Gate valve device for etching equipment

Abstract

The utility model discloses a gate valve device for etching equipment, which belongs to the field of etching equipment and comprises a sealing plate, a push-and-pull component and a lifting component, the push-and-pull component is connected with the sealing plate, and the push-and-pull component is used for pushing the sealing plate to move towards an etching chamber to seal the etching chamber or pulling the sealing plate to move away from the etching chamber; the lifting assembly comprises a lifting plate, a linear driving mechanism and two racks, the linear driving mechanism is connected with the lifting plate, the two racks are arranged on the two sides of the lifting plate, the two sides of the lifting plate are each provided with a gear, the two gears are engaged with the two racks, the linear driving mechanism is used for driving the lifting plate to move in the first direction, and when the lifting plate moves, the linear driving mechanism drives the lifting plate to move in the second direction. The gear rolls in the length direction of the rack, so that the sealing effect of the gate valve device can be prevented from being affected by inclination of the sealing plate.

Description

Technical Field

[0001] This utility model belongs to the field of etching equipment technology, and specifically relates to a gate valve device for etching equipment. Background Technology

[0002] Typically, in the production and processing of devices such as liquid crystal displays, etching equipment is used to etch the metallic or non-metallic materials on the substrate. Etching is a process that uses chemical or physical methods to selectively remove unwanted materials from the surface of a silicon wafer or glass substrate.

[0003] Common etching equipment includes an etching chamber and a valve device. The valve device comprises a lifting assembly, a push-pull cylinder, and a sealing plate. The sealing plate and the push-pull cylinder are connected. The push-pull cylinder moves the sealing plate towards the etching chamber to seal it. The lifting assembly moves the push-pull cylinder to a preset position. The lifting assembly consists of a lifting plate and two sets of linear guide mechanisms. Each set of linear guide mechanisms includes a cylinder, a guide rail, and a slider. The cylinder drives the slider to move on the guide rail. The two sets of linear guide mechanisms are connected to both sides of the lifting plate, and the push-pull cylinder is mounted on the lifting plate. Using this structure, the lifting plate can be moved and raised / lowered by the two sets of linear guide mechanisms. However, the cylinders in the two sets of linear guide mechanisms are prone to asynchronous movement due to installation errors, air leakage, and other factors. This leads to asynchronous movement of the sliders on both sides of the lifting plate, causing the lifting plate to tilt. Consequently, the sealing plate connected to the lifting plate also tilts. Therefore, when the push-pull cylinder drives the sealing plate to seal the etching chamber, the valve device's sealing effect is poor due to the tilting of the sealing plate. Utility Model Content

[0004] To address the aforementioned problems in the prior art, this utility model provides a gate valve device for etching equipment. The technical problem to be solved by this utility model is achieved through the following technical solution:

[0005] In a first aspect, this utility model provides a valve device for an etching equipment, used to seal the etching chamber of the etching equipment. It includes a sealing plate, a push-pull assembly, and a lifting assembly. The push-pull assembly is connected to the sealing plate and is used to push the sealing plate toward the etching chamber to seal it, or to pull the sealing plate away from the etching chamber. The lifting assembly includes a lifting plate, a linear drive mechanism, and two racks. The linear drive mechanism is connected to the lifting plate, and the two racks are located on both sides of the lifting plate. A gear is provided on each side of the lifting plate, and the two gears mesh with the two racks respectively. The linear drive mechanism is used to drive the lifting plate to move in a first direction. When the lifting plate moves, the gears roll along the length direction of the racks.

[0006] In one embodiment of this utility model, the linear drive mechanism is a lifting cylinder, which is connected to the middle position of the lifting plate.

[0007] In one embodiment of the present invention, the rack is arranged along a first direction, and the lifting cylinder includes a cylinder shaft, the cylinder shaft and the rack being parallel to each other.

[0008] In one embodiment of this utility model, the push-pull assembly includes a connecting block and a moving component. The connecting block is connected to a lifting plate, and the moving component is connected to a sealing plate.

