Ultra-precise micro-feeding hydraulic fast tool servo device
By using a hydrostatic hydraulic guide rail structure and a data feedback system, the problem of existing devices being unable to achieve high-frequency response and small-amplitude feed in ultra-precision machining has been solved, achieving high-precision and high-efficiency machining results.
Patent Information
- Application Number
- CN202423202488.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2034-12-25
AI Technical Summary
Existing hydraulic guide rail type fast tool servo devices cannot achieve high-frequency response and small-amplitude axial rapid feed motion in ultra-precision machining, resulting in insufficient machining accuracy and preventing their widespread application in high-precision machining and measurement fields.
The hydraulic guide rail structure, which adopts hydrostatic pressure, includes a lower float plate, an upper float plate, a slider, a coil fixing plate, a linear motor coil, and a linear motor magnetic rail. The linear motor magnetic rail drives the movement of the coil fixing plate to form an oil floating film, ensuring smooth movement of the slider. The flow of hydraulic oil is stabilized by a capillary throttle. Combined with a reading head and a linear grating, a data feedback system is formed to achieve precise movement of the slider.
It achieves high rigidity on the basis of high precision, ensuring smooth movement and accurate measurement of the slider, and enables high-frequency response and small-amplitude axial rapid feed motion, thus improving machining accuracy and efficiency.
Smart Images

Figure CN223557938U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a quick knife servo device, concretely is a kind of super-precision micro-feeding hydraulic quick knife servo device, belong to super-precision machining technical field. BACKGROUND
[0002] With the increasing progress of science and technology, super-precision machining technology has also developed rapidly, and microstructure components with complex surface types are widely used in military, high-tech equipment, optical fiber communication and many other fields. Such components have complex structure and high machining precision requirements. It is difficult to meet the machining requirements with traditional machining methods. With the continuous progress of technology, many kinds of super-precision machining methods have emerged, which can process microstructure surfaces that meet the requirements, such as photolithography, micro-grinding, laser processing and quick knife servo. These methods have their own advantages and disadvantages. Quick knife servo is a classic super-precision machining technology and is one of the hotspots of microstructure turning research.
[0003] Quick knife servo machining refers to driving the tool to make high-frequency, small-amplitude axial rapid feed motion by means of the quick knife servo micro-feeding mechanism installed on the Z-axis during turning machining, and cooperating with high-precision back-axle and radial feed to complete the turning machining process. Compared with the general tens of hertz feed rate of the Z-axis, the feed rate of the quick knife servo micro-feeding mechanism can reach thousands of hertz or even higher, thereby greatly improving the machining efficiency. In the prior art, for example, the hydraulic guide rail type quick knife servo device disclosed in Patent No. CN117884929A includes a voice coil motor installed on a base and a guide rail component. The guide rail component includes a front guide rod supported by a front liquid floating support assembly and a rear guide rod supported by a rear liquid floating support assembly. The front end of the front guide rod is connected to the front end of the mover of the voice coil motor, and the rear end of the mover of the voice coil motor is connected to the front end of the rear guide rod. The front guide rod, the mover and the rear guide rod are coaxial. A tool is installed on the front end of the front guide rod. The hydraulic guide rail structure with front and rear liquid floating supports has better dynamic performance due to the high overall rigidity of the device. The front guide rod, the mover and the rear guide rod are connected in sequence and coaxial, which makes the overall gravity distribution of the device more reasonable, reduces the influence of the weight of the mover on the device, and helps to improve the machining precision. However, in actual use, although the existing device adopts a hydraulic guide rail structure with front and rear liquid floating supports, it cannot ensure that the tool is driven to make high-frequency, small-amplitude axial rapid feed motion, and thus cannot realize high-precision back-axle and radial feed cooperation, resulting in that the precision of the entire turning machining process cannot be guaranteed, and the device cannot be widely applied in multiple high-precision machining and measuring fields. SUMMARY
[0004] The utility model aims at solving at least one of the above technical problems and provides a super-precision micro-feeding hydraulic quick knife servo device.
