Hairbrush mounting assembly for semiconductor cleaning machine

Abstract

The utility model discloses a brush installation assembly for semiconductor cleaning machine, including cleaning box and connecting frame, the inside of cleaning box is provided with two sets of connecting frame, the inside of connecting frame is provided with draw-pull block, and the draw-pull block is connected with connecting frame sliding, the bottom end of connecting frame is provided with support frame, and the support frame is connected with the inside of connecting frame sliding connection. Rotating motors are installed on the side walls of the supporting frames, rotating shafts are installed at the output ends of the rotating motors, the rotating shafts are movably connected with the supporting frames, the surfaces of the rotating shafts are sleeved with brush bodies, two sets of circular grooves are formed in the side walls of the drawing blocks, and arc-shaped grooves are formed in the positions, on one sides of the circular grooves, of the side walls of the drawing blocks. According to the semiconductor cleaning device, the brush can be conveniently and elastically twisted and embedded, the semiconductor can be conveniently and movably cleaned, the semiconductor can be conveniently and oppositely clamped and cleaned, and the brush dismounting and mounting convenience and the cleaning effect are improved.

Description

Technical Field

[0001] This utility model relates to the technical field of brush mounting components, specifically a brush mounting component for a semiconductor cleaning machine. Background Technology

[0002] The semiconductor industry is the core of the modern electronics industry, and the foundation of the semiconductor industry is the silicon material industry. Although various new semiconductor materials are constantly emerging, most semiconductor devices and circuits, especially very large-scale integrated circuits, are fabricated on high-purity, high-quality silicon single-crystal polished wafers and epitaxial wafers. The importance of silicon wafer cleaning to the semiconductor industry has long been highly valued because contaminants on the surface of silicon wafers can seriously affect the performance, reliability, and yield of devices. With the rapid development of microelectronics technology and the increasing requirements for raw materials, the impact of contaminants on devices has become more prominent. Semiconductor cleaning machines need to use brushes to clean semiconductors. Traditional brushes are mostly fixed and their disassembly is inconvenient. In order to better use semiconductor cleaning brushes, a brush mounting assembly for semiconductor cleaning machines is proposed.

[0003] For example, the brush mounting assembly for a semiconductor cleaning machine disclosed in the authorization announcement number CN220920088U includes a brush body, a first groove is formed in the brush body, a brush plate is slidably sleeved in the first groove, a placement groove is formed in the brush plate, a plurality of water outlets are formed in the placement groove, a second groove is formed in the brush body, a pin is slidably sleeved in the second groove, one end of the pin is fixedly connected to a pull plate, and a channel is formed in the brush body, a device frame is fixedly connected in the channel;

[0004] Although this device achieves uniform water distribution by setting multiple water outlets and installing them between the brushes, when the brushes clean the surface, the water can clean multiple areas, improving the cleaning effect. By setting a pin, the brush plate can be installed when the pin is inserted into the brush plate. This device can complete the installation and removal of the brush plate simply by moving the pin, ensuring that the device is convenient and quick to use.

[0005] However, the existing brush mounting components do not solve the problems of the inconvenience of easy flexible twisting and fitting of the brush and easy movement for cleaning semiconductors, and the inconvenience of clamping and cleaning the semiconductors in opposite directions, which affects the convenience of brush assembly and disassembly and the cleaning effect. Utility Model Content

[0006] The purpose of this invention is to provide a brush mounting assembly for a semiconductor cleaning machine, so as to solve the problems mentioned in the background art, which are not conducive to the convenient elastic twisting and fitting of the brush for easy moving and cleaning of semiconductors, and are not conducive to the opposite clamping and cleaning of semiconductors, thus affecting the convenience of brush assembly and disassembly and the cleaning effect.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a brush mounting assembly for a semiconductor cleaning machine, comprising a cleaning tank and a connecting frame. The cleaning tank contains two sets of connecting frames, each with a pull-out block slidably connected to it. Each connecting frame has a support frame mounted at its bottom. A rotary motor is mounted on the side wall of each support frame, and a rotating shaft is mounted at the output end of each rotary motor, movably connected to the support frame. The surface of each rotating shaft is fitted with a brush. The brush body has two sets of circular grooves installed on the side walls of each pull-out block. An arc-shaped groove is installed on the side wall of each pull-out block on one side of the circular groove, and the circular groove and the arc-shaped groove are interconnected. A movable plate is installed on the side wall of each connecting frame, and the movable plate is movably connected to the connecting frame. Two sets of pull rods are slidably installed inside each movable plate. A circular block is installed at one end of each pull rod. A tension spring is fitted on the surface of each pull rod, and the two ends of the tension spring are connected to the pull rod and the movable plate, respectively. A rotating rod is provided on one side of each movable plate, and the rotating rod is connected to the pull rod.

