Extraction device for electronic special gas

Abstract

The utility model relates to an electronic special gas extraction device which comprises an extraction tank and a bottom plate, partition plates are fixedly connected to the inner wall of the extraction tank at equal intervals, T-shaped grooves are formed in the top of the bottom plate, T-shaped blocks are fixedly connected to the bottom of the extraction tank at equal intervals, the T-shaped blocks are in sliding connection with the T-shaped grooves, and inclined struts are fixedly connected to the top of the bottom plate and located on the outer side of the extraction tank at equal intervals. And circular rings are fixedly connected among the plurality of inclined struts. The extraction tank has the beneficial effects that the gear can drive the extraction tank to rotate through the teeth by rotating the gear, the T block can slide in the T groove in the rotation process of the extraction tank, so that the bottom plate cannot rotate along with the extraction tank, and meanwhile, the partition plate can be driven to rotate together in the rotation process of the extraction tank; different gases can be fully stirred in the rotating process of the partition plate, so that the mixing of the gases is accelerated, and the extraction efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of electronic specialty gas technology, and in particular to an extraction device for electronic specialty gases. Background Technology

[0002] Electronic specialty gases are widely used in high-tech industries such as semiconductors, microelectronics, and related solar cells, for applications including thin film deposition, etching, doping, passivation, cleaning, and as carrier gases and protective atmospheres. As semiconductor and microelectronic technologies evolve towards higher performance and greater integration, increasingly stringent requirements are being placed on the purity of electronic specialty gases, making their purification increasingly critical and important.

[0003] However, in the existing technology, the existing method for mixing and extracting electronic specialty gases refers to mixing two or more electronic specialty gases in a certain proportion to obtain a gas with specific properties. However, in the mixing process, different gases are usually placed in a tank, which makes it impossible to mix the gases quickly and thoroughly. Utility Model Content

[0004] In view of the above-mentioned problems in the prior art, the main purpose of this utility model is to provide an extraction device for electronic specialty gases, which solves the problem that the existing method of mixing and extracting electronic specialty gases refers to mixing two or more electronic specialty gases in a certain proportion to obtain a gas with specific properties. However, in the mixing process, different gases are usually placed in the same tank, which makes it impossible to mix the gases quickly and thoroughly.

[0005] The technical solution of this utility model is as follows: an extraction device for electronic special gases includes an extraction tank and a base plate. Partitions are fixedly connected at equal intervals to the inner wall of the extraction tank. A T-groove is formed at the top of the base plate. T-blocks are fixedly connected at equal intervals to the bottom of the extraction tank. The T-blocks are slidably connected to the T-groove. Diagonal braces are fixedly connected at equal intervals to the top of the base plate and to the outside of the extraction tank. A ring is fixedly connected between multiple diagonal braces. The ring is slidably connected to the extraction tank. Teeth are fixedly connected at equal intervals to the outside of the extraction tank and above the ring. A gear is rotatably connected to the top of the ring, and the gear meshes with the teeth.

[0006] Through the above technical solution, by rotating the gear, the gear can drive the extraction tank to rotate through the teeth. During the rotation of the extraction tank, the T-block can slide inside the T-groove, so the bottom plate will not rotate with the extraction tank. At the same time, the rotation of the extraction tank can drive the partition to rotate together. During the rotation of the partition, different gases can be fully agitated, thereby accelerating the mixing of gases and improving the extraction efficiency.

[0007] In a preferred embodiment, a first conveying pipe is fixedly connected to the top of the extraction tank, a first electronic valve is installed and connected to the outside of the first conveying pipe, a first rotary joint is installed and connected to the top of the first conveying pipe, a second conveying pipe is fixedly connected to the top of the first rotary joint, and a connecting pipe is fixedly connected to the top of the second conveying pipe.