[0005] The utility model discloses a following technical scheme to realize above-mentioned purpose: a kind of ultra-precision micro-feeding hydraulic quick knife servo device, including base, hydraulic guide rail, fine adjustment tool rest and cover, hydraulic guide rail and cover are all installed on base, hydraulic guide rail is located the inside of cover, and the movable end of hydraulic guide rail is threaded one end cover body of cover, and the movable end of hydraulic guide rail is connected with fine adjustment tool rest;
[0006] Hydraulic guide rail includes lower floating plate, upper floating plate, slider, coil fixing plate, linear motor coil, linear motor magnetic track and side floating plate, lower floating plate and upper floating plate are connected together, slider is movably clamped in the slot in the butt joint surface of lower floating plate and upper floating plate, coil fixing plate is fixedly connected with the outer side of slider, the front end of slider is fixedly connected with the body of fine adjustment tool rest, linear motor coil is clamped in the slot in the body of coil fixing plate, linear motor magnetic track is connected above side floating plate, and linear motor magnetic track is fixedly connected on the side of the body of coil fixing plate, oil channel is internally provided in the plate of lower floating plate, upper floating plate and side floating plate, and capillary tube throttler is arranged in oil channel.
[0007] The side of the body of upper floating plate is fixedly connected with reading head fixing seat, reading head is fixedly installed in reading head fixing seat, linear grating is pasted on the block body of slider, and grating protection cover is clamped on the outside of linear grating.
[0008] As a further scheme of the utility model: base includes oil pipe, oil pipe joint, base plate and oil return joint, base plate is fixedly connected on workbench, oil cavity is formed in the body of base plate, oil pipe joint and oil return joint are connected on the two sides of the body of base plate respectively, and oil pipe joint and oil return joint are communicated with oil cavity in the body of base plate respectively, one end of oil pipe is communicated with oil pipe joint, the other end of oil pipe is communicated with oil channel of lower floating plate and upper floating plate, and oil return joint is communicated with external oil tank.
[0009] As a further scheme of the utility model: temperature sensor is fixedly connected on the front end of the body of upper floating plate.
[0010] As a further scheme of the utility model: the side of the block body that slider is clamped in the slot in the butt joint surface of lower floating plate and upper floating plate is fixedly connected with baffle.
[0011] As a further scheme of the utility model: photoelectric switch is arranged in the lower side of the side floating plate, photoelectric switch is fixedly connected on base, photoelectric switch toggle is fixedly connected on coil fixing plate, and photoelectric switch is arranged on the two sides of photoelectric switch toggle.
[0012] As a further scheme of the utility model: the base is fixedly connected with a limiting seat, the limiting seat is located at the front end of the coil fixing plate, the front end of the sliding block is fixedly connected with a hard limiting block, and the front end of the upper floating plate is fixedly connected with a buffer block.
[0013] As a further scheme of the utility model: the fine adjustment tool rest comprises a rhombic blade, a fine adjustment plate, a tool holder and a tool rest rotating shaft, a V-shaped groove is formed in the butt joint surface between the fine adjustment plate and the tool holder, the tool rest rotating shaft is clamped in the V-shaped groove, the fine adjustment plate and the tool holder are fixedly connected through a differential screw rod, the rhombic blade is fixedly connected at the front end of the fine adjustment plate, and the tool holder is fixedly connected with the front end of the sliding block through bolts.
[0014] As a further scheme of the utility model: the cover comprises a telescopic cover and a sheet metal cover, the telescopic cover is connected at the front end of the sheet metal cover, and the telescopic cover is sleeved outside the fine adjustment tool rest.
