Caliper structure, cavity and thin film deposition equipment

Abstract

The utility model discloses a caliper structure, cavity and thin film deposition equipment, the caliper structure is used for tightly pressing a first slit valve shell and a second slit valve shell, the first slit valve shell and the second slit valve shell are arranged in the cavity, a space is arranged between the first slit valve shell and the second slit valve shell, the caliper structure comprises a body, a pressing unit and a fixing piece, the pressing unit is arranged on the body, and the fixing piece is arranged on the body. The fixing piece penetrates through the pressing unit and then is connected with the outer wall of the cavity in the space. The pressing unit comprises a first pressing block and a second pressing block, one side of the first pressing block is connected with the body, the other side of the first pressing block can be matched with the first crack valve shell, one side of the second pressing block is connected with the body, and the other side of the second pressing block can be matched with the second crack valve shell. The caliper structure and the thin film deposition equipment can be pre-installed offline in advance, the problem that operation cannot be conducted through other tools in a narrow space can be easily completed through the caliper structure, and the requirement for pressing a sealing ring through a crack valve shell in the narrow space is met.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a caliper structure, cavity, and thin film deposition equipment. Background Technology

[0002] Thin-film deposition equipment plays a crucial role in semiconductor manufacturing and is one of the core pieces of equipment in wafer fabrication. Its main function is to deposit various thin-film materials, such as non-metals like silicon dioxide, silicon nitride, and polycrystalline silicon, and metals like copper, onto substrates like silicon wafers to form the conductive or insulating layers required for semiconductor devices. During the thin-film deposition process, the wafer pick-up equipment and transport platform are key components. The wafer pick-up equipment is typically used to automatically place silicon wafers into carrier boards and process them through automated systems. The transport platform is used to transfer silicon wafers between different process chambers, ensuring the continuity and stability of the thin-film deposition process.

[0003] During the actual transfer process, silicon wafers are transferred from the transfer platform to the thin film deposition equipment via a robotic arm through a slotted valve and channel. The slotted valve serves to connect the transferred wafers and is also a key valve component isolating the chamber from the transfer platform; its sealing performance is crucial to the thin film deposition effect. To ensure the sealing effect of the slotted valve, the valve body and channel are clamped by fastening blocks. However, due to the limitations of the thin film deposition equipment, there is no suitable space for fastening in the lower middle part of the two chambers. Therefore, a rubber ring is installed on the mounting surface of the slotted valve for compression sealing. Under low pressure, atmospheric pressure can promote the sealing effect of the sealing ring, ensuring the sealing effect.

[0004] However, in the sub-atmospheric pressure chemical vapor deposition process, the reaction pressure is 600 Torr, which makes the pressure difference between the valve body and atmospheric pressure not significant. At this time, atmospheric pressure cannot promote the sealing ring. There may be gaps between the sealing ring, the gap valve and the channel, which may lead to the risk of leakage or contamination of the cavity during the reaction process. Utility Model Content

[0005] The embodiments of this utility model provide a caliper structure, cavity, and thin film deposition equipment, which realizes the requirement of pressing the sealing ring through the housing of the slotted valve in a narrow space, and solves the technical problem of gas leakage or contamination of the cavity during the reaction process due to the gap between the sealing ring, the slotted valve, and the channel.

[0006] To address the aforementioned problems, according to one aspect of this application, an embodiment of the present invention provides a caliper structure that cooperates with a chamber to clamp a first and a second slit valve housing. The first and second slit valve housings are disposed within the chamber, with a space between them. The caliper structure includes a body, a clamping unit, and a fixing member. The clamping unit is disposed on the body, and the fixing member passes through the clamping unit and connects to the outer wall of the chamber within the space. The clamping unit includes a first clamping block and a second clamping block. One side of the first clamping block is connected to the body, and the other side can cooperate with the first slit valve housing. One side of the second clamping block is connected to the body, and the other side can cooperate with the second slit valve housing.

[0007] In some embodiments, the first clamping block has a first groove on the side away from the body, and the first slit valve housing has a first protrusion on the side close to the body, the first protrusion engaging with the first groove.

[0008] And / or the second clamping block has a second groove on the side away from the body, and the second slit valve housing has a second protrusion on the side near the body, the second protrusion engaging with the second groove.

[0009] In some embodiments, the fastener includes a first captive screw and a second captive screw. The first captive screw passes through the first clamping block and is connected to the outer wall of the space cavity. The second captive screw passes through the second clamping block and is connected to the outer wall of the space cavity. The first captive screw and the second captive screw respectively cause the first clamping block and the second clamping block to press down the first clamping valve housing and the second clamping valve housing.

