Coil sensor composite assembly applied to planar motor and planar motor

Abstract

The utility model discloses a coil sensor composite assembly applied to a planar motor and the planar motor, and the coil sensor composite assembly comprises at least two layers of coil arrays which are parallel to each other, and a sensor module which is clamped between the two layers of coil arrays and is used for detecting the position information of a mover. The sensor module comprises a sensor circuit board and a magnetic field sensor array arranged on the sensor circuit board, the coil array is formed by arranging a plurality of coils, each layer of coil array is arranged in an up-and-down overlapping manner, and the coil arrays are arranged in series. A rotor or a stator of the planar motor adopts the coil sensor composite assembly. The coil sensor composite assembly is simple in structure, and the magnetic field detection range is expanded and the detection sensitivity is improved on the premise that the measuring range of the sensor is not expanded through ingenious position improvement of the magnetic field sensor array.

Description

Technical Field

[0001] This utility model relates to the field of planar motor technology, and in particular to a coil sensor composite component used in a planar motor and a planar motor. Background Technology

[0002] Planar motors mainly consist of a stator and a mover. The current flowing through the rotor coil array interacts with the magnetic field of the magnet array to drive the suspended mover in planar motion on the stator plane. Because the suspended mover achieves no mechanical contact during its motion, the motor system operates without friction, thus reducing power loss. This effectively lowers the aging and wear associated with traditional mechanical transmissions. As a result, its applications are becoming increasingly widespread, especially in industries such as ultra-precision positioning and semiconductors.

[0003] Since planar motors measure the displacement of their actuators by detecting the magnitude of the spatial magnetic field using magnetic field sensors, the accuracy of the magnetic field measurement directly affects the precision of the actuator displacement measurement. Therefore, magnetic field sensors are crucial components affecting the control accuracy of planar motors. Currently, commonly used magnetic field sensors include Hall effect sensors and eddy current sensors.

[0004] Currently, in existing planar motors, the magnetic field sensor array is usually fixedly mounted on the top surface of the stator coil array, such as... Figure 4 As shown. This setup requires the Hall sensor to have a large range; otherwise, when the mover moves close to the stator, a Hall sensor with a smaller range will typically fail to detect the change in mover height because the detected magnetic field strength is too large and exceeds its range. Therefore, existing planar motors suffer from the problem of discontinuous magnetic field information caused by the limited magnetic field range acquired by the Hall sensor. Using a Hall sensor with a larger range, on the other hand, presents problems of high cost and low detection accuracy.

[0005] Therefore, the existing technology still needs further development. Utility Model Content

[0006] To address the aforementioned technical problems, this utility model provides a coil sensor composite assembly for use in a planar motor and a planar motor. This coil sensor composite assembly cleverly sandwiches the magnetic field sensor array within the coil array, thereby expanding the magnetic field detection range and improving the detection sensitivity without increasing the measurement range, ensuring that the magnetic field information acquired by the magnetic field sensor is continuous and effective.

[0007] This utility model provides the following technical solution:

[0008] In a first aspect, this application provides a coil sensor composite assembly for use in a planar motor, comprising: at least two parallel coil arrays, and a sensor module for detecting mover position information sandwiched between the two coil arrays. The sensor module includes a sensor circuit board and a magnetic field sensor array disposed on the sensor circuit board. The coil arrays are formed by arranging multiple coils, and each coil array is arranged in an overlapping manner, with each coil array connected in series.

[0009] Optionally, in the application of the coil sensor composite assembly of the planar motor, the magnetic field sensor is a Hall sensor or an eddy current sensor.

[0010] Optionally, the distance between the magnetic field sensor and the top surface of the stator is set to D. The setting of D ensures that the magnetic field strength acquired by the magnetic field sensor when the mover is closest to the stator does not exceed its maximum range.

[0011] Optionally, in the coil sensor composite assembly applied to a planar motor, the distance between the magnetic field sensor and the top surface of the stator is set to D. The setting of D ensures that the magnetic field strength obtained by the magnetic field sensor when the mover is closest to the stator does not exceed its maximum range.

[0012] Optionally, in the coil sensor composite assembly applied to a planar motor, each layer of the coil array is configured as a coil printed circuit board, and the number of layers of the coil printed circuit board above the sensor circuit board is at least one; each layer of the coil printed circuit board includes a substrate located at the bottom and multiple coils printed on the substrate; by adjusting the number of layers of the coil printed circuit board above the sensor circuit board, the distance between the magnetic field sensor and the top surface of the stator is adjusted, so that the magnetic field strength acquired by the magnetic field sensor is always within the range.