[0015] The utility model has the advantages of:
[0016] 1) the utility model is provided with a base, a hydraulic guide rail, a fine adjustment tool rest and a cover, adopts the form of liquid static pressure, guarantees high precision and realizes greater rigidity, the fine adjustment tool rest can be slightly adjusted in height during the machining process of the ultra-precise micro-feeding hydraulic quick tool servo, the cover part is used for preventing impurities or dirt from the external environment from entering the equipment and causing damage or precision loss;
[0017] 2) the hydraulic guide rail comprises a lower floating plate, an upper floating plate, a sliding block, a coil fixing plate, a linear motor coil, a linear motor magnetic track and a side floating plate, the linear motor coil and the linear motor magnetic track constitute the power source of the device, the movement of the coil fixing plate is driven through the linear motor magnetic track, thereby driving the sliding block to move, and the lubricating oil can form an oil floating film between the upper surface of the lower floating plate, the lower surface of the upper floating plate and the sliding block through the oil channel, along with the forward and backward movement of the sliding block, the hydraulic oil can enter the oil channel formed in the side floating plate, so that the oil floating film is formed between the side floating plate, the lower floating plate and the sliding block, so that the sliding block can move more smoothly, and the capillary tube restrictor can ensure that the flow of the hydraulic oil is more stable, so as to provide a stable oil floating film;
[0018] 3) one side of the plate body of the upper floating plate is fixedly connected with a reading head fixing seat, a reading head is fixedly installed in the reading head fixing seat, a linear grating is pasted on the block body of the sliding block, and a grating protection cover is clamped on the outer side of the linear grating, the relative movement between the reading head and the linear grating constitutes a data feedback system, the movement distance of the sliding block can be accurately measured, so that the sliding block can drive the fine adjustment tool rest to realize micro-feeding in the movement direction quickly. BRIEF DESCRIPTION OF DRAWINGS
[0019] Figure 1This is a schematic diagram of the overall assembly structure of this utility model;
[0020] Figure 2 This is a schematic diagram of the base structure of this utility model;
[0021] Figure 3 This is a schematic diagram of the hydraulic guide rail structure of this utility model;
[0022] Figure 4 This is a schematic diagram of the fine-tuning tool holder structure of this utility model;
[0023] Figure 5 This is a schematic diagram of the outer cover structure of this utility model.
[0024] In the diagram: 01. Base; 02. Hydraulic guide rail; 03. Fine-tuning tool holder; 04. Outer cover; 05. Oil pipe; 06. Oil pipe connector; 07. Base plate; 08. Return oil connector; 09. Lower floating plate; 10. Upper floating plate; 11. Temperature sensor; 12. Reading head fixing seat; 13. Slider; 14. Reading head; 15. Linear grating; 16. Grating protective cover; 17. Baffle; 18. Coil fixing plate; 19. Linear motor coil; 20. Linear motor magnetic rail; 21. Side floating plate; 22. Photoelectric switch; 23. Photoelectric switch lever; 24. Limit seat; 25. Hard limit block; 26. Buffer block; 27. Rhomboid blade; 28. Fine-tuning plate; 29. Tool holder; 30. Tool holder shaft; 31. Telescopic protective cover; 32. Sheet metal cover. Detailed Implementation
[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0026] Example 1, as Figures 1 to 5 As shown, an ultra-precision micro-feed hydraulic fast tool servo device includes a base 01, a hydraulic guide rail 02, a fine-tuning tool holder 03, and an outer cover 04. The hydraulic guide rail 02 and the outer cover 04 are both mounted on the base 01. The hydraulic guide rail 02 is located inside the outer cover 04. The movable end of the hydraulic guide rail 02 passes through one end of the outer cover 04 and is connected to the fine-tuning tool holder 03.
[0027] The base 01 is made of stainless steel, the main part of the hydraulic guide rail 02 of the ultra-precision micro-feeding hydraulic fast tool servo is made of stainless steel, and the slider 13 is made of granite; the micro-adjustment tool holder 03 is made of low-carbon steel with good quenching performance, and is made after quenching and tempering to ensure sufficient rigidity; the outer cover 04 is mainly made of stainless steel, and a flexible contraction material is used for protection of the tool holder.