[0010] In some embodiments, when the first captive screw passes through the first clamping block and contacts the threaded hole on the outer wall of the space cavity, the distance between the first captive screw and the upper surface of the first clamping block is not less than 2 mm.

[0011] In some embodiments, the body includes a first plate and a second plate, which together form an L-shaped structure. After the first plate slides into the outer wall of the chamber, the second plate is precisely engaged on the side of the outer wall.

[0012] In some embodiments, the caliper structure further includes a handle connected to the body.

[0013] In some embodiments, the handle is movably connected to a second plate of the body.

[0014] According to another aspect of this application, an embodiment of the present invention provides a cavity, the cavity including a first slit valve housing, a second slit valve housing, and the aforementioned clamping structure, the clamping structure being located between the first slit valve housing and the second slit valve housing, and capable of pressing the first slit valve housing and the second slit valve housing so that the first slit valve housing and the second slit valve housing are tightly fitted with the sealing rings on their mounting surfaces.

[0015] In some embodiments, when the caliper structure further includes a handle, the body can be pushed into the cavity via the handle.

[0016] According to another aspect of this application, an embodiment of the present invention provides a thin film deposition apparatus, characterized in that the thin film deposition apparatus includes the cavity described above.

[0017] Compared with the prior art, the caliper structure of this utility model has at least the following beneficial effects:

[0018] The caliper structure provided by this utility model cooperates with a chamber to clamp a first and a second slit valve housing. The first and second slit valve housings are disposed within the chamber with a space between them. The caliper structure includes a body, a clamping unit, and a fixing member. The clamping unit is disposed on the body, and the fixing member passes through the clamping unit and connects to the outer wall of the chamber within the space. The clamping unit includes a first clamping block and a second clamping block. One side of the first clamping block is connected to the body, and the other side can cooperate with the first slit valve housing. One side of the second clamping block is connected to the body, and the other side can cooperate with the second slit valve housing.

[0019] This invention connects the first and second slit valve housings to the outer wall of the chamber via a fixing component and a clamping unit. Applying external force to the fixing component causes the first and second slit valve housings to move towards the outer wall of the chamber. This causes the first slit valve housing to press against its bottom first sealing ring, and the second slit valve housing to press against its bottom second sealing ring, resulting in a tight fit between the first and second slit valve housings and the outer wall of the chamber, achieving a seal. The clamp structure provided in this embodiment is simple in structure and can be pre-installed offline with the thin film deposition equipment. Addressing the problem of limited space preventing operation with other tools such as Allen wrenches, the clamp structure provided in this embodiment can easily accomplish this task. Furthermore, offline pre-installation reduces installation time and difficulty for the operator, fulfilling the requirement of pressing the sealing ring with the slit valve housing in a confined space. This solves the technical problem of gas leakage or contamination of the chamber during the reaction process due to gaps between the sealing ring, slit valve, and channel.

[0020] The cavity provided by this utility model is designed based on the above-mentioned caliper structure, and its beneficial effects are the same as those of the above-mentioned caliper structure, which will not be repeated here.

[0021] The thin film deposition apparatus provided by this utility model is designed based on the above-mentioned cavity, and its beneficial effects are the same as those of the cavity described above, which will not be repeated here.

[0022] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the first structure of a caliper structure provided by an embodiment of the present utility model;

[0025] Figure 2 This is a schematic diagram of a second structure of a caliper provided in an embodiment of the present invention;

[0026] Figure 3 This is a schematic diagram of a third structure of a caliper provided by an embodiment of the present utility model;

[0027] Figure 4 This is a first cross-sectional view of a caliper structure provided by an embodiment of the present invention after it has been applied to a chamber;

[0028] Figure 5 This is a second cross-sectional view of a caliper structure provided by an embodiment of the present invention after it has been applied to a chamber;

[0029] Figure 6 This is a first partial enlarged view of a caliper structure provided by an embodiment of this utility model after being applied to a chamber;

[0030] Figure 7 This is a second enlarged view of a caliper structure applied to a chamber according to an embodiment of this utility model;

[0031] Figure label:

[0032] 1. First slit valve housing; 11. First protrusion; 2. Second slit valve housing; 21. Second protrusion; 3. Body; 31. First plate; 32. Second plate; 4. Pressing unit; 41. First pressing block; 42. Second pressing block; 411. First groove; 421. Second groove; 5. Fixing component; 51. First non-removable screw; 52. Second non-removable screw; 6. Handle. Detailed Implementation

[0033] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the specific implementation methods, structures, features, and effects according to this utility model application are described in detail below with reference to the accompanying drawings and preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0034] In the description of this utility model, it should be clarified that the terms "first," "second," etc., in the specification, claims, and drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence; the terms "vertical," "lateral," "longitudinal," "front," "back," "left," "right," "up," "down," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this utility model, and do not mean that the device or element referred to must have a specific orientation or position, and therefore should not be construed as a limitation of this utility model.

