Probe detection mechanism for detecting material pipe in automatic pipe replacing system of semiconductor equipment

Abstract

The utility model discloses a probe detection mechanism for detecting a material pipe in an automatic pipe replacing system of semiconductor equipment, which relates to the technical field of semiconductor processing and comprises an L-shaped fixed plate connected with the output end of a pneumatic sliding table; the detection block mounting block is mounted at the top end of the fixing plate, and a first through hole is formed in one side of the detection block mounting block; the light focusing sensor comprises a light receptor and a light projector, the light receptor is mounted on the lower side of the fixing plate, and the light projector is mounted on the upper side of the detection block mounting block; and the detection block passes through the first through hole, and an elastic piece is arranged between the detection block and the fixed plate. The material pipe detection device is simple in structure and convenient to operate, and can quickly identify the material pipe when the material pipe is detected, so that the material pipe detection device has higher identification efficiency and quality.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a probe detection mechanism for detecting the feed tube in an automatic tube changing system of semiconductor equipment. Background Technology

[0002] In semiconductor equipment, feed tubes are used to deliver gases, chemicals, or other materials. The condition and accuracy of the feed tubes directly affect the overall operating efficiency and safety of the equipment.

[0003] In the semiconductor equipment industry, tubing is commonly used for loading and transferring products. The internal structure of tubing varies depending on the shape and size of the semiconductor product. However, products can usually only enter the tubing in a specified direction for storage. Therefore, the selection of tubing before loading is crucial.

[0004] A search revealed a Chinese patent (publication number: CN112729203B) that discloses a probe hole depth detection mechanism. This patent includes a base, a spring, a stop, a slider, a sensor, a guide block, a secondary positioning block, and a detection needle. The secondary positioning block, guide block, and stop are all mounted on the base. The detection needle passes through the secondary positioning block and extends into the guide block, which is located between the secondary positioning block and the stop. The slider is mounted on the upper surfaces of the guide block and the secondary positioning block, with one part of the slider located on the upper surface of the guide block and the other part on the upper surface of the secondary positioning block. There is a gap between the stop and the guide block. The spring passes through the stop and through the gap into the guide block, and the spring entering the guide block is connected to the tail of the detection needle. The sensor is located directly above the spring and senses the compression of the spring.

[0005] When inspecting tubes, the relevant inspection structure needs to have a fast inspection efficiency. Furthermore, when inspecting rigid tubes, it is necessary to avoid damage to the contact parts of the inspection structure due to contact. Therefore, this utility model proposes a probe inspection mechanism for inspecting tubes in an automatic tube changing system for semiconductor equipment. Utility Model Content

[0006] To address the shortcomings of existing technologies, this invention provides a probe detection mechanism for detecting tubes in an automatic tube-changing system for semiconductor equipment, thus solving the problem.

[0007] To achieve the above objectives, this utility model is implemented through the following technical solution: a probe detection mechanism for detecting tubes in an automatic tube changing system for semiconductor equipment, comprising a pneumatic slide, a detection block and a light sensor, wherein the pneumatic slide is installed on one side of a side plate and a fixing plate is installed at the output end of the pneumatic slide;

[0008] The fixing plate is L-shaped, including a vertical part and a horizontal part. The vertical part is connected to the pneumatic slide table, the horizontal part is installed at the bottom of the vertical part, and a countersunk hole is opened on one side of the vertical part. A detection block mounting block is installed at the top of the vertical part.

[0009] The light sensor includes a light receiver and a light projector. The light receiver is installed on the lower side of the vertical part, and the light projector is installed on the upper side of the detection block mounting block.

[0010] A first through hole is provided on one side of the detection block mounting block;

[0011] One end of the detection block passes through the first through hole, and an elastic element is installed between the detection block and the fixing plate;

[0012] When subjected to force, the elastic element can undergo elastic deformation along the moving direction of the detection block, and reset after the force is applied.

