Objective lens for laser processing workpiece and laser processing equipment

Abstract

The utility model discloses an objective lens for laser processing of a workpiece and laser processing equipment. The objective lens comprises a lens barrel; the lens group is arranged in the lens barrel; the sleeve sleeves the periphery of the lens barrel, a cooling cavity and a dust removal cavity are formed between the sleeve and the periphery of the lens barrel, at least one end of the cooling cavity is used for being communicated with the external environment, the sleeve is provided with a first air inlet and a second air inlet, the first air inlet is communicated with the cooling cavity, and the second air inlet is communicated with the dust removal cavity. The first air inlets are used for being communicated with an air source so as to blow cooling air into the cooling cavity, the second air inlets are all communicated with the dust removal cavity, the second air inlets are used for being communicated with an air source so as to blow dust removal air into the dust removal cavity, the first air inlets are used for being communicated with an air source, and the second air inlets are used for being communicated with an air source so as to blow dust removal air into the dust removal cavity. The multiple first air inlets are distributed in the axial direction of the sleeve, optical performance reduction caused by overheating can be prevented, the service life of the objective lens is prolonged, and the laser machining quality is guaranteed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of laser processing, in particular to an objective lens for laser processing workpieces and a laser processing device. BACKGROUND

[0002] Laser processing technology has been widely used in many fields due to its high precision, high efficiency, non-contact processing and other advantages, such as semiconductor manufacturing, electronic industry, automobile manufacturing, aerospace, etc. For example, in the cutting and marking processes of semiconductor wafers, laser processing devices can achieve high-precision processing to meet the strict requirements of chip manufacturing on process precision.

[0003] When the laser processing device is working, the high-energy laser beam is focused on the surface of the processing material through the objective lens. In this process, part of the laser energy is absorbed by the objective lens, causing the temperature of the objective lens to rise. When the laser interacts with the workpiece material, solid dust is generated, which easily accumulates on the surface of the objective lens, thereby affecting the service life of the objective lens. On the one hand, the dust blocks the transmission of the laser, reducing the efficiency and quality of laser processing. On the other hand, the dust affects the heat dissipation of the objective lens, further exacerbating the temperature rise of the objective lens, causing the laser beam to shift, reducing the processing precision, and even causing the product to be scrapped. CONTENT OF THE INVENTION

[0004] The present application discloses an objective lens for laser processing workpieces and a laser processing device, which can carry away the heat generated by the objective lens due to the absorption of laser energy, reduce the damage of high temperature to the objective lens, effectively prevent the decline of optical performance caused by overheating, and significantly prolong the service life of the objective lens, thereby ensuring the precision and quality of laser processing.

[0005] In order to achieve the above purpose, the present application discloses an objective lens for laser processing workpieces, comprising:

[0006] a lens barrel;

[0007] a lens group arranged in the lens barrel;

[0008] a sleeve arranged on the outer periphery of the lens barrel, a cooling cavity and a dust removal cavity are formed between the sleeve and the outer periphery of the lens barrel, at least one end of the cooling cavity is used for communicating with the external environment, a first air inlet and a second air inlet are arranged on the sleeve, the first air inlet communicates with the cooling cavity, the first air inlet is used for communicating with a gas source to blow cooling gas into the cooling cavity, the second air inlet communicates with the dust removal cavity, the second air inlet is used for communicating with a gas source to blow dust removal gas into the dust removal cavity, and the first air inlet comprises a plurality of first air inlets which are distributed along the axial direction of the sleeve.

[0009] In a possible implementation, the outer periphery of the sleeve is provided with a first outer protruding ring, and the first air inlet is arranged on the first outer protruding ring.