[0028] The hydraulic guide rail 02 comprises a lower floating plate 09, an upper floating plate 10, a slider 13, a coil fixing plate 18, a linear motor coil 19, a linear motor magnetic track 20 and a side floating plate 21, the lower floating plate 09 and the upper floating plate 10 are connected together in a top-to-bottom manner, the slider 13 is movably clamped in a groove position formed on the connecting surface of the lower floating plate 09 and the upper floating plate 10, the coil fixing plate 18 is fixedly connected with the outer side surface of the slider 13, the front end of the slider 13 is fixedly connected with the holder body of the micro-adjustment tool holder 03, the linear motor coil 19 is clamped in a groove position formed on the coil fixing plate 18, the linear motor magnetic track 20 is connected above the side floating plate 21, and the linear motor magnetic track 20 is fixedly connected on one side of the coil fixing plate 18, oil channels are formed in the lower floating plate 09, the upper floating plate 10 and the side floating plate 21, and capillary tube restrictors are arranged in the oil channels, the linear motor coil 19 and the linear motor magnetic track 20 constitute the power source of the device, the movement of the coil fixing plate 18 is driven by the linear motor magnetic track 20, thereby driving the slider 13 to move, and the lubricating oil can form an oil floating film between the upper surface of the lower floating plate 09, the lower surface of the upper floating plate 10 and the slider 13 through the oil channels, with the forward and backward movement of the slider 13, the hydraulic oil can enter the oil channels formed in the side floating plate 21, so as to form an oil floating film between the side floating plate 21, the lower floating plate 09 and the slider 13, to ensure that the slider 13 can move more smoothly, and the capillary tube restrictors can ensure that the flow of the hydraulic oil is more stable, to provide a stable oil floating film;
[0029] One side of the plate body of the upper floating plate 10 is fixedly connected with a reading head fixing seat 12, the reading head fixing seat 12 is fixedly installed with a reading head 14, the block body of the slider 13 is pasted with a linear grating 15, and the outer side of the linear grating 15 is clamped with a grating protection cover 16, the relative movement between the reading head 14 and the linear grating 15 constitutes a data feedback system, which can accurately measure the movement distance of the slider 13, to ensure that the slider 13 can drive the micro-adjustment tool holder 03 to realize micro-feeding in the movement direction quickly.
[0030] In addition to comprising all the technical features in Embodiment One, the embodiment comprises the following: the base 01 comprises an oil pipe 05, an oil pipe joint 06, a base plate 07 and an oil return joint 08, the base plate 07 is fixedly connected to the workbench, an oil cavity is formed in the plate body of the base plate 07, the oil pipe joint 06 and the oil return joint 08 are respectively connected to the plate bodies on the two sides of the base plate 07, and the oil pipe joint 06 and the oil return joint 08 are respectively communicated with the oil cavity in the plate body of the base plate 07, one end of the oil pipe 05 is communicated with the oil pipe joint 06, the other end of the oil pipe 05 is communicated with the oil channels of the lower floating plate 09 and the upper floating plate 10, the oil return joint 08 is communicated with an external oil tank, the base plate 07 is fixed to the workbench to achieve firm installation of the device, the oil pipe 05 can deliver the hydraulic oil in the oil cavity of the base plate 07 to the hydraulic guide rail 02, and the hydraulic oil can be returned to the oil tank through the oil return joint 08.
[0031] In addition to comprising all the technical features in Embodiment One, the embodiment comprises the following: the plate body of the upper floating plate 10 is fixedly connected with a temperature sensor 11 at the front end, so that the temperature of the corresponding part of the upper floating plate 10 can be detected by the temperature sensor, and the working temperature is monitored.
[0032] The side block fixedly connected to the side block on the side of the slot formed on the abutting surface of the lower floating plate 09 and the upper floating plate 10 is provided with a baffle 17, which blocks the hydraulic oil overflowing from the oil floating surface through the action of the baffle 17, avoiding pollution of the linear grating 15.
[0033] The lower side of the side floating plate 21 is provided with a photoelectric switch 22, which is fixedly connected to the base 01, and the coil fixing plate 18 is fixedly connected with a photoelectric switch paddle 23, and the photoelectric switch 22 is arranged on the two sides of the photoelectric switch paddle 23, and the photoelectric switch 22 and the photoelectric switch paddle 23 jointly constitute the soft limit of the device, and when the coil fixing plate 18 moves, the photoelectric switch paddle 23 moves with it, and then when the photoelectric switch paddle 23 contacts the photoelectric switch 22, the coil fixing plate 18 stops moving, which has good limiting effect.