[0013] Optionally, in the coil sensor composite assembly applied to a planar motor, the sensor circuit board and the adjacent coil printed circuit board are spaced apart by setting multiple non-magnetic support blocks; the adjacent coil printed circuit boards are spaced apart by setting multiple non-magnetic support blocks.

[0014] An insulating heat dissipation layer is provided between adjacent coil printed circuit boards, and this insulating heat dissipation layer is made of insulating heat dissipation material.

[0015] Optionally, in the coil sensor composite assembly applied to a planar motor, the coils of each layer of the coil array are flat and spiral-shaped, and are printed on corresponding positions on the coil substrate.

[0016] Optionally, in the coil sensor composite assembly applied to a planar motor, the cross-sectional shape of the coils in the coil array is circular, square, elliptical, or other polygonal.

[0017] Optionally, in the coil sensor composite assembly applied to a planar motor, the coil array above the sensor circuit board is a single layer, and the distance between the magnetic field sensor and the top surface of the stator is adjusted by adjusting the height of this coil array.

[0018] Secondly, this application also provides a planar motor, wherein the mover is provided with the aforementioned coil sensor composite assembly; and the stator of the planar motor is provided with the aforementioned coil sensor composite assembly.

[0019] The coil sensor composite assembly and planar motor provided by this utility model have the following beneficial effects:

[0020] 1. The coil sensor composite component can expand the detection range and improve the detection sensitivity of the magnetic field strength of the sensor without increasing the sensor range, by sandwiching the sensor array between two layers of coil arrays and without changing the magnetic field strength of the stator coil array. This makes the magnetic field information acquired by the magnetic field sensor continuous and effective, which is beneficial for the precise control of the mover.

[0021] 2. Setting the coil array as a multi-layered overlapping coil printed circuit board facilitates more flexible adjustment of the position of the magnetic field sensor in the coil array and its distance from the top surface of the stator. It also improves the convenience of assembly and processing, enabling it to meet the needs of different applications and expand its applicability.

[0022] 3. The coil sensor composite component has a simple structure, is easy to process, effectively reduces costs, has a wide range of applications, and can be used in various types of planar motors, showing good market application prospects. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the cross-sectional structure of the planar motor according to Embodiment 2 of the present invention;

[0024] Figure 2 This is a schematic diagram of the cross-sectional structure of the stator of the planar motor according to Embodiment 1 of the present invention;

[0025] Figure 3 This is a three-dimensional structural diagram of the stator of the planar motor according to Embodiment 1 of the present invention;

[0026] Figure 4 This is a schematic diagram of the cross-sectional structure of an existing planar motor;

[0027] Figure 5 This is a schematic diagram showing the magnetic induction intensity results of the Hall sensor and the mover of a planar motor.

[0028] Where A is Figure 4A is a schematic diagram showing the magnetic induction intensity results of the Hall sensor and the mover in a conventional planar motor using a single-layer coil; B is a schematic diagram showing the magnetic induction intensity results of the Hall sensor and the mover in a planar motor according to Embodiment 1 of this application.

[0029] The horizontal axis H represents the distance between the lower surface of the mover and the upper surface of the stator; the vertical axis represents the magnetic flux density of the mover's magnetic field sensed by the Hall sensor.

[0030] The annotations in the attached figures are explained as follows:

[0031] Coil array 1, sensor circuit board 2, magnetic field sensor array 3, lower coil array 11, upper coil array 12, mover 4, upper coil printed circuit board 121, lower coil printed circuit board 111, support block 13. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present utility model. It should be noted that when an element is described as being "fixed to" another element, it can be directly on the other element, or one or more intermediate elements may exist therebetween. When an element is described as being "connected" to another element, it can be directly connected to the other element, or one or more intermediate elements may exist therebetween. The terms "vertical," "horizontal," "left," "right," "upper," "lower," "inner," "outer," "bottom," etc., used in this specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the invention. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items. Furthermore, technical features involved in the different embodiments of this invention described below may be combined with each other as long as they do not conflict with each other.

[0034] This invention provides a coil sensor composite assembly for use in a planar motor, comprising: at least two parallel coil arrays, and a sensor module for detecting the position information of the mover sandwiched between the two coil arrays. The sensor module includes a sensor circuit board and a magnetic field sensor array disposed on the sensor circuit board. The coil arrays are composed of multiple coils arranged on the same plane, with each coil array layer overlapping vertically. The above-described coil sensor composite assembly functions by being installed in the stator or mover of the planar motor.

