Gas guide cylinder of single crystal furnace
By introducing an isolation layer and blade design into the gas duct of the single crystal furnace, the problems of heat loss and volatile accumulation are solved, achieving efficient exhaust and heat preservation, improving the crystallization rate and product quality of single crystal silicon, and reducing production costs.
Patent Information
- Application Number
- CN202422720288.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-06
- Publication Date
- 2025-11-11
- Estimated Expiration
- 2034-11-06
AI Technical Summary
During the exhaust process, the gas duct of the single crystal furnace loses a lot of heat, which leads to increased power consumption of the furnace and increased production costs. In addition, the volatiles tend to accumulate and cause blockage of the exhaust pipe, affecting the quality of single crystal silicon.
Design a single-crystal furnace gas guide tube that includes a gas guide tube cover, a heightening ring, an isolation layer, and a gas guide tube body. The isolation layer forms a temperature gradient to reduce heat loss, and the blade design prevents the accumulation of volatiles.
It effectively reduces heat loss, keeps the exhaust channel unobstructed, improves crystal formation rate, extends the life of the gas guide tube, reduces production costs, and ensures the quality of monocrystalline silicon.
Smart Images
Figure CN223535293U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of single crystal furnace technology, specifically to a gas guide tube for a single crystal furnace. Background Technology
[0002] A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon using a graphite heater in an inert gas environment and grows dislocation-free single crystals using the Czochralski method. A gas duct is located at the bottom of the single crystal furnace, primarily used to expel volatiles from the furnace interior; however, the expulsion of these volatiles also carries away a significant amount of heat from the furnace.
[0003] The high temperature of molten silicon will release silicon vapor. The protective gas introduced into the single crystal furnace will carry the silicon vapor and other impurities out of the furnace through the gas guide tube and exhaust pipe. During the exhaust process, after the volatile gases leave the high-temperature environment inside the single crystal furnace and enter the pipe, the volatiles are easily accumulated on the inner wall of the gas guide tube due to cooling, which can cause blockage of the exhaust pipe, affecting the vacuum efficiency of the single crystal furnace and the quality of the single crystal silicon.
[0004] Because current gas ducts prioritize exhaust efficiency, they contain no other structures. This results in the single crystal furnace carrying away a significant amount of heat during exhaust operation, increasing the furnace's power consumption. This cycle repeats itself, greatly raising production costs. Utility Model Content
[0005] To address the problems existing in the gas guide tubes of single crystal furnaces, this invention designs a gas guide tube for single crystal furnaces that can effectively reduce heat loss and lower the power consumption of furnace platform movement. The specific technical solution is as follows:
[0006] A gas guide tube for a single crystal furnace includes a gas guide tube cover, a heightening ring, an isolation layer, and a gas guide tube body. The heightening ring is provided at the top of the gas guide tube body, and the isolation layer is sleeved inside the heightening ring. The top of the heightening ring is connected to the gas guide tube cover. The size of the gas guide tube cover is adapted to the size of the heightening ring. The gas guide tube cover and the heightening ring are detachably connected. The isolation layer includes an isolation layer body and a plurality of blades arranged circumferentially along the isolation layer body. The plurality of blades are spaced apart, and the gap between two adjacent blades forms a vent hole. A first locking block is provided at the end of each blade.
[0007] Preferably, the air guide cover includes a top cover, multiple columns, and a seat ring. The top cover is connected to the seat ring through the columns. An air guide hole is formed by the interval between two adjacent columns. A second locking block is provided on the inner wall of the seat ring.
[0008] Furthermore, the height-increasing ring includes a height-increasing ring body, a height-increasing ring protrusion, and a third locking block. The height-increasing ring protrusion is connected to the third locking block. A first locking groove is provided between the third locking block and the height-increasing ring body. The first locking groove and the first locking block cooperate with each other. A fourth locking block is provided at the bottom of the inner wall of the height-increasing ring body.
[0009] Furthermore, a first limiting block is provided on the outer side of the third card block, and a second card groove is provided between the first limiting block and the protrusion of the heightening ring, and the second card groove cooperates with the second card block.
[0010] Furthermore, the top of the air guide cylinder body is provided with an air guide cylinder body protrusion, and a second limiting block is provided on the outside of the air guide cylinder body protrusion. A fourth slot is provided between the second limiting block and the air guide cylinder body, and the fourth slot and the fourth slot cooperate with each other.
[0011] Furthermore, the inner diameter of the third card block is the same as the inner diameter of the heightening ring body.
[0012] Furthermore, the inner diameter of the protruding part of the air guide cylinder body is the same as the inner diameter of the air guide cylinder body.
[0013] Preferably, the isolation layer is in the form of three uniformly arranged blades.
[0014] Furthermore, the columns are evenly distributed along the outer edge of the top cover.
[0015] Preferably, the heightening ring and the air guide cylinder body have the same outer diameter.