[0035] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0036] In the thin film deposition process, wafer pick-up equipment and transport platforms are key components. Wafer pick-up equipment is typically used to automatically place silicon wafers into carrier substrates and process them through automated systems. Transport platforms are used to transfer silicon wafers between different process chambers, ensuring the continuity and stability of the thin film deposition process.

[0037] The thin-film deposition equipment and the wafer transfer equipment are connected via a slit valve and a wafer transfer channel to ensure that the silicon wafers are not exposed to the atmosphere during the wafer transfer process. The slit valve is positioned between the thin-film deposition equipment and the wafer transfer equipment. When its internal valve plate rises, the wafer transfer channel is disconnected; when its internal valve plate descends, the wafer transfer channel is opened. The slit valve body and the wafer transfer channel are clamped together by surrounding fastening blocks to ensure a seal. Specifically, the fastening blocks are used to fix the slit valve housing to the thin-film deposition equipment, ensuring a tight connection between the slit valve housing and the thin-film deposition equipment.

[0038] Thin film deposition equipment has two chambers, left and right. The lower space between the two chambers is limited, with a width of only 110mm and a height of only 60mm. This space cannot be sealed using clamping blocks; therefore, a sealing ring is typically used to achieve a seal. The sealing ring is positioned between the valve housing and the thin film deposition equipment, relying on the pressure difference between the inside and outside of the chamber to ensure the valve housing tightly presses against the sealing ring. However, when the pressure difference is insufficient, such as in sub-atmospheric pressure chemical vapor deposition processes, the pressure difference is significantly insufficient. In this case, there is insufficient pressure between the valve housing and the sealing ring, causing the sealing ring to fail to provide a proper seal.

[0039] To address the aforementioned problems, this invention primarily addresses the issue by applying external force to the outer shell of the slot valve, enabling it to tightly engage with the sealing ring and thus ensuring a sealing effect.

[0040] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0041] Example 1

[0042] This embodiment provides a caliper structure, such as Figures 1-7 As shown, the caliper structure cooperates with the chamber to clamp the first slit valve housing 1 and the second slit valve housing 2. The first slit valve housing 1 and the second slit valve housing 2 are disposed in the chamber and there is a space between them. The caliper structure includes a body 3, a clamping unit 4, and a fixing member 5. The clamping unit 4 is disposed on the body 3. The fixing member 5 passes through the clamping unit 4 and is connected to the outer wall of the chamber in the space. The clamping unit 4 includes a first clamping block 41 and a second clamping block 42. One side of the first clamping block 41 is connected to the body 3, and the other side can cooperate with the first slit valve housing 1. One side of the second clamping block 42 is connected to the body 3, and the other side can cooperate with the second slit valve housing 2.

[0043] The slit valve is located between the thin film deposition equipment and the wafer transfer equipment. The slit valve includes a first slit valve housing 1 and a second slit valve housing 2. There is a space between the first slit valve housing 1 and the second slit valve housing 2 in the lower space between the two chamber channels of the thin film deposition equipment. The clamp structure provided in this embodiment acts in this space and is mainly used to press the first slit valve housing 1 and the second slit valve housing 2, so that the first slit valve housing 1 can press the first sealing ring at its bottom and the second slit valve housing 2 can press the second sealing ring at its bottom, thereby making the first slit valve housing 1 and the second slit valve housing 2 fit tightly with the thin film deposition equipment.

[0044] Specifically, the body 3 mates with the outer wall of the chamber. After the two are mated, the first clamping block 41 on the body 3 connects to one side of the first clamping valve housing 1, and the second clamping block 42 connects to one side of the second clamping valve housing 2. Then, the fixing member 5 passes through the first clamping block 41 and the second clamping block 42 respectively and connects to the outer wall of the chamber in the space. That is to say, in this embodiment, the first clamping valve housing 1 and the second clamping valve housing 2 are connected to the outer wall of the chamber through the fixing member 5 and the clamping unit 4. By applying external force to the fixing member 5, the first clamping valve housing 1 and the second clamping valve housing 2 can move towards the outer wall of the chamber. Then, the first clamping valve housing 1 presses its bottom first sealing ring, and the second clamping valve housing 2 presses its bottom second sealing ring, so that the first clamping valve housing 1 and the second clamping valve housing 2 are tightly fitted with the outer wall of the chamber to achieve a seal.

