Cooling device for vacuum coating

Abstract

The utility model discloses a cooling device for vacuum coating, which relates to the technical field of vacuum coating machines and comprises a coating frame, an electric control knob is arranged on the front surface of the coating frame, a vacuum cover is fixedly connected to the side surface of the coating frame through bolts, a vacuum air pump is arranged on the side surface of the vacuum cover, and a cooling fan is arranged on the vacuum air pump. A vacuum cover is arranged on the top of the coating frame, a pressure gauge and a temperature sensor are fixedly connected to the front side of the vacuum cover, a cooling box is arranged on the top of the vacuum cover, a protruding plate is fixedly connected to the inner side of the cooling box, and a cooling fan is arranged on the front side of the cooling box. A cooling box is installed at the top of the coating frame through a groove and a convex plate, a circulating pump is arranged on the side face of a cooling pipe installed on the inner side of the cooling box, and the cooling pipe makes contact with the side face of a heat conduction plate at the top of the vacuum cover, so that heat on the vacuum cover can be guided into the cooling pipe, and then the heat is rapidly discharged through a cooling fan; and the heat dissipation efficiency can be improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating machine technology, and in particular to a cooling device for vacuum coating. Background Technology

[0002] Vacuum coating machines mainly refer to a type of coating that needs to be carried out under high vacuum. They include many types, such as vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, and many others.

[0003] Traditional vacuum coating machines require cooling of the finished products inside. Existing vacuum coating machines mostly rely on natural cooling, which is ineffective, resulting in low work efficiency. Insufficient cooling can easily cause the vacuum coating machine to be damaged due to overheating, affecting its service life. Utility Model Content

[0004] The purpose of this invention is to provide a cooling device for vacuum coating, which solves the problem that traditional vacuum coating machines require cooling of the finished products inside. Existing vacuum coating machines mostly rely on natural cooling, which is ineffective, resulting in low work efficiency and untimely cooling. This can easily lead to damage to the vacuum coating machine due to excessive temperature, affecting its service life.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a cooling device for vacuum coating, comprising a coating frame, an electronically controlled knob on the front of the coating frame, and a vacuum cover fixedly connected to the side of the coating frame by bolts. A vacuum pump is provided on the side of the vacuum cover, and a pressure gauge and a temperature sensor are fixedly connected to the front of the vacuum cover. A cooling box is provided on the top of the vacuum cover, a protruding plate is fixedly connected to the inner side of the cooling box, a cooling fan is provided on the front of the cooling box, and a cooling pipe is inserted into the side of the cooling box. A slide rail is provided on the top of the coating frame, a clamping plate is slidably connected to the inner side of the slide rail, a protruding rod is fixedly connected to the inner bottom of the clamping plate, and a spring is sleeved on the outer side of the protruding rod.

[0006] As a preferred embodiment of this utility model, the coating frame has a slot on its side, and a card plate located inside the vacuum hood is engaged with the inside of the slot.

[0007] As a preferred embodiment of this utility model, the top of the vacuum hood is provided with a groove, and the inner side of the groove is engaged with a convex plate.

[0008] As a preferred embodiment of this utility model, the inner side of the cooling pipe is provided with a circulation pump located inside the cooling box.

[0009] As a preferred technical solution of this utility model, a heat-conducting plate is fixedly connected to the top of the vacuum cover, and the heat-conducting plate is in contact with the side of the cooling pipe; the vacuum cover is installed on the top of the coating frame through a clamping plate and a clamping groove, which can improve the sealing performance of the vacuum cover; and the cooling box is installed on the top of the coating frame through a groove and a convex plate. A circulation pump is provided on the side of the cooling pipe installed inside the cooling box, and the cooling pipe is in contact with the side of the heat-conducting plate on the top of the vacuum cover, which can transfer the heat on the vacuum cover into the cooling pipe, and then the cooling fan can quickly dissipate the heat, thereby improving its heat dissipation efficiency.

[0010] As a preferred embodiment of this utility model, an electric heating plate is fixedly connected to the inner side of the coating frame, and the electric heating plate is electrically connected to the electric control knob.

[0011] As a preferred embodiment of this utility model, a middle plate is fixedly connected to the bottom of the coating frame, and the side of the middle plate is fixedly connected to one end of a spring; a clamping plate is installed on the inner side of the slide rail opened at the top of the coating frame, and a spring is sleeved on the outer side of the protrusion fixedly connected to the bottom inner side of the clamping plate, and the other end of the spring is fixedly connected to the side of the middle plate at the bottom of the coating frame. The spring can provide tension so that the four clamping plates can clamp the coating part and prevent it from moving during the coating process.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. This utility model uses a clamping plate installed on the inner side of a slide rail at the top of the coating rack. A spring is sleeved on the outer side of a protruding rod fixedly connected to the inner side of the bottom of the clamping plate. The other end of the spring is fixedly connected to the side of the middle plate at the bottom of the coating rack. The spring can provide tension so that the four clamping plates can clamp the coating part and prevent it from moving during the coating process.