[0008] Through the above technical solution, by supplying different gases to the connecting pipe, the second conveying pipe delivers the gas through the first rotary joint into the interior of the first conveying pipe and then into the interior of the extraction tank for mixing. The first rotary joint can prevent the second conveying pipe from rotating.

[0009] In a preferred embodiment, a second electronic valve is fixedly connected to the outside of each connecting pipe, and a flow detector is installed on the outside of each connecting pipe and on the side of the second electronic valve.

[0010] Through the above technical solution, the second electronic valve can remotely cut off the delivery, and the flow detector can control the proportion of the delivered gas during the delivery process.

[0011] In a preferred embodiment, a third electronic valve is installed and connected to the bottom of the extraction tank, and a second rotary joint is installed and connected to the bottom of the third electronic valve.

[0012] The above technical solution allows for controlled emission of the mixed and extracted gas via a third electronic valve.

[0013] In a preferred embodiment, a pressure valve is installed and connected to the top of the extraction tank, and a detector is installed and connected to the top of the extraction tank and outside the pressure valve. The detector is electrically connected to an external control panel, and a discharge pipe is fixedly connected to the top of the detector. A valve is installed and connected to the outside of the discharge pipe.

[0014] The above technical solution enables the pressure valve to act as an emergency measure when the gas pressure inside the extraction tank is too high. The detector can detect when the gas pressure is too high, causing the pressure valve to release gas. At the same time, the valve can release the gas in the detector.

[0015] In a preferred embodiment, a pressure gauge is fixedly connected to the top of the extraction tank, a servo motor is fixedly connected to the bottom of the ring, the output shaft of the servo motor is fixedly connected to a gear, and support columns are fixedly connected at equal intervals to the bottom of the base plate.

[0016] The above technical solution enables the servo motor to drive the gears to rotate.

[0017] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0018] In this invention, by rotating the gear, the gear can drive the extraction tank to rotate through its teeth. During the rotation of the extraction tank, the T-block can slide inside the T-groove, so the bottom plate will not rotate with the extraction tank. At the same time, the rotation of the extraction tank can drive the partition plate to rotate together. During the rotation of the partition plate, different gases can be fully agitated, thereby accelerating the mixing of gases and improving the extraction efficiency.

[0019] By supplying different gases to the connecting pipe, the second delivery pipe delivers the gas through the first rotary joint into the interior of the first delivery pipe, and then into the interior of the extraction tank for mixing. The first rotary joint prevents the second delivery pipe from rotating. The second electronic valve allows for remote shut-off of the delivery. During the delivery process, the flow detector controls the proportion of the delivered gas. The third electronic valve controls the discharge of the mixed and extracted gas. The pressure valve provides an emergency function when the gas pressure inside the extraction tank is too high. The detector can detect when the gas pressure is too high, causing the pressure valve to discharge. At the same time, the valve can discharge the gas in the detector. The operation of the servo motor drives the gear to rotate. Attached Figure Description

[0020] Figure 1 A three-dimensional structural schematic diagram of an electronic special gas extraction device provided by this utility model;

[0021] Figure 2 A bottom view schematic diagram of the structure of the electronic special gas extraction device provided by this utility model;

[0022] Figure 3 A bottom view of the structural cross-section of the electronic special gas extraction device provided by this utility model;

[0023] Figure 4 This is a top view of the cross-sectional structure of the electronic special gas extraction device provided by this utility model.

[0024] Legend: 1. Extraction tank; 2. Baffle plate; 3. First delivery pipe; 4. First electronic valve; 5. First rotary joint; 6. Second delivery pipe; 7. Connecting pipe; 8. Second electronic valve; 9. Flow meter; 10. Third electronic valve; 11. Second rotary joint; 12. Ring; 13. Tooth; 14. Gear; 15. Servo motor; 16. Base plate; 17. T-groove; 18. T-block; 19. Diagonal brace; 20. Support column; 21. Pressure valve; 22. Detector; 23. Discharge pipe; 24. Valve; 25. Pressure gauge. Detailed Implementation