[0034] The base 01 is fixedly connected with a limiting seat 24, which is located at the front end of the coil fixing plate 18, the front end of the sliding block 13 is fixedly connected with a hard limiting block 25, and the front end of the upper floating plate 10 is fixedly connected with a buffer block 26, the limiting seat 24 and the buffer block 26 constitute the hard limit in one direction, and the hard limiting block 25 and the buffer block 26 constitute the hard limit in the other direction, which can ensure that the sliding block 13 is inside the space of the two hard limits when the soft limit fails or an accident occurs.
[0035] In addition to comprising all the technical features in embodiment one, embodiment four further comprises: the fine adjustment tool rest 03 comprises a diamond-shaped blade 27, a fine adjustment plate 28, a tool seat 29 and a tool rest pivot 30, the interfacing surface of the fine adjustment plate 28 and the tool seat 29 is provided with a V-shaped groove, the tool rest pivot 30 is limitedly clamped in the V-shaped groove, the fine adjustment plate 28 and the tool seat 29 are fixedly connected through a differential screw, the diamond-shaped blade 27 is fixedly connected to the front end of the fine adjustment plate 28, and the tool seat 29 is fixedly connected to the front end of the sliding block 13 through a bolt, so that the tool rest pivot 30 can be limited between the fine adjustment plate 28 and the tool seat 29 through the V-shaped groove, and the fine adjustment plate 28 can be deformed slightly through the up-down rotation of the differential screw, for the slight adjustment after tool setting.
[0036] The cover 04 comprises a telescopic cover 31 and a sheet metal cover 32, the telescopic cover 31 is connected to the front end of the sheet metal cover 32, and the telescopic cover 31 is sleeved outside the fine adjustment tool rest 03, the telescopic cover connecting tool rest and the sheet metal cover 32 are arranged at the fine adjustment tool rest 03, so as to protect the internal space and make the core components work in a clean and stable environment.
[0037] The super-precision micro-feeding hydraulic quick tool servo is placed on the working platform (Z axis), fixed through the countersunk bolt holes arranged on the base plate 07, and adjusted to be horizontal; the diamond-shaped blade 27 is fixed on the fine adjustment plate 28, and the differential screw arranged on the fine adjustment plate 28 and the tool seat 29 is adjusted to be horizontal; the bolt connecting the tool seat 29 and the sliding block 13 is loosened, the fine adjustment tool rest 03 of the quick tool servo is adjusted to the center height of the main shaft; power on, air on, and trial cutting are performed, the height of the tool tip is confirmed, and the tool is set through the adjustment of the differential screw; the above steps are repeated until the tool setting is completed, that is, the machining conditions are met.
[0038] It is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be regarded as exemplary and non-limiting, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.
[0039] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the specification is described in this way only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that those skilled in the art can understand.
Claims
1. An ultra-precision micro-feeding hydraulic quick tool servo device, comprising a base (01), a hydraulic guide rail (02), a micro-adjusting tool holder (03) and an outer cover (04), characterized in that: The hydraulic guide rail (02) and the outer cover (04) are both mounted on the base (01), the hydraulic guide rail (02) is located inside the outer cover (04), the movable end of the hydraulic guide rail (02) penetrates one end of the outer cover (04), and the movable end of the hydraulic guide rail (02) is connected with the fine adjustment tool rest (03). The hydraulic guide rail (02) comprises a lower floating plate (09), an upper floating plate (10), a sliding block (13), a coil fixing plate (18), a linear motor coil (19), a linear motor magnetic track (20) and a side floating plate (21), the lower floating plate (09) and the upper floating plate (10) are connected together in a top-to-bottom manner, the sliding block (13) is movably clamped in a groove position formed on the abutment surface of the lower floating plate (09) and the upper floating plate (10), the coil fixing plate (18) is fixedly connected with the outer side surface of the sliding block (13), the front end of the sliding block (13) is fixedly connected with the rest body of the fine adjustment tool rest (03), the linear motor coil (19) is clamped in a groove position formed on the coil fixing plate (18), the linear motor magnetic track (20) is connected above the side floating plate (21), and the linear motor magnetic track (20) is fixedly connected on one side of the coil fixing plate (18), oil channels are formed in the lower floating plate (09), the upper floating plate (10) and the side floating plate (21), and capillary tube restrictors are arranged in the oil channels. One side of the rest body of the upper floating plate (10) is fixedly connected with a reading head fixing seat (12), the reading head fixing seat (12) is fixedly installed with a reading head (14), the block body of the sliding block (13) is pasted with a linear grating (15), and the outer side of the linear grating (15) is clamped with a grating protective cover (16), and a data feedback system is formed through the relative movement between the reading head (14) and the linear grating (15).