[0010] In a possible implementation, the lens barrel has a first end and a second end in the axial direction, the first end is an end facing the workpiece, the lens group includes a first lens arranged at the first end, the sleeve includes a sleeve body and a sleeve bottom, the sleeve body is sleeved on the outer periphery of the lens barrel, the first air inlet is arranged on the sleeve body, the second air inlet is arranged on the sleeve body close to the first end, the sleeve bottom covers the first end of the lens barrel, the dust removal cavity is located between the sleeve bottom and the first end, the sleeve bottom is provided with a bypass opening, the bypass opening is used for bypassing the laser beam emitted by the first lens, and the bypass opening is in communication with the dust removal cavity.

[0011] In a possible implementation, the inner surface of the sleeve body is provided with a stop portion, the stop portion is arranged close to the first end, and the stop portion is attached to the outer periphery of the lens barrel to prevent the cooling cavity and the dust removal cavity from being in communication.

[0012] In a possible implementation, one end of the cooling cavity away from the dust removal cavity is in communication with the external environment, the inner surface of the sleeve body away from the first end is provided with a first inner protruding ring, and a gap is formed between the first inner protruding ring and the outer periphery of the lens barrel, the gap is in communication between the cooling cavity and the external environment, and in the radial direction of the lens barrel, the distance between the first inner protruding ring and the lens barrel is smaller than the radial width of the cooling cavity.

[0013] In a possible implementation, the lens barrel has a first end face close to the workpiece, and in the direction in which the edge of the sleeve bottom points to the center of the sleeve bottom, the axial distance between the sleeve bottom and the first end face gradually increases.

[0014] In a possible implementation, the sleeve bottom is arranged to be inclined relative to the first end face, and the inclination angle of the sleeve bottom is 2°-3°.

[0015] In a possible implementation, the outer surfaces of the two ends of the sleeve body in the axial direction are respectively provided with a second outer protruding ring and a third outer protruding ring, the second outer protruding ring and the third outer protruding ring are respectively provided with a threaded hole penetrating the sleeve wall of the sleeve body, and the objective lens further includes a locking jackscrew, the locking jackscrew is arranged in the threaded hole, and the locking jackscrew is arranged towards the lens barrel.

[0016] In a possible implementation, the objective lens further includes a plurality of air inlet connectors, the plurality of air inlet connectors are respectively inserted into the first air inlet and the second air inlet, and the plurality of air inlet connectors are used to be in communication with an air source.

[0017] The application further discloses a laser processing device comprising the objective lens for laser processing a workpiece.

[0018] Compared with the prior art, the application has the beneficial effects that:

[0019] In the objective lens for laser processing a workpiece and the laser processing device, the lens barrel is a bearing structure of the lens group, and protects the lens group from external mechanical damage and other interference. The sleeve is sleeved on the outer periphery of the lens barrel and forms a cooling cavity and a dust removal cavity. By passing cooling gas and dust removal gas into the cooling cavity and the dust removal cavity, the heat generated during the operation of the objective lens can be effectively taken away, and the dust accumulated during processing can be removed, thereby reducing the adverse effects of the dust on laser transmission and heat dissipation of the objective lens. At least one end of the cooling cavity is in communication with the external environment, so that the flow of the cooling gas in the cavity can form a circulation or be discharged, thereby maintaining the persistence of the cooling effect. The first gas inlet on the sleeve is in communication with the cooling cavity and is used for being connected with a gas source. The cooling gas with a certain pressure and flow rate is provided by the gas source, so that the effective regulation and control of the cooling of the objective lens is realized. The second gas inlet on the sleeve is in communication with the dust removal cavity and is used for being connected with a gas source. The dust removal gas with a certain pressure and flow rate is provided by the gas source, so that the dust removal of the objective lens is realized.