[0008] Preferably, servo motors are symmetrically installed on the inner wall of the cleaning tank, and each servo motor has a threaded rod installed at its output end, and the threaded rod is movably connected to the cleaning tank.

[0009] Preferably, the surface of the threaded rod is fitted with a threaded sleeve, and the threaded sleeve is threadedly connected to the threaded rod, and the threaded sleeve is slidably connected to the cleaning tank.

[0010] Preferably, a clamping frame is provided on one side of the threaded sleeve, and the clamping frame is connected to the two sets of threaded sleeves.

[0011] Preferably, a placement plate is mounted on the top of the clamping frame, and a clamping motor is mounted on the top of the placement plate.

[0012] Preferably, a drive shaft is installed at the output end of the clamping motor, and gears are fitted onto the surface of the drive shaft.

[0013] Preferably, the bottom end of the clamping frame is symmetrically equipped with slide rails, and each slide rail is symmetrically equipped with a slider, which is connected to the connecting frame.

[0014] Preferably, racks are slidably mounted on the sidewalls of the clamping frame on both sides of the gear, and the racks mesh with the gear. A movable block is mounted on the end of the rack away from the gear, and the movable block is connected to the connecting frame.

[0015] Compared with the prior art, the beneficial effects of this utility model are: the brush mounting assembly not only realizes convenient elastic twisting and fitting of the brush and convenient moving cleaning of semiconductors, facilitating the opposite clamping and cleaning of semiconductors, but also improves the convenience of brush assembly and disassembly and the cleaning effect. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0017] Figure 2 This is a front view cross-sectional structural diagram of the cleaning box of this utility model;

[0018] Figure 3 This is a three-dimensional structural diagram of the clamping frame of this utility model;

[0019] Figure 4 This is a three-dimensional structural diagram of the connecting frame of this utility model;

[0020] Figure 5 This is a three-dimensional structural diagram of the movable disc of this utility model;

[0021] Figure 6 This is a three-dimensional structural diagram of the pull-out block of this utility model.

[0022] In the diagram: 1. Cleaning tank; 2. Clamping frame; 3. Moving block; 4. Connecting frame; 5. Brush body; 6. Rotary motor; 7. Support frame; 8. Clamping motor; 9. Drive shaft; 10. Gear; 11. Slide rail; 12. Slider; 13. Servo motor; 14. Threaded rod; 15. Threaded sleeve; 16. Rotating shaft; 17. Arc groove; 18. Circular groove; 19. Circular block; 20. Tension spring; 21. Pull rod; 22. Rotating rod; 23. Movable disc; 24. Pull-out block; 25. Rack; 26. Placement plate. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0024] Please see Figure 1-6This utility model provides an embodiment of a brush mounting assembly for a semiconductor cleaning machine, comprising a cleaning tank 1 and a connecting frame 4. Two sets of connecting frames 4 are arranged inside the cleaning tank 1. Each connecting frame 4 has a pull-out block 24 installed inside, and the pull-out block 24 is slidably connected to the connecting frame 4. A support frame 7 is installed at the bottom of each connecting frame 4. A rotary motor 6 is installed on the side wall of each support frame 7, providing power drive. A rotating shaft 16 is installed at the output end of each rotary motor 6, and the rotating shaft 16 is movably connected to the support frame 7. A brush body 5 is fitted onto the surface of each rotating shaft 16. Two sets of circular grooves 18 are installed on the side wall of each block 24. Arc grooves 17 are installed on the side wall of each pull block 24 on one side of the circular grooves 18. The circular grooves 18 and the arc grooves 17 are connected to each other. Movable discs 23 are installed on the side wall of each connecting frame 4. The movable discs 23 are movably connected to the connecting frame 4. Two sets of pull rods 21 are slidably installed inside each movable disc 23. A circular block 19 is installed at one end of each pull rod 21. A tension spring 20 is fitted on the surface of each pull rod 21. The two ends of the tension spring 20 are connected to the pull rod 21 and the movable disc 23 respectively. A rotating rod 22 is provided on one side of each movable disc 23. The rotating rod 22 is connected to the pull rod 21.