[0013] When the tube to be inspected is equipped with a feature or groove that matches the inspection block, and the tube is in the correct position, the inspection block, based on a pneumatic slide, can be embedded into the corresponding feature or groove of the tube. When the tube is in the wrong position, the inspection block moves by compressing an elastic element, thereby changing the beam of light to the optical sensor and thus achieving rapid inspection.

[0014] Preferably, the horizontal portion of both the detection block mounting block and the fixing plate is provided with a second through hole, the two sets of second through holes are distributed on the same axial direction, and the projector and the receiver are aligned through the two sets of second through holes.

[0015] Preferably, the detection block includes two sets of cylindrical segments, with a protruding segment between the two sets of cylindrical segments;

[0016] The movement path of the protruding segment is located on the recognition path of the light sensor;

[0017] A set of cylindrical segments facing away from the fixed plate are provided with conical heads, which are located at the end of the corresponding cylindrical segment away from the fixed plate;

[0018] The elastic element is sleeved on the outside of another set of cylindrical segments, and the end of the elastic element facing away from the fixed plate is attached to the side corresponding to the protruding segment.

[0019] Preferably, a countersunk hole is provided on one side of the vertical part, and the end of the elastic element facing away from the detection block is installed in the countersunk hole.

[0020] Beneficial effects

[0021] This invention provides a probe detection mechanism for inspecting tubes in an automated tube-changing system for semiconductor equipment. Compared with existing technologies, it has the following advantages:

[0022] This utility model has a simple structure and is easy to operate. When inspecting the material tube, it can quickly identify the material tube, thus having high identification efficiency and quality.

[0023] Meanwhile, the detection block is equipped with an elastic element at the tail and a tapered head at the head. When the material tube is in the wrong position, it can prevent the detection block from directly contacting the material tube and causing damage, thereby improving applicability and thus improving recognition quality. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of this utility model;

[0025] Figure 2 This is the left view of the present invention;

[0026] Figure 3 This is a front view of the present invention;

[0027] Figure 4 This is a top view of the present invention;

[0028] Figure 5 This is a schematic diagram of the detection block in this utility model;

[0029] Figure 6 This is a schematic diagram of the natural state of this utility model;

[0030] Figure 7 This is a schematic diagram of the compressed state of this utility model;

[0031] In the diagram: 1. Side plate; 2. Pneumatic slide; 3. Fixing plate; 4. Light sensor; 5. Detection block mounting block; 6. Detection block; 7. Elastic element. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0033] Please see Figure 1-7 This utility model provides a technical solution: a probe detection mechanism for detecting tubes in an automatic tube changing system for semiconductor equipment, for detecting tubes with characteristic ports, including a pneumatic slide 2, a detection block 6 and a light sensor 4. The model of the light sensor 4 can be selected from any existing model to facilitate cost control.

[0034] The pneumatic slide 2 is installed on one side of the side plate 1, and the output end of the pneumatic slide 2 is equipped with a fixing plate 3;

[0035] The fixed plate 3 is L-shaped, including a vertical part and a horizontal part. The vertical part is connected to the pneumatic slide table 2, the horizontal part is installed at the bottom of the vertical part, and a countersunk hole is opened on one side of the vertical part. The detection block mounting block 5 is installed at the top of the vertical part.

[0036] The light sensor 4 includes a light receiver and a light transmitter. The light receiver is installed on the lower side of the vertical part, and the light transmitter is installed on the upper side of the detection block mounting block 5.

[0037] A first through hole is provided on one side of the detection block mounting block 5;

[0038] One end of the detection block 6 passes through the first through hole, and an elastic element 7 is installed between the detection block 6 and the fixing plate 3;

[0039] In this embodiment, the elastic element 7 is a spring, and it can elastically deform along the moving direction of the detection block 6.

[0040] The detection block mounting block 5 and the fixing plate 3 both have second through holes inside their horizontal parts. The two sets of second through holes are distributed on the same axis, and the projector and the receiver are aligned through the two sets of second through holes.