[0016] Compared with the prior art, the beneficial effects of this utility model are:
[0017] This novel air guide cylinder, through a specially designed isolation layer, reduces the range of temperature fluctuations and solves the technical problem of volatile accumulation, thereby maintaining a continuously unobstructed exhaust channel and improving ventilation efficiency. It effectively increases the crystal formation rate, ensuring the quality of single-crystal silicon crystals. Simultaneously, it guides the airflow to form a temperature gradient, reducing heat loss carried away by the gas. Due to the isolation layer structure design, the air guide cylinder has excellent insulation properties, preventing sudden cooling and heating, thus extending its service life and reducing production and operating costs. Attached Figure Description
[0018] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.
[0019] Figure 1 This is a schematic diagram of the three-dimensional structure of the air guide tube of this utility model. Figure 1 .
[0020] Figure 2 This is a schematic diagram of the three-dimensional structure of the air guide tube of this utility model. Figure 2 .
[0021] Figure 3 This is a three-dimensional structural diagram of the air guide cap of this utility model.
[0022] Figure 4 This is a schematic diagram of the three-dimensional structure of the air guide tube heightening ring of this utility model. Figure 1 .
[0023] Figure 5 This is a schematic diagram of the three-dimensional structure of the air guide tube heightening ring of this utility model. Figure 2 .
[0024] Figure 6 This is a three-dimensional structural diagram of the air guide tube isolation layer of this utility model.
[0025] Figure 7 This is a three-dimensional structural diagram of the air guide tube body of this utility model.
[0026] In the diagram: 1. Air guide cap; 2. Heightening ring; 3. Isolation layer; 4. Air guide body; 5. Vent hole; 11. Top cover; 12. Column; 13. Seat ring; 14. Air guide hole; 15. Second locking block; 21. Heightening ring body; 22. Heightening ring protrusion; 23. Third locking block; 24. First locking groove; 25. Fourth locking block; 26. First limiting block; 27. Second locking groove; 31. First locking block; 32. Blade; 41. Air guide body protrusion; 42. Second limiting block; 43. Fourth locking groove. Detailed Implementation
[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.
[0028] See Figures 1 to 7 The present invention provides one embodiment as follows:
[0029] A single-crystal furnace gas guide tube includes a gas guide tube cover 1, a heightening ring 2, an isolation layer 3, and a gas guide tube body 4. The heightening ring 2 is installed on the top of the gas guide tube body 4, and the isolation layer 3 is connected inside the heightening ring 2. The gas guide tube cover 1 is connected to the top of the heightening ring 2. The size of the gas guide tube cover 1 is adapted to the size of the heightening ring 2. The gas guide tube cover 1 and the heightening ring 2 are detachably connected. The isolation layer 3 includes an isolation layer body and multiple blades 32 arranged circumferentially along the isolation layer body. The multiple blades 32 are spaced apart, and the gap between two adjacent blades 32 forms a vent hole 5. The isolation layer 3 is connected to the inner wall of the heightening ring 2 through a first locking block 31 provided at the end of the blade 32. The isolation layer 3 can form a buffer zone inside the gas guide tube, forming a temperature gradient. Volatile substances in the exhaust gas will not accumulate on the inner wall of the gas guide tube due to a sudden drop in temperature. At the same time, the isolation layer 3 can also achieve a certain heat preservation effect, reducing heat loss and reducing the power consumption of the furnace operation, without affecting the normal exhaust of the gas guide tube.
[0030] As a preferred embodiment, the isolation layer 3 can be a three-bladed structure with uniformly arranged blades. The three-bladed design can distribute the wind force more evenly and at the same time provide effective heat preservation.
[0031] In a preferred embodiment, the air guide cover 1 includes a top cover 11, multiple columns 12, and a seat ring 13. The top cover 11 is connected to the seat ring 13 through the columns 12. The columns 12 are evenly arranged along the outer edge of the top cover 11. The interval between two adjacent columns 12 forms an air guide hole 14. The inner wall of the seat ring 13 is provided with a second locking block 15. The air guide hole 14 facilitates the discharge of exhaust gas. The second locking block 15 is used to firmly connect with the heightening ring 2.
[0032] Furthermore, the height-increasing ring 2 includes a height-increasing ring body 21, a height-increasing ring protrusion 22, and a third locking block 23. The height-increasing ring protrusion 22 is connected to the third locking block 23. A first locking groove 24 is provided between the third locking block 23 and the height-increasing ring body 21. The first locking groove 24 and the first locking block 31 cooperate with each other to make the isolation layer 3 and the height-increasing ring 2 tightly connected. A fourth locking block 25 is provided at the bottom of the inner wall of the height-increasing ring body 21. The fourth locking block 25 is used to securely connect with the air guide cylinder body 4.