[0009] The connecting block is provided with a push-pull inclined groove. The opening direction of the push-pull inclined groove is perpendicular to the first direction. The upper end of the push-pull inclined groove is close to the lifting plate, and the lower end is close to the sealing plate. The moving part is set in the push-pull inclined groove. When the lifting plate moves along the first direction, it drives the connecting block to move along the first direction. When the connecting block moves along the first direction, the push-pull inclined groove applies a force to the moving part, so that the moving part drives the sealing plate to move toward or away from the etching chamber.

[0010] In one embodiment of this utility model, the moving part includes a fixed seat and a cam. The fixed seat and the sealing plate are fixedly connected, and the cam and the fixed seat are rotatably connected. The cam is disposed in the push-pull inclined groove.

[0011] In one embodiment of this utility model, there are two moving parts, and the connecting block is provided with two push-pull inclined grooves. The two push-pull inclined grooves are arranged sequentially along the first direction, and the two moving parts are respectively arranged in the two push-pull inclined grooves.

[0012] In one embodiment of the present invention, a first vertical groove and a second vertical groove are respectively provided at both ends of the push-pull inclined groove. The first vertical groove and the second vertical groove are both arranged along a first direction, and the first vertical groove, the push-pull inclined groove and the second vertical groove are connected in sequence.

[0013] In one embodiment of this utility model, a spring is provided between the sealing plate and the connecting block, with one end of the spring fixedly connected to the sealing plate and the other end fixedly connected to the connecting block.

[0014] In one embodiment of this utility model, the lifting plate is provided with multiple push-pull components.

[0015] In one embodiment of the present invention, a connector is provided on the upper side of the sealing plate. The connector is used to connect with the sealing plate and restrict the sealing plate from moving along the first direction.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0017] In the above-described scheme of this application, the valve device includes a sealing plate, a push-pull assembly, and a lifting assembly. The push-pull assembly is connected to the sealing plate and can push the sealing plate toward the etching chamber to seal the etching chamber, or pull the sealing plate away from the etching chamber. The lifting assembly includes a lifting plate, a linear drive mechanism, and two racks. The linear drive mechanism is connected to the lifting plate, and a gear is provided on each side of the lifting plate. The two gears mesh with the two racks respectively. The linear drive mechanism is used to drive the lifting plate to move along a first direction. When the lifting plate moves, the gears roll along the length direction of the racks. Thus, when the valve device is used to seal the etching chamber, the linear drive mechanism can first drive the lifting plate to move up and down in the first direction. When the lifting plate moves, it drives the push-pull assembly and the sealing plate to move to the position corresponding to the etching chamber. Then, the push-pull assembly drives the sealing plate to move toward the etching chamber to seal the etching chamber. When the valve device and the etching chamber separate, the push-pull assembly drives the sealing plate to move away from the etching chamber, and the linear drive mechanism drives the lifting plate to move up and down in the opposite direction to the first direction, so that the valve device returns to the initial position.

[0018] In this design, the lifting plate is driven by a single linear drive mechanism, avoiding the problems associated with traditional valve devices that use two sets of linear guide mechanisms. In these mechanisms, the cylinders in the two sets of linear guide mechanisms are prone to asynchronous movement due to installation errors or air leaks, which can cause the sealing plate to tilt and affect the sealing effect. Furthermore, both sides of the lifting plate are connected by gears and racks. The limiting and guiding action of the gears and racks ensures that both sides of the lifting plate remain synchronized, preventing tilting and thus avoiding any impact on the sealing effect of the valve device.

[0019] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the valve device provided in an embodiment of the present utility model;

[0021] Figure 2 This is a schematic diagram of the lifting assembly provided in an embodiment of the present utility model;

[0022] Figure 3 This is a schematic diagram of the rack, lifting plate, and gear in an embodiment of this utility model;

[0023] Figure 4 This is a schematic diagram of the push-pull assembly in an embodiment of this utility model. Figure 1 ;

[0024] Figure 5 This is a schematic diagram of the push-pull assembly in an embodiment of this utility model. Figure 2 ;

[0025] Figure 6 This is a schematic diagram of the valve device in a sealed state in an embodiment of this utility model;

[0026] Figure 7 This is a schematic diagram of the valve device in a transition state in an embodiment of this utility model;

[0027] Figure 8 This is a schematic diagram of the valve device in the open state in an embodiment of this utility model.