[0025] First, the brush body 5 is mounted on the support frame 7 via the rotating shaft 16. The rotary motor 6 is connected to the rotating shaft 16. The rotating rod 22 is pulled, which drives the pull rod 21 to move. The pull rod 21 then drives the circular block 19 to move, bringing the circular block 19 close to the inner wall of the connecting frame 4. Then, the pull block 24 is inserted into the interior of the connecting frame 4, aligning the circular groove 18 with the circular block 19. Finally, the rotating rod 22 is released, and under the elastic support of the tension spring 20, the brush body 5 is moved... The pull rod 21 and the circular block 19 move to insert the circular block 19 into the circular groove 18. Then, the rotating rod 22 is rotated, which drives the circular block 19 to rotate inside the arc-shaped groove 17 via the pull rod 21. The movable plate 23 provides movable support for the pull rod 21. The diameter of the pull rod 21 is close to the width of the arc-shaped groove 17, and the width of the internal space of the arc-shaped groove 17 is close to the diameter of the circular block 19, so that the circular block 19 can be stuck inside the arc-shaped groove 17. Then, the pull block 24 and The support frame 7 is used to install the brush body 5. Then, cleaning fluid is added into the cleaning tank 1. At the same time, the device is connected to the external controller and external circuit. The semiconductor to be cleaned is placed between the two sets of brush bodies 5. The clamping motor 8 is turned on. The clamping motor 8 drives the gear 10 to rotate through the drive shaft 9. Under the mutual meshing of the gear 10 and the rack 25, the gear 10 drives the two sets of racks 25 to move towards each other. Under the sliding cooperation of the slide rail 11 and the slider 12, the rack 25 drives the two sets of connecting frames 4 to move towards each other through the moving block 3. The connecting frames 4 drive the two sets of brush bodies 5 to move towards each other, so that the two sets of brush bodies 5 contact the two sides of the semiconductor. Then, the rotary motor 6 is turned on. The rotary motor 6 drives the brush body 5 to rotate through the rotating shaft 16. The brush body 5 cleans the two sides of the semiconductor. It realizes convenient elastic twisting and fitting of the brush, which facilitates the opposite clamping and cleaning of the semiconductor and improves the convenience of brush assembly and disassembly.

[0026] Servo motors 13 are symmetrically installed on the inner wall of the cleaning tank 1. The servo motors 13 serve as power drives. The output ends of the servo motors 13 are all equipped with threaded rods 14, and the threaded rods 14 are movably connected to the cleaning tank 1.

[0027] The surface of the threaded rod 14 is fitted with threaded sleeves 15, and the threaded sleeves 15 are threadedly connected to the threaded rod 14. The threaded sleeves 15 are slidably connected to the cleaning tank 1. A clamping frame 2 is provided on one side of the threaded sleeve 15, and the clamping frame 2 is connected to two sets of threaded sleeves 15.

[0028] A placement plate 26 is installed at the top of the clamping frame 2, and a clamping motor 8 is installed at the top of the placement plate 26. The clamping motor 8 serves as a power drive, and a drive shaft 9 is installed at the output end of the clamping motor 8. A gear 10 is fitted on the surface of the drive shaft 9.

[0029] The bottom end of the clamping frame 2 is symmetrically equipped with slide rails 11, and sliders 12 are slidably mounted on the surface of the slide rails 11. The sliders 12 are connected to the connecting frame 4. Racks 25 are slidably mounted on the side walls of the clamping frame 2 on both sides of the gear 10. The racks 25 mesh with the gear 10. A moving block 3 is mounted on the end of the rack 25 away from the gear 10. The moving block 3 is connected to the connecting frame 4.

[0030] Turn on the servo motor 13, which drives the threaded rod 14 to rotate. With the threaded connection between the threaded rod 14 and the threaded sleeve 15, the two sets of threaded rods 14 drive the clamping frame 2 to move downward through the threaded sleeve 15. The clamping frame 2 drives the connecting frame 4, the pull block 24, the support frame 7, and the brush body 5 to move downward. The brush body 5 performs mobile cleaning on the semiconductor, cleaning different positions of the semiconductor, improving the cleaning effect, realizing convenient mobile cleaning of semiconductors, and improving the cleaning effect.