2. The ultra-precision micro-feeding hydraulic quick tool servo device according to claim 1, characterized in that: The base (01) comprises an oil pipe (05), an oil pipe joint (06), a base plate (07) and an oil return joint (08), the base plate (07) is fixedly connected on a workbench, an oil cavity is formed in the rest body of the base plate (07), the oil pipe joint (06) and the oil return joint (08) are respectively connected on the two rest bodies of the base plate (07), the oil pipe joint (06) and the oil return joint (08) are respectively connected with the oil cavity in the rest body of the base plate (07), one end of the oil pipe (05) is connected with the oil pipe joint (06), the other end of the oil pipe (05) is connected with the oil channels of the lower floating plate (09) and the upper floating plate (10), and the oil return joint (08) is connected with an externally arranged oil tank.
3. The ultra-precision micro-feeding hydraulic quick tool servo device according to claim 2, characterized in that: The rest body of the upper floating plate (10) is fixedly connected with a temperature sensor (11) at the front end.
4. The ultra-precision micro-feeding hydraulic quick tool servo device according to claim 3, characterized in that: The sliding block (13) is clamped on one side of the block body of the groove position formed on the abutment surface of the lower floating plate (09) and the upper floating plate (10), and the sliding block (13) is clamped on one side of the block body of the groove position formed on the abutment surface of the lower floating plate (09) and the upper floating plate (10).
5. The ultra-precision micro-feeding hydraulic quick tool servo device according to claim 1, characterized in that: The lower part of the side float plate (21) is provided with a photoelectric switch (22), which is fixedly connected to the base (01), the coil fixing plate (18) is fixedly connected with a photoelectric switch switch plate (23), and the photoelectric switch (22) is arranged on the two sides of the photoelectric switch switch plate (23).
6. The ultra-precision micro-feeding hydraulic quick tool servo device according to claim 1, characterized in that: The base (01) is fixedly connected with a limiting seat (24), the limiting seat (24) is located at the front end of the coil fixing plate (18), the front end of the sliding block (13) is fixedly connected with a hard limiting block (25), and the front end of the upper float plate (10) is fixedly connected with a buffer block (26).
7. The ultra-precision micro-feeding hydraulic quick tool servo device according to claim 1, characterized in that: The fine adjustment tool holder (03) comprises a rhombic blade (27), a fine adjustment plate (28), a tool seat (29) and a tool holder rotating shaft (30), the butt joint surface of the fine adjustment plate (28) and the tool seat (29) is provided with a V-shaped groove, the tool holder rotating shaft (30) is limitedly clamped in the V-shaped groove, the fine adjustment plate (28) and the tool seat (29) are fixedly connected through a differential screw, the rhombic blade (27) is fixedly connected to the front end of the fine adjustment plate (28), and the tool seat (29) is fixedly connected to the front end of the sliding block (13) through a bolt.
8. The ultra-precision micro-feeding hydraulic quick tool servo device according to claim 1, characterized in that: The cover (04) comprises a telescopic cover (31) and a sheet metal cover (32), the telescopic cover (31) is connected to the front end of the sheet metal cover (32), and the telescopic cover (31) is sleeved outside the fine adjustment tool holder (03).
Citation Information
Patent Citations
Hydraulic guide rail type fast tool servo device
CN117884929A