[0028] Reference numerals: 1-etching chamber, 2-sealing plate, 3-push-pull assembly, 31-connecting block, 32-moving component, 321-fixed seat, 322-cam, 33-push-pull inclined groove, 4-lifting plate, 5-linear drive mechanism, 6-rack, 7-gear, 8-spring, 9-connector. Detailed Implementation

[0029] The present invention will be further described in detail below with reference to specific embodiments, but the implementation of the present invention is not limited thereto.

[0030] Please see Figure 1 , Figure 2 and Figure 3 This utility model provides a valve device for an etching equipment, used to seal the etching chamber 1 of the etching equipment. It includes a sealing plate 2, a push-pull assembly 3, and a lifting assembly. The push-pull assembly 3 is connected to the sealing plate 2 and is used to push the sealing plate 2 towards the etching chamber 1 to seal it, or to pull the sealing plate 2 away from the etching chamber 1. The lifting assembly includes a lifting plate 4, a linear drive mechanism 5, and two racks 6. The linear drive mechanism 5 is connected to the lifting plate 4. The two racks 6 are located on both sides of the lifting plate 4. A gear 7 is provided on each side of the lifting plate 4, and the two gears 7 mesh with the two racks 6 respectively. The linear drive mechanism 5 drives the lifting plate 4 to move in a first direction. When the lifting plate 4 moves, the gears 7 roll along the length direction of the racks 6.

[0031] In some embodiments of this application, the sealing plate 2 is a rectangular plate, the lifting plate 4 is a rectangular plate, and the dimensions of the sealing plate 2 and the lifting plate 4 can be equal.

[0032] In some embodiments of this application, the push-pull assembly 3 can be a telescopic cylinder, a lead screw and nut mechanism, etc.

[0033] In some embodiments of this application, the linear drive mechanism 5 can be a telescopic cylinder, a lead screw and nut mechanism, etc.

[0034] In some embodiments of this application, gear 7 is a spur gear, and rack 6 can be a spur gear rack.

[0035] In some embodiments of this application, such as Figure 1 and Figure 2 As shown, the first direction is Figure 1 and Figure 2 The direction x in is the height direction of the lifting plate 4.

[0036] In some embodiments of this application, the valve device further includes a mounting bracket, on which the linear drive mechanism 5 and two racks 6 are fixed.

[0037] In the above-described scheme of this application, the valve device includes a sealing plate 2, a push-pull assembly 3, and a lifting assembly. The push-pull assembly 3 is connected to the sealing plate 2. The push-pull assembly 3 can push the sealing plate 2 toward the etching chamber 1 to seal the etching chamber 1, or pull the sealing plate 2 away from the etching chamber 1. The lifting assembly includes a lifting plate 4, a linear drive mechanism 5, and two racks 6. The linear drive mechanism 5 is connected to the lifting plate 4. The two racks 6 are located on both sides of the lifting plate 4. Each side of the lifting plate 4 is provided with a gear 7. The two gears 7 mesh with the two racks 6 respectively. The linear drive mechanism 5 is used to drive the lifting plate 4 to move in a first direction. When the lifting plate 4 moves, the gears 7 roll along the length direction of the racks 6. Thus, when the valve device is used to seal the etching chamber 1, the linear drive mechanism 5 can first drive the lifting plate 4 to move up and down in the first direction. When the lifting plate 4 moves, it drives the push-pull assembly 3 and the sealing plate 2 to move to the position corresponding to the etching chamber 1. Then, the push-pull assembly 3 drives the sealing plate 2 to move toward the etching chamber 1 to seal the etching chamber 1. When the valve device and the etching chamber 1 are separated, the push-pull assembly 3 drives the sealing plate 2 to move away from the etching chamber 1, and the linear drive mechanism 5 drives the lifting plate 4 to move up and down in the opposite direction to the first direction, so that the valve device returns to the initial position.