[0035] To ensure the consistency of the magnetic field distribution in each layer of the coil array and to make the magnetic field of each layer of the coil array appear superimposed and enhanced as a whole, each layer of the coil array is arranged to overlap vertically.

[0036] The coil arrays described above are connected in series, and the coils overlapping in each layer are controlled synchronously. This arrangement not only facilitates a consistent magnetic field distribution and maximizes the superimposed magnetic field strength of the coils composed of multiple layers, but also simplifies the circuit setup and control methods for each layer of the coil array.

[0037] With this setup, when the permanent magnetic field of the mover exhibits the same magnetic field strength, by changing the position of the sensor circuit board from the upper surface of the coil array to the inner layer of the coil array, the distance between the sensor and the stator surface is adjusted to be slightly greater. This reduces the magnetic field strength from the mover sensed by the magnetic field sensor on the sensor circuit board, thereby expanding the detection range of the magnetic field strength of the magnetic field sensor without increasing the measurement range.

[0038] More preferably, the distance between the magnetic field sensor and the top surface of the stator is set to D, and the setting of D satisfies the following condition: the magnetic field strength (maximum value) obtained by the magnetic field sensor when the mover is closest to the stator does not exceed its maximum range.

[0039] By adjusting the thickness or number of layers of the coil array above the sensor circuit board, the distance from the sensor circuit board to the stator surface can be adjusted to ensure that the maximum magnetic field strength of the permanent magnetic field acquired by the magnetic field sensor does not exceed the maximum measurement value of the magnetic field sensor. This setting balances expanding the magnetic field detection range and improving detection sensitivity without increasing the measurement range, ensuring that the magnetic field information acquired by the magnetic field sensor is continuous and effective, which is beneficial for precise control of the mover.

[0040] Example 1

[0041] Based on the above, such as Figures 2-3As shown, in the coil sensor composite assembly provided in this embodiment, each layer of the coil array is configured as a coil printed circuit board, and the number of coil printed circuit boards above the sensor circuit board is no less than two. By adjusting the number of layers of the coil array above the sensor circuit board, the distance between the sensor circuit board and the upper surface of the stator is adjusted, so that the magnetic field strength obtained by the magnetic field sensor is always within the range.

[0042] In this embodiment, the magnetic field sensor is a Hall sensor; in other embodiments, the magnetic field sensor may be an eddy current sensor.

[0043] In this embodiment, as an example, such as Figures 2-3 As shown, a three-layer upper coil printed circuit board 121 is disposed above the sensor circuit board 2, and a three-layer lower coil printed circuit board 111 is disposed below the sensor circuit board 2.

[0044] like Figure 3 As shown, each coil printed circuit board consists of a bottom substrate and multiple coils 1 printed on the substrate. The coils are flat spirals, and each coil is printed at a corresponding position on the coil substrate in an array. The shape of the coils can be set to a spiral circle, rectangle, ellipse, or other polygons. The arrangement of the coil array is not limited to... Figure 3 .

[0045] When the moving part is closest to the stator (i.e., when it moves to contact the stator), the magnetic field strength acquired by the magnetic field sensor reaches its maximum value M. The layer setting of the above-mentioned coil printed circuit board ensures that the maximum magnetic field strength acquired by the magnetic field sensor is equal to or less than its maximum range value.

[0046] In other embodiments, depending on the specifications of the planar motor and the different application requirements, the number of layers of the upper coil printed circuit board can be reasonably adjusted as needed, and is not limited to the specific settings of this embodiment.

[0047] This configuration balances the ability of the Hall sensor to detect a wide range of magnetic field strengths with ensuring high sensitivity of the detection results. Furthermore, the above scheme allows for more flexible adjustment of the magnetic field sensor's position within the stator coil array to meet the needs of different applications, making it widely applicable.

[0048] More preferably, to prevent the sensor sandwiched between two coil printed circuit boards from being crushed, a plurality of non-magnetic support blocks 3 are fixedly disposed between the sensor circuit board 2 and the adjacent coil printed circuit board, creating a certain gap between the sensor circuit board and the adjacent coil printed circuit board. The support blocks can be made of aluminum, copper, brass, or other non-magnetic materials.