[0020] The cooling cavity is directly arranged on the outer periphery of the lens barrel of the objective lens, and the cooling gas is passed into the cooling cavity, so that the rapid cooling of the objective lens can be realized. The cooling gas can quickly take away the heat generated by the lens group due to the absorption of laser energy, and the heat accumulation in the objective lens is avoided. Compared with some external cooling devices, the space is saved, and the overall structure of the laser processing device is more simple and compact. Effective cooling can reduce the working temperature of the lens group, reduce the damage of high temperature to the lens group, effectively prevent the optical performance from being reduced due to overheating, such as focal length drift and aberration increase, and remove the dust accumulated on the objective lens due to processing, thereby reducing the adverse effects of the dust on laser transmission and heat dissipation of the objective lens, significantly prolonging the service life of the lens group, reducing the replacement frequency and maintenance cost of the objective lens, thereby ensuring the precision and quality of laser processing, and improving the overall operation stability and economy of the laser processing device. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without any creative effort.

[0022] Figure 1 A structure diagram of an objective lens for laser processing a workpiece is provided for the embodiments of the application.

[0023] Figure 2 A structure schematic view of an objective lens for laser processing workpieces provided by the embodiment of the present application;

[0024] Figure 3 A structure schematic view of an objective lens for laser processing workpieces provided by the embodiment of the present application;

[0025] Figure 4 A Figure 3 partial enlarged view of A of FIG. 1;

[0026] Figure 5 A Figure 3 partial enlarged view of B of FIG. 1.

[0027] Explanation of reference signs:

[0028] 10 - lens barrel; 11 - first end; 12 - second end; 13 - first end face;

[0029] 20 - sleeve; 21 - barrel body; 211 - cooling cavity; 212 - first air inlet; 213 - first outer convex ring; 214 - second air inlet; 215 - stop; 216 - first inner convex ring; 217 - second outer convex ring; 218 - third outer convex ring; 22 - barrel bottom; 221 - dust removal cavity; 222 - avoiding opening;

[0030] 30 - locking jackscrew;

[0031] 40 - air inlet connector. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0033] In the present application, the terms "mounting", "setting", "provided with", "connection", "connected" should be understood broadly. For example, it can be fixed connection, detachable connection, or integral configuration; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] In addition, the terms "first", "second", and the like are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "a plurality" is two or more.

[0035] Laser processing technology has been widely used in many fields due to its high precision, high efficiency, non-contact processing and other advantages, such as semiconductor manufacturing, electronic industry, automobile manufacturing, aerospace, etc. For example, in the cutting and marking processes of semiconductor wafers, laser processing equipment can achieve high-precision processing to meet the strict requirements of chip manufacturing on process precision.

[0036] When the laser processing equipment is working, the high-energy laser beam is focused on the surface of the processing material through the objective lens. In this process, part of the laser energy will be absorbed by the objective lens, causing the temperature of the objective lens to rise. When laser interacts with workpiece material, solid dust is generated, which is easy to accumulate on the surface of the objective lens. On the one hand, the dust will block the transmission of the laser, reduce the efficiency and quality of the laser processing, and thus affect the service life of the objective lens. On the other hand, the dust will affect the heat dissipation of the objective lens, further exacerbate the temperature rise of the objective lens, cause the laser beam to shift, reduce the processing precision, and even make the product scrap.

[0037] In view of this point, some embodiments of the present application provide an objective lens for laser processing workpieces and a laser processing equipment, which can carry away the heat generated by the objective lens due to the absorption of laser energy, reduce the damage of high temperature to the objective lens, effectively prevent the decline of optical performance caused by overheating, and also can prolong the service life of the objective lens, so as to ensure the precision and quality of laser processing.

[0038] The present application will be described in detail below through specific embodiments:

[0039] The objective lens for laser processing workpieces of the embodiments of the present application, as shown in Figures 1-5 , comprises:

[0040] The lens barrel 10 and the lens group, the lens group is arranged in the lens barrel 10, the lens barrel 10 is the bearing structure of the lens group, protects the lens group from external mechanical damage and other interference, ensures that it can normally play the optical focusing function in the laser processing process.