[0045] The clamp structure provided in this embodiment is simple in structure and can be pre-installed offline with the thin film deposition equipment. It can easily solve the problem of operation in confined spaces where other tools, such as Allen wrenches, cannot be used. Furthermore, offline pre-installation can reduce the operator's installation time and difficulty. It also meets the requirement of pressing the sealing ring through the housing of the gap valve in a confined space, and solves the technical problem of gas leakage or contamination of the chamber during the reaction process due to the gap between the sealing ring, the gap valve, and the channel.

[0046] In a specific embodiment, the first clamping block 41 has a first groove 411 on the side away from the body 3, and the first slot valve housing 1 has a first protrusion 11 on the side close to the body 3. The first protrusion 11 mates with the first groove 411. The first clamping block 41 has a generally square outline, but its bottom has a step. The step is mainly used to mate with the body 3 and the outer wall of the chamber. For example, for ease of explanation, suppose the bottom of the first clamping block 41 is divided into three parts, from the direction close to the body 3 to the direction away from the body 3, namely the first part, the second part, and the third part. The first part is a protruding step structure, which is used to connect with the body 3. The second part is retracted inward compared to the first part. This part is mainly used to connect with the chamber through the fastener 5. The third part has the first groove 411. Corresponding to the first groove 411, the first slot valve housing 1 has a first protrusion 11 on the side near the body 3. In the initial stage of assembly, the first protrusion 11 is located in the first groove 411. As the external force is applied to the fixing member 5, the fixing member 5 moves downward, thereby causing the first groove 411 to apply downward pressure to the first protrusion 11. In this way, the first slot valve housing 1 will move downward until it is tightly fitted with the sealing ring and the chamber at its bottom.

[0047] In a specific embodiment, the second clamping block 42 has a second groove 421 on the side away from the body 3, and the second slit valve housing 2 has a second protrusion 21 on the side close to the body 3. The second protrusion 21 cooperates with the second groove 421. The second clamping block 42 has a generally square structure, but its bottom has a step. The step is mainly used to cooperate with the body 3 and the outer wall of the chamber. For example, for ease of explanation, suppose the bottom of the second clamping block 42 is divided into three parts, from the direction close to the body 3 to the direction away from the body 3, namely the first part, the second part, and the third part. The first part is a protruding step structure, which is used to connect with the body 3. The second part is retracted inward compared to the first part. This part is mainly used to connect with the chamber through the fastener 5. The third part has a second groove 421. Corresponding to the second groove 421, the second slit valve housing 2 has a second protrusion 21 on the side near the body 3. In the initial stage of assembly, the second protrusion 21 is located in the second groove 421. As the external force is applied to the fixing member 5, the fixing member 5 moves downward, thereby causing the second groove 421 to apply downward pressure to the second protrusion 21. In this way, the second slit valve housing 2 will move downward until it is tightly fitted with the sealing ring and the chamber at its bottom.

[0048] In a specific embodiment, the fastener 5 includes a first captive screw 51 and a second captive screw 52. The first captive screw 51 passes through the first clamping block 41 and connects to the outer wall of the inner cavity of the space. The second captive screw 52 passes through the second clamping block 42 and connects to the outer wall of the inner cavity of the space. The first captive screw 51 and the second captive screw 52 respectively press down the first clamping block 41 and the second clamping block 42 to compress the first clamping valve housing 1 and the second clamping valve housing 2. A captive screw, also known as a spring screw or a non-detachable screw, is a special fastener that prevents the screw from falling off during installation. Captive screws are usually fixed to the mounting plate by press riveting or expansion riveting to ensure that they will not easily loosen or fall off during use. The first clamping block 41 has a first mating hole, into which the first captive screw 51 is inserted. The second clamping block 42 has a second mating hole, into which the second captive screw 52 is inserted.

[0049] In a specific embodiment, after the first captive screw 51 passes through the first clamping block 41 and contacts the threaded hole on the outer wall of the inner cavity, the distance between the first captive screw 51 and the upper surface of the first clamping block 41 is not less than 2mm. During the assembly process, the body 3 is slid into the outer wall of the cavity, and then the first captive screw 51 is manually screwed into the threaded hole of the cavity. At this point, the body 3 will have at least 2mm of movement, which can be compensated for by fine adjustments to compensate for machining errors. Then, the second captive screw 52 is screwed into another threaded hole of the cavity, and finally, the first captive screw 51 and the second captive screw 52 are tightened to complete the installation.