[0049] Furthermore, multiple non-magnetic support blocks 3 are also fixedly installed between adjacent coil printed circuit boards to create a certain gap between them, ensuring the stability of the coil structure, preventing it from being damaged, and facilitating heat dissipation during coil operation.

[0050] Optionally, an insulating heat dissipation layer is provided between the upper and lower coil printed circuit boards. This insulating heat dissipation layer uses existing insulating heat dissipation materials, which is beneficial for coil heat dissipation. The specific insulating heat dissipation materials used are existing technologies, so they will not be listed one by one.

[0051] The multi-layered coil printed circuit board is fixed to the sensor circuit board by existing fixing methods, such as screwing, bonding or welding.

[0052] This embodiment also provides a planar motor, which is equipped with the above-described coil sensor composite assembly.

[0053] Specifically, if the planar motor is a moving-magnet planar motor, its stator is equipped with the coil sensor composite component described above in this embodiment. If the planar motor is a moving-coil planar motor, the mover of the planar motor adopts the coil sensor composite component described above in this embodiment.

[0054] Example 2

[0055] Based on the foregoing, this embodiment provides another coil sensor composite component, such as... Figure 1 As shown, this coil sensor composite assembly functions as the stator structure of a planar motor.

[0056] In this embodiment, the coil sensor composite component includes: two parallel coil arrays 1, and a sensor module for detecting the position information of the mover sandwiched between the two coil arrays. The sensor module includes a sensor circuit board 21 and a magnetic field sensor array 3 disposed on the sensor circuit board. The coil array 1 is formed by arranging multiple coils. Each coil array is arranged in an overlapping manner, and the coil arrays are connected in series.

[0057] In this embodiment, the upper coil array 12 above the sensor circuit board is configured as a single layer. The array below the sensor circuit board is also configured as a single layer. The coils are conventionally configured, consisting of a central post and coil windings wound around the central post. The height of the upper coil array determines the distance between the magnetic field sensor (such as a Hall sensor) and the upper surface of the stator.

[0058] Therefore, the distance between the sensor array and the upper surface of the stator can be adjusted by adjusting the height of the upper coil array. The coil height of the upper coil array is set such that the maximum magnetic field strength acquired by the magnetic field sensor does not exceed the maximum measurement value of the magnetic field sensor's range.

[0059] When the distance between the mover and the stator is closest (i.e., when the mover moves above the stator and touches the stator), the magnetic field strength acquired by the magnetic field sensor reaches its maximum value M. This maximum value M is ensured not to exceed the maximum range of the magnetic field sensor, which can be achieved by adjusting the height of the upper coil array.

[0060] In other embodiments, the upper coil array may also be configured as two or more layers.

[0061] To ensure the consistency of the magnetic field distribution in each layer of the coil array and to make the magnetic field of each layer of the coil array appear superimposed and enhanced as a whole, each layer of the coil array is arranged to overlap vertically.

[0062] In this embodiment, the coil arrays are connected in series, and the coils overlapping in each layer are controlled synchronously. This arrangement not only facilitates a consistent magnetic field distribution and maximizes the superimposed magnetic field strength of the coils composed of multiple layers, but also simplifies the circuit setup and control methods for each layer of the coil array.

[0063] In order to fully explain the technical effects of the technical solution of this application, the following will be presented: Figure 1 The existing planar motor shown is used as the control group, and the planar motor of this embodiment is used as the experimental group. A comparative analysis is conducted using schematic diagrams of the Hall sensor and the magnetic induction intensity results of the mover. The total thickness of the coil arrays in both the experimental and control groups is kept consistent to ensure that the magnetic field strength and force applied by the stator to the mover are consistent. The Hall sensors selected for both the control and experimental groups are the same, and the experimental conditions are identical.

[0064] like Figure 5 As shown in Figure A, for the existing planar motor in the control group, the Hall sensor is installed on the top surface of the stator, and the range of the Hall sensor is set to (0~M). In this example, assuming M = 100mt, when the height H of the mover (i.e., the distance from the lower surface of the mover to the upper surface of the stator) is 0, the magnetic field strength of the mover is greater than M, and the magnetic induction intensity of the Hall sensor only displays M. This state applies when the mover height H is within the range of 0~h1 (assuming h1 = 10mm in this example). In this state, because the magnetic field strength of the mover exceeds the range of the Hall sensor, the magnetic field strength B detected by the Hall sensor does not have a continuous functional relationship with the height H of the mover, and cannot reflect the change in the height of the mover. Only after the height H of the mover increases to h1 does the magnetic field strength B sensed by the Hall sensor become less than M, and only then does the magnetic field strength B detected by the Hall sensor show a correlation with the height H of the mover, and its detection result is valid.