[0041] Please see Figure 5 The detection block 6 includes two sets of cylindrical segments, with a protruding segment between them. The protruding segment limits the detection block 6, preventing it from moving out of the first through hole.

[0042] The movement path of the protruding segment is located on the recognition path of the light sensor 4;

[0043] A set of cylindrical segments facing away from the fixed plate 3 are provided with conical heads, and the conical heads are located at the end of the corresponding cylindrical segment away from the fixed plate 3;

[0044] The elastic element 7 is sleeved on the outside of another set of cylindrical sections, and the end of the elastic element 7 facing away from the fixing plate 3 is attached to the side corresponding to the protrusion section, and the end of the elastic element 7 facing away from the detection block 6 is installed in the countersunk hole.

[0045] During work:

[0046] After a set of tubes to be tested is moved to the testing station, the pneumatic slide 2 drives the testing block mounting block 5, testing block 6, and elastic element 7 to move through the fixed plate 3. If the tube is in the correct position, the testing block 6 passes through the characteristic opening of the tube and the state detected by the light sensor 4 does not change.

[0047] When the feed tube is not in the correct position, the detection block 6 cannot pass through the feature port. As the pneumatic slide 2 continues to move, after the detection block 6 contacts the feed tube, it moves relative to the light sensor 4 through the compression elastic element 7. After the detection block 6 moves relative to the light sensor 4, its internal protrusion moves into the recognition path of the light sensor 4, thereby changing the recognition state of the light sensor 4. This facilitates the equipment to automatically execute the next instruction and turn the feed tube to the correct position.

[0048] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0049] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A probe detection mechanism for detecting feed tubes in an automatic tube-changing system for semiconductor equipment, characterized in that, include: The fixed plate (3) is L-shaped and is connected to the output end of the pneumatic slide (2); The detection block mounting block (5) is installed on the top of the fixing plate (3), and a first through hole is provided on one side of the detection block mounting block (5); The light sensor (4) includes a light receiver and a light emitter. The light receiver is installed on the lower side of the fixed plate (3), and the light emitter is installed on the upper side of the detection block mounting block (5). The detection block (6) passes through the first through hole and is fitted with an elastic element (7) between itself and the fixing plate (3); The elastic element (7) can undergo elastic deformation along the moving direction of the detection block (6).

2. The probe detection mechanism for detecting tubes in an automatic tube-changing system for semiconductor equipment according to claim 1, characterized in that: The detection block mounting block (5) and the fixing plate (3) are both provided with a second through hole, and the two sets of second through holes are distributed on the same axis.

3. The probe detection mechanism for detecting tubes in an automatic tube-changing system for semiconductor equipment according to claim 1, characterized in that: The detection block (6) includes two sets of cylindrical segments, with a protruding segment between the two sets of cylindrical segments.

4. The probe detection mechanism for detecting tubes in an automatic tube-changing system for semiconductor equipment according to claim 3, characterized in that: The movement path of the protruding segment is located on the recognition path of the light sensor (4).

5. The probe detection mechanism for detecting tubes in an automatic tube-changing system for semiconductor equipment according to claim 4, characterized in that: A set of cylindrical segments facing away from the fixed plate (3) are provided with conical heads; The elastic element (7) is sleeved on the outside of another set of cylindrical segments, and the end of the elastic element (7) facing away from the fixed plate (3) is attached to the side corresponding to the protrusion segment.

6. The probe detection mechanism for detecting tubes in an automatic tube-changing system for semiconductor equipment according to claim 5, characterized in that: The fixing plate (3) includes a vertical part and a horizontal part. The vertical part is connected to the pneumatic slide (2), and the horizontal part is installed at the bottom of the vertical part. A countersunk hole is provided on one side of the vertical part, and the end of the elastic element (7) facing away from the detection block (6) is installed in the countersunk hole.

Images