[0038] In this design, the lifting plate 4 is driven by a single linear drive mechanism 5, which avoids the problem of asynchronous movement of the cylinders in the two linear guide mechanisms in traditional valve devices, where installation errors or air leaks can cause the sealing plate 2 to tilt and affect the sealing effect. Furthermore, both sides of the lifting plate 4 are connected by gears 7 and racks 6. The limiting and guiding relationship between the gears 7 and racks 6 ensures that both sides of the lifting plate 4 remain synchronized, preventing tilting of the lifting plate 4 and thus avoiding tilting of the sealing plate 2, which would affect the sealing effect of the valve device.

[0039] In some embodiments of this application, the linear drive mechanism 5 is a lifting cylinder, which is connected to the middle position of the lifting plate 4. With this structure, the telescopic rod of the lifting cylinder is connected to the middle position of the lifting plate 4, and the lifting cylinder applies a force to the middle position of the lifting plate 4, enabling the lifting plate 4 to move up and down in the first direction. Furthermore, with this structure, the force on the lifting plate 4 is more even, the movement is more stable, and tilting of the lifting plate 4 during movement is further prevented.

[0040] In some embodiments of this application, the above-mentioned lifting cylinder is a pneumatic actuator that utilizes the good compressibility and controllability of gas to convert the kinetic energy generated by the release of compressed gas into mechanical energy, thereby realizing the lifting or position adjustment of an object.

[0041] In some embodiments of this application, the rack 6 is arranged along a first direction, and the lifting cylinder includes a cylinder shaft, with the cylinder shaft and rack 6 parallel to each other. This structure, with the cylinder shaft and rack 6 parallel to each other, can further improve the stability of the lifting plate 4's movement.

[0042] In some embodiments of this application, such as Figure 4 and Figure 5 As shown, the push-pull assembly 3 includes a connecting block 31 and a moving component 32. The connecting block 31 is connected to the lifting plate 4, and the moving component 32 is connected to the sealing plate 2. The connecting block 31 is provided with a push-pull groove 33, the opening direction of which is perpendicular to the first direction. The upper end of the push-pull groove 33 is close to the lifting plate 4, and the lower end is close to the sealing plate 2. The moving component 32 is disposed in the push-pull groove 33. When the lifting plate 4 moves along the first direction, it drives the connecting block 31 to move along the first direction. When the connecting block 31 moves along the first direction, the push-pull groove 33 applies a force to the moving component 32, causing the moving component 32 to move the sealing plate 2 toward or away from the etching chamber 1. With this structure, when the lifting plate 4 moves up and down along the first direction, the lifting plate 4 drives the connecting block 31 to move up and down along the first direction. The push-pull groove 33 in the connecting block 31 applies a force to the moving component 32, causing the moving component 32 to move in a direction perpendicular to the first direction, thereby driving the sealing plate 2 toward or away from the etching chamber 1. Compared to push-pull assembly 3 using telescopic cylinders, when using the push-pull assembly 3 described in this application, the lifting action of the lifting assembly can be used to drive the sealing plate 2 to move closer to or further away from the etching chamber 1, avoiding the problem of air leakage caused by the reciprocating motion of the telescopic cylinder when the sealing plate 2 is driven by the telescopic cylinder, thereby improving the service life and stability of the push-pull assembly 3.

[0043] In some embodiments of this application, such as Figure 4 and Figure 5As shown, the moving component 32 includes a fixed base 321 and a cam 322. The fixed base 321 is fixedly connected to the sealing plate 2, and the cam 322 is rotatably connected to the fixed base 321. The cam 322 is disposed within the push-pull groove 33. With this structure, when the lifting plate 4 moves up and down in the first direction, the lifting plate 4 drives the connecting block 31 to move up and down in the first direction. The push-pull groove 33 in the connecting block 31 applies a force to the cam 322, causing the cam 322 to move within the push-pull groove 33. When the cam 322 moves, it drives the fixed base 321 to move in a direction perpendicular to the first direction, thereby causing the sealing plate 2 to move closer to or away from the etching chamber 1. By utilizing the movement of the cam 322 within the push-pull groove 33, the stability of the push-pull assembly 3's movement can be improved.

[0044] In some embodiments of this application, the fixed seat 321 is a conical seat, the front end of the conical seat is rotatably connected to the cam 322, and the rear end of the conical seat is fixed to the sealing plate 2.