[0065] Therefore, during the movement of the mover's height H from 0 to h1, the Hall sensor cannot detect any change in the mover's height. This demonstrates that the magnetic field information acquired by the Hall sensor in this scheme is not continuous and effective, which is detrimental to the control of the mover.

[0066] like Figure 5 As shown in Figure B, for the planar motor of Example 1 or 2 in the experimental group, when H is 0, the magnetic field strength of the mover detected by the Hall sensor is 100mt (assuming M = 100mt), which is exactly at its maximum range. In the range of 0 to h1 (i.e. 0 to 10mm), the magnetic induction intensity detected by the Hall sensor decreases linearly, which can accurately detect the height change of the mover. This indicates that the magnetic field information obtained by the Hall sensor is continuous and effective, which is beneficial to the precise control of the mover.

[0067] The above schematic diagram of the magnetic induction intensity results of the sensor of the planar motor in this embodiment is merely an example for illustration and is not intended to limit the present invention.

[0068] This embodiment also provides a planar motor equipped with the coil sensor composite assembly of this embodiment. Specifically, if the planar motor is a moving-magnet planar motor, its stator is provided with the coil sensor composite assembly described above in this embodiment. If the planar motor is a moving-coil planar motor, the mover of the planar motor adopts the coil sensor composite assembly described above in this embodiment.

[0069] In this application, the term "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the article or device that includes said element.

[0070] It is understood that those skilled in the art can make equivalent substitutions or changes based on the technical solution and concept of this utility model, and all such substitutions or changes should fall within the protection scope of the appended claims.

Claims

1. A coil sensor composite assembly applied in a planar motor, characterized in that, include: At least two parallel coil arrays (1), a sensor module for detecting the position information of the mover sandwiched between the two coil arrays, the sensor module includes a sensor circuit board (21) and a magnetic field sensor array (3) disposed on the sensor circuit board, the coil array (1) is composed of multiple coils arranged in the same plane, each layer of the coil array is arranged in an overlapping manner, and the coil arrays of each layer are connected in series.

2. The coil sensor composite assembly applied to a planar motor according to claim 1, characterized in that, The magnetic field sensor is a Hall sensor or an eddy current sensor.

3. The coil sensor composite assembly applied to a planar motor according to claim 2, characterized in that, The distance between the magnetic field sensor and the top surface of the stator is set to D. The setting of D ensures that the magnetic field strength obtained by the magnetic field sensor when the mover is closest to the stator does not exceed its maximum range.

4. The coil sensor composite assembly applied to a planar motor according to claim 2, characterized in that, Each coil array is configured as a coil printed circuit board, and the number of layers of the coil printed circuit board above the sensor circuit board is at least one; each coil printed circuit board includes a substrate at the bottom and multiple coils printed on the substrate; The distance between the magnetic field sensor and the top surface of the stator is adjusted by changing the number of layers on the coil printed circuit board above the sensor circuit board, so that the magnetic field strength acquired by the magnetic field sensor is always within the range.

5. The coil sensor composite assembly for use in a planar motor according to claim 4, characterized in that, Each layer of the coil array has flat, spiral-shaped coils, which are printed in an array on corresponding positions on the coil substrate.

6. The coil sensor composite assembly for use in a planar motor according to claim 4, characterized in that, The sensor circuit board and the adjacent coil printed circuit board are kept apart by setting multiple non-magnetic support blocks; the adjacent coil printed circuit boards are kept apart by setting multiple non-magnetic support blocks.

7. The coil sensor composite assembly for use in a planar motor according to claim 4, characterized in that, An insulating heat dissipation layer is provided between adjacent coil printed circuit boards, and this insulating heat dissipation layer is made of insulating heat dissipation material.

8. The coil sensor composite assembly for use in a planar motor according to claim 3, characterized in that, The coil array above the sensor circuit board is a single layer. The distance between the magnetic field sensor and the top surface of the stator can be adjusted by adjusting the height of this coil array.

9. The coil sensor composite assembly applied to a planar motor according to claim 5 or 8, characterized in that, The cross-sectional shape of the coils is circular, square, elliptical, or other polygonal.

10. A planar motor, characterized in that, Its mover is provided with a coil sensor composite assembly as described in any one of claims 1 to 7; or its stator is provided with a coil sensor composite assembly as described in any one of claims 1 to 7.

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