[0033] Furthermore, a first limiting block 26 is provided on the outer side of the third locking block 23, and a second locking groove 27 is provided between the first limiting block 26 and the protruding part 22 of the heightening ring. The second locking groove 27 and the second locking block 15 cooperate with each other to make the air guide cover 1 and the heightening ring 2 stably connected.
[0034] Furthermore, the top of the air cylinder body 4 is provided with an air cylinder body protrusion 41, and a second limiting block 42 is provided on the outside of the air cylinder body protrusion 41. A fourth slot 43 is provided between the second limiting block 42 and the air cylinder body 4. The fourth slot 43 and the fourth locking block 25 cooperate with each other to make the heightening ring 2 and the air cylinder body 4 firmly connected.
[0035] In terms of size, the inner diameter of the third locking block 23 is the same as the inner diameter of the heightening ring body 21; the inner diameter of the protrusion 41 of the air guide body is the same as the inner diameter of the air guide body 4; the outer diameters of the heightening ring 2 and the air guide body 4 are the same. This design facilitates the mutual fixing and cooperation between various components.
[0036] Usage: Connect the gas guide tube body 4 to the bottom of the heightening ring 2 via the engagement of the fourth slot 43 and the fourth locking block 25. Connect the inside of the heightening ring 2 to the isolation layer 3 via the engagement of the first slot 24 and the first locking block 31. Connect the top of the heightening ring 2 to the gas guide tube cover 1 via the engagement of the second slot 27 and the second locking block 15. After assembly, install it in the corresponding position on the single crystal furnace. During the exhaust process, the exhaust gas inside the single crystal furnace enters the gas guide tube cover 1 through the vent 5 of the isolation layer 3, and then exits the single crystal furnace through the gas guide hole 14.
[0037] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be encompassed within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
Claims
1. A gas guide tube for a single crystal furnace, characterized in that, The device includes an air cylinder cover (1), a heightening ring (2), an isolation layer (3), and an air cylinder body (4). The air cylinder body (4) has a heightening ring (2) on its top. An isolation layer (3) is fitted inside the heightening ring (2). The top of the heightening ring (2) is connected to the air cylinder cover (1). The size of the air cylinder cover (1) is adapted to the size of the heightening ring (2). The air cylinder cover (1) and the heightening ring (2) are detachably connected. The isolation layer (3) includes an isolation layer body and multiple blades (32) arranged circumferentially along the isolation layer body. The multiple blades (32) are spaced apart. The gap between two adjacent blades (32) forms a vent hole (5). A first locking block (31) is provided at the end of each blade (32).
2. The gas guide tube for a single crystal furnace according to claim 1, characterized in that, The air guide cover (1) includes a top cover (11), multiple columns (12), and a seat ring (13). The top cover (11) is connected to the seat ring (13) through the columns (12). The interval between two adjacent columns (12) forms an air guide hole (14). The inner wall of the seat ring (13) is provided with a second locking block (15).
3. The gas guide tube for a single crystal furnace according to claim 2, characterized in that, The height-increasing ring (2) includes a height-increasing ring body (21), a height-increasing ring protrusion (22), and a third locking block (23). The height-increasing ring protrusion (22) is connected to the third locking block (23). A first locking groove (24) is provided between the third locking block (23) and the height-increasing ring body (21). The first locking groove (24) cooperates with the first locking block (31). A fourth locking block (25) is provided at the bottom of the inner wall of the height-increasing ring body (21).
4. The gas guide tube for a single crystal furnace according to claim 3, characterized in that, The third card block (23) is provided with a first limiting block (26) on the outside, and a second card groove (27) is provided between the first limiting block (26) and the heightening ring protrusion (22), and the second card groove (27) cooperates with the second card block (15).
5. The gas guide tube for a single crystal furnace according to claim 3, characterized in that, The top of the air guide cylinder body (4) is provided with an air guide cylinder body protrusion (41), and a second limiting block (42) is provided on the outside of the air guide cylinder body protrusion (41). A fourth slot (43) is provided between the second limiting block (42) and the air guide cylinder body (4), and the fourth slot (43) cooperates with the fourth locking block (25).
6. The gas guide tube for a single crystal furnace according to claim 3, characterized in that, The inner diameter of the third card block (23) is the same as the inner diameter of the heightening ring body (21).
7. The gas guide tube for a single crystal furnace according to claim 5, characterized in that, The inner diameter of the protruding part (41) of the air guide cylinder body is the same as the inner diameter of the air guide cylinder body (4).
8. The gas guide tube for a single crystal furnace according to claim 1, characterized in that, The isolation layer (3) is in the shape of three uniformly arranged blades.
9. The gas guide tube for a single crystal furnace according to claim 2, characterized in that, The columns (12) are evenly arranged along the outer edge of the top cover (11).
10. The gas guide tube for a single crystal furnace according to claim 1, characterized in that, The heightening ring (2) and the air guide body (4) have the same outer diameter.