[0045] In some embodiments of this application, two moving parts 32 are provided, and two push-pull grooves 33 are provided on the connecting block 31. The two push-pull grooves 33 are arranged sequentially along the first direction, and the two moving parts 32 are respectively disposed in the two push-pull grooves 33. With this structure, the lifting plate 4 drives the connecting block 31 to move up and down along the first direction. The two push-pull grooves 33 can apply forces to the two moving blocks respectively, so that the moving parts 32 move in a direction perpendicular to the first direction, thereby driving the sealing plate 2 to move closer to or away from the etching chamber 1. Through the cooperation of the two moving parts 32 and the two push-pull grooves 33, the stability of the movement of the sealing plate 2 can be improved, and the sealing plate 2 can be prevented from tilting or shifting, thereby improving the sealing effect of the valve device.

[0046] In some embodiments of this application, each moving component 32 includes a fixed seat 321 and a cam 322. The two fixed seats 321 are fixed to the sealing plate 2 along the first direction, and the two cams 322 are respectively connected to the two fixed seats 321.

[0047] In some embodiments of this application, the push-pull inclined groove 33 has a first vertical groove and a second vertical groove at both ends, both of which are arranged along a first direction. The first vertical groove, the push-pull inclined groove 33, and the second vertical groove are connected in sequence. With this structure, when the moving member 32 moves to both ends of the push-pull inclined groove 33, it can be embedded in the first or second vertical groove for limiting, thereby improving the stability of the sealing plate 2 and preventing the sealing plate 2 from retracting and affecting the sealing effect of the valve device. When the moving member 32 includes a cam 322, the cam 322 can rotate into the first or second vertical groove for positioning. By using the cam 322 to limit the position with the first or second vertical groove, the stability of the sealing plate 2 can be further improved.

[0048] In some embodiments of this application, a spring 8 is provided between the sealing plate 2 and the connecting block 31. One end of the spring 8 is fixedly connected to the sealing plate 2, and the other end is fixedly connected to the connecting block 31. With this structure, when the lifting plate 4 moves and drives the sealing plate 2 toward the etching chamber 1, the spring 8 is stretched and undergoes elastic deformation. When the lifting plate 4 retracts, the sealing plate 2 can move away from the etching chamber using the elastic force of the spring 8, thereby ensuring that the push-pull assembly 3 can work normally, and thus ensuring that the valve device can work normally.

[0049] In some embodiments of this application, multiple springs 8 are provided. Through the elastic action of multiple springs 8, the pulling force of the lifting plate 4 on the sealing plate 2 can be increased, ensuring that the sealing plate 2 can return to the initial position.

[0050] In some embodiments of this application, the lifting plate 4 is provided with multiple push-pull components 3. These multiple push-pull components 3 can be arranged sequentially along the length of the lifting plate 4, with equal spacing between any two adjacent push-pull components 3. This structure, by using multiple push-pull components 3 to drive the sealing plate 2, improves the stability of the sealing plate 2's movement.

[0051] In some embodiments of this application, Figure 6 , Figure 7 and Figure 8 The process is illustrated where the lifting plate 4 moves along a first direction, causing the sealing plate 2 to move closer to or further away from the etching chamber 1. Figure 6 This diagram shows the valve device of this application in a sealed state. Figure 6 It can be seen that the cam 322 is located in the second vertical groove at the lower end of the push-pull inclined groove 33, the sealing plate 2 is pressed against the etching chamber 1 for sealing, and the spring 8 is in a stretched state. Figure 7 This diagram shows the valve device of this application in a transitional state. Figure 7 As can be seen, when the cam 322 is in the push-pull groove 33, the sealing plate 2 begins to disengage from the etching chamber 1, and the spring 8 begins to retract. Figure 8 This diagram shows the valve device of this application in the open state. Figure 8 It can be seen that the cam 322 is located in the first vertical groove at the upper end of the push-pull inclined groove 33, the sealing plate 2 is completely separated from the etching chamber 1, and the spring 8 is completely retracted.