[0050] In a specific embodiment, the body 3 includes a first plate 31 and a second plate 32, which form an L-shaped structure. After the first plate 31 slides into the outer wall of the chamber, the second plate 32 is precisely engaged with the side of the outer wall. To conform to the shape of the chamber, the first plate 31 and the second plate 32 form an L-shaped structure. During assembly, after the first plate 31 slides into the outer wall of the chamber, the second plate 32 is precisely engaged with the side of the outer wall, ensuring a tight fit between the body 3 and the chamber.

[0051] In a specific embodiment, the caliper structure further includes a handle 6, which is connected to the body 3. More specifically, the handle 6 is movably connected to the second plate 32 of the body 3. The handle 6 is mainly for ease of installation. Holding the handle 6, the body 3 is slid into the outer wall of the cavity. Then, the first captive screw 51 is manually screwed into the threaded hole of the cavity. At this point, the body 3 will have at least 2mm of movement, which can be compensated for by fine adjustments. Then, the second captive screw 52 is screwed into another threaded hole of the cavity, and the first captive screw 51 and the second captive screw 52 are tightened. Finally, the handle 6 can be removed.

[0052] Example 2

[0053] This embodiment provides a cavity, which includes a first slit valve housing 1, a second slit valve housing 2, and the caliper structure described in Embodiment 1. The caliper structure is located between the first slit valve housing 1 and the second slit valve housing 2, and can press the first slit valve housing 1 and the second slit valve housing 2 so that the first slit valve housing 1 and the second slit valve housing 2 are tightly fitted with the sealing rings on their mounting surfaces.

[0054] In a specific embodiment, when the caliper structure further includes a handle 6, the body 3 can be pushed into the cavity through the handle 6.

[0055] By adopting the caliper structure in Embodiment 1, the service life of the sealing rings on the mounting surface of the first slit valve housing 1 and the second slit valve housing 2 in the cavity is improved, the workload of replacement and installation is reduced, and the problem of cavity contamination caused by poor channel sealing during the process is also solved.

[0056] Example 3

[0057] This embodiment provides a thin film deposition apparatus, which includes the cavity described in Embodiment 2.

[0058] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A caliper structure, characterized in that, The caliper structure engages with the chamber to clamp the first and second slit valve housings. The first and second slit valve housings are disposed within the chamber with a space between them. The caliper structure includes a body, a clamping unit, and a fixing member. The clamping unit is disposed on the body, and the fixing member passes through the clamping unit and connects to the outer wall of the chamber within the space. The clamping unit includes a first clamping block and a second clamping block. One side of the first clamping block is connected to the body, and the other side can engage with the first slit valve housing. One side of the second clamping block is connected to the body, and the other side can engage with the second slit valve housing.

2. The caliper structure according to claim 1, characterized in that, The first clamping block has a first groove on the side away from the body, and the first slit valve housing has a first protrusion on the side close to the body, and the first protrusion cooperates with the first groove. And / or the second clamping block has a second groove on the side away from the body, and the second slit valve housing has a second protrusion on the side near the body, the second protrusion engaging with the second groove.

3. The caliper structure according to claim 1, characterized in that, The fastener includes a first captive screw and a second captive screw. The first captive screw passes through the first clamping block and is connected to the outer wall of the inner cavity of the space. The second captive screw passes through the second clamping block and is connected to the outer wall of the inner cavity of the space. The first captive screw and the second captive screw respectively cause the first clamping block and the second clamping block to press down the first clamping valve housing and the second clamping valve housing.

4. The caliper structure according to claim 3, characterized in that, When the first captive screw passes through the first clamping block and contacts the threaded hole on the outer wall of the inner cavity of the space, the distance between the first captive screw and the upper surface of the first clamping block is not less than 2mm.

5. The caliper structure according to claim 1, characterized in that, The body includes a first plate and a second plate, which together form an L-shaped structure. After the first plate slides into the outer wall of the chamber, the second plate is precisely locked onto the side of the outer wall.

6. The caliper structure according to claim 5, characterized in that, The caliper structure also includes a handle, which is connected to the body.

7. The caliper structure according to claim 6, characterized in that, The handle is movably connected to the second plate of the main body.

8. A cavity, characterized in that, The cavity includes a first slit valve housing, a second slit valve housing, and a caliper structure as described in any one of claims 1-7. The caliper structure is located between the first slit valve housing and the second slit valve housing and is capable of pressing the first slit valve housing and the second slit valve housing so that the first slit valve housing and the second slit valve housing are tightly fitted with the sealing rings on their mounting surfaces.

9. The cavity according to claim 8, characterized in that, When the caliper structure also includes a handle, the body can be pushed into the cavity via the handle.

10. A thin film deposition apparatus, characterized in that, The thin film deposition apparatus includes the cavity as described in claim 8 or 9.

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