[0014] 2. This utility model uses a coating frame to install a vacuum hood through a combination of a card plate and a slot, which can improve the sealing performance of the vacuum hood. The top of the coating frame is equipped with a cooling box through a groove and a convex plate. The cooling pipe installed inside the cooling box is equipped with a circulation pump on its side. The cooling pipe is in contact with the side of the heat-conducting plate on the top of the vacuum hood, which can transfer the heat on the vacuum hood into the cooling pipe. Then, the cooling fan can quickly dissipate the heat, which can improve its heat dissipation efficiency. Attached Figure Description

[0015] Figure 1 This is a front view of the structure of this utility model;

[0016] Figure 2 This is a partial front view of the structure of this utility model;

[0017] Figure 3 This is an internal view of the cooling box structure of this utility model;

[0018] Figure 4This is a top view of the structural coating frame of this utility model;

[0019] Figure 5 This is a bottom view of the coating frame structure of this utility model.

[0020] In the diagram: 1. Coating rack; 2. Electrical control knob; 3. Bolt; 4. Vacuum chamber; 5. Vacuum pump; 6. Pressure gauge; 7. Temperature sensor; 8. Cooling box; 9. Groove; 10. Protruding plate; 11. Cooling pipe; 12. Circulating pump; 13. Cooling fan; 14. Heat conduction plate; 15. Slot; 16. Heating plate; 17. Slide rail; 18. Clamping plate; 19. Protruding rod; 20. Spring; 21. Intermediate plate. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-5 This utility model provides a cooling device for vacuum coating, including a coating frame 1. The front of the coating frame 1 is provided with an electronic control knob 2, and a vacuum cover 4 is fixedly connected to the side of the coating frame 1 by bolts 3. A vacuum pump 5 is provided on the side of the vacuum cover 4, and a pressure gauge 6 and a temperature sensor 7 are fixedly connected to the front of the vacuum cover 4 respectively. A cooling box 8 is provided on the top of the vacuum cover 4. A protruding plate 10 is fixedly connected to the inner side of the cooling box 8. A cooling fan 13 is provided on the front of the cooling box 8, and a cooling pipe 11 is inserted into the side of the cooling box 8. A slide rail 17 is provided on the top of the coating frame 1. A clamping plate 18 is slidably connected to the inner side of the slide rail 17. A protruding rod 19 is fixedly connected to the inner bottom of the clamping plate 18, and a spring 20 is sleeved on the outer side of the protruding rod 19.

[0023] In summary, a clamping plate 18 is installed inside the slide rail 17 at the top of the coating rack 1. A spring 20 is sleeved on the outside of the protruding rod 19 fixedly connected to the bottom inner side of the clamping plate 18. The other end of the spring 20 is fixedly connected to the side of the middle plate 21 at the bottom of the coating rack 1. The spring 20 provides tension so that the four clamping plates 18 can clamp the workpiece to be coated, preventing it from moving during the coating process. A vacuum hood 4 is installed at the top of the coating rack 1 through a clamping plate and a clamping groove 15, which can improve the sealing performance of the vacuum hood 4. A cooling box 8 is installed at the top of the coating rack 1 through a groove 9 and a protruding plate 10 for cooling. The cooling pipe 11 installed inside the box 8 is equipped with a circulating pump 12 on its side. The cooling pipe 11 is in contact with the side of the heat-conducting plate 14 on the top of the vacuum chamber 4. The heat on the vacuum chamber 4 can be transferred into the cooling pipe 11, and then the cooling fan 13 can quickly dissipate the heat, which can improve its heat dissipation efficiency. This solves the problem that traditional vacuum coating machines need to cool the products produced inside them. Existing vacuum coating machines mostly use natural cooling, which is less effective and results in low working efficiency. If the cooling is not timely, the vacuum coating machine can easily be damaged due to excessive temperature, affecting the service life of the vacuum coating machine.

[0024] The coating rack 1 has a slot 15 on its side, and a card plate located inside the vacuum chamber 4 is engaged with the inside of the slot 15. The top of the vacuum chamber 4 has a groove 9, and the inside of the groove 9 is engaged with the protrusion 10. The inner side of the cooling pipe 11 is provided with a circulation pump 12 located inside the cooling box 8.