[0041] The sleeve 20 is sleeved on the outer periphery of the lens barrel 10, and a cooling cavity 211 and a dust removal cavity 221 are formed between the sleeve 20 and the outer periphery of the lens barrel 10. At least one end of the cooling cavity 211 is used to communicate with the external environment. The sleeve 20 is provided with a first air inlet 212 and a second air inlet 214. The first air inlet 212 communicates with the cooling cavity 211 and is used to communicate with the gas source to blow cooling gas into the cooling cavity 211. The second air inlet 214 communicates with the dust removal cavity 221 and is used to communicate with the gas source to blow dust removal gas into the dust removal cavity 221.

[0042] The lens barrel 10 is a bearing structure of the lens group, which protects the lens group from external mechanical damage and other interference. The sleeve 20 is sleeved on the outer periphery of the lens barrel 10 and forms a cooling cavity 211 and a dust removal cavity 221. By passing cooling gas and dust removal gas therein, the heat generated during the operation of the objective lens can be effectively taken away, and the dust accumulated during processing can also be removed, reducing the adverse effects of dust on laser transmission and objective lens heat dissipation. At least one end of the cooling cavity 211 communicates with the external environment, ensuring that the flow of cooling gas in the cavity can form a cycle or be discharged, maintaining the persistence of the cooling effect. The first air inlet 212 on the sleeve 20 communicates with the cooling cavity 211 and is used to connect with the gas source. The cooling gas with a certain pressure and flow rate is provided by the gas source, thereby realizing effective regulation and control of the cooling of the objective lens. The second air inlet 214 on the sleeve communicates with the dust removal cavity 221 and is used to connect with the gas source. The dust removal gas with a certain pressure and flow rate is provided by the gas source, thereby realizing the dust removal of the objective lens.

[0043] Directly arranging the cooling cavity 211 on the outer periphery of the lens barrel 10 of the objective lens and passing the cooling gas can realize rapid cooling of the objective lens. The cooling gas can quickly take away the heat generated by the lens barrel 10 and the lens group due to the absorption of laser energy, avoiding the accumulation of heat inside the objective lens. Compared with some external cooling devices, it saves space, making the overall structure of the laser processing equipment more simple and compact. Effective cooling can reduce the working temperature of the lens group, reduce the damage of high temperature to the lens group, effectively prevent the optical performance from being reduced due to overheating, such as focal length drift and increase of aberration, and also remove the dust accumulated on the objective lens due to processing, reducing the adverse effects of dust on laser transmission and objective lens heat dissipation, thereby significantly prolonging the service life of the lens group, reducing the replacement frequency and maintenance cost of the objective lens, thereby ensuring the precision and quality of laser processing, and improving the overall operation stability and economy of the laser processing equipment.

[0044] The cooling gas with certain pressure and flow rate, such as compressed air or inert gas, is provided by the gas source, and the supply of the cooling gas can be accurately controlled, so as to effectively regulate and control the cooling of the objective lens. The first gas inlet 212 is connected with the gas source, and the type and parameters of the cooling gas can be flexibly selected according to different laser processing processes and actual working states of the objective lens.

[0045] Specifically, in some embodiments, as shown in Figure 1 The first gas inlet 212 includes a plurality of first gas inlets 212, and the plurality of first gas inlets 212 are distributed along the axial direction of the sleeve 20.

[0046] The plurality of first gas inlets 212 are distributed along the axial direction of the sleeve 20, and the cooling gas can enter the cooling cavity 211 from different axial positions of the sleeve 20, so that the cooling gas can be uniformly injected at different positions of the cooling cavity 211, thereby more comprehensively covering the outer periphery of the lens barrel 10 and providing more uniform cooling effect for the entire objective lens.

[0047] The number of the first gas inlets 212 can be any number of two, three, four, etc., which is not limited herein. Exemplarily, the number of the first gas inlets 212 is two.

[0048] Alternatively, in other embodiments, for the objective lens with smaller size, a single first gas inlet 212 can also be provided.