[0025] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0026] Example

[0027] like Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, this utility model provides a technical solution: including an extraction tank 1 and a bottom plate 16. The inner wall of the extraction tank 1 is fixedly connected with partitions 2 at equal intervals. The top of the bottom plate 16 is provided with a T-groove 17. The bottom of the extraction tank 1 is fixedly connected with T-blocks 18 at equal intervals. The T-blocks 18 are slidably connected to the T-groove 17. The top of the bottom plate 16 and the outer side of the extraction tank 1 are fixedly connected with diagonal braces 19 at equal intervals. A ring 12 is fixedly connected between multiple diagonal braces 19. The ring 12 is slidably connected to the extraction tank 1. The outer side of the extraction tank 1 and the ring 12 are fixedly connected with teeth 13 at equal intervals. The top of the ring 12 is rotatably connected with a gear 14. The gear 14 is meshed with the teeth 13.

[0028] In this embodiment, by rotating the gear 14, the gear 14 can drive the extraction tank 1 to rotate through the teeth 13. During the rotation of the extraction tank 1, the T block 18 can slide inside the T groove 17, so the bottom plate 16 will not rotate with the extraction tank 1. At the same time, during the rotation of the extraction tank 1, the partition 2 can be driven to rotate together. During the rotation of the partition 2, different gases can be fully agitated, thereby accelerating the mixing of gases and improving the extraction efficiency.

[0029] like Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, a first conveying pipe 3 is fixedly connected to the top of the extraction tank 1, a first electronic valve 4 is installed and connected to the outside of the first conveying pipe 3, a first rotary joint 5 is installed and connected to the top of the first conveying pipe 3, a second conveying pipe 6 is fixedly connected to the top of the first rotary joint 5, and a connecting pipe 7 is fixedly connected to the top of the second conveying pipe 6.

[0030] In this embodiment, by supplying different gases to the connecting pipe 7, the second conveying pipe 6 delivers the gas through the first rotary joint 5 into the interior of the first conveying pipe 3 and then into the interior of the extraction tank 1 for mixing. The first rotary joint 5 can prevent the second conveying pipe 6 from rotating.

[0031] like Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, a second electronic valve 8 is fixedly connected to the outside of the connecting pipe 7, and a flow detector 9 is installed on the outside of the connecting pipe 7 and on one side of the second electronic valve 8.

[0032] In this embodiment, the second electronic valve 8 can remotely cut off the delivery, and the flow detector 9 can control the proportion of the delivered gas during the delivery process.

[0033] like Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, a third electronic valve 10 is installed and connected to the bottom of the extraction tank 1, and a second rotary joint 11 is installed and connected to the bottom of the third electronic valve 10.

[0034] In this embodiment, the mixed and extracted gas can be controlled and discharged through the third electronic valve 10.

[0035] like Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, a pressure valve 21 is installed and connected to the top of the extraction tank 1. A detector 22 is installed and connected to the top of the extraction tank 1 and outside the pressure valve 21. The detector 22 is electrically connected to an external control panel. A discharge pipe 23 is fixedly connected to the top of the detector 22. A valve 24 is installed and connected to the outside of the discharge pipe 23.

[0036] In this embodiment, the pressure valve 21 can play an emergency role when the gas pressure inside the extraction tank 1 is too high. The detector 22 can detect the situation where the pressure valve 21 is discharged due to excessive gas pressure. At the same time, the valve 24 can discharge the gas in the detector 22.

[0037] like Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, a pressure gauge 25 is fixedly connected to the top of the extraction tank 1, a servo motor 15 is fixedly connected to the bottom of the ring 12, the output shaft of the servo motor 15 is fixedly connected to the gear 14, and support columns 20 are fixedly connected at equal intervals to the bottom of the base plate 16.

[0038] In this embodiment, the servo motor 15 drives the gear 14 to rotate.