[0025] A heat-conducting plate 14 is fixedly connected to the top of the vacuum chamber 4, and the heat-conducting plate 14 contacts the side of the cooling pipe 11. The top of the coating rack 1 is fitted with a clamping plate and a clamping groove 15 to install the vacuum chamber 4, which can improve the sealing performance of the vacuum chamber 4. The top of the coating rack 1 is fitted with a cooling box 8 through a groove 9 and a protruding plate 10. The cooling pipe 11 installed inside the cooling box 8 is equipped with a circulating pump 12 on its side, and the cooling pipe 11 contacts the side of the heat-conducting plate 14 on the top of the vacuum chamber 4. This allows the heat on the vacuum chamber 4 to be transferred into the cooling pipe 11, and then the cooling fan 13 quickly dissipates the heat, which can improve its heat dissipation efficiency. An electric heating plate 16 is fixedly connected to the inner side of the coating rack 1. The electric heating plate 16 is electrically connected to the electric control knob 2. An intermediate plate 21 is fixedly connected to the bottom of the coating rack 1. The side of the intermediate plate 21 is fixedly connected to one end of the spring 20. A clamping plate 18 is installed on the inner side of the slide rail 17 at the top of the coating rack 1. A spring 20 is sleeved on the outer side of the protrusion 19 fixedly connected to the bottom inner side of the clamping plate 18. The other end of the spring 20 is fixedly connected to the side of the intermediate plate 21 at the bottom of the coating rack 1. The spring 20 can provide tension so that the four clamping plates 18 can clamp the coating part and prevent it from moving during the coating process.

[0026] In practical use, firstly, a clamping plate 18 is installed on the inner side of the slide rail 17 at the top of the coating rack 1. A spring 20 is sleeved on the outer side of the protruding rod 19 fixedly connected to the bottom inner side of the clamping plate 18. The other end of the spring 20 is fixedly connected to the side of the middle plate 21 at the bottom of the coating rack 1. The spring 20 can provide tension so that the four clamping plates 18 can clamp the coating part and prevent it from moving during the coating process. The vacuum cover 4 is installed on the top of the coating rack 1 through the cooperation of the card plate and the card slot 15, which can improve the sealing of the vacuum cover 4. The cooling box 8 is installed on the top of the coating rack 1 through the groove 9 and the protruding plate 10. The cooling pipe 11 installed inside the cooling box 8 has a circulating pump 12 on the side. The cooling pipe 11 is in contact with the side of the heat conduction plate 14 on the top of the vacuum cover 4, which can conduct the heat on the vacuum cover 4 into the cooling pipe 11. Then the cooling fan 13 quickly dissipates the heat, which can improve its heat dissipation efficiency.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A cooling device for vacuum coating, comprising a coating rack (1), characterized in that: The coating rack (1) has an electronic control knob (2) on its front side, and a vacuum hood (4) is fixedly connected to the side of the coating rack (1) by bolts (3). A vacuum pump (5) is provided on the side of the vacuum hood (4), and a pressure gauge (6) and a temperature sensor (7) are fixedly connected to the front of the vacuum hood (4). A cooling box (8) is provided on the top of the vacuum hood (4), and a protruding plate (10) is fixedly connected to the inner side of the cooling box (8). A cooling fan (13) is provided on the front of the cooling box (8), and a cooling pipe (11) is inserted into the side of the cooling box (8). A slide rail (17) is provided on the top of the coating rack (1), and a clamping plate (18) is slidably connected to the inner side of the slide rail (17). A protruding rod (19) is fixedly connected to the inner side of the bottom of the clamping plate (18), and a spring (20) is sleeved on the outer side of the protruding rod (19).

2. The cooling device for vacuum coating according to claim 1, characterized in that: The coating rack (1) has a slot (15) on its side, and a card plate located inside the vacuum hood (4) is engaged with the slot (15).

3. The cooling device for vacuum coating according to claim 1, characterized in that: The top of the vacuum hood (4) is provided with a groove (9), and the inner side of the groove (9) is engaged with the protrusion (10).

4. The cooling device for vacuum coating according to claim 1, characterized in that: The inner side of the cooling pipe (11) is provided with a circulation pump (12) located inside the cooling box (8).

5. A cooling device for vacuum coating according to claim 1, characterized in that: A heat-conducting plate (14) is fixedly connected to the top of the vacuum shroud (4), and the heat-conducting plate (14) is in contact with the side of the cooling pipe (11).

6. A cooling device for vacuum coating according to claim 1, characterized in that: A heating plate (16) is fixedly connected to the inner side of the coating rack (1), and the heating plate (16) is electrically connected to the electric control knob (2).

7. A cooling device for vacuum coating according to claim 1, characterized in that: The bottom of the coating rack (1) is fixedly connected to an intermediate plate (21), and the side of the intermediate plate (21) is fixedly connected to one end of the spring (20).

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