[0049] In some possible embodiments, as shown in Figure 1 and Figure 2 The outer periphery of the sleeve 20 is provided with a first outer convex ring 213, and the first gas inlet 212 is arranged on the first outer convex ring 213.

[0050] The outer periphery of the sleeve 20 is provided with a first outer convex ring 213, and the first gas inlet 212 is arranged on the first outer convex ring 213. The structural strength of the first outer convex ring 213 is higher, which can increase the stability of the connection part of the first gas inlet 212. When connecting the gas source pipeline, the first outer convex ring 213 can provide a better support and fixing point, so as to ensure that the connection between the gas source pipeline and the first gas inlet 212 is more firm, and reduce the loosening caused by vibration and the like.

[0051] In the present embodiment, further, as shown in Figure 1As shown, the lens barrel 10 has a first end 11 and a second end 12 in the axial direction, the first end 11 is an end towards the workpiece, the lens group includes a first lens arranged at the first end 11, the sleeve 20 includes a barrel 21 and a barrel bottom 22, the barrel 21 is sleeved on the outer periphery of the lens barrel 10, a first gas inlet 212 is arranged on the barrel 21, a second gas inlet 214 is located on the barrel 21 close to the first end 11, the barrel bottom 22 is covered on the first end 11 of the lens barrel 10, a dust removal cavity 221 is located between the barrel bottom 22 and the first end 11, the barrel bottom 22 is provided with a avoiding port 222, the avoiding port 222 is used for avoiding the laser beam emitted by the first lens, the avoiding port 222 and the second gas inlet 214 are in communication with the dust removal cavity 221, and the second gas inlet 214 is used for being in communication with the gas source to blow the dust removal gas into the dust removal cavity 221.

[0052] The first end 11 is towards the workpiece, and the first lens bears the key optical functions such as initial focusing of the laser beam. Since it is exposed to the outside, it is easy to accumulate dust. The barrel bottom 22 covers the first end 11 of the lens barrel 10, and the dust removal cavity 221 is formed between the barrel bottom 22 and the first end 11. The barrel bottom 22 is provided with the avoiding port 222, which not only ensures that the first lens can normally play the optical role, but also makes the dust removal cavity 221 relatively closed. The first gas inlet 212 is on the barrel 21 and is in communication with the cooling cavity 211 to realize the input of the cooling gas. The second gas inlet 214 is in communication with the dust removal cavity 221 to introduce the dust removal gas provided by the gas source into the dust removal cavity 221. The two gas inlets correspond to different function cavities, so that the sleeve 20 has the dual functions of cooling and dust removal integrated in the objective lens structure. In the laser processing process, the heat of the objective lens can be effectively taken away to ensure the stability of the optical performance, and the dust accumulated on the first lens due to processing can be removed in time to reduce the adverse effects of dust on laser transmission and objective lens heat dissipation, thereby improving the overall working reliability of the objective lens and the quality of laser processing. In addition, the dust removal gas discharged from the dust removal cavity 221 forms a clean and stable dust removal gas flow layer on the surface of the first lens, which can also avoid the attachment of particles and dust in the environment air on the surface of the first lens.

[0053] In some embodiments, when the laser beam is focused inside the workpiece for processing, the above technical solution can not only cool the objective lens, but also avoid the attachment of particles and dust in the environment air on the surface of the first lens.

[0054] In some embodiments, as shown in Figure 1 The inner surface of the barrel 21 is provided with a stop portion 215, the stop portion 215 is arranged close to the first end 11, and the stop portion 215 is attached to the outer periphery of the lens barrel 10 to prevent the cooling cavity 211 and the dust removal cavity 221 from being in communication.

