranged.

5. The flexible centering device of claim 1, wherein: The centering block (1) is provided with two, and the two centering blocks (1) are respectively fixedly installed on the micro slide rail (2).

6. The flexible centering device of claim 1, wherein: The spring mechanism (5) is provided with two, and the two spring mechanisms (5) are respectively fixedly connected with the centering block (1) at one end close to each other, and the other end of the two spring mechanisms (5) is respectively fixedly connected with the spring limiting seat (3).

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