[0052] In some embodiments of this application, a connector 9 is provided on the upper side of the sealing plate 2. The connector 9 is used to connect to the sealing plate 2 and restrict the movement of the sealing plate 2 along a first direction. The connector 9 can be fixedly connected to the housing of the etching equipment. Furthermore, the connector 9 can be a slide rail, with the sealing plate 2 slidably connected to the slide rail. The slide rail is arranged along the movement direction of the push-pull assembly 3. When the push-pull assembly 3 drives the sealing plate 2 to move, the sealing plate 2 can slide on the slide rail towards or away from the etching chamber 1. Using this structure, connecting the sealing plate 2 with the connector 9 improves the stability of the sealing plate 2. Restricting the movement of the sealing plate 2 along the first direction by the connector 9 ensures that the sealing plate 2 can move towards or away from the etching chamber 1 in a direction perpendicular to the first direction, guaranteeing the normal movement of the sealing plate 2.

[0053] In some embodiments of this application, the material of the connector 9 may be Teflon.

[0054] In the description of this utility model, it should be understood that the terms "center", "middle", "longitudinal", "lateral", "length", "width", "height", "upper", "lower", "left", "right", "vertical", "horizontal", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0055] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0056] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0057] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the protection scope of the present invention.

Claims

1. A valve device for an etching apparatus, used to seal the etching chamber of the etching apparatus, characterized in that, It includes a sealing plate, a push-pull assembly, and a lifting assembly. The push-pull assembly is connected to the sealing plate. The push-pull assembly is used to push the sealing plate toward the etching chamber to seal the etching chamber, or to pull the sealing plate away from the etching chamber. The lifting assembly includes a lifting plate, a linear drive mechanism, and two racks. The linear drive mechanism is connected to the lifting plate, and the two racks are disposed on both sides of the lifting plate. A gear is provided on each side of the lifting plate, and the two gears mesh with the two racks respectively. The linear drive mechanism is used to drive the lifting plate to move in a first direction. When the lifting plate moves, the gears roll along the length direction of the racks.

2. The valve device for etching equipment according to claim 1, characterized in that, The linear drive mechanism is a lifting cylinder, which is connected to the middle position of the lifting plate.

3. The valve device for etching equipment according to claim 2, characterized in that, The rack is arranged along a first direction, and the lifting cylinder includes a cylinder shaft, the cylinder shaft and the rack being parallel to each other.

4. The valve device for etching equipment according to claim 1, characterized in that, The push-pull assembly includes a connecting block and a moving component. The connecting block is connected to the lifting plate, and the moving component is connected to the sealing plate. The connecting block is provided with a push-pull inclined groove, the opening direction of which is perpendicular to the first direction. The upper end of the push-pull inclined groove is close to the lifting plate, and the lower end is close to the sealing plate. The moving component is disposed in the push-pull inclined groove. When the lifting plate moves along the first direction, it drives the connecting block to move along the first direction. When the connecting block moves along the first direction, the push-pull inclined groove applies a force to the moving component, so that the moving component drives the sealing plate to move toward or away from the etching chamber.

5. The valve device for etching equipment according to claim 4, characterized in that, The moving component includes a fixed seat and a cam. The fixed seat and the sealing plate are fixedly connected, and the cam and the fixed seat are rotatably connected. The cam is disposed in the push-pull inclined groove.

6. The valve device for etching equipment according to claim 5, characterized in that, The moving parts are provided in two places, and the connecting block is provided with two push-pull inclined grooves. The two push-pull inclined grooves are arranged sequentially along the first direction, and the two moving parts are respectively arranged in the two push-pull inclined grooves.

7. The valve device for etching equipment according to claim 5, characterized in that, The push-pull inclined groove has a first vertical groove and a second vertical groove at its two ends, and both the first vertical groove and the second vertical groove are arranged along the first direction. The first vertical groove, the push-pull inclined groove and the second vertical groove are connected in sequence.

8. The valve device for etching equipment according to claim 4, characterized in that, A spring is provided between the sealing plate and the connecting block, with one end of the spring fixedly connected to the sealing plate and the other end fixedly connected to the connecting block.

9. The valve device for etching equipment according to claim 1, characterized in that, The lifting plate is equipped with multiple push-pull components.

10. The valve device for etching equipment according to claim 1, characterized in that, The upper side of the sealing plate is provided with a connector, which is used to connect to the sealing plate and restrict the movement of the sealing plate along the first direction.

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