[0055] The stop portion 215 is tightly fitted with the outer periphery of the lens barrel 10, which effectively prevents the gas from flowing between the cooling cavity 211 and the dust removal cavity 221, and ensures the independent functions of the two cavities. The isolation of the stop portion 215 enables the cooling cavity 211 and the dust removal cavity 221 to be controlled in terms of gas flow and pressure, respectively. For the cooling cavity 211, the flow rate, flow speed and pressure of the cooling gas can be accurately controlled according to the heat generation of the objective lens, so as to achieve the best cooling effect. For the dust removal cavity 221, the parameters of the dust removal gas can also be independently adjusted, such as adjusting the gas flow intensity in the dust removal cavity by controlling the gas inlet amount of the second gas inlet 214, to ensure effective dust removal.

[0056] The first gas inlet 212 and the second gas inlet 214 are respectively provided with a separate electromagnetic valve to control the on-off of the gas, and a separate speed regulating valve to control the flow rate of the gas.

[0057] In one possible implementation, as shown in Figure 3 and Figure 4 The cooling cavity 211 is in communication with the external environment at the end away from the dust removal cavity 221.

[0058] The cooling gas enters from the first gas inlet 212, and after taking away the heat of the lens barrel 10 and the lens group, it flows out through the end in communication with the external environment. The cooling cavity 211 is in communication with the external environment at the end away from the dust removal cavity 221, which is simple in structure and easy to implement, so that there is no need to separately open an exhaust port on the barrel wall of the sleeve 20, thereby improving the structural strength of the sleeve 20.

[0059] In this embodiment, as shown in Figure 4 The inner surface of the barrel 21 away from the first end 11 is provided with a first inner convex ring 216, and the first inner convex ring 216 has a gap with the outer periphery of the lens barrel 10. The gap is in communication with the cooling cavity 211 and the external environment. In the radial direction of the lens barrel 10, the distance between the first inner convex ring 216 and the lens barrel 10 is L1, and the radial width of the cooling cavity 211 is L2, and L1 < L2.

[0060] The gap between the first inner convex ring 216 and the lens barrel 10 serves as the communication channel between the cooling cavity 211 and the external environment, which can effectively control the outflow path of the cooling gas, accurately control the flow rate of the cooling gas, and ensure that the cooling gas is orderly discharged after taking away sufficient heat, thereby maintaining the flow stability of the cooling gas in the cooling cavity 211 and improving the cooling efficiency. Since the distance between the first inner convex ring 216 and the lens barrel 10 is less than the radial width of the cooling cavity 211, a certain pressure difference will be generated in the cavity during the outflow of the cooling gas, which promotes the more uniform distribution of the cooling gas in the cavity.

[0061] In order to achieve better cooling effect, in the embodiment, the distance L1 between the first inner convex ring 216 and the lens barrel 10 is 0.2mm-0.4mm along the radial direction of the lens barrel 10.

[0062] According to the actual use experience and simulation, the distance between the first inner convex ring 216 and the lens barrel 10 is set to 0.2mm-0.4mm to achieve better cooling effect, so the distance between the first inner convex ring 216 and the lens barrel 10 is set to 0.2mm, 0.3mm or 0.4mm, etc., as long as the distance between the first inner convex ring 216 and the lens barrel 10 is within the range of 0.2mm-0.4mm, and the embodiments of the application will not be enumerated here.

[0063] In one possible implementation, as shown in Figure 5 The lens barrel 10 has a first end face 13 close to the workpiece, and the axial distance between the barrel bottom 22 and the first end face 13 gradually increases along the direction of the edge of the barrel bottom 22 pointing to the center of the barrel bottom 22.

[0064] When the dust removal gas enters the dust removal cavity 221 from the second gas inlet 214, the gas will gradually diffuse during the flow to the center of the barrel bottom 22, which can make the dust removal gas better cover the area around the first lens and more effectively remove the dust accumulated on the surface of the first lens, just like a horn mouth can disperse the airflow, increasing the contact area of the dust removal gas and the dust, improving the dust removal efficiency and ensuring the optical performance of the first lens is not disturbed by the dust.