[0031] Working principle: First, the brush body 5 is mounted on the support frame 7 via the rotating shaft 16. The rotary motor 6 is connected to the rotating shaft 16. Pulling the rotating rod 22 causes the pull rod 21 to move, which in turn moves the circular block 19, bringing it close to the inner wall of the connecting frame 4. Then, the pull block 24 is inserted into the connecting frame 4, aligning the circular groove 18 with the circular block 19. Finally, the rotating rod 22 is released, and the tension spring 20 moves the pull rod 21 and the circular block 19. The circular block 19 is inserted into the circular groove 18. The rotating rod 22 drives the circular block 19 to rotate inside the arc-shaped groove 17 via the pull rod 21. The movable plate 23 provides movable support for the pull rod 21. The diameter of the pull rod 21 is close to the width of the arc-shaped groove 17, and the width of the internal space of the arc-shaped groove 17 is close to the diameter of the circular block 19, so that the circular block 19 can be locked inside the arc-shaped groove 17. Then, the brush body 5 is installed by the pull block 24 and the support frame 7, and then put into the cleaning box 1. The cleaning solution is added to the semiconductor, which is then placed between two sets of brush bodies 5. The clamping motor 8 drives the gear 10 to rotate via the drive shaft 9. The gear 10 drives the two sets of racks 25 to move towards each other. The racks 25 drive the two sets of connecting frames 4 to move towards each other via the moving block 3. The connecting frames 4 drive the two sets of brush bodies 5 to move towards each other, so that the two sets of brush bodies 5 contact both sides of the semiconductor. The rotary motor 6 drives the brush bodies 5 to rotate via the rotating shaft 16, and the brush bodies 5 clean both sides of the semiconductor. The servo motor 13 drives the threaded rod 14 to rotate. The two sets of threaded rods 14 drive the clamping frame 2 to move downward via the threaded sleeve 15. The clamping frame 2 drives the connecting frame 4, the pull block 24, the support frame 7, and the brush bodies 5 to move downward, and the brush bodies 5 perform mobile cleaning of the semiconductor, cleaning different parts of the semiconductor, improving the cleaning effect, and completing the use of the brush mounting assembly for the semiconductor cleaning machine.

Claims

1. A brush mounting assembly for a semiconductor cleaning machine, comprising a cleaning tank (1) and a connecting frame (4), characterized in that: The cleaning tank (1) is equipped with two sets of connecting frames (4). Each connecting frame (4) has a pull-out block (24) installed inside, and the pull-out block (24) is slidably connected to the connecting frame (4). Each connecting frame (4) has a support frame (7) installed at its bottom end. Each support frame (7) has a rotary motor (6) installed on its side wall. Each rotary motor (6) has a rotary shaft (16) installed at its output end, and the rotary shaft (16) is movably connected to the support frame (7). Each rotary shaft (16) has a brush body (5) fitted onto its surface. Each pull-out block (24) has two sets of circular grooves (18) installed on its side wall. Each pull-out block (24) has a pull-out block (24) on one side of the circular groove (18). 4) Arc grooves (17) are installed on the side walls, and the circular grooves (18) and arc grooves (17) are connected to each other. Movable discs (23) are installed on the side walls of the connecting frame (4), and the movable discs (23) are movably connected to the connecting frame (4). Two sets of pull rods (21) are slidably installed inside the movable discs (23). A round block (19) is installed at one end of each pull rod (21). A tension spring (20) is fitted on the surface of each pull rod (21), and the two ends of the tension spring (20) are connected to the pull rod (21) and the movable disc (23) respectively. A rotating rod (22) is provided on one side of each movable disc (23), and the rotating rod (22) is connected to the pull rod (21).

2. The brush mounting assembly for a semiconductor cleaning machine according to claim 1, characterized in that: Servo motors (13) are symmetrically installed on the inner wall of the cleaning tank (1). Each of the output ends of the servo motors (13) is equipped with a threaded rod (14), and the threaded rod (14) is movably connected to the cleaning tank (1).

3. The brush mounting assembly for a semiconductor cleaning machine according to claim 2, characterized in that: The surface of the threaded rod (14) is fitted with a threaded sleeve (15), and the threaded sleeve (15) is threadedly connected to the threaded rod (14), and the threaded sleeve (15) is slidably connected to the cleaning tank (1).

4. A brush mounting assembly for a semiconductor cleaning machine according to claim 3, characterized in that: A clamping frame (2) is provided on one side of the threaded sleeve (15), and the clamping frame (2) is connected to the two sets of threaded sleeves (15).

5. A brush mounting assembly for a semiconductor cleaning machine according to claim 4, characterized in that: The clamping frame (2) has a placement plate (26) mounted on its top end, and the placement plate (26) has a clamping motor (8) mounted on its top end.

6. A brush mounting assembly for a semiconductor cleaning machine according to claim 5, characterized in that: The output end of the clamping motor (8) is equipped with a drive shaft (9), and a gear (10) is fitted on the surface of the drive shaft (9).

7. A brush mounting assembly for a semiconductor cleaning machine according to claim 4, characterized in that: The bottom end of the clamping frame (2) is symmetrically equipped with slide rails (11), and the surface of each slide rail (11) is symmetrically equipped with sliders (12), and the sliders (12) are connected to the connecting frame (4).

8. A brush mounting assembly for a semiconductor cleaning machine according to claim 6, characterized in that: On the side walls of the clamping frame (2) on both sides of the gear (10), racks (25) are slidably installed, and the racks (25) mesh with the gear (10). A moving block (3) is installed on the end of the rack (25) away from the gear (10), and the moving block (3) is connected to the connecting frame (4).

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