[0039] Working principle:

[0040] like Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, by rotating gear 14, the gear 14 can drive the extraction tank 1 to rotate through teeth 13. During the rotation of extraction tank 1, T block 18 can slide inside T groove 17, so the bottom plate 16 will not rotate with extraction tank 1. At the same time, during the rotation of extraction tank 1, the partition 2 can be driven to rotate together. During the rotation of partition 2, different gases can be fully stirred, thereby accelerating gas mixing and improving extraction efficiency.

[0041] By supplying different gases to the connecting pipe 7, the second conveying pipe 6 delivers the gas through the first rotary joint 5 into the interior of the first conveying pipe 3 and then into the interior of the extraction tank 1 for mixing. The first rotary joint 5 can prevent the second conveying pipe 6 from rotating. The second electronic valve 8 can remotely cut off the delivery. During the delivery process, the flow detector 9 can control the proportion of the delivered gas. The third electronic valve 10 can control the discharge of the mixed and extracted gas. The pressure valve 21 can play an emergency role when the gas pressure inside the extraction tank 1 is too high. The detector 22 can detect the situation where the gas pressure is too high, causing the pressure valve 21 to discharge. At the same time, the valve 24 can discharge the gas in the detector 22. The operation of the servo motor 15 can drive the gear 14 to rotate.

[0042] Finally, it should be noted that the above-described embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. An extraction device for electronic special gases, comprising an extraction tank (1) and a bottom plate (16), characterized in that: The inner wall of the extraction tank (1) is fixedly connected with partitions (2) at equal intervals. The top of the bottom plate (16) is provided with a T-groove (17). The bottom of the extraction tank (1) is fixedly connected with T-blocks (18) at equal intervals. The T-blocks (18) are slidably connected to the T-groove (17). The top of the bottom plate (16) and the outer side of the extraction tank (1) are fixedly connected with diagonal braces (19) at equal intervals. A ring (12) is fixedly connected between multiple diagonal braces (19). The ring (12) is slidably connected to the extraction tank (1). The outer side of the extraction tank (1) and the ring (12) are fixedly connected with teeth (13) at equal intervals. The top of the ring (12) is rotatably connected with a gear (14). The gear (14) is meshed with the teeth (13).

2. The extraction device for electronic special gases according to claim 1, characterized in that: The top of the extraction tank (1) is fixedly connected to a first conveying pipe (3), a first electronic valve (4) is installed and connected to the outside of the first conveying pipe (3), a first rotary joint (5) is installed and connected to the top of the first conveying pipe (3), a second conveying pipe (6) is fixedly connected to the top of the first rotary joint (5), and a connecting pipe (7) is fixedly connected to the top of the second conveying pipe (6).

3. The electronic special gas extraction device according to claim 2, characterized in that: A second electronic valve (8) is fixedly connected to the outside of each connecting pipe (7), and a flow detector (9) is installed on the outside of each connecting pipe (7) and on one side of the second electronic valve (8).

4. The extraction device for electronic special gases according to claim 1, characterized in that: A third electronic valve (10) is installed and connected to the bottom of the extraction tank (1), and a second rotary joint (11) is installed and connected to the bottom of the third electronic valve (10).

5. The extraction device for electronic special gases according to claim 1, characterized in that: A pressure valve (21) is installed and connected to the top of the extraction tank (1). A detector (22) is installed and connected to the top of the extraction tank (1) and outside the pressure valve (21). The detector (22) is electrically connected to an external control panel. A discharge pipe (23) is fixedly connected to the top of the detector (22). A valve (24) is installed and connected to the outside of the discharge pipe (23).

6. The extraction device for electronic special gases according to claim 1, characterized in that: A pressure gauge (25) is fixedly connected to the top of the extraction tank (1), a servo motor (15) is fixedly connected to the bottom of the ring (12), the output shaft of the servo motor (15) is fixedly connected to the gear (14), and support columns (20) are fixedly connected at equal intervals to the bottom of the base plate (16).

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