[0065] Further, in some embodiments, the barrel bottom 22 is inclined relative to the first end face 13, and the inclination angle of the barrel bottom 22 is 2°-3°.

[0066] When the dust is blown up by the dust removal gas, due to the inclination of the barrel bottom 22, the dust is more easily moved away from the first lens under the action of gravity, sliding down the inclined barrel bottom 22 to the edge of the dust removal cavity 221, and then being discharged, reducing the possibility of the dust adhering to the first lens again, and further enhancing the dust removal effect.

[0067] According to the actual use experience and simulation, the inclination angle of the barrel bottom 22 is set to 2°-3° to achieve better dust removal effect, so the inclination angle of the barrel bottom 22 is set to 2°, 2.5° or 3°, etc., as long as the inclination angle of the barrel bottom 22 is within the range of 2°-3°, and the embodiments of the application will not be enumerated here.

[0068] The connection of the sleeve 20 and the lens barrel 10 can have various implementation manners, in one possible implementation, as shown in Figure 2As shown, the outer surface of the two axial ends of the barrel 21 is respectively provided with a second outer convex ring 217 and a third outer convex ring 218, and the second outer convex ring 217 and the third outer convex ring 218 are both provided with a threaded hole penetrating the barrel wall of the barrel 21. The objective lens further comprises a locking top screw 30, which is arranged in the threaded hole and is arranged towards the lens barrel 10.

[0069] The locking top screw 30 can effectively fix the lens barrel 10 and the sleeve 20 by contacting and applying pressure to the lens barrel 10. During the operation of the laser processing equipment, the lens barrel 10 and the sleeve 20 can be firmly fixed by tightening the locking top screw 30, preventing movement between the two, ensuring the stability of the objective lens, and ensuring the precision and quality of laser processing. The locking top screw 30 is arranged on the second outer convex ring 217 and the third outer convex ring 218, which enhances the structural strength and stability between the sleeve 20 and the lens barrel 10.

[0070] In another possible implementation, the connection between the sleeve 20 and the lens barrel 10 can also be fixed by a snap ring, glued or magnetically attracted.

[0071] In some embodiments, the locking top screw 30 is a resin top screw.

[0072] The hardness of the resin top screw is relatively low, and compared with the metal top screw, it can effectively avoid scratching the surface of the lens barrel 10 when fixing and adjusting the position of the lens barrel 10.

[0073] In some embodiments, as shown in Figure 1 and Figure 2 The objective lens further comprises a plurality of gas inlet connectors 40, which are respectively inserted into the first gas inlet 212 and the second gas inlet 214, and are used to communicate with the gas source.

[0074] The objective lens is provided with a plurality of gas inlet connectors 40, which are respectively inserted into the first gas inlet 212 (for cooling gas to enter the cooling cavity 211) and the second gas inlet 214 (for dust removal gas to enter the dust removal cavity 221). This kind of insertion connection is simple and direct, which makes the gas inlet connector 40 can be easily connected with the gas inlet of the objective lens, and when it is necessary to replace or repair the gas inlet connector 40, it can also be easily inserted and pulled out. At the same time, the gas inlet connector 40 can better ensure the sealing of the connection.

[0075] Among them, the gas inlet connector 40 can adopt a horizontal connector as shown in Figure 1 The gas source pipeline and the gas inlet channel of the horizontal connector are in the same straight line, or the gas inlet connector 40 can also adopt a vertical connector as shown in Figure 2 The gas source pipeline and the gas inlet channel of the vertical connector are arranged vertically.

[0076] The embodiment of the present application further discloses a laser processing device, comprising an objective lens for laser processing a workpiece, the objective lens for laser processing a workpiece in the laser processing device is the objective lens for laser processing a workpiece described above, therefore, the laser processing device in the embodiment has substantially the same technical effects as the objective lens for laser processing a workpiece described above, since the technical effects of the objective lens for laser processing a workpiece have been fully described, here, no longer be described in detail. Exemplarily, the workpiece in the embodiment of the present application is a wafer.

[0077] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. An objective lens for laser processing a workpiece, characterized by, The utility model relates to a lens barrel for laser processing workpiece, comprising: a lens barrel; a lens group arranged in the lens barrel; a sleeve arranged on the outer periphery of the lens barrel, a cooling cavity and a dust removal cavity being formed between the sleeve and the outer periphery of the lens barrel, at least one end of the cooling cavity being used for communicating with the external environment, the sleeve being provided with a first air inlet and a second air inlet, the first air inlet communicating with the cooling cavity, the first air inlet being used for communicating with a gas source to blow cooling gas into the cooling cavity, the second air inlet communicating with the dust removal cavity, the second air inlet being used for communicating with a gas source to blow dust removal gas into the dust removal cavity, the first air inlet comprising a plurality of first air inlets distributed along the axial direction of the sleeve.

2. The objective for laser processing a workpiece according to claim 1, characterized in that The outer periphery of the sleeve is provided with a first outer convex ring, and the first air inlet is arranged on the first outer convex ring.

3. The objective lens for laser processing a workpiece according to claim 1, characterized by, The lens barrel has a first end and a second end along the axial direction, the first end being an end facing the workpiece, the lens group comprising a first lens arranged at the first end, the sleeve comprising a sleeve body and a sleeve bottom, the sleeve body being arranged on the outer periphery of the lens barrel, the first air inlet being arranged on the sleeve body, the second air inlet being arranged on the sleeve body close to the first end, the sleeve bottom being arranged on the first end of the lens barrel, the dust removal cavity being located between the sleeve bottom and the first end, the sleeve bottom being provided with an avoiding opening for avoiding the laser beam emitted by the first lens, the avoiding opening communicating with the dust removal cavity.

4. The objective for laser processing a workpiece according to claim 3, characterized in that The inner surface of the sleeve body is provided with a stop portion, the stop portion being arranged close to the first end, the stop portion being in abutment with the outer periphery of the lens barrel to prevent the cooling cavity and the dust removal cavity from communicating.

5. The objective for laser processing a workpiece according to claim 4, characterized in that The end of the cooling cavity away from the dust removal cavity communicates with the external environment, the inner surface of the sleeve body away from the first end is provided with a first inner convex ring, the first inner convex ring and the outer periphery of the lens barrel have a gap therebetween, the gap communicating the cooling cavity with the external environment, along the radial direction of the lens barrel, the distance between the first inner convex ring and the lens barrel is smaller than the radial width of the cooling cavity.

6. The objective for laser processing a workpiece according to claim 5, characterized in that The lens barrel has a first end face close to the workpiece, along the direction in which the edge of the sleeve bottom points to the center of the sleeve bottom, the axial distance between the sleeve bottom and the first end face gradually increases.

7. The objective for laser processing a workpiece according to claim 6, characterized in that The sleeve bottom is arranged to be inclined relative to the first end face, and the inclination angle of the sleeve bottom is 2°-3°.

8. The objective lens for laser processing a workpiece according to claim 3, characterized by, The outer surfaces of the two ends of the sleeve body along the axial direction are respectively provided with a second outer convex ring and a third outer convex ring, the second outer convex ring and the third outer convex ring are both provided with a threaded hole penetrating the sleeve wall of the sleeve body, the objective lens further comprises a locking jackscrew, the locking jackscrew is arranged in the threaded hole, and the locking jackscrew is arranged towards the lens barrel.

9. The objective lens for laser processing a workpiece according to claim 1, characterized by, The objective lens further comprises a plurality of air inlet connectors, the plurality of air inlet connectors are respectively inserted into the first air inlet and the second air inlet, and the plurality of air inlet connectors are used for communicating with a gas source.

10. A laser processing apparatus characterized by comprising: The utility model relates to a lens barrel for laser processing workpiece, comprising: any one of claims 1-9.

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